EP1622715A1 - Module microminiaturise - Google Patents

Module microminiaturise

Info

Publication number
EP1622715A1
EP1622715A1 EP04728110A EP04728110A EP1622715A1 EP 1622715 A1 EP1622715 A1 EP 1622715A1 EP 04728110 A EP04728110 A EP 04728110A EP 04728110 A EP04728110 A EP 04728110A EP 1622715 A1 EP1622715 A1 EP 1622715A1
Authority
EP
European Patent Office
Prior art keywords
housing
microfluidic
module according
microprocessing
microprocessing module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04728110A
Other languages
German (de)
English (en)
Inventor
Dirk Schmalz
Heinz Allmann
Michael HÄBERL
Hans Muntermann
Michael Schmelz
Frank Schwarz
Reiner Funck
Astrid Lohf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Merck Patent GmbH
Original Assignee
Merck Patent GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10344227A external-priority patent/DE10344227A1/de
Application filed by Merck Patent GmbH filed Critical Merck Patent GmbH
Publication of EP1622715A1 publication Critical patent/EP1622715A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093Microreactors, e.g. miniaturised or microfabricated reactors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/56General build-up of the mixers
    • B01F35/561General build-up of the mixers the mixer being built-up from a plurality of modules or stacked plates comprising complete or partial elements of the mixer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502715Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30Micromixers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781Aspects relating to microreactors
    • B01J2219/00801Means to assemble
    • B01J2219/0081Plurality of modules
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781Aspects relating to microreactors
    • B01J2219/00819Materials of construction
    • B01J2219/00824Ceramic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/02Adapting objects or devices to another
    • B01L2200/025Align devices or objects to ensure defined positions relative to each other
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/02Adapting objects or devices to another
    • B01L2200/026Fluid interfacing between devices or objects, e.g. connectors, inlet details
    • B01L2200/027Fluid interfacing between devices or objects, e.g. connectors, inlet details for microfluidic devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/06Auxiliary integrated devices, integrated components
    • B01L2300/0627Sensor or part of a sensor is integrated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/18Means for temperature control
    • B01L2300/1805Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/18Means for temperature control
    • B01L2300/1838Means for temperature control using fluid heat transfer medium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/18Means for temperature control
    • B01L2300/1883Means for temperature control using thermal insulation

Definitions

  • the invention relates to a microprocessing module that has at least one process engineering microfluidic element.
  • microreactor elements have been developed that allow, for example, mixing, separating, tempering and analyzing the smallest amounts of liquid or gas.
  • Complete microreaction systems not only allow a very effective and cost-effective production or analysis of chemical substances, but also make it possible for the first time not possible reaction processes that are only possible due to a changed fluid dynamics that occurs when such miniaturized microfluidic structures are used.
  • the manufacture of a microreaction system is due to the small dimensions of the individual structures and
  • microreaction system is complex to handle and can be used easily damaged in everyday laboratory work.
  • Modular microprocessing systems which consist of interconnectable, individual modules, each of which can contain one or more process steps, have been developed especially for the needs in research institutions.
  • a complex microreaction engineering system can be built up from the individual modules, which contain microfluidic elements such as pumps, mixers or analysis devices. _The individual modules are much cheaper to manufacture and can be replaced in the event of damage without having to replace the entire microreaction system.
  • the individual components have fluidic and possibly further connections, which must be connected to one another or to external device connections when a microreaction system composed of several components is set up.
  • the previously known microreaction modules of this type do not, however, have any universal uses. and standardized connections for the fluidic and, for example, electrical connections. Even if only uniform components from a certain system provider are used, the lengthy connection technology makes it a long time
  • a microprocessing module with at least one process engineering microfluidic element and with microfluidic channel connections, the microprocessing module being arranged in a thermally insulating housing which Microfluid channel connections are passed through the housing and connecting elements for connecting individual housings are arranged on the housing, so that the respectively assigned microfluid channel connections can be tightly connected to one another.
  • the individual building blocks of a complex microreaction system composed of several building blocks are thermally decoupled from one another, so that a targeted temperature control of the individual microfluidic elements of the microprocessing building block is possible.
  • the housing has connections arranged on the outside, so that respectively assigned connections are also connected to one another when two housings are connected to one another. While a simple contacting of the connections is sufficient for electrical connections, for example, fluid connections can and must be tightly connected to one another by using suitable connection devices. It has been shown that a tight fluid connection can be established using commercially available fluid connections even with a slight contact pressure of the interconnected housings.
  • the mechanical and fluidic connection technology can be largely integrated into the housing, so that projecting connection or connection elements can be avoided, which would otherwise be exposed to increased mechanical stress in everyday laboratory work.
  • the microfluidic element is essentially completely thermally conductive Material is surrounded.
  • the microfluidic element can, for example, be accommodated in a metal block which is arranged in the interior of the insulating housing.
  • the good thermal conductivity of the metal block ensures a uniform temperature control of the microfluidic element contained therein, with the surrounding housing achieving thermal insulation of the individual microfluidic elements.
  • the thermally conductive is aluminum or copper and the housing could be made of any other suitable material such as ceramic or a plastic that meets the requirements. These materials have sufficient thermal properties for most requirements, are easy to process and are sufficiently resistant for use in everyday laboratory work.
  • connection block arranged fluid connections and an arm transfer block with facilities for Temperature control is arranged.
  • the microfluidic element can be arranged between these two blocks, which are preferably made of aluminum or copper and can be detachably connected to one another, in such a way that, apart from the respective connections, it is completely removed from the one used
  • the microfluidic element is connected to all fluid and, for example, electrical connections in the surrounding blocks, without the individual connections having to be made manually in each case.
  • the microfluidic elements which are not necessarily produced in the form of a chip, can also be used, the shape of the connection block or of the heat transfer block in each case matching the microfluidic
  • connection connections in the connection block are connected to the connections arranged in the housing via hoses and lines. If the microfluidic element malfunctions, it can be removed and replaced without further effort, in particular without the manual loosening and reconnection of connections and connecting lines.
  • Heat transfer blocks are used, their shape and Connection arrangement is adapted to different geometries of microfluidic elements.
  • connection block has devices for
  • Has temperature control An electrical heater, in particular a resistance heater or a fluid-operated heat exchanger with a predeterminable fluid temperature, which are arranged in the heat exchanger block and, if appropriate, in the connection block, can be considered. Temperature control by one or more Peltier elements, by inductive or microwave heating can also be used. It is also possible to combine different possibilities of temperature control with one another, or to apply them at different times simultaneously or depending on the reaction method just carried out.
  • the temperature of the microfluidic element can be regulated.
  • one or more sensors for temperature measurement are arranged in the immediate vicinity of the microfluidic element.
  • the connection block and the heat exchanger block can have sufficiently small dimensions in order to cause only a low thermal inertia when the temperature changes due to the low heat capacity of the blocks. This enables fast, effective temperature control within a wide temperature range, which enables both the production of the smallest quantities of chemicals and rapid parameter screening for experimental tests.
  • sensors such as pressure, flow, conductivity, temperature, optical or pH sensors are arranged on the microfluidic element in the housing. About appropriate, through that
  • the individual sensors can be connected to external measuring devices through connecting lines which are guided through the housing and provided with detachable connections . and supply them with measured values. Since the individual sensors are located inside the housing and can be activated if necessary, undesired influencing of a reaction taking place in the microfluidic element is largely ruled out. The arrangement of the individual sensors, which does not have to be changed even when changing a microfluidic element, remains reproducible over many test series and enables reliable and repeatable measurements.
  • microfluidic components such as valves, check valves or pumps are arranged on the microfluidic element and / or the microfluidic channel connections.
  • microfluidic components enable controlled reaction control and fluid flow control within the microprocessing module, or the microfluidic element, which is largely independent of an external fluid supply or subsequent process steps.
  • Connection element for connecting individual housings has a conical screw which has a locking pin with a bore adapted to the conical screw, which protrudes from a first of the housings to be connected, releasably pressed firmly into a recess of a second housing adapted to the locking pin.
  • the locking pin of one housing is first inserted into the recess, usually a bore, of the second housing, and is firmly attached with a conical screw that can be screwed to the second housing and whose conically tapering section protrudes through the bore of the locking pin connected to the second housing.
  • the arrangement of the bore in the locking pin and the design of the conical section of the conical screw are coordinated with one another such that as the conical screw is increasingly screwed into the second housing, the
  • Locking pin and the associated first housing are pressed increasingly firmly against the second housing.
  • a defined contact pressure of the two housings can be achieved with simple means, which also ensures a reliable and tight connection of the associated ones
  • the housing has protrusions and recesses on the side faces for a form-fitting arrangement of individual housings relative to one another.
  • projections and recesses adapted to them facilitate the precise positioning of the housings to be connected relative to one another. This ensures that the associated fluid connections and, if necessary, electrical connections, even when a connection between two housings is established quickly Contactings are reliably and tightly connected or manufactured.
  • this type of connection ensures that the side faces of two housings to be connected are not mixed up.
  • the microprocessing module on the bottom surface of the housing has devices for releasably fastening the microprocessing module on a base plate.
  • connection technology of the individual housings in many cases enables a reliable connection of several housings with each other and thus the construction of a complex microreaction system without any additional aids, it may be useful for certain applications to fix the individual micro process engineering components on a common base plate.
  • the common base plate can on the one hand contribute to an additional secure connection of the individual microprocessing components to one another and, on the other hand, enables the attachment of further components, such as, for example, external measuring devices which are used together with the microreaction system.
  • Fig. 1 shows the basic structure of a microprocessing module, the individual Components are shown exploded for better illustration and
  • FIG. 2 shows a structure of a complex micro-process engineering system from several interconnected micro-process engineering components according to FIG. 1.
  • Fig. 1 shows an embodiment of a microprocessing module, the individual
  • FIG. 1 Components are shown in an exploded view. During the assembly of the individual components, the microprocessing module is usually held upside down, as shown in FIG. 1.
  • the microprocessing module has a housing 1, which is made of polyaryl ether ketone (PEEK) due to the desired thermal insulation properties.
  • the housing 1 could also be made of any other suitable thermally insulating material such as ceramic or a plastic that meets the requirements.
  • a heat exchanger block 2 In the interior of the housing 1 are a heat exchanger block 2 and
  • connection block 3 arranged, between which there is a microreaction chip 4.
  • the microreaction chip 4 as a concrete example for any microfluidic element has fluid channels (not shown), the characteristic dimensions of which are in the micrometer range.
  • microreaction chip 4 is usually by means of known shaping or structure-forming Process made from a thin glass plate or a silicon chip. Furthermore, other types of microreaction chip 4 are known and conceivable, in which microreaction chip 4 is made of metal or plastic. There are different versions of
  • Microreaction chips 4 or very generally known microfluidic elements which enable process engineering operations such as dosing, tempering, reactions, mixing, staying, extracting, separating, evaporating or rectifying.
  • a material with high thermal conductivity such as copper or aluminum, is usually used for the heat transfer block 2 and the connection block 3.
  • the heat transfer block 2 consists of a base block 5, the meandering grooves 6 for
  • the meandering grooves 6 are covered by a sealing plate 7.
  • the closure plate 7 On the side facing the connection block 3, the closure plate 7 has a cutout 8 which is adapted to the dimensions of the microreaction chip 4.
  • connection block 3 There are several in the connection block 3
  • Microchannel fluid connections 9 are arranged in such a way that the common, different microreaction chips 4 can each be contacted fluidically.
  • Commercial connection systems are used, which at Establish a sufficiently tight fluidic connection using the appropriate contact pressure.
  • connection block 3 and the heat transfer block 2 are firmly screwed together.
  • Supply lines for the temperature control medium 10 and heating cartridges 11 are connected to the arm transfer block 2 from the outside through the housing 1 by correspondingly adapted bores. In this way, the temperature of the microfluidic element is achieved by means of a temperature control device operated electrically or with a fluid heat transfer medium is controllable.
  • Heat exchanger block 2 has a further recess 12 for receiving a sensor 13. Due to its embedding in the heat transfer block 2, the sensor 13 is brought to the same temperature as the microreaction chip 4, so that largely unadulterated measurements are possible.
  • the microchannel fluid connections 9 are connected via a hose 14, which is only indicated schematically, to fluid connections 15 arranged in the side walls of the housing 1. Not shown are further electrical connections between the connection block 3 or the heat exchanger block 2 and the outside of the housing 1, which can be used, for example, for energy transmission or control and evaluation of further measuring devices. To contact these electrical, not shown
  • Connection can on the outside of the housing 1 additional connections such as Single plug connections, collective plug connections or terminal strips can be provided.
  • the housing 1 has projecting guide pins 16 and bores 17 adapted to them.
  • the guide pins 16 of a first housing 1 must be inserted into the bores 17 of a second housing 1, thereby ensuring a precise and reliable alignment of the individual housings 1 with one another.
  • a locking pin 18 which is fixedly connected to the first housing 1 and has a bore 19 running transversely to its longitudinal axis, is inserted into a bore 20 adapted to it in the side wall of the second housing 1.
  • a conical screw 21 with a threaded section 22 and a conically tapering section 23 is screwed to the second housing 1 such that the conically tapering section 23 with the
  • the housing 1 can be closed with a base plate 24 which is screwed to the housing 1.
  • microprocessing components are each connected to one another.
  • further microprocessing modules can be connected in a simple manner to the microreaction system shown, the locking pin 18 and the associated housing 1 of the newly added microprocessing module being fixed by screwing in the conical screw 21 and each associated fluid connections 15 are tightly connected.
  • connection technology shown enables complex microreaction systems to be set up solely by assembling the individual microprocessing components. It can be useful for various applications to attach the individual micro process engineering components on a common base plate.
  • the individual housings 1 are then locked via the respective base plates 24, which fit into the recesses in the base plate positioned and, if necessary, additionally attached.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

L'invention concerne un module microminiaturisé comportant un élément microfluidique microminiaturisé (4) et des connexions de canaux microfluidiques (9), qui présente un boîtier (1) assurant l'isolation thermique, qui entoure l'élément microfluidique (4). Les connexions de canaux microfluidiques (9) sont guidées à travers le boîtier (1) et des éléments d'assemblage sont disposés sur le boîtier (1) pour relier des boîtiers (1) individuels, de sorte que les connexions de canaux microfluidiques associés dans chaque cas puissent être interconnectées de manière étanche. L'élément microfluidique (4) est disposé entre un bloc de raccordement (3) et un bloc d'échangeurs de chaleur (2). La température du bloc d'échangeurs de chaleur (29 et du bloc de raccordement (3) et par conséquent de l'élément microfluidique (4) est régulable. Un élément d'assemblage pour relier des boîtiers (1) individuels entre eux présente une vis conique (21) avec une section filetée (22) et une section (23) s'amenuisant de manière conique. Une goupille de blocage (18) comportant un alésage (19) adapté à la vis conique (21), qui fait saillie hors d'un premier boîtier des boîtiers (1) à assembler, est introduite dans un évidement (20) d'un second boîtier (1), qui est adapté à ladite goupille de blocage (18) et est comprimée de manière fixe au moyen de la vis conique (21), dont la section (23) s'amenuisant de manière conique est mise en prise avec l'alésage (19) de la goupille de blocage (18).
EP04728110A 2003-05-09 2004-04-17 Module microminiaturise Withdrawn EP1622715A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10321115 2003-05-09
DE10344227A DE10344227A1 (de) 2003-05-09 2003-09-24 Mikroverfahrenstechnischer Baustein
PCT/EP2004/004098 WO2004098768A1 (fr) 2003-05-09 2004-04-17 Module microminiaturise

Publications (1)

Publication Number Publication Date
EP1622715A1 true EP1622715A1 (fr) 2006-02-08

Family

ID=33435971

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04728110A Withdrawn EP1622715A1 (fr) 2003-05-09 2004-04-17 Module microminiaturise

Country Status (4)

Country Link
US (1) US20070077179A1 (fr)
EP (1) EP1622715A1 (fr)
JP (1) JP2006526492A (fr)
WO (1) WO2004098768A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101563614A (zh) * 2006-10-31 2009-10-21 波凯特有限及两合公司 用于液体分析和合成的实验室模块装置及液体分析和合成方法
KR100935786B1 (ko) * 2007-06-29 2010-01-06 한국원자력연구원 수리화학 파라미터 측정기 및 이를 구비하는 수리시험장치
DE202010000262U1 (de) * 2009-05-12 2010-05-20 Lonza Ag Strömungsreaktor mit Mikrokanalsystem
JP6128932B2 (ja) * 2013-04-22 2017-05-17 株式会社神戸製鋼所 処理装置及び処理方法
KR102438219B1 (ko) 2016-07-06 2022-08-30 프레시젼 나노시스템스 유엘씨 지능형 미세 유체 혼합 기기 및 카트리지

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Publication number Priority date Publication date Assignee Title
DD122311A3 (fr) * 1973-06-20 1976-10-05
US6159368A (en) * 1998-10-29 2000-12-12 The Perkin-Elmer Corporation Multi-well microfiltration apparatus
EP1129772A3 (fr) * 1999-03-03 2001-11-07 Symyx Technologies, Inc. Distribution de fluide pour les microsystèmes de traitement chimique
US20020042140A1 (en) * 1999-03-03 2002-04-11 Alfred Hagemeyer Methods for analysis of heterogeneous catalysts in a multi-variable screening reactor
DE19917330B4 (de) * 1999-04-16 2004-08-26 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Mikroreaktormodul
DE19945832A1 (de) * 1999-09-24 2001-04-05 Karlsruhe Forschzent Modular aufgebauter Mikroreaktor
DE19959249A1 (de) * 1999-12-08 2001-07-19 Inst Mikrotechnik Mainz Gmbh Modulares Mikroreaktionssystem
ATE287291T1 (de) * 2000-03-07 2005-02-15 Symyx Technologies Inc Prozessoptimierungsreaktor mit parallelem durchfluss
WO2001089681A2 (fr) * 2000-05-24 2001-11-29 Cellular Process Chemistry, Inc. Systeme de production chimique modulaire utilisant un microreacteur
US6436720B1 (en) * 2000-09-15 2002-08-20 Cellular Process Chemistry, Inc. Residence time providing module/apparatus

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Also Published As

Publication number Publication date
WO2004098768A1 (fr) 2004-11-18
US20070077179A1 (en) 2007-04-05
JP2006526492A (ja) 2006-11-24

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