EP1678446B1 - Vakuumvorrichtung - Google Patents

Vakuumvorrichtung Download PDF

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Publication number
EP1678446B1
EP1678446B1 EP04740982A EP04740982A EP1678446B1 EP 1678446 B1 EP1678446 B1 EP 1678446B1 EP 04740982 A EP04740982 A EP 04740982A EP 04740982 A EP04740982 A EP 04740982A EP 1678446 B1 EP1678446 B1 EP 1678446B1
Authority
EP
European Patent Office
Prior art keywords
cryopumps
cryopump
throttle
vacuum device
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP04740982A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1678446A1 (de
Inventor
Dirk Schiller
Holger Dietz
Gerhard Wilhelm Walter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1678446A1 publication Critical patent/EP1678446A1/de
Application granted granted Critical
Publication of EP1678446B1 publication Critical patent/EP1678446B1/de
Anticipated expiration legal-status Critical
Not-in-force legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B29/00—Other pumps with movable, e.g. rotatable cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/10—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point with several cooling stages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/002—Gas cycle refrigeration machines with parallel working cold producing expansion devices in one circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/14—Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1428—Control of a Stirling refrigeration machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/04—Refrigeration circuit bypassing means
    • F25B2400/0411—Refrigeration circuit bypassing means for the expansion valve or capillary tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/25—Control of valves
    • F25B2600/2501—Bypass valves

Definitions

  • the invention relates to a vacuum device which has a plurality of cryopumps for generating vacuum.
  • Such vacuum devices have a plurality of cryopumps usually connected in parallel to one another, which are connected to one or more vacuum spaces. Furthermore, the vacuum device has a compressor device with which the cooling medium, usually helium, is compressed. The compressed refrigerant medium is delivered to the cryopumps via medium supply lines, expands in the cryopump and is then returned to the compressor device via medium return lines. Possibly. In this case, cleaning devices are provided in the medium line in order to clean the medium, for example, of oil or other impurities. As a result, contaminants of the medium are kept away from the cryopumps.
  • the cooling medium usually helium
  • cryopumps used are two-stage cryopumps that operate on the Gifford McMahon principle.
  • a piston possibly a common piston is provided for each stage.
  • the cooling medium is transported and a corresponding cooling of the two stages is achieved.
  • radiant heat or other temperature influences heating of individual pumps can occur.
  • the object of the invention is to provide a vacuum device with a plurality of cryopumps in which the temperature of the cryopump can be controlled quickly and easily.
  • the vacuum device according to the invention has a plurality of cryopumps connected to one or more vacuum spaces. These are preferably cryopumps which operate on the Gifford McMahon principle and preferably have a cooling head.
  • a compressor device connected to the cryopumps via medium supply lines and medium return lines, helium can be provided in the cryopumps in at least two different pressure levels.
  • a vacuum device according to the invention can in particular more than five, or possibly also more than ten cryopumps, which are connected in parallel with each other.
  • Such systems then have a compressor device with several, for example two or three compressors, in particular helium compressors on. As a result, the required energy requirement is relatively high, for example 10 to 20 kW.
  • the vacuum device has at least one adjusting device, which is connected directly upstream of a cryopump, ie is assigned. With the aid of the adjusting device, the amount of medium supplied to the cryopump can be controlled.
  • the adjusting device is connected to a control device.
  • a temperature measuring device is provided, which is connected to the cryopump and in particular measures temperatures of both stages.
  • the adjusting device according to the invention is arranged in a medium supply line of a cryopump and has a throttle device arranged in the medium supply line. Furthermore, the adjusting device has a branch or a throttle bypass, which bridges the throttle device. In the throttle bypass line a valve is arranged. This valve can be controlled by means of the control device. With the aid of the setting device according to the invention, it is thus possible in particular to realize two medium feed states to the cryopump. In one state, the valve arranged in the bypass line is closed, so that medium only passes through the throttle device to the cryopump. In another position, the valve is fully open, so that a maximum amount of medium passes through the bypass line to the cryopump. In this case, in a simple embodiment, the valve can be designed as a switching valve which has only the two states completely closed or completely open.
  • control device With the help of the control device, it is thus possible in a simple manner, for example, to provide a large amount of refrigerating medium to a cryopump that is too hot by opening the valve. This can be done simultaneously By closing or keeping closed valves associated with the sufficiently cold cryopumps, it can be avoided that an excessive amount of refrigeration medium is discharged through them.
  • each cryopump of the vacuum device is assigned an adjusting device according to the invention. This makes it possible to ensure in a simple manner that a too warm cryopump can be presented with a sufficient amount of refrigeration medium, so that the desired temperature of the cryopump can be reached quickly.
  • the cross-section of the throttle bypass line is selected such that a maximum medium supply is possible.
  • the valve provided in the by-pass line can be designed such that the effective cross-section of the valve and thus the medium flow rate can be varied.
  • the valve arranged in the by-pass line preferably has a cross-sectional diameter of more than 6 mm.
  • the intended nozzle has a cross-sectional diameter of about 1 mm.
  • a throttle device whose effective cross-sectional area can be adjusted.
  • a large amount of refrigeration medium is required, for example, during startup operation.
  • the vacuum device has a plurality of cryopumps 10 which are connected to one or more vacuum spaces, not shown.
  • the cryopumps 10 are arranged parallel to each other and connected via medium supply lines 12 and medium return lines 14 with a compressor having two compressors 16.
  • an adjusting device 18 for controlling the amount of medium supplied to the cryopump is provided in each case.
  • the adjusting device 18 has a branch of the medium supply line 12 in two mutually parallel lines 20, 22.
  • a throttle device 24 and in the second line 22, a valve 26 is provided in the first line 20.
  • the individual valves 26 are connected via dashed lines shown with a control device 28.
  • the control device 28 is also connected via electrical lines also shown in dashed lines in the cryopump 10 temperature measuring devices.
  • the throttle device 24 is not variable, but has a constant cross-section.
  • the valve 16 is a switching valve which may be either closed or opened. An intermediate position does not have this valve.
  • the control device 28, for example, deposited mode of operation is in Fig. 2 shown.
  • a first step 30 the temperature of a first stage of a specific cryopump 10 is compared with a target value. If the measured temperature of the first stage is higher than the target value, ie if the first stage of the cryopump 10 is too warm, the query must be answered with "yes", so that in step 32 the associated valve 26 is opened.
  • step 34 a check is made of the temperature of the second stage with respect to a second target value, which differs from the first target value checked in step 30. According to step 30, the decision "yes” is made if the temperature of the second stage exceeds the target value, ie the second stage is too warm. This in turn has an opening of the valve 26 in step 32.
  • the decision is "no" and the valve remains closed (step 36).
  • the above-described query of the individual cryopumps takes place at regular intervals.
  • the control of the valves can be further refined especially for valves that can also be partially opened or closed.
  • further target values or threshold values are defined.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
  • Glass Compositions (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
EP04740982A 2003-08-20 2004-07-14 Vakuumvorrichtung Not-in-force EP1678446B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US49700203P 2003-08-20 2003-08-20
PCT/EP2004/007763 WO2005019744A1 (de) 2003-08-20 2004-07-14 Vakuumvorrichtung

Publications (2)

Publication Number Publication Date
EP1678446A1 EP1678446A1 (de) 2006-07-12
EP1678446B1 true EP1678446B1 (de) 2008-05-14

Family

ID=34216063

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04740982A Not-in-force EP1678446B1 (de) 2003-08-20 2004-07-14 Vakuumvorrichtung

Country Status (11)

Country Link
US (1) US7481066B2 (ko)
EP (1) EP1678446B1 (ko)
JP (1) JP2007502928A (ko)
KR (1) KR20060067958A (ko)
CN (1) CN100422660C (ko)
AT (1) ATE395565T1 (ko)
DE (1) DE502004007169D1 (ko)
ES (1) ES2307022T3 (ko)
HK (1) HK1093093A1 (ko)
TW (1) TW200508496A (ko)
WO (1) WO2005019744A1 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102017289B (zh) 2008-06-19 2014-06-25 夏普株式会社 无线装置
KR101093480B1 (ko) 2010-08-16 2011-12-13 프란시스 충 화 판 구체 이동 경로의 측정 방법
JP5545858B2 (ja) 2010-09-21 2014-07-09 住友重機械工業株式会社 クライオポンプシステム及びその制御方法
JP5978045B2 (ja) * 2012-07-26 2016-08-24 株式会社アルバック 減圧システム
JP6067423B2 (ja) * 2013-03-04 2017-01-25 住友重機械工業株式会社 極低温冷凍装置、クライオポンプ、核磁気共鳴画像装置、及び極低温冷凍装置の制御方法
KR101741708B1 (ko) * 2016-07-13 2017-05-30 한국알박크라이오(주) 컴프레서 장치 및 그 제어 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3139044C1 (de) * 1981-10-01 1983-04-21 Danfoss A/S, 6430 Nordborg Kaelte- oder Waermepumpenkreislauf
US4546611A (en) * 1983-12-21 1985-10-15 Eby Robert S UF6 -Recovery process utilizing desublimation
US5010737A (en) * 1989-03-30 1991-04-30 Aisin Seiki Kabushiki Kaisha Multi-headed cryopump apparatus
JPH0626459A (ja) * 1992-07-09 1994-02-01 Hitachi Ltd 極低温冷却装置およびその冷却方法
US5386708A (en) * 1993-09-02 1995-02-07 Ebara Technologies Incorporated Cryogenic vacuum pump with expander speed control
US5775109A (en) * 1997-01-02 1998-07-07 Helix Technology Corporation Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor
JP4274648B2 (ja) * 1999-09-29 2009-06-10 住友重機械工業株式会社 クライオポンプの制御装置
JP5421509B2 (ja) * 2000-05-30 2014-02-19 ブルックス オートメイション インコーポレーテッド 制御された冷却および昇温速度と長期加熱機能とを有する極低温冷凍システム
US7127901B2 (en) * 2001-07-20 2006-10-31 Brooks Automation, Inc. Helium management control system
JP3754992B2 (ja) * 2001-08-03 2006-03-15 住友重機械工業株式会社 マルチシステム冷凍機の運転方法、装置及び冷凍装置

Also Published As

Publication number Publication date
KR20060067958A (ko) 2006-06-20
TW200508496A (en) 2005-03-01
CN1833145A (zh) 2006-09-13
JP2007502928A (ja) 2007-02-15
EP1678446A1 (de) 2006-07-12
US20060272338A1 (en) 2006-12-07
CN100422660C (zh) 2008-10-01
ES2307022T3 (es) 2008-11-16
DE502004007169D1 (de) 2008-06-26
WO2005019744A1 (de) 2005-03-03
ATE395565T1 (de) 2008-05-15
US7481066B2 (en) 2009-01-27
HK1093093A1 (en) 2007-02-23

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