EP1323668B9 - Generateur pour usage dans un systéme microéléctromécanique - Google Patents

Generateur pour usage dans un systéme microéléctromécanique Download PDF

Info

Publication number
EP1323668B9
EP1323668B9 EP02020901A EP02020901A EP1323668B9 EP 1323668 B9 EP1323668 B9 EP 1323668B9 EP 02020901 A EP02020901 A EP 02020901A EP 02020901 A EP02020901 A EP 02020901A EP 1323668 B9 EP1323668 B9 EP 1323668B9
Authority
EP
European Patent Office
Prior art keywords
heat transfer
micro
transfer member
electro
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02020901A
Other languages
German (de)
English (en)
Other versions
EP1323668A2 (fr
EP1323668A3 (fr
EP1323668B1 (fr
Inventor
Kwang Ho Kim
Yoon Pyo Lee
Jae Hak Jeon
Gui Eun Song
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Advanced Institute of Science and Technology KAIST
Korea Institute of Science and Technology KIST
Original Assignee
Korea Advanced Institute of Science and Technology KAIST
Korea Institute of Science and Technology KIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Advanced Institute of Science and Technology KAIST, Korea Institute of Science and Technology KIST filed Critical Korea Advanced Institute of Science and Technology KAIST
Publication of EP1323668A2 publication Critical patent/EP1323668A2/fr
Publication of EP1323668A3 publication Critical patent/EP1323668A3/fr
Publication of EP1323668B1 publication Critical patent/EP1323668B1/fr
Application granted granted Critical
Publication of EP1323668B9 publication Critical patent/EP1323668B9/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K35/00—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit
    • H02K35/02—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit with moving magnets and stationary coil systems

Definitions

  • the present invention relates to generators for use in micro-electro-mechanical systems, and particularly to a micro-electro-mechanical generator designed to generate electricity by allowing a portion of a fluid chamber charged with fluid to be moved reciprocally.
  • An electro-thermal device of conventional size is disclosed in German laid open patent application No. 1 016 502. The device comprises a cavity having a working fluid disposed therein and an electrical heater for heating the working fluid. At least a portion of said cavity is configured to be displaced upon a change of pressure in the cavity resulting from evaporation of the heated working fluid so as to convert electrically generated heat into mechanical work.
  • a micro-electro-mechanical system is one wherein mechanical components and electronic components are incorporated together in a very small size ranging from several micrometers to dozens of millimeters.
  • a MEMS a number of elements requiring electricity such as micro-pumps, microprocessors, micro-sensors, micro-actuators, etc., are integrated with one another.
  • voltage and current required to drive these elements of the MEMS are very minute in magnitude compared to those consumed in macro-scaled systems, it is difficult for a power supply for the elements in the MEMS to generate a proper level of the voltage and the current, as it must be very small in size for use in the micro-scaled system.
  • a high temperature section and a low temperature section are provided.
  • Working fluid is sequentially passed between the two sections in such a manner that the fluid is heated in the high temperature section to work outside, then cooled by the low temperature section, and is returned to the high temperature, repeatedly.
  • the problem in the art is that it is difficult to apply this principle to a generator for a MEMS due to limitations in volume, a limitation in the relevant micro-fabrication technology, and influences to other electric circuits or electronic circuit components which have to be incorporated with the generator in the MEMS.
  • thermoelectric modules have also been used for power generation in a MEMS. Power generation using the thermoelectric module adapts the Seebeck-effect wherein two different metals are joined to each other and a temperature difference is applied between them to induce a current.
  • thermoelectric module is simple in configuration and when it operates under a small temperature difference condition it can generate electricity commensurate to that small temperature difference.
  • the thermoelectric module could appear to provide a generator suitable for application with the MEMS as a stable energy source with its advantages including operation with reduced noise as it requires no working fluid or parts performing mechanical movement.
  • this type of generator has low operational efficiency and cannot generate sufficient levels of current and voltage. For these reasons, this type of generator is not an appropriate power source for a micro-pump for the MEMS.
  • an object of the present invention to provide a micro-electro-mechanical generator capable of providing increased levels of electricity with respect to levels provided by known MEMS generators.
  • a micro-electro-mechanical generator comprising a housing, a heating means and a cooling means disposed within the housing, with the cooling means opposite to the heating means.
  • a heat transfer member is positioned between the heating means and cooling means, with the heat transfer member having a first surface facing the heating means and a second surface facing the cooling means.
  • a supporting member supports the heat transfer member at an external portion of the heat transfer member and is alternatively deformable between a first position wherein the heat transfer member is adjacent the heating means, and a second position wherein the heat transfer member is adjacent the cooling means.
  • the supporting member partitions the housing into a sealed first space at a side of the heating means and a second space at a side of the cooling means.
  • the sealed first space and the second spaces are respectively adapted to be charged with a first fluid and a second fluid.
  • the supporting member is alternatively deformed in a bi-stable snapping action wherein the first position and the second position of the supporting member are two stable positions
  • a power-generating means generates electricity by using the alternative deforming action by the supporting member.
  • the power-generating means can comprise a piezoelectric element provided in the supporting member.
  • the power-generating means can also comprise the heat transfer member and a coil disposed in the housing, wherein the heat transfer member is a permanent magnet.
  • the first fluid is heated by the heating means to its boiling point and is cooled by the cooling means to condensation.
  • the heat transfer member can further comprise a plurality of pins which maintain the first fluid in a liquid state with a capillary action therebetween.
  • the first fluid is selected from the group consisting of pentane and HFC-134a.
  • the inventive micro-electro-mechanical generator uses reciprocal movements of a moving portion of a fluid chamber charged with fluid in order to generate electricity.
  • a change of volume in the fluid causes a volume change of the fluid chamber, which in turn results in reciprocal movements by the moving portion of the fluid chamber.
  • the moving portion of the fluid chamber is close to a heater, so that heat transfer from the heater to the moving portion begins to occur.
  • the rise in temperature increases the volume of the fluid chamber.
  • the moving portion is moved upward.
  • the moving portion comes into contact with a cooler.
  • heat transfer occurs from the moving portion to the cooler.
  • the fluid chamber begins to contract and the moving portion moves downward.
  • Fig. 1 shows a micro-electro-mechanical generator in accordance with a first embodiment of the present invention.
  • the micro-electro-mechanical generator 100 includes a heating plate 12, wall portions 14, a cooling plate 24, a plurality of pins 28, working fluid 30, a heat transfer member 32, a supporting member 34 and a heat transfer member 32.
  • the heating plate 12 is thermally connected to a heat source (not shown) and a constant high temperature is continuously maintained thereto.
  • the wall portions 14 include a first wall portion 14a, a second wall portion 14b and a third wall portion 14c.
  • the first wall portion 14a has an inclined surface 15 which extends from a same height as the heating plate 12 to the supporting member 34.
  • the first wall portion 14a is adapted to surround the heating plate 12.
  • the second wall portion 14b is positioned on top of the supporting member 34.
  • the third wall portion 14c is formed on top of the second wall portion 14b, and third wall portion 14c is also adapted to surround the cooling plate 24.
  • the wall portions 14 are, preferably, made of an adiabatic material.
  • the supporting member 34 supporting ends of the heat transfer member 32 defines a hermetic fluid chamber 26 together with the heat transfer member 32, the first wall portion 14a and the heating plate 12.
  • the supporting member 34 has flexibility and elasticity such that it can resiliently deform upward or downward in a vertical direction, while resiliently supporting ends of the heat transfer member 32. While vertical upward and downward movement have been exemplified in this embodiment, it will be apparent to one skilled in the art that lateral, horizontal, diagonal movements are equally applicable while staying within the spirit of this invention, after having the benefit of this disclosure.
  • the supporting member 34 is equipped with a piezoelectric element, so that the piezoelectric element generates electricity when the supporting member 34 is deformed.
  • the supporting member 34 and/or the piezoelectric element is electrically connected to an electrical connection means (not shown) through which the electricity generated in the piezoelectric element is transmitted to the outside of the generator 100.
  • the heat transfer member 32 is a member moving up and down.
  • the heat transfer member 32 is heated by the heating plate 12 and then is cooled by the cooling plate 24. Accordingly, it is preferable that the heat transfer member 32 be made of a material having a good heat transferring property.
  • the plurality of pins 28 protrude. It is preferable that the pins 28 be integrally formed with the heat transfer member 32. It is preferable that the pins 28 be made of a same material as that of the heat transfer member 32.
  • a work space 30a represents a space between the pins 28. The pins 28 are so close to each other such that the fluid 30 charged in a work space 30a does not deviate from the work space 30a due to capillary phenomenon of each pin 28. As shown in Fig. 1, it is preferable that a width of each pin 28 be larger than that of the work space 30a.
  • the working fluid 30 kept in the work space 30a experiences a phase change beyond its boiling point by the heat transferred from the heating plate 12.
  • Increase in vapor pressure due to the temperature elevation increases the overall pressure within the fluid chamber 26.
  • a pressure force is biased upwardly and the supporting member 34 begins to rise.
  • the supporting member 34 is deformed upward, generating electricity.
  • the heat transfer member 32 supported by the supporting member 34 comes into contact with the cooling plate 24, as the supporting member 34 is deformed upward. At that stage, the heat of the fluid chamber 26 is transferred to the cooling plate 24 through the heat transfer member 32.
  • the cooling plate 24 serves to cool the fluid chamber 26.
  • the heat transfer member 32 contacts the cooling plate 24 and heat transfer occurs from the fluid chamber 26 including the work space 30a, to the cooling plate 24.
  • the fluid 30 in vapor state begins to be condensed.
  • heat is continuously transferred to the heating plate 12 from the heat source (not shown) by conduction or any other known method.
  • the heat source not shown
  • conduction any other known method.
  • the heating plate 12 heats the working fluid 30 kept around the pins 28, i.e. in the work space 30a. Transferred heat causes a phase change from liquid to vapor in the working fluid 18. During this procedure, the volume and pressure of the fluid 30 kept in both the work space 30a and the hermetic fluid chamber 26, begin rising.
  • the supporting member 34 is deformed upward in an instant. In other words, a snapping action results. At that moment, the heat transfer member 32 makes contact with the cooling plate 24, as shown in Fig. 2. At the same time, current is induced in the supporting member 34 made of the piezoelectric element due to the deformation of the latter.
  • the supporting member 34 shows a bi-stable behavior. In other words, it alternates rapidly between two stable positions, one at the downward position and the other at the upward position. Thus, the two stable positions are relatively fixed with supporting member 34 rapidly snapping between the two stable positions.
  • the rapid deformation of the supporting member 34 between the stable upward and downward positions is referred to herein as "the bi-stable snapping action.”
  • the bistable snapping action enables the generator 100 to be efficiently operated.
  • the heat transfer member 32 travels rapidly when the position change occurs, and one cycle of operation can be completed in a reduced time interval. This enables production of a larger amount of electricity for a given period of time.
  • the heat transfer member 32 is not permitted to stay in a mid-position between the two stable positions of the supporting member 34 where the heat transfer member 32 is alternatively heated and cooled by the heating plate 12 and the cooling plate 24. As a result, there is a reduced possibility for the heat transfer member 32 to be heated and cooled simultaneously. This also enables the supporting member 34 to convert its position more frequently.
  • Figs. 5 and 6 show a bottom view of the heat transfer member 32 and a top planar view of the supporting member 34, respectively.
  • the supporting member 34 has a cutout 34b of a substantial rectangular shape and slits 34a formed along diagonal lines of the supporting member 34.
  • the heat transfer member 32 and the supporting member 34 are assembled together in such a manner that the heat transfer member 32 is received by a central portion 34b of the supporting member 34 that has a size smaller than that of the heat transfer member 32.
  • the supporting member 34 becomes naturally distorted upward or downward. With this configuration, the heat transfer member 32 and the supporting member 34 conduct the bi-stable snapping action.
  • the configuration of the pins 28 whereby the fluid in liquid state can be kept around them enables more efficient operation of the generator 100. More specifically, for efficient cooling action by the cooling plate 24 in the configuration shown in Fig. 2, condensed liquid is initially required to be kept near the cooling plate 24 without dropping on the heating plate 12. The capillary force by adjacent pins 28 can prevent this.
  • a space defined between the cooling plate 24 and the heat transfer member 20 may be charged with fluid.
  • the fluid to be charged in that space may be different from the fluid in the fluid chamber 26 or same fluid as that in the fluid chamber 26.
  • the fluid charged in the fluid chamber 26 is preferably, pentane or HFC-134a.
  • heating plate 12 to the area of cooling plate 24 can be pre-determined by one skilled in the art.
  • the heating plate 12 and the cooling plate 24 may be made of materials having suitable conductivity such as copper, aluminum, gold and the like.
  • Fig. 3 illustrates a micro-electro-mechanical generator 200 in accordance with a second embodiment of the present invention.
  • same reference numerals are designated for components which are the same as those shown in connection with the first embodiment and a separate description thereof are omitted.
  • the generator 200 is very similar to the generator 100 in accordance with the first embodiment, it has a configuration different from the generator 100 in terms of the conversion of the thermal energy of fluid 30 into electric energy.
  • the generator 200 is provided with a moving member 20 and a supporting member 16 supporting ends of the moving member 20 and formed on top of the first wall portion 14a.
  • a coil 18 is formed in the first wall portion 14a and the second wall portion 14b.
  • the moving member 20 functions as a permanent magnet moving up and down which is heated by the heating plate 12 and then is cooled by the cooling plate 24.
  • the moving member 20 is made of a magnet material having a good conductivity.
  • the moving member 20 has a plurality of pins 28 on its bottom surface. Like the first embodiment, the fluid 30 in a liquid state is placed in the work space 30a between the pins 28. Further, the pins 28 are, preferably, made of a same material as that of the moving member 20. It is also preferable that the pins 28 be integrally formed with the moving member 20.
  • the supporting member 16 can be made of a material with elasticity and flexibility and is adapted to upward and downward deformation as shown in Figs. 3 and 4. Whenever the supporting member 16 conducts the snapping action, the moving member 20 is moved upward or downward.
  • moving member 20 makes a relative movement with respect to the coil 28 in a cycling between upward and downward snapping action of the supporting member 16. This allows an electromotive force to be induced in the coil 28.
  • the current induced in the coil 28 is transmitted to the outside through an electrical connection means (not shown) through which electricity induced in coil 18 is transmitted as a source to the outside of the generator 200.
  • Position of the coil 18 in the wall portions 14a and 14b is determined by considering the movements of the moving member 20 so that greater current can be induced in the coil 18.
  • Fig. 7 shows a micro-electro-mechanical generator in accordance with a third embodiment of the present invention.
  • the micro-electro-mechanical generator 300 includes a heating plate 312, a first adiabatic portion 314, a second adiabatic portion 315, a diaphragm or thin film 316, working fluid 318, a piezoelectric material 320, and a cooling plate 322.
  • a liquid working fluid 318 is contemplated.
  • the heating plate 312 is thermally connected to a heat source (not shown) and a constant high temperature is continuously maintained thereto.
  • the first adiabatic portion 314 is provided with a lower portion 314a adapted to be adjacent and surrounding the heating plate 312 at a vertical level flush therewith, and a wall 314b extending vertically upward from the ends of the lower portion 314a.
  • the heater 312, the lower portion 314a, the wall 314b and the thin film 316 define a sealed space having a volume therein.
  • the thin film 316 is adapted on an upper surface of the wall 314b; and the thin film 316, the wall 314b, the lower portion 314a and the heating plate 312 define a hermetical fluid chamber 328.
  • the thin film 316 has a flexible central portion 316a that can move up and down.
  • the fluid chamber 328 confines working fluid 318 so that the working fluid 318 is exposed to the heating plate 312.
  • the working fluid 318 is not required to charge the entire volume of the fluid chamber 328 and it is preferable that working fluid 318 be partially charged in the fluid chamber 328.
  • the piezoelectric material 320 is adapted above the thin film 316 such that there is a distinct separation from the thin film 316. As pressure pushes the central portion 316a, it too presses the piezoelectric material 320 during its upward movement. The pressing force of the fluid chamber 328 that is exerted to the piezoelectric material 320 by the central portion 316a of the thin film 316 is converted to electric energy by the piezoelectric material 320. The increase of pressure within the fluid chamber 328 pushes the central portion 316a upwards, resulting in the central portion 316a pressing the piezoelectric material 320, with piezoelectric material 320 generating electricity.
  • the second adiabatic portion 315 is adapted between the piezoelectric material 320 and the thin film 316 to increase the heat insulation effect of the fluid chamber 328.
  • the cooling plate 322 is adapted on an upper surface of the piezoelectric material 320.
  • the cooling plate 322 serves to keep the piezoelectric material 320 in a low temperature state.
  • the thin film 316 is initially deformed upward to press piezoelectric material 320 to generate electricity, and continued contact by the thin film 316 against piezoelectric material 320 allows the heat of the thin film 316 to be transferred to the cooling plate 322 through the piezoelectric material 320.
  • the heat transfer results in lowering of the temperature around the central portion 316a of the thin film 316 and consequently, the pressure within the fluid chamber 328 is also lowered, allowing the central portion 316a to begin descending.
  • the transferred heat elevates the temperature of the working fluid 318 and a phase change from liquid to vapor occurs in a portion of the working fluid 318.
  • the increased pressure upwardly deforms the thin film 316 to allow the central portion 316a to be raised.
  • the central portion 316a is contacted to the piezoelectric material 320 kept in a low temperature state by the cooling plate 322.
  • the pressure being increased presses against the piezoelectric material 320.
  • the piezoelectric material 320 converts the pressing force into electric energy.
  • Fig. 8 shows a micro-electro-mechanical generator 400 in accordance with a fourth embodiment.
  • the micro-electro-mechanical generator 400 shown in Fig. 8 is similar to the generator 300 in accordance with the third embodiment, except that in this fourth embodiment, the working fluid 430 in the fluid chamber 428 is preferably, a gas.
  • the volume change of the fluid chamber 428 is caused by direct volume expansion of the gas itself, unlike the third embodiment where the phase change from liquid to vapor generates the volume change in fluid chamber 328. Accordingly, a response delay due to the phase change when liquid is used as the working fluid is absent in the micro-electro-mechanical generator 400.
  • micro-electro-mechanical generator 300 may show a performance difference depending on its spatial posture, i.e. whether the generator is in a tilted state or not, whereas the micro-electro-mechanical generator 400 can provide a constant output regardless of its position.
  • Fig. 9 illustrates the inventive micro-electro-mechanical generator 300 in accordance with the fifth embodiment.
  • the generator 500 is nearly similar to the generator 300 in accordance with the third embodiment, it has a configuration different from the generator 300 in terms of the conversion of the thermal energy of fluid into electric energy.
  • the generator 500 in accordance with the fifth embodiment is provided with a permanent magnet 526 formed on top of a thin film 516, and a coil 524 is adapted above the permanent magnet 526.
  • the permanent magnet 526 makes a relative movement with respect to the coil 524 with the upward and downward deformation of the thin film 516. This allows an electromotive force to be induced in the coil 524.
  • the permanent magnet 526 comes into contact with the cooling plate 522 adapted on top of coil 524 during its upward movement through the coil 524.
  • the graph in Fig. 10 plots performance curves for the micro-electro-mechanical generator 300 in accordance with the third embodiment using piezoelectric material 320 and liquid working fluid 318, where the change of pressure P exerted on the piezoelectric material by the thin film, and the consequent change of output voltage V, are shown with respect to time change T.
  • the inventive micro-electro-mechanical generator may use waste heat from a power plant, a chemical plant, an incinerator, etc., as its energy source. When it is made in a miniature size, it may be applied as the main power source or supplementary power source for a mobile phone, a personal digital assistant (PDA), a lap top computer or a DNA chip, using for instance, body heat or solar heat as thermal energy source.
  • PDA personal digital assistant
  • DNA chip using for instance, body heat or solar heat as thermal energy source.
  • the invention provides a micro-electro-mechanical generator has a housing, a heater, a cooler, a heat transfer member, a supporting member, and fluid.
  • the heater is formed in the housing and the cooler is formed in the housing opposite to the heater.
  • the heat transfer member is positioned between the heater and the cooler and is provided with a first surface facing the heater and a second surface facing the cooler.
  • the supporting member supports the heat transfer member at an external portion of the heat transferring member and is deformable between a first position where the heat transferring member is positioned adjacent to the heater, and a second position where the heat transferring member is positioned adjacent to the cooler.
  • the supporting member also partitions the housing into a sealed first space at a side of the heater and a second space at a side of the cooler. The fluid is charged in the sealed first space. Electric energy is obtained whenever the deformation of the supporting member provided with a piezoelectric element.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Reciprocating Pumps (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)

Claims (7)

  1. Générateur microélectromécanique (100, 200, 300), comprenant :
    un boîtier (14, 314, 315) ;
    un moyen de chauffage (12, 312) disposé à l'intérieur dudit boîtier (14, 314, 315);
    un moyen de refroidissement (24, 322) disposé à l'intérieur dudit boîtier (14, 314, 315) et en face dudit moyen de chauffage (12, 312) ;
    un élément de transfert de chaleur (20, 32, 316a) positionné entre ledit moyen de chauffage (12, 312) et ledit moyen de refroidissement (24, 322), l'élément de transfert de chaleur (20, 32, 316) ayant une première surface faisant face audit moyen de chauffage (12, 312) et une seconde surface faisant face audit moyen de refroidissement (24, 322) ;
    un élément de support (16, 34, 316) supportant ledit élément de transfert de chaleur (20, 32, 316a) au niveau d'une partie externe dudit élément de transfert de chaleur (20, 32, 316a) et étant déformable entre une première position dans laquelle ledit élément de transfert de chaleur (20, 32, 316a) est positionné adjacent audit moyen de chauffage (12, 312) et une seconde position dans laquelle ledit élément de transfert de chaleur (20, 32, 316a) est positionné adjacent audit moyen de refroidissement (24, 322), et l'élément de support (16, 34, 316) divisant ledit boîtier (14, 314, 315) en un premier espace fermé hermétiquement (26, 328) d'un côté dudit moyen de chauffage (12, 312) et en un second espace d'un côté dudit moyen de refroidissement (24, 322), dans lequel le premier espace fermé hermétiquement (26, 328) et le second espace, respectivement, sont aptes à être chargés d'un premier fluide (30, 318) et d'un second fluide ; et
    un moyen de production de puissance produisant de l'électricité en utilisant ladite action de déformation dudit élément de support (16, 34, 316).
  2. Générateur microélectromécanique (100, 200) selon la revendication 1, dans lequel ledit moyen de production de puissance comprend un élément piézoélectrique installé dans ledit élément de support (16, 34).
  3. Générateur microélectromécanique (200) selon la revendication 1, dans lequel ledit moyen de production de puissance comprend ledit élément de transfert de chaleur (20) et un enroulement (18) disposé dans ledit boîtier (14), dans lequel ledit élément de transfert de chaleur (20) est un aimant permanent.
  4. Générateur microélectromécanique (100, 200, 300) selon la revendication 1, dans lequel ledit premier fluide (30, 318) est chauffé par ledit moyen de chauffage (12, 312) jusqu'à son point d'ébullition et est refroidi par ledit moyen de refroidissement (24, 322) jusqu'à condensation.
  5. Générateur microélectromécanique (100, 200) selon la revendication 1, dans lequel ledit élément de transfert de chaleur (20, 32) comprend en outre une pluralité de tiges (28), les tiges (28) maintenant ledit premier fluide (30) dans un état liquide au moyen d'un effet de capillarité entre celles-ci.
  6. Générateur microélectromécanique (100, 200, 300) selon la revendication 1, dans lequel ledit élément de support (34, 316) est alternativement déformé sous un effet de ressort bistable dans lequel ladite première position et ladite seconde position dudit élément de support (34, 316) sont deux positions stables.
  7. Générateur microélectromécanique (100, 200, 300) selon la revendication 1, dans lequel ledit premier fluide (30, 318) est choisi parmi le groupe consistant en pentane et en HFC-134a.
EP02020901A 2001-12-31 2002-09-18 Generateur pour usage dans un systéme microéléctromécanique Expired - Lifetime EP1323668B9 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR2001088869 2001-12-31
KR10-2001-0088869A KR100466373B1 (ko) 2001-12-31 2001-12-31 미소 전자 기계 구조의 발전기

Publications (4)

Publication Number Publication Date
EP1323668A2 EP1323668A2 (fr) 2003-07-02
EP1323668A3 EP1323668A3 (fr) 2005-01-19
EP1323668B1 EP1323668B1 (fr) 2006-06-07
EP1323668B9 true EP1323668B9 (fr) 2006-12-13

Family

ID=36643347

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02020901A Expired - Lifetime EP1323668B9 (fr) 2001-12-31 2002-09-18 Generateur pour usage dans un systéme microéléctromécanique

Country Status (5)

Country Link
US (1) US6750596B2 (fr)
EP (1) EP1323668B9 (fr)
JP (1) JP3646108B2 (fr)
KR (1) KR100466373B1 (fr)
DE (1) DE60212054T2 (fr)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030087677A1 (en) * 2001-10-18 2003-05-08 Edward Miller Self-powered wireless communication device and method of use
US7411337B2 (en) * 2001-11-16 2008-08-12 Intel Corporation Electrical energy-generating system and devices and methods related thereto
KR100524343B1 (ko) * 2003-10-30 2005-10-28 한국과학기술연구원 이중 박막을 갖는 마이크로 시스템용 발전기
US7057330B2 (en) * 2003-12-18 2006-06-06 Palo Alto Research Center Incorporated Broad frequency band energy scavenger
US7397169B2 (en) * 2004-03-19 2008-07-08 Lawrence Livermore National Security, Llc Energy harvesting using a thermoelectric material
DE102005003453B4 (de) * 2005-01-25 2010-07-08 Continental Automotive Gmbh Antrieb, insbesondere Piezoantrieb, für ein Kraftstoff-Einspritzventil
KR100635405B1 (ko) 2005-06-10 2006-10-19 한국과학기술연구원 마이크로 발전기
US7345407B2 (en) * 2005-11-18 2008-03-18 Adaptivenergy, Llc. Human powered piezoelectric power generating device
DE602006009761D1 (de) * 2006-03-28 2009-11-26 Infineon Technologies Sensonor Vorrichtung zum Sammeln von Energie
ITRM20070079A1 (it) * 2007-02-15 2008-08-16 Wisepower S R L Generatore piezoelettrico bistabile.
US7498681B1 (en) * 2007-03-21 2009-03-03 Sandia Corporation Mechanical vibration to electrical energy converter
US8390137B2 (en) * 2009-10-01 2013-03-05 Mark Bryfogle Fluid-driven electrical generator
KR20110040710A (ko) * 2009-10-12 2011-04-20 에스티마이크로일렉트로닉스 (그레노블 2) 에스아에스 열전 발전기
FR2951319B1 (fr) * 2009-10-12 2011-12-09 St Microelectronics Crolles 2 Generateur thermoelectrique
FR2951874B1 (fr) 2009-10-26 2011-12-09 St Microelectronics Crolles 2 Generateur thermoelectrique
FR2951873B1 (fr) * 2009-10-26 2011-12-09 St Microelectronics Crolles 2 Dispositif de conversion d'energie thermique en electricite
US8415859B2 (en) * 2009-10-27 2013-04-09 Korea University Research And Business Foundation Piezoelectric nanodevices
FR2982424B1 (fr) * 2011-11-09 2014-01-10 Commissariat Energie Atomique Systeme de conversion d'energie thermique en energie electrique a efficacite amelioree
FR3009907B1 (fr) * 2013-08-20 2015-09-18 Commissariat Energie Atomique Dispositif de conversion d'energie thermique en energie electrique
FR3032845B1 (fr) * 2015-02-13 2017-03-10 St Microelectronics Crolles 2 Sas Dispositif de recuperation d'energie thermique
US10298152B2 (en) * 2015-04-20 2019-05-21 Lawrence Livermore National Security, Llc Harvesting mechanical and thermal energy by combining nanowires and phase change materials
US10682845B2 (en) 2015-08-10 2020-06-16 Buerkert Werke Gmbh Film transducer
US10955599B2 (en) 2016-04-01 2021-03-23 Infineon Technologies Ag Light emitter devices, photoacoustic gas sensors and methods for forming light emitter devices
US10347814B2 (en) 2016-04-01 2019-07-09 Infineon Technologies Ag MEMS heater or emitter structure for fast heating and cooling cycles
US10681777B2 (en) 2016-04-01 2020-06-09 Infineon Technologies Ag Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures
CN108725846B (zh) * 2018-05-03 2020-10-27 北京工业大学 感应加热的液体蒸发型微推进器及其制备方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1016502B (de) * 1956-04-27 1957-09-26 Boris V Schlippe Elektro-thermisches Geraet zur Verrichtung mechanischer Arbeit
US4031704A (en) * 1976-08-16 1977-06-28 Moore Marvin L Thermal engine system
US4356697A (en) * 1980-08-27 1982-11-02 White Eugene W Heat engines
JPH01248976A (ja) * 1988-03-28 1989-10-04 Nec Corp 液体燃料式熱電発電機
DE4403180C1 (de) * 1994-02-02 1995-03-16 Hansa Metallwerke Ag Einrichtung zur Umwandlung von in Fluidsystemen herrschenden Druckschwankungen in elektrische Energie
JPH08118632A (ja) * 1994-10-19 1996-05-14 Fujitsu Ltd インクジェットヘッド
DE19721349C1 (de) * 1997-05-22 1999-12-09 Erich Mehnert Bewegungsvorrichtung
DE19722249A1 (de) * 1997-05-28 1998-12-03 Andreas Foerster Wärmekraftmaschine mit geschlossenem Kreislauf
CA2426823A1 (fr) * 2000-10-25 2002-10-24 Washington State University Research Foundation Microtransducteurs piezo-electriques, procedes d'utilisation et procedes de fabrication correspondants
KR100494067B1 (ko) * 2002-02-25 2005-06-13 한국과학기술연구원 기포를 이용한 미소 전자 기계 구조의 발전장치

Also Published As

Publication number Publication date
US20030122448A1 (en) 2003-07-03
US6750596B2 (en) 2004-06-15
KR100466373B1 (ko) 2005-01-14
EP1323668A2 (fr) 2003-07-02
EP1323668A3 (fr) 2005-01-19
EP1323668B1 (fr) 2006-06-07
DE60212054T2 (de) 2006-12-14
JP3646108B2 (ja) 2005-05-11
KR20030058420A (ko) 2003-07-07
JP2003211397A (ja) 2003-07-29
DE60212054D1 (de) 2006-07-20

Similar Documents

Publication Publication Date Title
EP1323668B9 (fr) Generateur pour usage dans un systéme microéléctromécanique
EP1528609B1 (fr) Générateur pour un micro-système ayant deux diaphragmes
US7329959B2 (en) Micro power generator and apparatus for producing reciprocating movement
EP1979939B1 (fr) Commutateur thermique/électrique miniaturisé à haute conductivité
US6975060B2 (en) Meso-to-micro-scaleable device and methods for conversion of thermal energy to electrical energy
US20060042676A1 (en) Thermoelectric device and method of manufacturing the same
CA2506584A1 (fr) Thermocontact, procedes d'utilisation et procedes de realisation
US20050193736A1 (en) Steam engine
JP2004235638A (ja) 微細加工素子およびその製造方法
JP2007221126A (ja) 圧力接触部設計のパワー半導体モジュール
US20080047701A1 (en) Electrowetting based heat spreader
JP2002144297A (ja) 温度差サイクル発電システム、そのための可変容量コンデンサ及びその製造方法
TW200306598A (en) A piezoelectrically actuated liquid metal switch
JP5402346B2 (ja) 放熱装置
TW200421643A (en) Push-mode latching relay
JP5076727B2 (ja) 断熱容器
CN2641804Y (zh) 突跳式多联体多功能温控器
Ruhhammer et al. Bistable switching with a thermoelectrically driven thermopneumatic actuator
CN113460951A (zh) 一种主动式mems固态制冷器件及其制造方法
JP2014211149A (ja) アクチュエータ
PL240482B1 (pl) Metoda poprawy osiągów generatora termoelektrycznego z wykorzystaniem pracy impulsowej
JP2004257310A (ja) ポンプ

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20020918

AK Designated contracting states

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

AKX Designation fees paid

Designated state(s): CH DE FR GB LI NL

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): CH DE FR GB LI NL

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REF Corresponds to:

Ref document number: 60212054

Country of ref document: DE

Date of ref document: 20060720

Kind code of ref document: P

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: DIEHL & PARTNER AG

ET Fr: translation filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

NLR4 Nl: receipt of corrected translation in the netherlands language at the initiative of the proprietor of the patent
26N No opposition filed

Effective date: 20070308

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20100914

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20100921

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20100916

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 20100910

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20100915

Year of fee payment: 9

REG Reference to a national code

Ref country code: NL

Ref legal event code: V1

Effective date: 20120401

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20110918

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20120531

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 60212054

Country of ref document: DE

Effective date: 20120403

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110930

Ref country code: NL

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120401

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120403

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110930

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110930

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110918