EP1386347A4 - Einrichtung für ein mikroelektromechanischen (mens)-systems - Google Patents

Einrichtung für ein mikroelektromechanischen (mens)-systems

Info

Publication number
EP1386347A4
EP1386347A4 EP20020724965 EP02724965A EP1386347A4 EP 1386347 A4 EP1386347 A4 EP 1386347A4 EP 20020724965 EP20020724965 EP 20020724965 EP 02724965 A EP02724965 A EP 02724965A EP 1386347 A4 EP1386347 A4 EP 1386347A4
Authority
EP
Grant status
Application
Patent type
Prior art keywords
beam
element
mems
substrate
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP20020724965
Other languages
English (en)
French (fr)
Other versions
EP1386347A2 (de )
Inventor
Jeffrey R Annis
Ernst H Dummermuth
Richard D Harris
Patrick C Herbert
Michael J Knieser
Robert J Kretschmann
Henric Larsson
Winfred L Morris
Jun J Yao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rockwell Automation Technologies Inc
Original Assignee
Rockwell Automation Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002Electrostatic motors
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/04Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
    • H01G5/14Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to longitudinal movement of electrodes
EP20020724965 1999-09-21 2002-02-20 Einrichtung für ein mikroelektromechanischen (mens)-systems Withdrawn EP1386347A4 (de)

Priority Applications (9)

Application Number Priority Date Filing Date Title
US804817 1985-12-04
US788928 1997-01-24
US09788928 US6583374B2 (en) 2001-02-20 2001-02-20 Microelectromechanical system (MEMS) digital electrical isolator
US09804817 US6798312B1 (en) 1999-09-21 2001-03-13 Microelectromechanical system (MEMS) analog electrical isolator
US805410 2001-03-13
US09805410 US6617750B2 (en) 1999-09-21 2001-03-13 Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise
US10001412 US6803755B2 (en) 1999-09-21 2001-10-25 Microelectromechanical system (MEMS) with improved beam suspension
US1412 2001-10-25
PCT/US2002/004824 WO2002067293A9 (en) 2001-02-20 2002-02-20 Microelectromechanical systems (mems) device including an analog or a digital

Publications (2)

Publication Number Publication Date
EP1386347A2 true EP1386347A2 (de) 2004-02-04
EP1386347A4 true true EP1386347A4 (de) 2005-05-25

Family

ID=27485089

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20020724965 Withdrawn EP1386347A4 (de) 1999-09-21 2002-02-20 Einrichtung für ein mikroelektromechanischen (mens)-systems

Country Status (3)

Country Link
EP (1) EP1386347A4 (de)
JP (1) JP4464607B2 (de)
WO (1) WO2002067293A9 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6690178B2 (en) * 2001-10-26 2004-02-10 Rockwell Automation Technologies, Inc. On-board microelectromechanical system (MEMS) sensing device for power semiconductors
JP4643192B2 (ja) * 2004-07-16 2011-03-02 アオイ電子株式会社 グリッパ
US7205867B2 (en) * 2005-05-19 2007-04-17 Robert Bosch Gmbh Microelectromechanical resonator structure, and method of designing, operating and using same
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5739686A (en) * 1996-04-30 1998-04-14 Naughton; Michael J. Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
DE10011830A1 (de) * 1999-03-12 2000-09-14 Denso Corp Winkelgeschwindigkeitssensor mit Oszillatoren

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US5359893A (en) * 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
KR100252009B1 (ko) * 1997-09-25 2000-04-15 윤종용 마이크로 진동구조물과 그 공진주파수 조절방법 및 이를 이용한 마이크로 엑츄에이터
US6060336A (en) * 1998-12-11 2000-05-09 C.F. Wan Incorporated Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore
US6094102A (en) * 1999-04-30 2000-07-25 Rockwell Science Center, Llc Frequency synthesizer using micro electro mechanical systems (MEMS) technology and method
US6384353B1 (en) * 2000-02-01 2002-05-07 Motorola, Inc. Micro-electromechanical system device
US6307169B1 (en) * 2000-02-01 2001-10-23 Motorola Inc. Micro-electromechanical switch

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5739686A (en) * 1996-04-30 1998-04-14 Naughton; Michael J. Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
DE10011830A1 (de) * 1999-03-12 2000-09-14 Denso Corp Winkelgeschwindigkeitssensor mit Oszillatoren

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO02067293A3 *

Also Published As

Publication number Publication date Type
JP4464607B2 (ja) 2010-05-19 grant
JP2005503267A (ja) 2005-02-03 application
WO2002067293A3 (en) 2003-11-27 application
EP1386347A2 (de) 2004-02-04 application
WO2002067293A9 (en) 2004-04-01 application
WO2002067293A2 (en) 2002-08-29 application

Similar Documents

Publication Publication Date Title
US6897537B2 (en) Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
US5824900A (en) Angular velocity sensor
US5806364A (en) Vibration-type angular velocity detector having sensorless temperature compensation
US7215229B2 (en) Laminated relays with multiple flexible contacts
US5208535A (en) Mr position detecting device
Goldfarb et al. Modeling piezoelectric stack actuators for control of micromanipulation
US20030048036A1 (en) MEMS comb-finger actuator
US6388789B1 (en) Multi-axis magnetically actuated device
US6469603B1 (en) Electronically switching latching micro-magnetic relay and method of operating same
Emmerich et al. Magnetic field measurements with a novel surface micromachined magnetic-field sensor
US4678991A (en) Inductive displacement transducer with unipolar output
US6089089A (en) Multi-element micro gyro
US5698784A (en) Vibratory rate gyroscope and methods of assembly and operation
Lemkin et al. A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics
US5834864A (en) Magnetic micro-mover
US6508126B2 (en) Dynamic quantity sensor having movable and fixed electrodes with high rigidity
US20060076947A1 (en) Micro-electromechanical system (MEMS) based current & magnetic field sensor having improved sensitivities
US20030030527A1 (en) Microelectromechanical component
US6130464A (en) Latching microaccelerometer
US6975193B2 (en) Microelectromechanical isolating circuit
US6985271B2 (en) Pointing angle control of electrostatic micro mirrors
US6087743A (en) Position control system for use with micromechanical actuators
Hosaka et al. Electromagnetic microrelays: concepts and fundamental characteristics
US6981414B2 (en) Coupled micromachined structure
Seeger et al. Charge control of parallel-plate, electrostatic actuators and the tip-in instability

Legal Events

Date Code Title Description
17P Request for examination filed

Effective date: 20030911

AK Designated contracting states:

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent to

Countries concerned: ALLTLVMKROSI

RIC1 Classification (correction)

Ipc: 7B 81B 3/00 A

A4 Despatch of supplementary search report

Effective date: 20050411

17Q First examination report

Effective date: 20080414

18D Deemed to be withdrawn

Effective date: 20150901