EP1513598A1 - Kühlfalle mit schneller regenierung - Google Patents

Kühlfalle mit schneller regenierung

Info

Publication number
EP1513598A1
EP1513598A1 EP03756032A EP03756032A EP1513598A1 EP 1513598 A1 EP1513598 A1 EP 1513598A1 EP 03756032 A EP03756032 A EP 03756032A EP 03756032 A EP03756032 A EP 03756032A EP 1513598 A1 EP1513598 A1 EP 1513598A1
Authority
EP
European Patent Office
Prior art keywords
plate
cold
cryogenic trap
contact surface
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03756032A
Other languages
English (en)
French (fr)
Inventor
Jean-Pierre Desbiolles
Gloria Sogan
Sébastien Munari
Emmanuelle Veran
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP1513598A1 publication Critical patent/EP1513598A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
EP03756032A 2002-05-30 2003-05-30 Kühlfalle mit schneller regenierung Withdrawn EP1513598A1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0206642A FR2840232B1 (fr) 2002-05-30 2002-05-30 Piege cryogenique a regeneration rapide
FR0206642 2002-05-30
PCT/FR2003/001637 WO2003101576A1 (fr) 2002-05-30 2003-05-30 Piege cryogenique a regeneration rapide

Publications (1)

Publication Number Publication Date
EP1513598A1 true EP1513598A1 (de) 2005-03-16

Family

ID=29558846

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03756032A Withdrawn EP1513598A1 (de) 2002-05-30 2003-05-30 Kühlfalle mit schneller regenierung

Country Status (5)

Country Link
US (1) US7370482B2 (de)
EP (1) EP1513598A1 (de)
JP (1) JP2005527366A (de)
FR (1) FR2840232B1 (de)
WO (1) WO2003101576A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050148199A1 (en) * 2003-12-31 2005-07-07 Frank Jansen Apparatus for atomic layer deposition
JP5028142B2 (ja) * 2007-05-17 2012-09-19 キヤノンアネルバ株式会社 クライオトラップ
DE102011085154A1 (de) 2011-10-25 2013-04-25 Evonik Industries Ag Vorrichtung zur Vermeidung von Ablagerungen an optischen Komponenten im Laser-Sintern
JP6562503B2 (ja) * 2015-07-13 2019-08-21 アルバック・クライオ株式会社 クライオトラップ
CN109806612B (zh) * 2019-03-18 2021-05-25 杭州阿卡米低温科技有限责任公司 一种基于运动部件的机械式低温冷阱

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3721101A (en) * 1971-01-28 1973-03-20 Cryogenic Technology Inc Method and apparatus for cooling a load
US4356701A (en) * 1981-05-22 1982-11-02 Helix Technology Corporation Cryopump
DE3680335D1 (de) * 1986-06-23 1991-08-22 Leybold Ag Kryopumpe und verfahren zum betrieb dieser kryopumpe.
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
US4724677A (en) * 1986-10-09 1988-02-16 Foster Christopher A Continuous cryopump with a device for regenerating the cryosurface
US5305612A (en) * 1992-07-06 1994-04-26 Ebara Technologies Incorporated Cryopump method and apparatus
JP3544604B2 (ja) * 1996-12-16 2004-07-21 株式会社荏原製作所 切替式トラップ装置
JP3884108B2 (ja) * 1996-09-04 2007-02-21 株式会社大阪真空機器製作所 急速再生クライオポンプ
US5819545A (en) * 1997-08-28 1998-10-13 Helix Technology Corporation Cryopump with selective condensation and defrost
US6116032A (en) * 1999-01-12 2000-09-12 Applied Materials, Inc. Method for reducing particulate generation from regeneration of cryogenic vacuum pumps
US6327863B1 (en) * 2000-05-05 2001-12-11 Helix Technology Corporation Cryopump with gate valve control

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO03101576A1 *

Also Published As

Publication number Publication date
US20050235656A1 (en) 2005-10-27
US7370482B2 (en) 2008-05-13
FR2840232B1 (fr) 2004-08-27
WO2003101576A1 (fr) 2003-12-11
FR2840232A1 (fr) 2003-12-05
JP2005527366A (ja) 2005-09-15

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20041230

AK Designated contracting states

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Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

RIN1 Information on inventor provided before grant (corrected)

Inventor name: VERAN, EMMANUELLE

Inventor name: MUNARI, SEBASTIEN

Inventor name: SOGAN, GLORIA

Inventor name: DESBIOLLES, JEAN-PIERRE

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ALCATEL LUCENT

17Q First examination report despatched

Effective date: 20090610

STAA Information on the status of an ep patent application or granted ep patent

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18D Application deemed to be withdrawn

Effective date: 20091021