EP1386347A4 - Einrichtung für ein mikroelektromechanischen (mens)-systems - Google Patents

Einrichtung für ein mikroelektromechanischen (mens)-systems

Info

Publication number
EP1386347A4
EP1386347A4 EP02724965A EP02724965A EP1386347A4 EP 1386347 A4 EP1386347 A4 EP 1386347A4 EP 02724965 A EP02724965 A EP 02724965A EP 02724965 A EP02724965 A EP 02724965A EP 1386347 A4 EP1386347 A4 EP 1386347A4
Authority
EP
European Patent Office
Prior art keywords
mems
substrate
sensor
transverse
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02724965A
Other languages
English (en)
French (fr)
Other versions
EP1386347A2 (de
Inventor
Jeffrey R Annis
Ernst H Dummermuth
Richard D Harris
Patrick C Herbert
Michael J Knieser
Robert J Kretschmann
Henric Larsson
Winfred L Morris
Jun J Yao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rockwell Automation Technologies Inc
Original Assignee
Rockwell Automation Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/788,928 external-priority patent/US6583374B2/en
Priority claimed from US09/805,410 external-priority patent/US6617750B2/en
Priority claimed from US09/804,817 external-priority patent/US6798312B1/en
Priority claimed from US10/001,412 external-priority patent/US6803755B2/en
Application filed by Rockwell Automation Technologies Inc filed Critical Rockwell Automation Technologies Inc
Publication of EP1386347A2 publication Critical patent/EP1386347A2/de
Publication of EP1386347A4 publication Critical patent/EP1386347A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/04—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
    • H01G5/14—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to longitudinal movement of electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
EP02724965A 2001-02-20 2002-02-20 Einrichtung für ein mikroelektromechanischen (mens)-systems Withdrawn EP1386347A4 (de)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US804817 1985-12-04
US1412 1993-12-08
US788928 2001-02-20
US09/788,928 US6583374B2 (en) 2001-02-20 2001-02-20 Microelectromechanical system (MEMS) digital electrical isolator
US09/805,410 US6617750B2 (en) 1999-09-21 2001-03-13 Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise
US805410 2001-03-13
US09/804,817 US6798312B1 (en) 1999-09-21 2001-03-13 Microelectromechanical system (MEMS) analog electrical isolator
US10/001,412 US6803755B2 (en) 1999-09-21 2001-10-25 Microelectromechanical system (MEMS) with improved beam suspension
PCT/US2002/004824 WO2002067293A2 (en) 2001-02-20 2002-02-20 Microelectromechanical systems (mems) device including an analog or a digital

Publications (2)

Publication Number Publication Date
EP1386347A2 EP1386347A2 (de) 2004-02-04
EP1386347A4 true EP1386347A4 (de) 2005-05-25

Family

ID=27485089

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02724965A Withdrawn EP1386347A4 (de) 2001-02-20 2002-02-20 Einrichtung für ein mikroelektromechanischen (mens)-systems

Country Status (4)

Country Link
EP (1) EP1386347A4 (de)
JP (1) JP4464607B2 (de)
AU (1) AU2002255563A1 (de)
WO (1) WO2002067293A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6690178B2 (en) * 2001-10-26 2004-02-10 Rockwell Automation Technologies, Inc. On-board microelectromechanical system (MEMS) sensing device for power semiconductors
JP4643192B2 (ja) * 2004-07-16 2011-03-02 アオイ電子株式会社 グリッパ
US7205867B2 (en) * 2005-05-19 2007-04-17 Robert Bosch Gmbh Microelectromechanical resonator structure, and method of designing, operating and using same
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5739686A (en) * 1996-04-30 1998-04-14 Naughton; Michael J. Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
DE10011830A1 (de) * 1999-03-12 2000-09-14 Denso Corp Winkelgeschwindigkeitssensor mit Oszillatoren

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US5359893A (en) * 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
KR100252009B1 (ko) * 1997-09-25 2000-04-15 윤종용 마이크로 진동구조물과 그 공진주파수 조절방법 및 이를 이용한 마이크로 엑츄에이터
US6060336A (en) * 1998-12-11 2000-05-09 C.F. Wan Incorporated Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore
US6094102A (en) * 1999-04-30 2000-07-25 Rockwell Science Center, Llc Frequency synthesizer using micro electro mechanical systems (MEMS) technology and method
US6384353B1 (en) * 2000-02-01 2002-05-07 Motorola, Inc. Micro-electromechanical system device
US6307169B1 (en) * 2000-02-01 2001-10-23 Motorola Inc. Micro-electromechanical switch

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5739686A (en) * 1996-04-30 1998-04-14 Naughton; Michael J. Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
DE10011830A1 (de) * 1999-03-12 2000-09-14 Denso Corp Winkelgeschwindigkeitssensor mit Oszillatoren

Also Published As

Publication number Publication date
WO2002067293A2 (en) 2002-08-29
WO2002067293A9 (en) 2004-04-01
AU2002255563A1 (en) 2002-09-04
EP1386347A2 (de) 2004-02-04
JP2005503267A (ja) 2005-02-03
JP4464607B2 (ja) 2010-05-19
WO2002067293A3 (en) 2003-11-27

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