EP1520063A1 - Bain pour depot electrolytique d'or - Google Patents
Bain pour depot electrolytique d'orInfo
- Publication number
- EP1520063A1 EP1520063A1 EP03729763A EP03729763A EP1520063A1 EP 1520063 A1 EP1520063 A1 EP 1520063A1 EP 03729763 A EP03729763 A EP 03729763A EP 03729763 A EP03729763 A EP 03729763A EP 1520063 A1 EP1520063 A1 EP 1520063A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- gold
- bath
- bismuth
- sulfite
- soluble
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/48—Electroplating: Baths therefor from solutions of gold
Definitions
- the present invention relates to the field of baths for electrolytic deposits. It relates, more particularly, to a sulphite gold bath of the type used to deposit layers of gold that are both ductile and thick, that is to say typically more than 200 ⁇ m. These deposits are particularly well suited, in particular, to the production of conductive protuberances, known under the name of "bumps", used to connect electronic chips.
- gold has been present in electrolytic baths in the form of cyanide complexes, such as (Au (CN) 2 ) " .
- cyanide complexes such as (Au (CN) 2 ) " .
- Toxicity being a very relative concept, we will define as toxic a harmful substance in the quantities used for the intended application and as non-toxic a substance not presenting no harmfulness for this application.
- metal layer be particularly ductile, regular, with fine grains and having a very low hardness.
- the sulphite gold baths currently known provide deposits that are too hard, which requires additional heat treatment to soften them.
- they use toxic grain refiners, containing arsenic or thallium.
- the solutions obtained are aggressive and attack the substrates, especially when it comes to photoresists.
- the main object of the present invention is to provide a sulphite gold bath free of toxic compounds and making it possible to deposit particularly tender, without having to use a subsequent heat treatment.
- the pH of the bath obtained is neutral and the solution does not attack the photoresists commonly used.
- the bath according to the invention is of the type comprising, in solution in water, gold sulfite, a grain refiner chosen from soluble compounds of bismuth, tin, tellurium and selenium, a complexing agent and a conductive salt.
- This bath is characterized in that it further comprises amidosulfonic acid.
- the bath for electrolytic deposition of gold according to the invention comprises:
- a phosphonic acid derivative for example, the product known as Dequest 2010, used as complexing agent, - from 20 to 100 g / L of ammonium sulfite, used as conductive salt for plating, and
- the bath comprises: - 10 g / L of gold, in the form of gold sulfite,
- the bath obtained uses neither toxic gold salt, nor toxic grain refiner.
- it makes it possible to obtain tender deposits, typically having a hardness of between 50 and 70 Vickers, without the need for any heat treatment.
- the solution obtained does not attack the substrates on which bumps are commonly deposited and its pH is typically between 6.7 and 7.5.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03729763A EP1520063B1 (fr) | 2002-07-04 | 2003-06-20 | Bain pour depot electrolytique d'or |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02405558A EP1378590A1 (fr) | 2002-07-04 | 2002-07-04 | Bain pour dépôts electrolytiques d'or |
EP02405558 | 2002-07-04 | ||
EP03729763A EP1520063B1 (fr) | 2002-07-04 | 2003-06-20 | Bain pour depot electrolytique d'or |
PCT/CH2003/000400 WO2004005589A1 (fr) | 2002-07-04 | 2003-06-20 | Bain pour depôt electrolytique d’or |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1520063A1 true EP1520063A1 (fr) | 2005-04-06 |
EP1520063B1 EP1520063B1 (fr) | 2005-10-26 |
Family
ID=29719808
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02405558A Withdrawn EP1378590A1 (fr) | 2002-07-04 | 2002-07-04 | Bain pour dépôts electrolytiques d'or |
EP03729763A Expired - Lifetime EP1520063B1 (fr) | 2002-07-04 | 2003-06-20 | Bain pour depot electrolytique d'or |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02405558A Withdrawn EP1378590A1 (fr) | 2002-07-04 | 2002-07-04 | Bain pour dépôts electrolytiques d'or |
Country Status (6)
Country | Link |
---|---|
EP (2) | EP1378590A1 (fr) |
AT (1) | ATE307918T1 (fr) |
AU (1) | AU2003240347A1 (fr) |
DE (1) | DE60302074T2 (fr) |
ES (1) | ES2252673T3 (fr) |
WO (1) | WO2004005589A1 (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005036133C5 (de) | 2005-07-26 | 2017-07-13 | Ivoclar Vivadent Ag | Bad für die galvanische Abscheidung von Gold und Goldlegierungen und Zusatzgemisch für ein solches Bad |
KR101464343B1 (ko) * | 2013-04-02 | 2014-11-28 | 한밭대학교 산학협력단 | 범프 형성용 비시안계 금 도금욕 및 범프의 형성방법 |
CN103741181B (zh) * | 2014-01-10 | 2016-01-27 | 哈尔滨工业大学 | 一种多配位剂无氰电镀金镀液及电镀金工艺 |
CN103741180B (zh) * | 2014-01-10 | 2015-11-25 | 哈尔滨工业大学 | 无氰光亮电镀金添加剂及其应用 |
CN107299366A (zh) * | 2017-08-24 | 2017-10-27 | 重庆立道表面技术有限公司 | 无氰镀铜电镀液 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE754151A (fr) * | 1969-08-08 | 1970-12-31 | Sel Rex Corp | Bain aqueux pour le placage electrolytique d'or ou d'alliage d'or sur un article conducteur, procede de fabrication dudit bain aqueux et utilisation de celui-ci |
CH530473A (fr) * | 1969-08-19 | 1972-11-15 | Sel Rex Corp | Procédé pour le dépôt électrolytique d'or brillant et bain électrolytique pour la mise en oeuvre de ce proédé |
DD245787A3 (de) * | 1984-10-25 | 1987-05-20 | Mikroelektronik Friedrich Enge | Bad fuer die hochgeschwindigkeitsabscheidung von gold |
US4795534A (en) * | 1986-09-25 | 1989-01-03 | Vanguard Research Associates, Inc. | Electrolyte solution and process for gold electroplating |
DE3805627A1 (de) * | 1988-02-24 | 1989-09-07 | Wieland Edelmetalle | Goldbad |
DE3905705A1 (de) * | 1989-02-24 | 1990-08-30 | Degussa | Bad zur galvanischen abscheidung von feingoldueberzuegen |
DE4226167C2 (de) * | 1992-08-07 | 1996-10-24 | Sel Alcatel Ag | Verfahren zum elektrisch leitenden Verbinden unter Anwendung der Flipchip-Technik |
DE4425110C1 (de) * | 1994-07-15 | 1995-10-26 | Heraeus Gmbh W C | Wäßriges Bad für die galvanische Abscheidung von Palladiumüberzügen, Verfahren der galvanischen Abscheidung sowie Verwendung des Bades |
JP4183240B2 (ja) * | 2001-02-28 | 2008-11-19 | ヴィーラント デンタル ウント テクニーク ゲーエムベーハー ウント コー カーゲー | 金および金合金の電着浴とその用法 |
-
2002
- 2002-07-04 EP EP02405558A patent/EP1378590A1/fr not_active Withdrawn
-
2003
- 2003-06-20 AT AT03729763T patent/ATE307918T1/de not_active IP Right Cessation
- 2003-06-20 EP EP03729763A patent/EP1520063B1/fr not_active Expired - Lifetime
- 2003-06-20 AU AU2003240347A patent/AU2003240347A1/en not_active Abandoned
- 2003-06-20 WO PCT/CH2003/000400 patent/WO2004005589A1/fr not_active Application Discontinuation
- 2003-06-20 ES ES03729763T patent/ES2252673T3/es not_active Expired - Lifetime
- 2003-06-20 DE DE60302074T patent/DE60302074T2/de not_active Expired - Fee Related
Non-Patent Citations (1)
Title |
---|
See references of WO2004005589A1 * |
Also Published As
Publication number | Publication date |
---|---|
DE60302074T2 (de) | 2006-07-13 |
AU2003240347A1 (en) | 2004-01-23 |
WO2004005589A1 (fr) | 2004-01-15 |
ATE307918T1 (de) | 2005-11-15 |
DE60302074D1 (de) | 2005-12-01 |
ES2252673T3 (es) | 2006-05-16 |
EP1520063B1 (fr) | 2005-10-26 |
EP1378590A1 (fr) | 2004-01-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI391523B (zh) | 無電解鍍金浴、無電解鍍金方法及電子零件 | |
FR2699556A1 (fr) | Bains pour former un dépôt électrolytique de cuivre et procédé de dépôt électrolytique utilisant ce bain. | |
EP0193848B1 (fr) | Bain galvanique pour le dépôt électrolytique d'alliages d'or | |
EP1423557B1 (fr) | Bain electrolytique pour le depot electrochimique de l'or et de ses alliages | |
EP1520063B1 (fr) | Bain pour depot electrolytique d'or | |
EP1272691B1 (fr) | Bain electrolytique destine au depot electrochimique du palladium ou de ses alliages | |
EP0077582A1 (fr) | Solution pour l'enlèvement d'étain ou d'alliage étain-plomb d'un substrat, moyennant une opération à jet, et procédé pour son emploi | |
EP1268347B1 (fr) | Sel complexe de palladium et son utilisation pour ajuster la concentration en palladium d'un bain electrolytique destine au depot du palladium ou d'un de ses alliages | |
FR2552781A1 (fr) | Composition contenant du thallium pour detacher les depots d'or, de palladium et d'alliages palladium/nickel et procede l'utilisant | |
EP0088465B1 (fr) | Mélange stabilisant pour un bain de cuivrage chimique | |
CH418085A (fr) | Electrolyte pour le dépôt galvanique d'alliages d'or | |
FR2512845A1 (fr) | Procede pour accroitre la resistance a la corrosion d'un alliage palladium-nickel depose par electrolyse | |
EP0149830B1 (fr) | Bain électrolytique pour le dépôt de couches minces d'or pur | |
FR2617667A1 (fr) | Procede de fabrication d'une plaquette a circuit imprime et cette plaquette | |
JPS5920471A (ja) | 剥離剤 | |
FR2500012A1 (fr) | Bain de revetement electrolytique d'or et procede de depot | |
JPH09287082A (ja) | 銅又は銅合金の変色防止液並びに変色防止方法 | |
CH511288A (fr) | Solution électrolytique et utilisation de celle-ci | |
BE569991A (fr) | ||
CH710185B1 (fr) | Préparation pour bain galvanique d'alliage d'or et bain galvanique. | |
EP2505691A1 (fr) | Procédé d'obtention d'un dépôt d'alliage d'or 18 carats 3N | |
FR2558853A1 (fr) | Bain exempt de citrate pour deposer, par electrolyse, des alliages d'or et son procede d'utilisation | |
BE853192Q (fr) | Procede et solution pour depot electrolytique de chrome et d'alliages de chrome | |
CH704795A2 (fr) | Procédé d'obtention d'un dépôt d'alliage d'or 18 carats 3N. | |
CH629260A5 (en) | Process for gold-silver electrolytic deposition, bath for its use and alloy thus obtained |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20041224 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL LT LV MK |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
DAX | Request for extension of the european patent (deleted) | ||
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20051026 Ref country code: CZ Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20051026 Ref country code: RO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20051026 Ref country code: AT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20051026 Ref country code: SI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20051026 Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20051026 Ref country code: NL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20051026 |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D Free format text: NOT ENGLISH |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: FG4D Free format text: LANGUAGE OF EP DOCUMENT: FRENCH |
|
REF | Corresponds to: |
Ref document number: 60302074 Country of ref document: DE Date of ref document: 20051201 Kind code of ref document: P |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BG Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20060126 Ref country code: DK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20060126 Ref country code: GR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20060126 Ref country code: SE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20060126 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: NV Representative=s name: GLN GRESSET & LAESSER NEUCHATEL CABINET DE CONSEIL |
|
GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) |
Effective date: 20060130 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: PT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20060327 |
|
NLV1 | Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act | ||
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: HU Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20060427 |
|
REG | Reference to a national code |
Ref country code: ES Ref legal event code: FG2A Ref document number: 2252673 Country of ref document: ES Kind code of ref document: T3 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: ES Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20060621 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20060630 Ref country code: MC Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20060630 |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed |
Effective date: 20060727 |
|
REG | Reference to a national code |
Ref country code: ES Ref legal event code: FD2A Effective date: 20060621 |
|
BERE | Be: lapsed |
Owner name: METALOR TECHNOLOGIES INTERNATIONAL S.A. Effective date: 20060630 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: EE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20051026 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20060620 Ref country code: TR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20051026 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CH Payment date: 20080630 Year of fee payment: 6 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: IT Payment date: 20080625 Year of fee payment: 6 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20080731 Year of fee payment: 6 Ref country code: IE Payment date: 20080627 Year of fee payment: 6 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CY Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20051026 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20080617 Year of fee payment: 6 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20080627 Year of fee payment: 6 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20090620 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20100226 |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: MM4A |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20090630 Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20090630 Ref country code: IE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20090622 Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20090630 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20090620 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100101 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20090620 |