JP2005503267A5 - - Google Patents

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Publication number
JP2005503267A5
JP2005503267A5 JP2002566525A JP2002566525A JP2005503267A5 JP 2005503267 A5 JP2005503267 A5 JP 2005503267A5 JP 2002566525 A JP2002566525 A JP 2002566525A JP 2002566525 A JP2002566525 A JP 2002566525A JP 2005503267 A5 JP2005503267 A5 JP 2005503267A5
Authority
JP
Japan
Prior art keywords
electrical signal
mems
attached
substrate
isolator according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002566525A
Other languages
English (en)
Japanese (ja)
Other versions
JP4464607B2 (ja
JP2005503267A (ja
Filing date
Publication date
Priority claimed from US09/788,928 external-priority patent/US6583374B2/en
Priority claimed from US09/804,817 external-priority patent/US6798312B1/en
Priority claimed from US09/805,410 external-priority patent/US6617750B2/en
Priority claimed from US10/001,412 external-priority patent/US6803755B2/en
Application filed filed Critical
Priority claimed from PCT/US2002/004824 external-priority patent/WO2002067293A2/en
Publication of JP2005503267A publication Critical patent/JP2005503267A/ja
Publication of JP2005503267A5 publication Critical patent/JP2005503267A5/ja
Application granted granted Critical
Publication of JP4464607B2 publication Critical patent/JP4464607B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002566525A 2001-02-20 2002-02-20 マイクロ電気機械システム（ｍｅｍｓ）装置 Expired - Fee Related JP4464607B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/788,928 US6583374B2 (en) 2001-02-20 2001-02-20 Microelectromechanical system (MEMS) digital electrical isolator
US09/804,817 US6798312B1 (en) 1999-09-21 2001-03-13 Microelectromechanical system (MEMS) analog electrical isolator
US09/805,410 US6617750B2 (en) 1999-09-21 2001-03-13 Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise
US10/001,412 US6803755B2 (en) 1999-09-21 2001-10-25 Microelectromechanical system (MEMS) with improved beam suspension
PCT/US2002/004824 WO2002067293A2 (en) 2001-02-20 2002-02-20 Microelectromechanical systems (mems) device including an analog or a digital

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008216879A Division JP2009066750A (ja) 2001-02-20 2008-08-26 マイクロ電気機械システム（ｍｅｍｓ）装置

Publications (3)

Publication Number Publication Date
JP2005503267A JP2005503267A (ja) 2005-02-03
JP2005503267A5 true JP2005503267A5 (de) 2007-07-05
JP4464607B2 JP4464607B2 (ja) 2010-05-19

Family

ID=27485089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002566525A Expired - Fee Related JP4464607B2 (ja) 2001-02-20 2002-02-20 マイクロ電気機械システム（ｍｅｍｓ）装置

Country Status (4)

Country Link
EP (1) EP1386347A4 (de)
JP (1) JP4464607B2 (de)
AU (1) AU2002255563A1 (de)
WO (1) WO2002067293A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6690178B2 (en) * 2001-10-26 2004-02-10 Rockwell Automation Technologies, Inc. On-board microelectromechanical system (MEMS) sensing device for power semiconductors
JP4643192B2 (ja) * 2004-07-16 2011-03-02 アオイ電子株式会社 グリッパ
US7205867B2 (en) * 2005-05-19 2007-04-17 Robert Bosch Gmbh Microelectromechanical resonator structure, and method of designing, operating and using same
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US5359893A (en) * 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5739686A (en) * 1996-04-30 1998-04-14 Naughton; Michael J. Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
KR100252009B1 (ko) * 1997-09-25 2000-04-15 윤종용 마이크로 진동구조물과 그 공진주파수 조절방법 및 이를 이용한 마이크로 엑츄에이터
US6060336A (en) * 1998-12-11 2000-05-09 C.F. Wan Incorporated Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore
JP4126833B2 (ja) * 1999-03-12 2008-07-30 株式会社デンソー 角速度センサ装置
US6094102A (en) * 1999-04-30 2000-07-25 Rockwell Science Center, Llc Frequency synthesizer using micro electro mechanical systems (MEMS) technology and method
US6307169B1 (en) * 2000-02-01 2001-10-23 Motorola Inc. Micro-electromechanical switch
US6384353B1 (en) * 2000-02-01 2002-05-07 Motorola, Inc. Micro-electromechanical system device

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