EP1609184A1 - Ensemble constitue d'un composant electrique sur un substrat et son procede de production - Google Patents

Ensemble constitue d'un composant electrique sur un substrat et son procede de production

Info

Publication number
EP1609184A1
EP1609184A1 EP04718634A EP04718634A EP1609184A1 EP 1609184 A1 EP1609184 A1 EP 1609184A1 EP 04718634 A EP04718634 A EP 04718634A EP 04718634 A EP04718634 A EP 04718634A EP 1609184 A1 EP1609184 A1 EP 1609184A1
Authority
EP
European Patent Office
Prior art keywords
electrical
component
film
contact
electrically conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04718634A
Other languages
German (de)
English (en)
Inventor
Franz Auerbach
Bernd Gutsmann
Thomas Licht
Norbert Seliger
Karl Weidner
Jörg ZAPF
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Siemens AG
Original Assignee
Siemens AG
EUPEC GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, EUPEC GmbH filed Critical Siemens AG
Publication of EP1609184A1 publication Critical patent/EP1609184A1/fr
Withdrawn legal-status Critical Current

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    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838—Geometry or layout
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    • H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
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Definitions

  • the invention relates to an arrangement with at least one substrate, at least one electrical component arranged on a surface section of the substrate with an electrical contact surface and at least one electrical contact lug with an electrical connection surface for electrically contacting the contact surface of the component, the connection surface of the contact lug and the contact surface of the component are connected to one another in such a way that there is an area of the contact tab that projects at least beyond the contact surface of the component.
  • a method for producing the arrangement is also specified.
  • Another method of contacting can be carried out using solder bumps in flip chip technology (Liu, X., et al.,
  • a large-area contacting via evaporated copper lines is in (Lu, G.-Q., "3-D, Bond-Wireless Interconnection of Power Devices in Modules Will Cut Resistance, Parasitics and Noise", PCIM May 2000, pp.40- 68), whereby the conductor tracks are insulated by means of an isolator (CVD process) separated from the vapor phase (Power Module Overlay Structure).
  • CVD process isolator
  • Contacting by means of a structured film via an adhesive or soldering process was published in (Krokoszinski, H.-J., Esrom, H., "Foil Clip for Power Module Interconnects", Hybrid Circuits 34, Sept. 1992).
  • the types of contacting shown are generally subject to induction. A relatively high inductance is caused by electrical control of the contacts.
  • the object of the invention is therefore a
  • an arrangement is specified with at least one substrate, at least one electrical component arranged on a surface section of the substrate with an electrical contact surface and at least one electrical contact lug with an electrical connection surface for electrically contacting the contact surface of the component, the connection surface of the contact lug and the contact surface of the component are connected to one another in such a way that there is an area of the contact lug projecting at least beyond the contact surface of the component.
  • the arrangement is characterized in that the contact tab has at least one electrically conductive film and the electrically conductive film has the electrical connection surface of the contact tab.
  • substrates on an organic or inorganic basis can be used as substrates.
  • substrates are, for example, PCB (Printed Circuit Board), DCB, IM (Insulated Metal), HTCC (High Temperature Cofired Cerics) and LTCC (Low Temperature Cofired Ceramics) substrates.
  • the electrically conductive film acts as a load connection, for example.
  • the load connection serves as an electrical lead for the electrical component.
  • the component is connected via the electrically conductive film, for example, to a so-called bus structure, which is used for the electrical control of several components.
  • the electrically conductive film has an electrically conductive material formed into a thin sheet.
  • the film has a flat electrical conductor.
  • the film can consist partially or entirely of the electrically conductive material.
  • the film has a certain deformability.
  • the film can be essentially planar. It is also conceivable that the film opposite the contact surface of the component or
  • connection surface of the film is angled.
  • the film thickness of the film is from the ⁇ m range. This means that the film can be a few ⁇ m to a few 100 ⁇ m thick. In particular, film thicknesses of up to 500 ⁇ m are possible.
  • the electrical component can be any passive or active component.
  • the passive component is, for example, a conductor structure.
  • the component is preferably a semiconductor chip and in particular a power semiconductor chip.
  • the power semiconductor chip is, for example, a MOSFET with relatively large-area source gate and drain chip areas (physical connections of the MOSFET). In order to ensure contacting with a high current density for these chip areas, the chip areas are contacted over a large area.
  • a lateral dimension of the contact area is relatively large.
  • each of the contact areas comprises at least 60%, but preferably at least 80%, of the respective chip area.
  • a thin, electrically conductive film with a large connection area is used for electrical contacting.
  • the electrically conductive film is characterized by a relatively low inductance when electrically controlled.
  • the component can be contacted with low inductance. Due to the flat shape of the contact lug and the associated relatively large surface area, a good heat connection to the surroundings is possible. This enables an increased current density.
  • Cross-section of the contact lug is particularly advantageous when controlling the contact lug at higher frequencies. At higher frequencies there is a current shift (skin effect). Despite the current shift, good electrical conductivity is guaranteed for the contact lug.
  • the electrically conductive film has a layer composite with at least two electrical line layers and at least one electrical insulation layer arranged between the line layers.
  • the line layers and the insulation layer of the layer composite are preferably configured and arranged with respect to one another in such a way that the
  • Such a magnetic field can be generated in each of the line layers, so that the magnetic fields weaken each other.
  • the magnetic fields are almost canceled out by negative interference.
  • This is preferably achieved in that the line layers of the layer composite are arranged essentially coplanar with one another.
  • the line layers become like this controlled that the current directions in the line layers are opposite to each other.
  • the insulation layer is designed in such a way that there can be no electrical short circuit between the line layers.
  • it can be advantageous to use a layered composite comprising a plurality of conductor layers and insulation layers arranged between them. Adjacent line layers are driven with current with opposite current directions.
  • connection method selected from the group soldering and / or welding and / or gluing.
  • the gluing is done, for example, with an electrically conductive adhesive.
  • Connection method a connection between the contact surface of the component and the connection surface of the electrically conductive film is achieved.
  • the electrically conductive film can only consist of electrically conductive material, for example copper.
  • an electrically conductive film with a layer composite with at least one electrical insulation layer and at least one electrical conductor layer is used to form the connection area of the electrically conductive film.
  • the insulation layer can act as a flexible carrier layer for the line layer.
  • the layer composite consists of a plastic film forming the insulation layer, on which a conductor layer made of copper is applied.
  • a layered composite with alternately stacked conductor layers and insulation layers is also conceivable.
  • the electrical contact surface of the component is produced using the following further method steps: c) applying an electrical insulation film to the substrate and the component and d) producing a window in the insulation film, the Contact area of the component is exposed.
  • the insulation film is preferably laminated on under vacuum.
  • the lamination is advantageously carried out in a vacuum press. Vacuum deep drawing, hydraulic vacuum pressing, vacuum gas pressure pressing or similar laminating processes are also conceivable.
  • the pressure is advantageously applied isostatically.
  • the lamination is carried out, for example, at temperatures from 100 ° C to 250 ° C and a pressure of 1 bar to 10 bar.
  • the exact process parameters of lamination i.e. pressure, temperature, time etc., depend, among other things, on the topology of the substrate, the plastic material of the insulation film and the film thickness of the insulation film.
  • Laminating the insulation film leads to the insulation film covering the surface with the contact surface (s) closely and on top of it
  • An insulation film made of polyimide for example, is resistant up to 300 ° C. - Low process costs, e.g. compared to separating the isolator from the vapor phase.
  • a high throughput is possible by laminating the insulation foils.
  • Benefits are processed. - Windows of any size and thus contact areas of any size can be produced in the laminated insulation film.
  • the laminated insulation film is characterized by homogeneous insulation properties, since air pockets are prevented by processing the film in a vacuum.
  • Chip contact areas of 30 mm 2 to 300 mm 2 can be realized.
  • the chips can be controlled homogeneously due to the flat contact.
  • the inductance of the contact in a contact area is smaller due to the areal geometry than with thick wire bonding.
  • Insulation film is used as the insulation layer of the composite layer of the electrically conductive film.
  • electrically conductive material is applied to the insulation film before and / or after the application of the insulation film. Any application or deposition process can be used.
  • the electrically conductive material is applied over the entire surface.
  • a physical or chemical deposition of the electrically conductive material is carried out.
  • Such physical processes are sputtering and vapor deposition (Physical Vapor Deposition, PVD).
  • Chemical deposition can be carried out from the gaseous phase (Chemical Vapor Deposition, CVD) and / or liquid phase (Liquid Phase Chemical Vapor Deposition). It is also conceivable that a thin electrically conductive partial layer is first applied by means of one of these methods, on which a thicker electrically conductive partial layer is then electrodeposited.
  • the insulation film is applied to the component in such a way that a region of the insulation film which projects at least beyond the contact surface of the component is produced. This area of the insulation film forms the area of the contact tab which projects beyond the contact area.
  • the insulation film is designed so that a
  • Height difference of up to 2000 ⁇ m can be overcome.
  • the height difference is caused, among other things, by the topology of the substrate and by the components, for example semiconductor chips, arranged on the substrate.
  • the insulation film can have any plastic.
  • any thermoplastics, thermosets and mixtures thereof are conceivable.
  • a foil with a is preferred as the insulation foil
  • Plastic material based on polyimide (PI), polyethylene (PE), polyphenol, polyether ether ketone (PEEK) and / or epoxy is used.
  • the insulation film can have several sublayers made of different plastics.
  • the insulation film can have an adhesive coating to improve the adhesion to the surface of the substrate and / or the component.
  • the film thickness of the insulation film is chosen from the ⁇ m range and can be a few ⁇ m to a few 100 ⁇ m. For example, the film thickness is selected from the range from 10 ⁇ m to 500 ⁇ m. An insulation film with a film thickness of 25 ⁇ m to 150 ⁇ m is preferably used.
  • a tempering step is carried out.
  • the adhesion of the insulation film to the surface of the substrate and / or the component is improved by a temperature treatment.
  • the application (with or without a tempering step) is repeated until a certain film thickness of the applied insulation film is reached.
  • insulating foils of smaller thickness are processed into a laminated insulating foil of greater thickness.
  • These insulation foils advantageously consist of a kind of plastic material. It is also conceivable that insulating films made of several different materials
  • Plastic materials are used. The result is a layered, applied insulation film.
  • material of the insulation film is removed by laser ablation in order to produce the window in the insulation film.
  • a wavelength of a laser used for this is between 0.1 ⁇ m and 11 ⁇ m.
  • the power of the laser is between 1 W and 100 W.
  • a C0 2 laser with a wavelength of 9.24 ⁇ m is used.
  • the windows are opened without damaging an aluminum chip contact that may be under the insulating film. This chip contact forms the contact surface of the component.
  • the size of the window is preferably more than 80%, but less than 99.9% of the size of the side and / or the area (chip area) of the component.
  • the size of the window is advantageously selected from the range of 80% to 95% of the size of the side and / or the area of the component.
  • a photosensitive insulation film is used and a photolithographic process is carried out to produce the window in the insulation film.
  • the photosensitive insulation film is a photo film.
  • the photolithographic process comprises exposing the photosensitive insulating film, developing the exposed and / or unexposed areas of the insulating film and removing the exposed or unexposed areas of the insulating film.
  • the cleaning step is carried out, for example, by wet chemistry.
  • a plasma cleaning process is also conceivable.
  • a line layer consisting of a plurality of partial layers of different, electrically conductive material arranged one above the other is used.
  • different metal layers are applied one above the other.
  • the number of partial layers or metal layers is in particular 2 to 5.
  • a sublayer functioning as a diffusion barrier can be integrated, for example, by the electrical conduction layer composed of several sublayers.
  • a partial layer consists, for example, of a titanium-tungsten alloy (TiW).
  • TiW titanium-tungsten alloy
  • a partial layer that promotes or improves adhesion is advantageously applied directly to the surface to be contacted.
  • Such a partial layer consists, for example, of titanium.
  • the described process with the individual process steps can be carried out once.
  • the steps of applying the insulating film, producing the window in the insulating film and / or producing the electrical contacting are carried out several times in order to produce a multilayer arrangement.
  • At least one interconnect of the arrangement can be provided.
  • the conductor track can be applied to the existing insulation film.
  • the insulating film is structured to produce the conductor track. This means that the conductor track is created in this insulation film.
  • the conductor track is used, for example, to make electrical contact with a semiconductor chip.
  • the structuring is usually carried out in a photolithographic process.
  • a photoresist can be applied to an electrically conductive layer, dried and then exposed and developed.
  • a tempering step may follow in order to stabilize the applied photoresist against subsequent treatment processes.
  • Conventional positive and negative resists (coating materials) can be used as photoresist.
  • the photo lacquer is applied, for example, by a spraying or dipping process. Electro-deposition (electrostatic or electrophoretic deposition) is also conceivable.
  • photosensitive foils can also be used, which are laminated on and exposed and developed in a manner comparable to the applied photoresist layer.
  • the following can be used to generate the conductor track:
  • a applied an electrically conductive layer and structured a photoresist layer thereon In a subsequent sub-step, a further metallization is applied to the conductor track generated.
  • the conductor track is reinforced by the further metallization.
  • copper is electrodeposited to a thickness of 1 ⁇ m to 400 ⁇ m on the conductor track produced by structuring.
  • the copper can also be deposited with greater thicknesses of up to 1 mm.
  • the galvanically deposited copper layer can also function as an efficient heat sink.
  • the photoresist layer or the laminated insulation film is detached. This can be done, for example, with an organic solvent, an alkaline developer or the like. Subsequent differential etching removes the flat, metallically conductive layer that is not reinforced with the metallization.
  • the reinforced conductor track is retained.
  • any contact surfaces of any electrical component can be contacted flatly with the contact lug.
  • the large-area, low-inductive electrical contacting of semiconductor chips and in particular of power semiconductor chips is possible.
  • the resulting flat electrical connection leads to a high current carrying capacity with reduced ohmic losses.
  • the use of a contact lug with coplanar line layers leads to low-inductance contacting of the component. Among other things, this leads to reduced EMC interference.
  • Figure 1 shows an arrangement according to the invention in cross section.
  • Figure 2 shows the arrangement of Figure 1 in supervision.
  • Figures 3A and 3B show a method of manufacturing the assembly.
  • FIGS 4 to 8 show different embodiments of the arrangement.
  • the arrangement has a substrate (circuit carrier) 1, an electrical component 2 arranged on the surface section 11 of the substrate 1 and an electrical contact lug 3 for making electrical contact with the component 2.
  • the substrate 1 consists of a ceramic material.
  • the component 2 is a conductor structure.
  • the electrical component 2 is a power semiconductor.
  • the electrical contact area 21 is formed on a chip contact area.
  • the electrical connection surface 32 of the contact lug 3 and the contact surface 21 of the component 2 are connected to one another in such a way that an area 33 of the contact lug 3 protruding at least beyond the contact surface 21 of the component 2 is present.
  • the arrangement is characterized in that the contact tab 3 has at least one electrically conductive film 31 and the electrically conductive film 31 has the electrical connection surface 32 of the contact tab 3.
  • a plurality of substrates 1 and 1 'with electrical components 2 and 2' are arranged on a common carrier, not shown.
  • the contact surfaces 21 and 21 'of the components 2 and 2' are connected to one another in an electrically conductive manner. Insulation 6 of the electrical components 2 and 2 'of the substrates 1 and 1' is provided between the substrates 1 and 1 '.
  • Insulation 6 consists for example of Teflon.
  • the insulation 6 also serves to avoid sticking in the course of the manufacturing process.
  • the procedure for establishing the intersubstrate connection is as follows: First, the substrates 1 and 1 'with the components 2 and 2' are arranged on the carrier (not shown) at a certain distance from one another. In the space specified by the distance, a Teflon plate is placed, which has a height that corresponds approximately to the height of the substrates 1 and 1 'with the components 2 and 2'. Furthermore, an insulation film 4 is laminated onto the components 2 and 2 '. In the next step, the contact surfaces 21 and 21 'of the components 2 and 2' are created by generating corresponding windows in the
  • the insulation 6 made of Teflon can be removed after the application of the electrically conductive material has ended.
  • the electrical contact tab 3 functions as a load connection to a bus structure (not shown) (FIG. 5).
  • the contact lug 3 has two coplanar line layers 31 and 31 '.
  • An insulation layer 35 is present between the line layers 31 and 31 '.
  • the line layers 31 and 31 'and the insulation layer 35, which form a layer composite 36, are dimensioned such that magnetic fields are generated by the electrical control of the line layers 31 and 31', which lead to a low inductance.
  • the insulation layer 35 is produced from an insulation film 34, which is used in the course of the manufacturing process of the flat contacts of the contact surface 21.
  • a conductor track 5 is applied to the insulation film 4.
  • the component 2 and the conductor track 5 are each electrically contacted with one of the conductor layers 31 and 31 '.
  • the insulation film 4 has a step 6 (FIG. 6).
  • a conductor structure 7 is arranged in a first step on a substrate 1 provided with an electrical component 2 such that the component 2 is electrically contacted via the conductor structure 7.
  • the conductor structure 7 is made of, for example Copper foil or a copper sheet.
  • An insulation film 4 is then laminated onto the component 2 and the conductor structure 7.
  • a conductor track 5 is applied to the laminated insulation film 4.
  • a line layer 31 is applied to the insulation film 4 in such a way that the electrical contact tab 3 is formed and the conductor track 5 is electrically contacted.
  • the insulation layer 35 of the layer composite 36 is formed from the insulation film 4.
  • An insulation film 4 is applied to the component 2. After the application, a window is created, the contact surface of the component 2 being exposed (FIG. 7).
  • electrically conductive material is applied to form the conductive layer 31.
  • another insulation film 4 ' is applied.
  • a further electrical conductor layer 31 ' is finally applied.
  • the result is an electrical contact tab 3 with coplanar conductor layers 31 and 31 '.
  • the insulation layers 35 and 35 ' result from the applied insulation foils 4 and 4'.
  • the contact lug 3 is angled (FIG. 8).
  • An angle that the contact tab 3 makes with respect to the contact surface of the component or the surface of the substrate can be any.
  • the layer composite 36 of the contact lug 3 is bent away from the substrate surface.
  • An angled contact lug is provided in further exemplary embodiments, not described in more detail, which are derived from the exemplary embodiments described above.

Landscapes

  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Geometry (AREA)
  • Wire Bonding (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

L'invention concerne un ensemble comprenant au moins un substrat (1), au moins un composant électrique (2) placé sur un segment de surface (11) du substrat et présentant une surface de contact électrique (21), ainsi qu'au moins une languette de contact électrique (3) présentant une surface de connexion électrique (32) pour la mise en contact électrique de la surface de contact du composant, la surface de connexion de la languette de contact et la surface de contact du composant étant reliées l'une à l'autre de sorte qu'une zone (33) de la languette de contact fait saillie au moins au-delà de la surface de contact du composant. L'ensemble selon l'invention est caractérisé en ce que la languette de contact présente au moins un film électroconducteur (7) et en ce que le film électroconducteur présente la surface de connexion électrique de la languette de contact. L'invention est notamment utilisée pour la mise en contact, sur une grande surface et à basse induction, de puces semi-conductrices de puissance, cette mise en contact permettant une densité de courant élevée.
EP04718634A 2003-03-28 2004-03-09 Ensemble constitue d'un composant electrique sur un substrat et son procede de production Withdrawn EP1609184A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10314172A DE10314172B4 (de) 2003-03-28 2003-03-28 Verfahren zum Betreiben einer Anordnung aus einem elektrischen Bauelement auf einem Substrat und Verfahren zum Herstellen der Anordnung
DE10314172 2003-03-28
PCT/EP2004/002424 WO2004086502A1 (fr) 2003-03-28 2004-03-09 Ensemble constitue d'un composant electrique sur un substrat et son procede de production

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EP1609184A1 true EP1609184A1 (fr) 2005-12-28

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US (1) US7807931B2 (fr)
EP (1) EP1609184A1 (fr)
JP (1) JP2006521686A (fr)
CN (1) CN1771600A (fr)
DE (1) DE10314172B4 (fr)
WO (1) WO2004086502A1 (fr)

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DE102004018471B4 (de) * 2004-04-16 2009-04-16 Infineon Technologies Ag Leistungshalbleiterschaltung und Verfahren zum Herstellen einer Leistungshalbleiterschaltung
DE102004057494A1 (de) 2004-11-29 2006-06-08 Siemens Ag Metallisierte Folie zur flächigen Kontaktierung
DE102004061936A1 (de) * 2004-12-22 2006-07-06 Siemens Ag Anordnung eines Halbleitermoduls und einer elektrischen Verschienung
DE102006014582B4 (de) 2006-03-29 2011-09-15 Infineon Technologies Ag Halbleitermodul
US7524775B2 (en) 2006-07-13 2009-04-28 Infineon Technologies Ag Method for producing a dielectric layer for an electronic component
DE102007009521B4 (de) 2007-02-27 2011-12-15 Infineon Technologies Ag Bauteil und Verfahren zu dessen Herstellung
US9059083B2 (en) * 2007-09-14 2015-06-16 Infineon Technologies Ag Semiconductor device
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DE102008017454B4 (de) * 2008-04-05 2010-02-04 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul mit hermetisch dichter Schaltungsanordnung und Herstellungsverfahren hierzu
DE102008028299B3 (de) 2008-06-13 2009-07-30 Epcos Ag Systemträger für elektronische Komponente und Verfahren für dessen Herstellung
US8124449B2 (en) * 2008-12-02 2012-02-28 Infineon Technologies Ag Device including a semiconductor chip and metal foils
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Also Published As

Publication number Publication date
US7807931B2 (en) 2010-10-05
CN1771600A (zh) 2006-05-10
DE10314172A1 (de) 2004-11-04
DE10314172B4 (de) 2006-11-30
US20070175656A1 (en) 2007-08-02
WO2004086502A1 (fr) 2004-10-07
JP2006521686A (ja) 2006-09-21

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