EP1530408A2 - Installation radiographique à microfoyer - Google Patents

Installation radiographique à microfoyer Download PDF

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Publication number
EP1530408A2
EP1530408A2 EP04009205A EP04009205A EP1530408A2 EP 1530408 A2 EP1530408 A2 EP 1530408A2 EP 04009205 A EP04009205 A EP 04009205A EP 04009205 A EP04009205 A EP 04009205A EP 1530408 A2 EP1530408 A2 EP 1530408A2
Authority
EP
European Patent Office
Prior art keywords
target
current
control
microfocus
target current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04009205A
Other languages
German (de)
English (en)
Other versions
EP1530408A3 (fr
Inventor
Alfred Reinhold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Comet GmbH
Original Assignee
Feinfocus Rontgen-Systeme GmbH
Comet GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Feinfocus Rontgen-Systeme GmbH, Comet GmbH filed Critical Feinfocus Rontgen-Systeme GmbH
Publication of EP1530408A2 publication Critical patent/EP1530408A2/fr
Publication of EP1530408A3 publication Critical patent/EP1530408A3/fr
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/26—Measuring, controlling or protecting
    • H05G1/30—Controlling
    • H05G1/46—Combined control of different quantities, e.g. exposure time as well as voltage or current
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/26—Measuring, controlling or protecting
    • H05G1/30—Controlling
    • H05G1/34—Anode current, heater current or heater voltage of X-ray tube

Definitions

  • the invention relates to a microfocus X-ray device mentioned in the preamble of claim 1 Art as well as a method of regulating the intensity of generated by a microfocus X-ray device X-ray radiation in the preamble of claim 24 mentioned type.
  • Microfocus X-ray devices are general known, for example by US 4,344,013, and For example, for testing printed circuit boards in the Electronics industry used. Corresponding microfocus X-ray devices are also represented by EP 0 815 582 B1 WO 96/29723 and DE 32 225 11 A1.
  • microfocus X-ray facilities of the relevant Art known to be a target and means of Have exposure of the target with a target stream.
  • the well-known microfocus X-ray devices also have means for controlling the intensity (dose rate) the generated X-rays.
  • These funds are in the known X-ray devices, for example formed by one of a filament outgoing emission current is regulated.
  • a disadvantage of the known microfocus X-ray devices is that the regulation achieved does not have sufficient reliability. This leads to to that, for example, when investigating a electronic components in the course of the investigation the image brightness changes. This limits in particular the possibilities of automatic image processing, the one constant or almost constant image brightness requires, to a considerable extent.
  • the invention is based on the object Microfocus X-ray device in the preamble of Specify claim 1 mentioned type, in which the reliability the scheme is increased.
  • the intensity of the X-radiation in that at least one parameter the target current, in particular the current of the target stream is controlled.
  • the intensity (dose rate) of the the X-ray tube produced X-rays with high Constancy and reliability controllable.
  • This is the X-ray device according to the invention, in particular in Areas where it is particularly useful a high consistency of the intensity of the generated X-radiation arrives.
  • the inventive X-ray device particularly good at the examination electronic components used in the Method of automatic image processing for use come that only with reasonable reliability are applicable when the intensity of the generated X-rays are sufficiently constant.
  • a particular advantage of the teaching according to the invention is that due to the regulation of the target current neither the thermal behavior of the X-ray tube and an associated high voltage generator one more Aging of components of the X-ray device the Intensity of the generated X-radiation in essential Influence dimensions. Also a change between different ones Operating modes of the X-ray device with different focal spot sizes leads at a Control of the target current is not essential Change in the intensity of the generated X-radiation.
  • any parameters of Target current can be controlled. Since it is the target stream usually a direct current act It is particularly useful to determine the amperage of the To regulate target current. Is that the case? at the target current, for example, a pulsed one Electricity, such as the pulse duration or the Duty cycle of the target current to be regulated. These the target current is an alternating current, for example, the amplitude and / or the Frequency of the target current to be regulated.
  • the one or the regulating parameters of the target current immediately capture, for example, when controlling the current the target current characterized in that the current of the target current is measured.
  • the parameter to be controlled of the target current indirectly. Will the current of the Controlled target current, so it is possible, for example, the current strength of the target current indirectly thereby to detect that backscattered from the target stream Electrons and thus an "image" of the current of the target current.
  • a development of the teaching of the invention provides that the target is electrically against a body the X-ray tube isolated on the body is arranged.
  • the Current of the target current with particularly high reliability measurable and as actual value for the control usable.
  • a current sensor for detection an actual value of the current intensity of the target current intended.
  • the detected by the current sensor actual value of the Target current can in this embodiment immediately used as actual value for the control of the target current become.
  • the scheme of the target stream it is also possible to be based on a different size, for example, one dependent on the target stream electrical size. In particular, it is possible to convert the measured target current into a voltage and to use this voltage as the actual value for the control.
  • the means for regulation the target stream on a control device is provided.
  • a development of the aforementioned embodiment provides that the control device detected one Actual value of the target current with a predetermined setpoint of the target current and a manipulated variable changed so that the difference between the setpoint and the actual value is minimized.
  • the scheme can also based electrical quantities are taken from the target stream are dependent.
  • the detected actual value of the target current are converted into a voltage, which then fed as an actual value of the control device that is given a predetermined voltage Setpoint one of a nominal value of the target current dependent voltage compares and the manipulated variable so changed that difference between the setpoint and the actual value is minimized.
  • the microfocus X-ray device a high voltage generator for generating a preferably substantially constant high voltage on, by for generating an emission current the X-ray tube electrons, preferably from a Cathode released electrons, towards the Target are accelerated.
  • the Manipulated variable is the emission current.
  • control device an electrical or electronic circuit comprising a Regulator forms.
  • the Controller implemented by hardware.
  • the Control device also realized by software be.
  • the control device having an electronic circuit, by a Control software is controllable, such that the scheme software controlled.
  • a special advantage this embodiment is that the control of the target current by changing the software simple way is changeable.
  • the electronic Circuit has a microcontroller or the like.
  • Such microcontrollers are considered simple and inexpensive standard components available.
  • the regulation of the target current during operation of the X-ray device is always turned on be.
  • the teaching according to the invention provides that the control of the target current on and off is.
  • the regulation of the target stream can be switched off, for example if stable control of the target current is not possible, for example because of momentary Operating parameters of the X-ray device to a Prevent malfunction of the scheme.
  • a development of the aforementioned embodiment provides that when the regulation of the Targetstromes another regulator the emission current the X-ray tube regulates. In this embodiment is switched off after the regulation of the Target current of the emission current of the X-ray tube regulated. Albeit by regulating the emission current not with sufficient accuracy a regulation of Intensity of the generated X-radiation is possible this is nevertheless due to the regulation of the emission current ensured that fluctuations in intensity to keep to a certain extent.
  • Teaching provides that when switching on the scheme the target stream currently flowing target stream the Setpoint of the target current forms. This embodiment allows it when switching on the scheme present intensity of the X-radiation and thus to keep the present image brightness constant.
  • Another embodiment of the embodiment with the regulation of the emission current provides that a when switching off the control of the target current momentarily flowing emission current setpoint for the Control of the emission current through the further control device forms. In this embodiment changes when switching off the control of the target current the image brightness is not.
  • control device controls the target current so that exceeding a predetermined or predefinable maximum electrical Performance of the target is prevented.
  • a damage to the target through an electrical overload for example, by overshoot at power up could occur reliably avoided.
  • Another advantageous embodiment of the invention Teaching provides that switching on the Control of the target current after switching on the Microfocus X-ray tube is delayed in time. On this way it is ensured that the scheme of Target current is activated only when a stable Operation of the scheme is possible.
  • a development of the aforementioned embodiment provides that the switching takes place when the Emission current a predetermined or predetermined Setpoint reached. In this embodiment, it is ensured that the scheme is not about one Time is activated, to which no emission current flows.
  • a development of the aforementioned provides Embodiment, that at a reduction the high voltage the control parameters are changed so that the inertia of the scheme is increased, and that when increasing the high voltage, the control parameters be changed so that the inertia of the control decreases is.
  • the inertia the scheme to the terms of high voltage adapted in the x-ray tube prevailing conditions.
  • the x-ray tube may have means by which the emission current so distractable or can be blocked, that an impact of the emission current is substantially prevented on the target.
  • a development of the aforementioned embodiment provides that upon activation of the funds, by the emission current is deflectable or blockable, switching off the control of the target current takes place. In this way, malfunctions of the control are reliable avoided.
  • Teaching means which determine whether there is a short circuit at the target, wherein the Means upon detection of a short circuit the regulation Turn off the target current. That way is prevents the target in case of a short circuit, in which the target stream is wholly or partially derived is destroyed by too high a target current becomes.
  • An inventive method for controlling the Intensity of the generated by an X-ray device X-radiation is specified in claim 24.
  • the X-ray device has a X-ray tube 4, which has a target 6, the on a base body 8 of the X-ray tube 4 is arranged. From the drawing is not apparent and therefore is explained here that the target 6 electrically isolated against the main body 8 of the x-ray tube 4 at the Basic body 8 is arranged.
  • the insulation can, for example made of ceramic or the like.
  • the X-ray device 2 further comprises means for Exposure of the target 6 to a target current, which have a filament 10 connected as a cathode.
  • the means for applying the target 6 with a target current further comprises a high voltage generator 12 for generating a variable, after a change, however, essentially constant High voltage, by means of which in one inside the Main body 4 prevailing vacuum from the filament 10th released electrons towards the target 6 be accelerated, with the impact of the electrons on the target 6 in the expert generally known Way X-ray radiation arises.
  • Electrons form an emission stream 14, the is focused by means of a coil 16.
  • a Aperture 18 is arranged, which serves the diameter of the electron beam to reduce such the x-ray tube has a focal spot with a diameter of ⁇ 200 ⁇ m, in particular ⁇ 10 ⁇ m, so that the X-ray tube 4 is formed as a microfocus X-ray tube is.
  • the X-ray device 2 further comprises means for Regulation of the intensity (dose rate) of the generated X-radiation, in the drawing by the reference numeral 20 is symbolized on, wherein the means according to the invention Means for regulating the amperage of the Have target current.
  • the means according to the invention Means for regulating the amperage of the Have target current.
  • Embodiment is the parameter to be controlled of the target current, the current of the target current.
  • the means for controlling the target stream have in this embodiment, a control device 22, which in this embodiment a Microcontroller has, by a control software is controllable, such that the regulation of the current the target stream is software controlled.
  • the X-ray device 2 also has a sensor 24, which senses the target current at the target 6 and a measuring amplifier 26 supplies.
  • the measuring amplifier 26 amplifies the measured target current, the output signal the measuring amplifier is an actual value of the current of the target current forms an input 28th the control device 22 is supplied.
  • the control device 22 also has another input 30 fed to a target value of the current of the target current, wherein the controller 22 detected the Actual value of the target current with the target value of the target current compares and changes a manipulated variable in such a way that the difference between the setpoint and the Actual value is minimized.
  • the emission current forms the manipulated variable the regulation.
  • the emission current generated by that from the filament 10th Electrons leak through the from the high voltage generator 12 generated high voltage in the direction of the target will be accelerated.
  • a grid or the like is arranged on the one also from the high voltage generator 12th generated voltage can be applied.
  • the emission current is variable, wherein the emission current increases as the reduced voltage applied to the grid and at Reduction of the voltage applied to the grid increases.
  • To influence the manipulated variable is an output 32 of the control device 22 with a control input 34th connected to the high voltage generator 12, wherein the at the grid applied voltage and thus the emission current is variable via the control input 34.
  • the Filament 10 When operating the X-ray device 2 is the Filament 10 is heated so that in a vacuum electrons exit the filament 10. About the high voltage generator is between the anode 6 connected as the target and the filament 10 connected as a cathode High voltage generated due to which from the filament 10 escaping electrons towards the Target 6 are accelerated and an emission current the X-ray tube 4 form.
  • the emission current 14 is focused on the coil 16 and the diaphragm 18, wherein a portion of the emission stream reaching the target 14 forms the target stream.
  • the controller 22 compares the detected actual value with a at the entrance 30 applied setpoint and minimizes the difference between the predetermined or predefinable setpoint and the detected actual value.
  • the target current is regulated and held constant with high accuracy, so that the Intensity (dose rate) to the generated X-radiation is kept constant.
  • the brightness remains one by means of X-ray radiation for examination an electronic component generated image constant, so that an evaluation of the image by means of automatic image processing allows or is considerably simplified.
  • the controller 22 is in this embodiment designed so that the regulation of Target current is switched on and off.
  • the emission current is measured and the regulation then turned on when the emission current is a predetermined or has reached a predefinable setpoint.
  • the control input 30 of the control device 22 is supplied becomes.
  • control device when turned off Control of the target current by another, in the drawing, not shown control device regulated the emission current of the X-ray tube, wherein when switching off the control of the target current currently flowing emission current a setpoint for the regulation of the emission current through the further Dictates control device. This is a change the image brightness when turning off the Control of the target current avoided.
  • control parameters of the control device 22 depending on the voltage from the high voltage generator 12 generated high voltage changeable, in such a way that at a reduction of the high voltage, the control parameters be changed so that the inertia of the Regulation is increased, and that with an increase in the High voltage the control parameters are changed so that the inertia of the control is reduced.
  • the X-ray tube 4 means has, by which the emission current so distractable or is blockable, that an impact of the emission current is substantially prevented on the target.
  • this also known as shutter Means is the control of the target current in the embodiment switched off.
  • the control device in the embodiment 22 regulates the control device in the embodiment 22 the target current so that an exceeding a predetermined or predetermined maximum electrical Performance of the target is prevented. Furthermore, will determined by means not shown in the drawing, whether there is a short circuit at the target 6, these means upon detection of a short circuit turn off the control of a target current. To this Way is in the embodiment damage or destroying the target by overloading reliably avoided.
  • the X-ray device 2 allows in a simple and reliable way a scheme the intensity (dose rate) of the generated X-radiation.

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  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • X-Ray Techniques (AREA)
EP04009205A 2003-11-06 2004-04-19 Installation radiographique à microfoyer Withdrawn EP1530408A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10352334 2003-11-06
DE10352334A DE10352334B4 (de) 2003-11-06 2003-11-06 Verfahren zur Regelung einer Mikrofokus-Röntgeneinrichtung

Publications (2)

Publication Number Publication Date
EP1530408A2 true EP1530408A2 (fr) 2005-05-11
EP1530408A3 EP1530408A3 (fr) 2007-08-01

Family

ID=34428638

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04009205A Withdrawn EP1530408A3 (fr) 2003-11-06 2004-04-19 Installation radiographique à microfoyer

Country Status (5)

Country Link
US (1) US20050100133A1 (fr)
EP (1) EP1530408A3 (fr)
JP (1) JP2005142140A (fr)
CN (1) CN100417307C (fr)
DE (1) DE10352334B4 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2151262A1 (fr) * 2008-08-06 2010-02-10 Mitsubishi Heavy Industries, Ltd. Appareil de radiothérapie et procédé d'irradiation
CN103808353A (zh) * 2012-11-08 2014-05-21 克洛纳测量技术有限公司 用于确定测量变量的测量组件
EP2747049A3 (fr) * 2012-12-20 2015-10-28 Krohne Messtechnik GmbH Système de mesure pour la détermination d'une grandeur de mesure et procédé de génération d'un signal de sortie

Families Citing this family (10)

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DE102006062452B4 (de) 2006-12-28 2008-11-06 Comet Gmbh Röntgenröhre und Verfahren zur Prüfung eines Targets einer Röntgenröhre
JP5135601B2 (ja) * 2007-01-30 2013-02-06 エスアイアイ・ナノテクノロジー株式会社 Ｘ線管及びｘ線分析装置
US8571175B2 (en) * 2009-11-30 2013-10-29 The Boeing Company System and method for determining ionization susceptibility using x-rays
US9405021B2 (en) * 2013-06-03 2016-08-02 Unfors Raysafe Ab Detector for detecting x-ray radiation parameters
DE102014015974B4 (de) * 2014-10-31 2021-11-11 Baker Hughes Digital Solutions Gmbh Anschlusskabel zur Verminderung von überschlagsbedingten transienten elektrischen Signalen zwischen der Beschleunigungsstrecke einer Röntgenröhre sowie einer Hochspannungsquelle
EP3413691A1 (fr) 2017-06-08 2018-12-12 Koninklijke Philips N.V. Appareil pour produire des rayons x
DE102018201247A1 (de) 2018-01-26 2019-08-01 Carl Zeiss Industrielle Messtechnik Gmbh Objektdurchstrahlungsvorrichtung und Verfahren zum Ermitteln eines Zustandes einer Objektdurchstrahlungsvorrichtung
US11315751B2 (en) * 2019-04-25 2022-04-26 The Boeing Company Electromagnetic X-ray control
US11769647B2 (en) * 2021-11-01 2023-09-26 Carl Zeiss X-ray Microscopy, Inc. Fluid cooled reflective x-ray source
GB2619108A (en) * 2022-11-22 2023-11-29 3Dx Ray Ltd A method, apparatus, system and computer program for generating a radiographic X-ray beam

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US4322797A (en) * 1978-04-19 1982-03-30 U.S. Philips Corporation X-ray tube filament current predicting circuit
WO1992004620A2 (fr) * 1990-08-30 1992-03-19 Four Pi Systems Corporation Procede et appareil destines a l'inspection a haute resolution de composants electroniques
WO2003019995A1 (fr) * 2001-08-29 2003-03-06 Kabushiki Kaisha Toshiba Dispositif de production de rayons x

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US5020086A (en) * 1983-07-05 1991-05-28 Ridge, Inc. Microfocus X-ray system
DE19509516C1 (de) * 1995-03-20 1996-09-26 Medixtec Gmbh Medizinische Ger Mikrofokus-Röntgeneinrichtung
JP2001319608A (ja) * 2000-05-10 2001-11-16 Shimadzu Corp マイクロフォーカスｘ線発生装置
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WO2004079752A2 (fr) * 2003-03-04 2004-09-16 Inpho, Inc. Systemes et procedes pour la commande d'une source de rayons x

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Publication number Priority date Publication date Assignee Title
DE322515C (de) * 1919-10-26 1920-07-01 Chemische Werke Waren Loch & C Schweissstab zum autogenen Schweissen von Metallen
US4322797A (en) * 1978-04-19 1982-03-30 U.S. Philips Corporation X-ray tube filament current predicting circuit
WO1992004620A2 (fr) * 1990-08-30 1992-03-19 Four Pi Systems Corporation Procede et appareil destines a l'inspection a haute resolution de composants electroniques
WO2003019995A1 (fr) * 2001-08-29 2003-03-06 Kabushiki Kaisha Toshiba Dispositif de production de rayons x

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2151262A1 (fr) * 2008-08-06 2010-02-10 Mitsubishi Heavy Industries, Ltd. Appareil de radiothérapie et procédé d'irradiation
US7881431B2 (en) 2008-08-06 2011-02-01 Mitsubishi Heavy Industries, Ltd. Radiotherapy apparatus and radiation irradiating method
CN101642605B (zh) * 2008-08-06 2013-03-06 三菱重工业株式会社 放射治疗设备和放射线照射方法
CN103808353A (zh) * 2012-11-08 2014-05-21 克洛纳测量技术有限公司 用于确定测量变量的测量组件
CN103808353B (zh) * 2012-11-08 2017-09-15 克洛纳测量技术有限公司 用于确定测量变量的测量组件
EP2747049A3 (fr) * 2012-12-20 2015-10-28 Krohne Messtechnik GmbH Système de mesure pour la détermination d'une grandeur de mesure et procédé de génération d'un signal de sortie

Also Published As

Publication number Publication date
EP1530408A3 (fr) 2007-08-01
CN1617650A (zh) 2005-05-18
JP2005142140A (ja) 2005-06-02
US20050100133A1 (en) 2005-05-12
CN100417307C (zh) 2008-09-03
DE10352334A1 (de) 2005-06-23
DE10352334B4 (de) 2010-07-29

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