EP1386347A4 - Dispositif a systeme micro-electromecanique (mems) - Google Patents

Dispositif a systeme micro-electromecanique (mems)

Info

Publication number
EP1386347A4
EP1386347A4 EP20020724965 EP02724965A EP1386347A4 EP 1386347 A4 EP1386347 A4 EP 1386347A4 EP 20020724965 EP20020724965 EP 20020724965 EP 02724965 A EP02724965 A EP 02724965A EP 1386347 A4 EP1386347 A4 EP 1386347A4
Authority
EP
Grant status
Application
Patent type
Prior art keywords
beam
element
mems
substrate
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP20020724965
Other languages
German (de)
English (en)
Other versions
EP1386347A2 (fr )
Inventor
Jeffrey R Annis
Ernst H Dummermuth
Richard D Harris
Patrick C Herbert
Michael J Knieser
Robert J Kretschmann
Henric Larsson
Winfred L Morris
Jun J Yao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rockwell Automation Technologies Inc
Original Assignee
Rockwell Automation Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002Electrostatic motors
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/04Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
    • H01G5/14Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to longitudinal movement of electrodes

Abstract

1) Production d'un isolateur analogique pour système micro-électromécanique (MEMS) dans lequel un actionneur, p. ex. moteur électrostatique, entraîne une barrette contre une force opposée produite, par exemple, par un autre moteur électrostatique. Le déplacement de la barrette peut être détecté par un capteur fixé sur celle-ci. La barrette elle-même est isolée électriquement entre les emplacements de l'actionneur et du capteur. Cette structure peut être incorporée dans des circuits intégrés pour assurer une isolation sur puce. 2) Production d'un isolateur numérique pour système micro-électromécanique (MEMS) dans lequel un actionneur, p. ex. moteur électrostatique, entraîne une barrette contre une force prédéfinie produite, par exemple, par un autre moteur électrostatique. Quand le seuil de la force opposée est dépassé, le déplacement de la barrette peut être détecté par un capteur fixé sur celle-ci. La barrette elle-même est isolée électriquement entre les emplacements de l'actionneur et du capteur. Cette structure peut être incorporée dans des circuits intégrés pour assurer une isolation sur puce. 3) Dans un dispositif MEMS utilisant une barrette reposant sur des bras transversaux, la flexion potentielle des bras transversaux produite par des processus de fabrication, par la température ou par un auto-échauffement local dû à des pertes par effet Joule, est assurée par des terminaisons souples desdits bras. Dans une autre forme de réalisation, la flexion est réglée de manière à fournir une sollicitation sélective à la barrette, ou un avantage mécanique dans la détection du déplacement de celle-ci. 4) Les systèmes micro-électromécaniques (MEMS) fabriqués à l'échelle microscopique à l'aide de techniques pour circuits intégrés peuvent servir à mesurer divers paramètres au moyen de signaux électriques produits par le déplacement de petites barrettes. On peut supprimer le bruit inertiel en dupliquant la structure de barrette afin de détecter l'accélération devant être soustraite d'une structure de barrette similaire servant à mesurer le paramètre voulu.
EP20020724965 1999-09-21 2002-02-20 Dispositif a systeme micro-electromecanique (mems) Withdrawn EP1386347A4 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
US804817 1985-12-04
US788928 1997-01-24
US09788928 US6583374B2 (en) 2001-02-20 2001-02-20 Microelectromechanical system (MEMS) digital electrical isolator
US09804817 US6798312B1 (en) 1999-09-21 2001-03-13 Microelectromechanical system (MEMS) analog electrical isolator
US805410 2001-03-13
US09805410 US6617750B2 (en) 1999-09-21 2001-03-13 Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise
US10001412 US6803755B2 (en) 1999-09-21 2001-10-25 Microelectromechanical system (MEMS) with improved beam suspension
US1412 2001-10-25
PCT/US2002/004824 WO2002067293A9 (fr) 2001-02-20 2002-02-20 Dispositif a systeme micro-electromecanique (mems)

Publications (2)

Publication Number Publication Date
EP1386347A2 true EP1386347A2 (fr) 2004-02-04
EP1386347A4 true true EP1386347A4 (fr) 2005-05-25

Family

ID=27485089

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20020724965 Withdrawn EP1386347A4 (fr) 1999-09-21 2002-02-20 Dispositif a systeme micro-electromecanique (mems)

Country Status (3)

Country Link
EP (1) EP1386347A4 (fr)
JP (1) JP4464607B2 (fr)
WO (1) WO2002067293A9 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6690178B2 (en) * 2001-10-26 2004-02-10 Rockwell Automation Technologies, Inc. On-board microelectromechanical system (MEMS) sensing device for power semiconductors
JP4643192B2 (ja) * 2004-07-16 2011-03-02 アオイ電子株式会社 グリッパ
US7205867B2 (en) * 2005-05-19 2007-04-17 Robert Bosch Gmbh Microelectromechanical resonator structure, and method of designing, operating and using same
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5739686A (en) * 1996-04-30 1998-04-14 Naughton; Michael J. Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
DE10011830A1 (de) * 1999-03-12 2000-09-14 Denso Corp Winkelgeschwindigkeitssensor mit Oszillatoren

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US5359893A (en) * 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
KR100252009B1 (ko) * 1997-09-25 2000-04-15 윤종용 마이크로 진동구조물과 그 공진주파수 조절방법 및 이를 이용한 마이크로 엑츄에이터
US6060336A (en) * 1998-12-11 2000-05-09 C.F. Wan Incorporated Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore
US6094102A (en) * 1999-04-30 2000-07-25 Rockwell Science Center, Llc Frequency synthesizer using micro electro mechanical systems (MEMS) technology and method
US6384353B1 (en) * 2000-02-01 2002-05-07 Motorola, Inc. Micro-electromechanical system device
US6307169B1 (en) * 2000-02-01 2001-10-23 Motorola Inc. Micro-electromechanical switch

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5739686A (en) * 1996-04-30 1998-04-14 Naughton; Michael J. Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
DE10011830A1 (de) * 1999-03-12 2000-09-14 Denso Corp Winkelgeschwindigkeitssensor mit Oszillatoren

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO02067293A3 *

Also Published As

Publication number Publication date Type
JP4464607B2 (ja) 2010-05-19 grant
JP2005503267A (ja) 2005-02-03 application
WO2002067293A3 (fr) 2003-11-27 application
EP1386347A2 (fr) 2004-02-04 application
WO2002067293A9 (fr) 2004-04-01 application
WO2002067293A2 (fr) 2002-08-29 application

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Legal Events

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Effective date: 20030911

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Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent to

Countries concerned: ALLTLVMKROSI

RIC1 Classification (correction)

Ipc: 7B 81B 3/00 A

A4 Despatch of supplementary search report

Effective date: 20050411

17Q First examination report

Effective date: 20080414

18D Deemed to be withdrawn

Effective date: 20150901