EP1735250A2 - Composant en verre de quartz destine a une source de rayons ultraviolets et procede de production et de test d'aptitude de ce composant en verre de quartz - Google Patents

Composant en verre de quartz destine a une source de rayons ultraviolets et procede de production et de test d'aptitude de ce composant en verre de quartz

Info

Publication number
EP1735250A2
EP1735250A2 EP05732180A EP05732180A EP1735250A2 EP 1735250 A2 EP1735250 A2 EP 1735250A2 EP 05732180 A EP05732180 A EP 05732180A EP 05732180 A EP05732180 A EP 05732180A EP 1735250 A2 EP1735250 A2 EP 1735250A2
Authority
EP
European Patent Office
Prior art keywords
quartz glass
glass component
quartz
radiation
sih groups
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05732180A
Other languages
German (de)
English (en)
Inventor
Andreas Schreiber
Bodo KÜHN
Franz-Josef Schilling
Erich Arnold
Hans-Dieter Witzke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzglas GmbH and Co KG
Original Assignee
Heraeus Quarzglas GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Quarzglas GmbH and Co KG filed Critical Heraeus Quarzglas GmbH and Co KG
Publication of EP1735250A2 publication Critical patent/EP1735250A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/01—Other methods of shaping glass by progressive fusion or sintering of powdered glass onto a shaping substrate, i.e. accretion, e.g. plasma oxidation deposition
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz
    • C03B2201/03—Impurity concentration specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz
    • C03B2201/03—Impurity concentration specified
    • C03B2201/04—Hydroxyl ion (OH)
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/07—Impurity concentration specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/23—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with hydroxyl groups

Definitions

  • the present invention relates to a component made of quartz glass for a UV radiation source.
  • the invention relates to a method for producing a quartz glass component for a UV radiation source, comprising the melting of Si0 2 -containing grain.
  • the invention relates to a diagnostic method for the suitability of a quartz glass component for use with a UV radiation source.
  • UV radiation sources are used, for example, for curing, modifying, coating and cleaning surfaces, for disinfecting gases, liquids, surfaces and packaging, for UV measurement technology, industrial photochemistry, for drying and curing printing inks, varnishes, adhesives and potting compounds, paint drying and analysis technology used.
  • UV radiation sources have a discharge space which is delimited, for example, by an envelope body in the form of a tube or bulb.
  • UV excimer lamps are increasingly being used. Such a UV excimer lamp is described in EP 0 254 111 A1.
  • the discharge space is filled with an inert gas or with a gas mixture and bounded by a quartz glass tube, in which a silent electrical discharge is generated.
  • High-performance excimer lamps emit an almost monochromatic, incoherent radiation. Typical working wavelengths are 172 nm (Xe lamps), 222 nm (KrCI lamps), 282 nm (XeBr lamps) and 308 nm (XeCI lamps).
  • Quartz glass made from both natural and synthetic raw materials is basically suitable for this purpose due to its UV permeability.
  • the high photon energy of the UV radiation in the quartz glass of the envelope body creates defects in the glass structure (so-called “color centers”), which cause absorption in certain wavelength ranges and thus transmission changes. Such defects in the glass structure can also cause mechanical stresses in the quartz glass.
  • the particularly high-energy photons of the 172nm-Xe excimer lamp are problematic with regard to the generation of defects.
  • quartz glass qualities differ in their radiation resistance.
  • synthetically produced quartz glass is more resistant to radiation than high-energy UV radiation than quartz glass made from natural raw materials.
  • Synthetic quartz glass is used for demanding applications as a covering material for UV lamps and for cover plates.
  • the production of high-purity, synthetic quartz glass is complex and the quartz glass is accordingly expensive.
  • the UV radiation resistance of a quartz glass has so far been determined on the basis of radiation tests.
  • samples from the quartz glass are prepared and exposed to UV radiation with the corresponding working wavelength.
  • the radiation durations required to determine the radiation resistance can be in the range of several months.
  • the invention is also based on the object of specifying an inexpensive method for producing such a quartz glass component.
  • Another object of the invention is to provide a diagnostic method by means of which the suitability of any quartz glass for use with high-energy UV radiation can be determined reliably and inexpensively in a simple manner.
  • this object is achieved according to the invention in that the quartz glass is melted from synthetically produced quartz crystals and has a SiH group content of less than 5 ⁇ 10 17 molecules / cm 3 .
  • quartz glass The radiation resistance of quartz glass is impaired by extrinsic and intrinsic defects.
  • Extrinsic defects include contaminants. These are entered into the quartz glass via the raw material and the manufacturing process - for example using crucible and furnace materials.
  • Intrinsic defects are structural defects in the quartz glass network that are thermally influenced during the manufacturing process. Many of these structural defects act as optical absorption or color centers in the UV and in the deep UV spectral range or they form “precursor defects” (precursors) from which other structural defects can arise as a result of irradiation with short-wave UV radiation. Those explained in more detail below Defects or precursor defects show absorption bands in the short-wave UV spectral range and are particularly important:
  • Type I quartz glass is quartz glass made of electrically melted quartz crystals. This quartz glass typically has an OH content of less than 5 ppm by weight and an impurity content of 10 to 100 ppm by weight.
  • Quartz glass according to the type II is formed by melting of quartz crystals in the oxyhydrogen flame (H 2/0 2). Due to the manufacturing process, this quartz glass has a higher OH content between 100 and 300 ppm by weight.
  • Synthetic quartz glass is produced either by flame hydrolysis, by plasma-assisted oxidation or by the sol-gel process (types III, IV and VII). Depending on the production method and the type of treatment before vitrification, these quartz glass types have OH contents in a wide range from less than 0.1 ppm to approximately 1000 ppm by weight and very low impurity contents.
  • the quartz glass type Va is quartz glass that is melted in a crucible under a hydrogen-containing atmosphere in an electrical melting process from pegmatitic quartz (quartz in combination with other minerals).
  • the quartz glass obtained in this way typically has an OH content of 100 ppm by weight and generally contains impurities of up to a few hundred ppm by weight.
  • the OH content can be reduced to a range of ⁇ 1 ppm to 15 ppm, whereby the quartz glass type Vb is obtained.
  • quartz glass of type VIII is of interest, which is formed by melting quartz crystals in a plasma flame.
  • this quartz glass has a significantly lower OH content than the quartz glass of type II and is referred to below as quartz glass of type VIII.
  • Type III and purple quartz glass is synthetically produced quartz glass which, although generally well suited for UV applications, is also expensive and is therefore not the subject of the present invention.
  • the quartz glass of type V is usually used 7, which is melted in large quantities of several tons from natural, pegmatitic quartz.
  • type I and II quartz glasses are produced in smaller quantities and used for the semiconductor industry, for the chemical industry and also for lamps.
  • a quartz glass component in which the quartz glass is produced from synthetically produced quartz crystals.
  • This is a modification of the above-mentioned quartz glass types I, II and VIII, insofar as the quartz crystals used are specified as synthetically produced quartz crystals (hereinafter also referred to as “growth crystals”).
  • Quartz growth crystals are starting materials with a Natural quartz of higher purity. Such synthetic quartz crystals are usually produced in a so-called “hydrothermal process", which will be explained in more detail below. The quartz glass melted from quartz growing crystals is significantly cheaper than synthetic quartz glass.
  • the quartz glass of the quartz glass component according to the invention has the lowest possible content of SiH groups.
  • SiH groups in quartz glass do not themselves absorb in the relevant UV wavelength range; the bonds, however, are relatively weak and can be affected by radiation break up short-wave UV light easily (in a so-called "one-photon process") to form absorbing E 'centers.
  • E 'centers result in increased absorption at a wavelength of 215 nm and are also noticeably noticeable in the adjacent UV wavelength range. They therefore have an unfavorable effect on the radiation resistance of the quartz glass component.
  • SiH groups can increasingly occur in quartz glass if it has a high hydrogen content.
  • the raw material used here - namely synthetic quartz crystals - may contain small amounts of hydrogen due to the production process, additional hydrogen being able to be introduced into the quartz glass via the production process, as will be discussed in more detail below with reference to the process according to the invention.
  • the content of SiH groups in the quartz glass is as low as possible.
  • the content of SiH groups is less than bx 1 mol molecules / cm 3 , which corresponds approximately to the current detection limit with the measurement method mentioned below.
  • the quartz glass has a hydroxyl group content of at least 25 ppm by weight, preferably at least 100 ppm by weight.
  • quartz glass is produced by melting synthetic quartz crystals using a burner flame.
  • the quartz glass component according to the invention is present, for example, as a disk, tube or as a piston.
  • the comparatively thin wall thickness results in a short diffusion distance, which is easier for the removal of SiH groups from the quartz glass by means of an annealing treatment, which will be explained in more detail below using the method according to the invention.
  • the above-mentioned object is achieved according to the invention on the basis of a method having the features mentioned at the outset in that synthetically produced quartz crystals are melted into a preliminary product which consists of quartz glass which contains hydroxyl groups. contains a number that is greater than the number of SiH groups, and that to remove SiH groups, the preliminary product is subjected to an annealing treatment at a temperature of at least 850 ° C. and the quartz glass component is obtained in the process.
  • a preliminary product for the quartz glass component actually to be produced is first produced using a raw material in the form of synthetically produced quartz crystals.
  • Synthetic quartz crystals are starting materials with a higher purity than natural quartz, which can be produced, for example, using the "hydrothermal process".
  • the quartz glass melted from synthetic quartz crystals is inexpensive compared to quartz glass which is produced by flame hydrolysis or by plasma processes.
  • the preliminary product usually already has the shape and dimensions of the actual quartz glass component. It is essential that the preliminary product consists of quartz glass which contains SiH groups in a number which is less than the number of hydroxyl groups, as will be explained in more detail below.
  • the preliminary product is subjected to an annealing treatment to remove SiH groups.
  • SiH groups are firmly connected to the glass network and do not diffuse or hardly diffuse. They can therefore only be removed reactively from the quartz glass of the preliminary product.
  • Suitable reactants are hydroxyl groups (OH groups), which react with the SiH groups at high temperatures to form hydrogen, which can diffuse out of the quartz glass of the preliminary product. This reaction forms according to the reaction equation
  • An essential prerequisite for the effectiveness of the annealing treatment is therefore that the number of hydroxyl groups in the quartz glass of the preliminary product is at least as large as the number of SiH groups.
  • the content of hydroxyl groups in quartz glass is often given in the unit “ppm by weight”. The conversion from this concentration unit to the number of hydroxyl groups per cm 3 in quartz glass is carried out using the factor: 7.8 ⁇ 10 16 cm 3 / wt. ppm.
  • the SiH groups are removed as far as possible from the quartz glass of the preliminary product by reacting with a part of the OH groups present in excess to form reaction products that diffuse out of the quartz glass.
  • the hydroxyl groups present in the quartz glass will react with the SiH groups 1: 1 in a short time, so that a clear excess of hydroxyl groups is helpful for a rapid and extensive elimination of the SiH groups, and on the other hand it is im
  • the radiation resistance of the quartz glass it is advantageous if a residue of hydroxyl groups is contained in the quartz glass even after the reaction of the OH groups with the SiH groups.
  • a precursor which consists of quartz glass and which contains hydroxyl groups in a number which is at least twice as large as the number of SiH groups. It has proven to be particularly favorable if the tempering treatment is carried out at a temperature in the range between 900 ° C. and 1200 ° C.
  • the removal of the SiH groups is particularly effective if the tempering treatment comprises treatment under vacuum.
  • the vacuum causes the reaction products to be rapidly removed from the surface of the preliminary product, thus preventing a renewed reaction and thereby accelerating the removal of the SiH groups from the quartz glass.
  • the vacuum is applied at least temporarily during the tempering treatment.
  • the annealing treatment comprises a treatment under an oxygen-containing atmosphere.
  • Oxygen deficiency defects present in the quartz glass can be saturated by the oxygen present in the tempering atmosphere.
  • the hydroxyl group content of the quartz glass is preferably set to at least 25 ppm by weight, preferably at least 100 ppm by weight.
  • a certain content of hydroxyl groups has a favorable effect on the radiation resistance of quartz glass.
  • the specified minimum hydroxyl group content should therefore still be present in the finished quartz glass component after the heat treatment and the reaction with the SiH groups.
  • the quartz glass component is preferably designed as an enveloping body for the UV radiation source with a wall thickness in the range between 0.4 mm and 8 mm, wherein the annealing treatment, depending on the wall thickness, lasts between 4 hours and 80 hours.
  • the enveloping body is, for example, a tube, a piston or a component that shields the UV radiation source, such as a disk.
  • the above-mentioned object is achieved according to the invention in that the quartz glass component is exposed to excitation radiation and the fluorescence radiation of the quartz glass generated as a result of the excitation radiation is detected in the wavelength range from 350 to 430 nm.
  • quartz glass is not very resistant to UV radiation and, as a result of UV excitation radiation, has a perceptible fluorescence in the visible, blue wavelength range from 350 to 430 nm (for example at a wavelength of 390 nm).
  • This finding which has been checked and confirmed on various quartz glass qualities, results in a diagnostic method according to the invention, by means of which the suitability of the quartz glass in question for use with high-energy UV radiation can be determined simply and reliably.
  • the excitation radiation has a wavelength of around 248 nm and if the fluorescence radiation of the quartz glass component is determined in a direction which is essentially perpendicular to the main direction of propagation of the excitation radiation.
  • the measurement of the fluorescence radiation is not noticeably influenced by the excitation radiation.
  • FIG. 1 UV transmission spectra of different quartz glass qualities and differently treated samples in comparison
  • Figure 2 fluorescence spectra of different quartz glass qualities and differently treated samples in comparison.
  • the growth crystals for the production of the quartz glass qualities according to types II and VIII were produced by the so-called "hydrothermal process".
  • the lower area broken pieces of quartz are dissolved in a slightly alkaline solution.
  • Oriented cut quartz plates - as seeds - are arranged in the upper area of the autoclave.
  • the dissolved in the lower area condenses Quartz on the quartz plates to form a synthetic quartz crystal, which is characterized by a higher purity than natural quartz crystals.
  • Quartz glass samples were made from different quartz glass qualities. Type II and type VIII quartz glass (see FIG. 1) were each produced using growth crystals, the type II quartz crystals being melted using a fuel gas flame (oxyhydrogen flame) and the type VIII quartz glass using a hydrogen-free plasma flame.
  • the quartz glass of the purple type is synthetically produced quartz glass, which was obtained by flame hydrolysis of SiCI 4 according to the so-called soot process.
  • the type Vc quartz glass is quartz glass, which was melted from synthetically produced quartz glass granules and which had a hydroxyl group content of less than 25 ppm by weight. Before and after a thermal pretreatment, which is described below, the quartz glass samples were characterized by measuring their UV transmission in the wavelength range from 150 to 240 nm and their SiH and hydroxyl group content.
  • the hydroxyl group content is obtained by measuring the IR absorption using the method of DM Dodd et al. ("Optical Determinations of OH in Fused Silica", (1966), p. 3911).
  • the content of SiH groups is determined by means of Raman spectroscopy, with calibration being carried out using a chemical reaction: Si-O-Si + H2 - > Si-H - + Si-OH r as in-Shelby "Reaction of-hydrogen with-hydroxyMree vitreous silica" (J. Appl. Phys., Vol. 51, No. 5 (May 1980), p. 2589- 2593).
  • NT annealing treatment Conversion factor for the specification of the OH contents between columns 3 and 4: 7.8 x 10 16 [number / cm 3 ]
  • the irradiation time was 950 hours for the quartz glass types II, purple and VIII and 1590 hours for the quartz glass type Vc.
  • Measurement of fluorescence In addition, the fluorescence spectra were determined on all samples when irradiated with an excimer laser with a wavelength of 248 nm and a pulse width of 20 ns and an energy density of 200 mJ / cm 2 .
  • the fluorescence radiation was determined in a direction perpendicular to the main direction of propagation of the excitation radiation, the spectra shown in FIG. 2 being obtained by integration over a period of 50 ⁇ s, starting 10 ⁇ s after the excitation radiation was switched on.
  • Figure 1 shows the transmission spectra of the various - tempered and non-tempered - quartz glass samples before and after UV irradiation in the wavelength range between 150 nm and 240 nm.
  • FIG. 1 the diagrams in the right column each show the transmission spectra of the irradiated samples and the diagrams on the left that of the non-irradiated samples.
  • Two measurement curves are entered in the diagrams, one of which, in which the measurement points are shown as circles, shows the course of the transmission in thermally pretreated samples, and the other, which is shown as a solid line, symbolizes samples that have not been pretreated thermally.
  • the diagrams on the right side of FIG. 1 show the transmission spectra after irradiation with 172 nm UV radiation. Irradiation with the UV excimer lamp leads to a reduction in transmission in all samples (right column), particularly pronounced in quartz glass types II and VIII, and hardly recognizable in the quartz glass type purple.
  • the quartz glass of the purple type is essentially resistant to such radiation and shows no differences in transmission in both the annealed and the non-annealed quality.
  • the tempering treatment also brings about improved transmission and, in particular, improved resistance to UV radiation in the case of the quartz glass types Vc and VIII.
  • the radiation resistance of the quartz glass VIII is significantly lower than that of the type II quartz glass. This can be attributed to the fact that the type VIII quartz glass was obtained from water-free plasma melting of growth crystals and accordingly already has a low hydroxyl group content before the tempering process.
  • Table 1 shows, the number of hydroxyl groups before the annealing treatment is less than the number of SiH groups, so that the effect of the Annealing treatment with a view to eliminating SiH groups is reduced.
  • the number of hydroxyl group contents of the preliminary product before the tempering treatment is somewhat higher than the number of SiH groups; however, this is not sufficient for complete elimination, as the still measurable content of 1.0 ⁇ 10 17 after the tempering treatment shows.
  • the radiation resistance of this quartz glass is therefore somewhat better than that of type VIII quartz glass, but significantly worse than that of type II after the tempering treatment.
  • quartz glass type II The improvement in transmission and radiation resistance is particularly pronounced in quartz glass type II.
  • the non-tempered quartz glass sample type II is degenerated by UV radiation in a similar way to quartz glass qualities Vc and VIII, the tempered quartz glass sample II is resistant to UV radiation and shows none Absorption band at 163 nm and 215 nm. This quartz glass shows no crack formation even after an exposure time of 2,000 hours.
  • the type II quartz glass has a small number of intrinsic and extrinsic defects.
  • it is made from a comparatively pure starting material, namely from quartz crystals, so that it contains little impurities.
  • the production of the quartz glass by means of flame melting leads to a comparatively high hydroxyl group content (in comparison to plasma melting), which in turn enables the SiH groups introduced during production to be reduced to a value below the detection limit in the subsequent tempering treatment.
  • FIG. 2 shows fluorescence spectra for quartz glass types II, purple, Vc and VIII in the wavelength range between 300 and 700 nm before and after irradiation with 172 nm UV excimer radiation.
  • the fluorescence "PL" is relative Units plotted over the wavelength in the range between 300 and 700 nm.
  • the quartz glass of the purple type shows a weak fluorescence band in the green area essentially independent of a thermal pretreatment of this quartz glass.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Thermal Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Glass Compositions (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

Un procédé de production classique d'un composant en verre de quartz destiné à une source de rayons ultraviolets comporte la fusion de granulés contenant SiO2. L'invention vise à améliorer ce procédé et à le rendre plus économique en vue d'obtenir un composant en verre de quartz caractérisé par une grande résistance aux rayons. A cet effet, des cristaux de quartz de production synthétique sont fondus pour obtenir un produit semi-fini constitué de verre de quartz contenant des groupes hydroxyle en nombre supérieur à celui de groupes SiH. Pour éliminer les groupes SiH, le produit semi-fini est soumis à un traitement thermique à une température d'au moins 850 DEG C, ce qui permet d'obtenir le composant en verre de quartz. Le composant en verre de quartz selon l'invention est caractérisé en ce que le verre de quartz est fondu à partir de cristaux de quartz de production synthétique, et il a une teneur en groupes SiH d'au moins 5 x 10<17> molécules/cm<3>.
EP05732180A 2004-04-15 2005-04-05 Composant en verre de quartz destine a une source de rayons ultraviolets et procede de production et de test d'aptitude de ce composant en verre de quartz Withdrawn EP1735250A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004018887A DE102004018887B4 (de) 2004-04-15 2004-04-15 Verfahren für die Herstellung eines Bauteils aus Quarzglas zum Einsatz mit einer UV-Strahlenquelle und Verfahren für die Eignungsdiagnose eines derartigen Quarzglas-Bauteils
PCT/EP2005/003549 WO2005102950A2 (fr) 2004-04-15 2005-04-05 Composant en verre de quartz destine a une source de rayons ultraviolets et procede de production et de test d'aptitude de ce composant en verre de quartz

Publications (1)

Publication Number Publication Date
EP1735250A2 true EP1735250A2 (fr) 2006-12-27

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EP05732180A Withdrawn EP1735250A2 (fr) 2004-04-15 2005-04-05 Composant en verre de quartz destine a une source de rayons ultraviolets et procede de production et de test d'aptitude de ce composant en verre de quartz

Country Status (6)

Country Link
US (1) US20070272685A1 (fr)
EP (1) EP1735250A2 (fr)
JP (1) JP2007532459A (fr)
CN (1) CN1968903A (fr)
DE (1) DE102004018887B4 (fr)
WO (1) WO2005102950A2 (fr)

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JP2009046328A (ja) * 2007-08-15 2009-03-05 Shinetsu Quartz Prod Co Ltd 光触媒用シリカガラス及び光触媒用シリカガラスの製造方法
JP5406439B2 (ja) * 2007-08-23 2014-02-05 信越石英株式会社 耐化学性シリカガラス及び耐化学性シリカガラスの製造方法
JP5151816B2 (ja) * 2008-08-29 2013-02-27 ウシオ電機株式会社 エキシマランプ
JP5476982B2 (ja) * 2009-12-25 2014-04-23 信越化学工業株式会社 チタニアドープ石英ガラスの選定方法
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DE102014113854A1 (de) * 2014-09-24 2016-03-24 Ev Group E. Thallner Gmbh Verfahren zur Herstellung eines optischen Glaselements
EP3205630B1 (fr) 2016-02-12 2020-01-01 Heraeus Quarzglas GmbH & Co. KG Materiau diffuseur en verre de quartz synthetique et procede de fabrication d'un corps de moulage en etant totalement ou partiellement constitue
CN116930115B (zh) * 2023-09-15 2023-12-12 久智光电子材料科技有限公司 一种石英玻璃羟基检测方法及检测装置

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JP4104338B2 (ja) * 2002-01-31 2008-06-18 信越石英株式会社 ＡｒＦ露光装置用合成石英ガラス素材

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US20070272685A1 (en) 2007-11-29
DE102004018887B4 (de) 2009-04-16
JP2007532459A (ja) 2007-11-15
WO2005102950A3 (fr) 2006-03-02
CN1968903A (zh) 2007-05-23
WO2005102950A2 (fr) 2005-11-03
DE102004018887A1 (de) 2005-11-10

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