EP1849178A2 - Lampe a decharge a barriere dielectrique ayant une configuration a double tube - Google Patents

Lampe a decharge a barriere dielectrique ayant une configuration a double tube

Info

Publication number
EP1849178A2
EP1849178A2 EP06705909A EP06705909A EP1849178A2 EP 1849178 A2 EP1849178 A2 EP 1849178A2 EP 06705909 A EP06705909 A EP 06705909A EP 06705909 A EP06705909 A EP 06705909A EP 1849178 A2 EP1849178 A2 EP 1849178A2
Authority
EP
European Patent Office
Prior art keywords
dielectric barrier
discharge lamp
barrier discharge
lamp according
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06705909A
Other languages
German (de)
English (en)
Other versions
EP1849178B1 (fr
Inventor
Markus Roth
Reinhold Wittkötter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osram GmbH
Original Assignee
Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH filed Critical Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH
Publication of EP1849178A2 publication Critical patent/EP1849178A2/fr
Application granted granted Critical
Publication of EP1849178B1 publication Critical patent/EP1849178B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel

Definitions

  • the invention is based on a dielectric barrier discharge lamp with a discharge vessel in coaxial double tube arrangement, i. an inner tube is coaxially disposed within an outer tube. Inner tube and outer tube are connected to each other at their two end faces and thus form the gas-tight discharge vessel. The discharge space enclosed by the discharge vessel thus extends between the inner and outer tubes.
  • This type of discharge lamp typically has a first electrode disposed within the inner tube and a second electrode disposed on the outer surface of the outer tube. Both electrodes are thus outside the discharge vessel. It is in this case therefore a two-sided dielectrically impeded discharge. Accordingly, in the following, where the simplicity is occasionally referred to as the inner electrode or inner electrode and outer electrode or outer electrode, this term refers only to the spatial arrangement of the subject electrode with respect to the coaxial double tube arrangement, i. within the inner tube or on the outside of the outer tube.
  • This type of lamp is used in particular for UV irradiation in process technology, for example for surface cleaning and activation, photolytics, ozone generation, drinking water purification, metallization, and UV curing.
  • the term radiator or UV lamps is also common.
  • the coaxial arrangement of two tubes allows the construction of lamps with very long lengths. Long lamps are for high performance Of importance because the maximum coupled into the lamp power increases with the length.
  • attaching the inner electrode causes problems with long lamps, for example longer than 1 m, as well as lamps with a small inner tube diameter.
  • the inner electrode should rest firmly against the wall of the inner tube, ie without sagging, on the other hand, it should be as easy to assemble. This problem is exacerbated when the discharge vessel is bent, for example, U-shaped.
  • a generic dielectric barrier discharge lamp is described in the document DE 196 13 502 A1.
  • This is an excimer radiator with a closed discharge space, which is designed as an annular gap between two quartz glass tubes arranged coaxially with one another.
  • the discharge space contains a filling gas which forms excimers under discharge conditions.
  • an outer electrode in the form of a net is provided, while the inner electrode is formed by a wire spiral applied to the inside of the wall of the inner quartz glass tube. Due to the relatively large distance to the neighboring electrode, the areas of high field strength concentrate in a spatially small area and there is a high field strength gradient at the radiator surface. This can make it easier to form filaments in the area of the wire spiral.
  • the generation of radiation can be made more efficient by suitable choice of the electrical operation, as described in document EP 733 266 B1, in conjunction with suitable electrode arrangements.
  • a negative high voltage on the inner conductor (cathode side) form ⁇ -like discharge structures, the tip of which lies on the cathode side.
  • the document EP 767 484 A1 discloses an embodiment of a dielectric barrier discharge lamp in which the inner electrode is designed in the form of a metal tube with a longitudinal slot extending in the direction of the radiator axis.
  • the slotted metal tube is slightly rolled up and then inserted into the inner tube.
  • a firm abutment of the inner electrode on the wall of the inner tube is achieved, so that the discharge filaments forming numerous discharge filaments are distributed substantially homogeneously.
  • the filaments tend to migrate along the longitudinal slot.
  • a metal strip is installed spirally as an inner electrode. This has the advantage that the filaments are distributed homogeneously and are spatially fixed even when installed vertically. The disadvantage is still not very simple production of the inner electrode. In addition, delimited areas also appear in the metal strip spiral, where the discharges take place almost exclusively.
  • the object of the present invention is to provide a dielectric barrier discharge lamp in coaxial double tube arrangement with improved internal electrode. - A -
  • a dielectric barrier discharge lamp a discharge vessel, which comprises o an outer tube and an inner tube,
  • the inner tube and the outer tube are gas-tightly interconnected, whereby a discharge space filled with a discharge medium is formed between the inner and outer tubes, o a first electrode and at least one further electrode, wherein the first electrode is arranged inside the inner tube, characterized the first electrode is in the form of an electrically conductive brush.
  • the inner electrode is designed in the form of a conductive brush, which is formed, for example, by weaving thin metal threads, the braid wires or bristles, into two twisted metal wires, also called twisted wires.
  • the rotary wires in the axial direction and the sizing wires in bristle tufts run radially in the direction of the inner wall of the inner tube and touch with the tips of the inner tube.
  • the trimming wires can also be radially embedded in an elongated axial support.
  • a very dense and uniform coverage of the internal surface of the radiator with individual electrodes is achieved with the aid of the conductive brush according to the invention as the inner electrode.
  • the homogeneous discharge structure remains because of the large number of possible Discharge points received.
  • the inner electrode is designed as a round brush.
  • the round brush electrode may be made of fine filaments of conductive material (bristles) woven into two or more spirally wound carrier wires (twisted wires). At least one of the twisted wires is electrically conductive.
  • the bristles are oriented essentially perpendicular to the twisted wires and spirally wind around the twisted wires in bristle tufts.
  • the outer diameter of the round brush is a little larger than the inner diameter of the inner tube to ensure a secure contact. Due to the larger outer diameter of the brush in the relaxed state compared with the inner diameter of the inner tube, a concern of the bristles or fine metal wires, preferably not only with the tips guaranteed.
  • the diameter in the relaxed state results when the brush is not installed.
  • Under the outer diameter is understood to mean the maximum diameter of the cross section perpendicular to the brush longitudinal axis.
  • the spiral shape of the inner electrode prevents unwanted migration of the discharge filaments very effectively, regardless of the spatial orientation of the discharge lamp.
  • the preferably elastic deformability of the round brush facilitates installation in the inner tube.
  • the inner electrode thus formed is also suitable for bent inner tubes.
  • the distance of the bristles within a bristle tuft in the relaxed state is 0.01 mm to 1 mm.
  • the distance is between 0.05 mm and 0.2 mm.
  • twisted wires As favorable in view of their elastic deformability, twisted wires have been found with thicknesses between 0.2 mm and 2 mm.
  • a material for both the twisted wires and the bristles is preferably stainless steel.
  • the inventive inner electrode designed in the form of a brush is particularly well suited. Due to its flexibility, the inner electrode according to the invention can adapt to the bending of the inner tube. The bend can be executed both as a kink and as a continuous curvature. As examples, a circular, semicircular, banana-shaped or U-shaped curvature of the inner tube should be mentioned.
  • the internal electrode according to the invention combines simple assembly with a uniform occupancy of the inner surface of the inner tube and consequently a homogeneous discharge within the discharge vessel. Plus, it's easy to make.
  • the at least one further electrode is typically arranged on the outside of the outer tube.
  • outer electrode inter alia, both net-like and strip or line-shaped electrodes come into consideration.
  • a reflector can be provided on the rear side of the lamp according to the invention, ie on the side opposite to the side intended for the light emission, preferably of aluminum, which at the same time can act as an earth electrode.
  • the lamp according to the invention can be embedded in a metal block, for example made of aluminum, and also several lamps next to one another.
  • the metal block acts as an outer electrode, preferably at ground potential.
  • a cooling system can be connected.
  • FIG. 1a shows a discharge lamp according to the invention with a round brush-shaped inner electrode in a side view
  • FIG. 1b is a cross-sectional view of the embodiment of Figure 1a
  • FIG. 2 shows a discharge lamp according to the invention with a segmented inner electrode in a side view
  • FIG. 3a shows a discharge lamp according to the invention with a semicircular brush-shaped inner electrode in a side view
  • FIG. 3b is a cross-sectional view of the embodiment of Figure 3a
  • FIG. 4 shows a U-shaped discharge lamp according to the invention with a round brush-shaped inner electrode in a side view.
  • the elongated discharge vessel of the lamp 1 consists of an outer tube 2 and an inner tube 3 in coaxial double tube arrangement, thus the longitudinal axis of the discharge vessel.
  • the length of the dielectric barrier discharge lamp 1 designed for an electrical power consumption of 20 W is 20 cm.
  • the outer tube 2 has a diameter of 40 mm and a wall thickness of 1 mm.
  • the inner tube 3 has a Diameter of 11 mm and a wall thickness of 1, 2 mm. Both tubes 2, 3 consist of UV radiation permeable quartz glass.
  • the discharge vessel is closed at its two end faces such that an elongated, annular gap-shaped discharge space 4 is formed.
  • the discharge vessel has suitably shaped, annular vessel sections 5 at its two ends.
  • a pumping tube (not shown) is attached to one of the vessel sections 5, with the aid of which the discharge space 4 is first evacuated and then filled with 15 kPa xenon.
  • a total of eight uniformly distributed, line-shaped outer electrodes 5 of width 1 mm are arranged parallel to the longitudinal axis of the discharge vessel.
  • a round brush-shaped inner electrode 6 is arranged inside the inner tube 3, ie also outside of the discharge chamber 4 enclosed by the discharge vessel.
  • the inner electrode 6 consists of an axial carrier element 7 (shown here in simplified form) and numerous bristles 8.
  • the carrier element 7 is formed from two stainless steel wires (twisted wires) twisted together, each with a diameter of 1 mm (not shown). Numerous stainless steel wires, diameters 0.06 mm in each case, are spirally woven into these two twisted wires of the carrier element 7 along the entire length of the carrier element 7, which are oriented radially to the carrier element 7 and act as bristles 8.
  • FIGS. 1a, 1b show a further embodiment, wherein the same features as in Figure 1a, 1b are provided with the same reference numerals.
  • the dielectric barrier discharge lamp 9 schematically illustrated there differs from the lamp shown in FIGS. 1a, 1b only in that here the inner electrode is subdivided into five segments 10-14. Within the segments 10, 12 and 14, the carrier element 7 is provided in the entire circumference with radially extending bristles 8. These segments 10, 12 and 14 alternate with the segments 11 and 13, in which there are no bristles. In operation, therefore, the lamp 9 preferably radiates in partial areas the segments 10, 12 and 14, whereas in the segments 11 and 13 no discharge is formed.
  • FIGS. 3a, 3b show a highly schematic representation of a side view and a cross-sectional view of a further exemplary embodiment. Again, the same features as in Figure 1a, 1 b are provided with the same reference numerals.
  • the dielectric barrier discharge lamp 9 schematically illustrated there differs from the lamp illustrated in FIGS. 1 a, 1 b in that in this case the inner electrode is provided with radial bristles 8 only in a semi-cylindrical manner.
  • the outside of the wall of the outer tube 2 is half-shell-shaped with an outer electrode 16 made of aluminum, which extends along the entire length of the outer tube 2. In this case, the outer electrode 16 is oriented such that it is directly opposite the semicircular brush-shaped inner electrode. This causes a preferred direction for the radiation.
  • the outer electrode 16 may, for example, be vapor-deposited, glued or plugged.
  • the outer electrode may also be formed by a metal block, in which the lamp is partially embedded.
  • FIG. 5 schematically shows an exemplary embodiment in which the discharge vessel and therefore the inner tube 17 and the outer tube 18 are bent in a U-shape.
  • the flexible inner electrode 6 according to the invention is easily able to follow this bend.
  • the inner electrode 6 is relatively easy to insert into the inner tube.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

La présente invention concerne une lampe à décharge à barrière diélectrique (1) ayant une configuration à double tube coaxiale. Dans le tube intérieur (3) se trouve une électrode intérieure (6) qui se présente sous la forme d'un balai flexible électriquement conducteur. L'électrode en forme de balai (6) est relativement simple de réalisation et peut être facilement insérée dans le tube intérieur (3) grâce à sa flexibilité.
EP06705909.7A 2005-02-14 2006-02-06 Lampe à décharge à barrière diélectrique ayant une configuration a double tube Not-in-force EP1849178B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005006656A DE102005006656A1 (de) 2005-02-14 2005-02-14 Dielektrische Barriere-Entladungslampe in Doppelrohrkonfiguration
PCT/DE2006/000181 WO2006086942A2 (fr) 2005-02-14 2006-02-06 Lampe a decharge a barriere dielectrique ayant une configuration a double tube

Publications (2)

Publication Number Publication Date
EP1849178A2 true EP1849178A2 (fr) 2007-10-31
EP1849178B1 EP1849178B1 (fr) 2017-07-26

Family

ID=36693047

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06705909.7A Not-in-force EP1849178B1 (fr) 2005-02-14 2006-02-06 Lampe à décharge à barrière diélectrique ayant une configuration a double tube

Country Status (9)

Country Link
US (1) US20080197775A1 (fr)
EP (1) EP1849178B1 (fr)
JP (1) JP4833285B2 (fr)
KR (1) KR101216450B1 (fr)
CN (1) CN101120432A (fr)
CA (1) CA2597559A1 (fr)
DE (1) DE102005006656A1 (fr)
TW (1) TW200644038A (fr)
WO (1) WO2006086942A2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5314700B2 (ja) * 2007-11-28 2013-10-16 コーニンクレッカ フィリップス エヌ ヴェ 誘電バリア放電ランプ
US8022377B2 (en) * 2008-04-22 2011-09-20 Applied Materials, Inc. Method and apparatus for excimer curing
NL1036561C2 (nl) * 2009-02-11 2010-08-12 Stichting Wetsus Ct Excellence Sustainable Water Technology Werkwijze en inrichting voor het behandelen en / of karakteriseren van een fluidum.
JP5223772B2 (ja) * 2009-05-11 2013-06-26 ウシオ電機株式会社 希ガス放電ランプ
DE102009036297B3 (de) * 2009-08-06 2011-01-13 Heraeus Noblelight Gmbh Excimerlampe
JP5947292B2 (ja) 2010-06-04 2016-07-06 アクセス ビジネス グループ インターナショナル リミテッド ライアビリティ カンパニー 誘導結合誘電体バリア放電ランプ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0509110B1 (fr) * 1991-04-15 1995-06-21 Heraeus Noblelight GmbH Dispositif d'irradiation
DE19613502C2 (de) * 1996-04-04 1998-07-09 Heraeus Noblelight Gmbh Langlebiger Excimerstrahler und Verfahren zu seiner Herstellung
JP3520708B2 (ja) * 1997-02-25 2004-04-19 ウシオ電機株式会社 誘電体バリア放電ランプ
DE19741668C2 (de) * 1997-09-22 2003-04-17 Heraeus Noblelight Gmbh Entladungslampe für Oberflächen-Gleitentladung
DE19856428C1 (de) * 1998-12-08 2000-05-04 Heraeus Noblelight Gmbh Entladungslampe
JP3506055B2 (ja) 1999-07-28 2004-03-15 ウシオ電機株式会社 誘電体バリア放電ランプ、およびその光照射装置
JP3385259B2 (ja) 2000-03-15 2003-03-10 株式会社エム・ディ・コム 誘電体バリヤ放電ランプ及びそれを利用したドライ洗浄装置
AU2003266866A1 (en) * 2002-09-19 2004-04-08 Vlaamse Instelling Voor Technologisch Onderzoek (Vito) Method and apparatus for generating and maintaining a plasma

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2006086942A2 *

Also Published As

Publication number Publication date
WO2006086942A2 (fr) 2006-08-24
CA2597559A1 (fr) 2006-08-24
KR20070103496A (ko) 2007-10-23
CN101120432A (zh) 2008-02-06
JP2008537842A (ja) 2008-09-25
DE102005006656A1 (de) 2006-08-17
TW200644038A (en) 2006-12-16
WO2006086942A3 (fr) 2007-09-20
US20080197775A1 (en) 2008-08-21
EP1849178B1 (fr) 2017-07-26
KR101216450B1 (ko) 2013-01-09
JP4833285B2 (ja) 2011-12-07

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