EP1245527B1 - Vorratsbehälter für flüssige, hochreine Substanzen mit einer Einrichtung zur Reinigung der Anschlussstücke und Rohrleitungen des Vorratsbehälters - Google Patents
Vorratsbehälter für flüssige, hochreine Substanzen mit einer Einrichtung zur Reinigung der Anschlussstücke und Rohrleitungen des Vorratsbehälters Download PDFInfo
- Publication number
- EP1245527B1 EP1245527B1 EP01108033A EP01108033A EP1245527B1 EP 1245527 B1 EP1245527 B1 EP 1245527B1 EP 01108033 A EP01108033 A EP 01108033A EP 01108033 A EP01108033 A EP 01108033A EP 1245527 B1 EP1245527 B1 EP 1245527B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- vessel
- storage vessel
- solvent
- container
- shut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
- B67D7/0288—Container connection means
- B67D7/0294—Combined with valves
Definitions
- the invention relates to a storage container for liquid substances that are supplied to a consumer, with a device for cleaning the connectors and Pipes when changing the storage container according to the generic term of claim 1.
- Such a consumer is, for example, a reactor for chemical vapor deposition (CVD).
- CVD reactors become chips, i.e. integrated microcircuits and the like Components manufactured.
- facilities for the production of hard material layers or glass fibers be supplied with liquid chemicals.
- substances of the highest order for the corresponding processes Purity can be used.
- the object of the invention is therefore to provide an easy-to-use reliable device for cleaning the connecting pieces and pipes of the storage container in the preamble of claim 1 to provide type.
- the storage container is a container together with the solvent container and / or one evacuated container designed as a vacuum source for serves the rinsing process.
- a waste container for the used for rinsing, used solvents can be provided. This can also can be combined with the evacuated container.
- the reservoir can with one, with two or three further containers form a container, which when changing the storage container exchanged as a whole for a new container becomes.
- the container can be next to the storage container for the liquid substance only one container for the solvent include.
- the vacuum for cleaning the connectors can then be generated, for example, by a vacuum pump and can absorb the used solvent a waste container that is independent of the container must be provided.
- the container preferably comprises, in addition to the storage container both a solvent container and an evacuated one Container as a vacuum source, which is also the container can form to absorb the used solvent.
- the container for the solvent or the evacuated container and, if next to the evacuated container, a separate one Waste container for the used solvent is present, can be done in different ways with the storage container be united in one container. So besides, below or inside the liquid storage container Substance can be arranged. There can be several containers for the solvent, the vacuum and / or for the used solvent be provided. The containers can be or multiple jackets may be formed around the main container. However, they always form together with the storage container Container used for transport and storage can be.
- the evacuated container can be a solid absorbent contain, for example a molecular sieve, e.g. B. a zeolite.
- the absorbent can be used to maintain the Vacuum can be provided in the evacuated container, i.e. around leaking into the evacuated container To adsorb air.
- the evacuated container used that Absorbs solvent serves the absorbent to absorb the solvent.
- the properties of the absorbent are then adapted to the solvent. That is, with hydrophobic solvents such as hexane uses a hydrophobic absorbent, and at hydrophilic solvents, e.g. Ethanol a hydrophilic Adsorbent.
- the solvent container, the evacuated container and if necessary the container for the used solvent are connected to the connector of the compressed gas line via a shut-off device and the riser can be connected, namely preferably between the coupling piece and the shut-off device the compressed gas line or between the coupling piece and the Shut-off device of the riser.
- the shut-off devices can Valves, taps or the like.
- shut-off devices in the fittings of the compressed gas line and the riser and the shut-off devices through which the solvent container, the evacuated container and possibly the container for the used solvent to the connectors the compressed gas line and the riser line are preferably connected to a plate that with Channels is provided to which the connection pieces next to the riser for the compressed gas line and the riser are connected and, if necessary, a nozzle for supply of the compressed gas in the storage container.
- Another one Channel in the plate can form the connecting line that the connectors for the compressed gas line and the riser connects with each other.
- Such a plate with attached shut-off valves which too referred to as "Surface Mounted Device” through short channels and thus small dead volumes, a better one Sealing and easy assembly, because e.g. the shut-off devices only in corresponding threaded holes with a Seal must be screwed into the plate.
- the connectors and if necessary the coupling pieces for the Compressed gas line and the riser can also be in this Plate integrated.
- shut-off devices in the fittings of the compressed gas line and the riser and the shut-off devices, via which the Solvent container, the evacuated container and / or the Containers for the used solvent to the connection pieces the compressed gas line and the riser line is preferably designed to be automatically actuated.
- the shut-off devices can be operated pneumatically or be electrically actuated.
- a control unit is preferably provided, by means of which the Shut-off devices can be controlled so that the cleaning process after changing the container with the storage container expires automatically.
- shut-off devices from an external control unit electrical control lines are controlled, it is advantageous the control line from the shut-off devices with one To connect plug, socket or the like plug part that for connection to the control unit with a counterpart part is pluggable. This allows you to change containers none when connecting the control line to the control unit Errors occur.
- the plug-in part can also be the level measuring device in the reservoir with the level indicator connect.
- a storage container 1 which is up to height 2 is filled with a liquid substance to a compressed gas line 3 and an extraction line 4 connected to a consumer, for example a CVD reactor.
- the compressed gas line 3 and line 4 each have Valve 5, 6, in particular valve 6 in the line 4 can also be provided on a manifold via which the liquid substance is supplied to several consumers.
- the valves 5, 6 are via connectors 7, 8 with coupling pieces 10, 11 connected.
- a connector 13 is provided, the Z. B. above a nozzle 14 in the container 1 above the substance 2 opens and a valve 15 and a coupling piece 16, which is connected to the coupling piece 10 can be.
- the under the pressure of the supplied via the connector 13 Compressed gas is available to supply line 4 to the consumer, is on the cover 12 in the lower part of the cover 1 projecting extraction line designed as a riser 17, which is connected to a connector 18, the with a valve 19 and a coupling piece 21 for connection is provided with the coupling piece 11.
- the one with the other connectable coupling pieces 10 and 16 and 11 and 21 can formed by conventional connection fittings for gas pipes his.
- the two connecting pieces 13 and 18 are through a connecting line 22 connected to a valve 20.
- a container 23 for a solvent 24 connected via a valve 25, further via a valve 26 the container 27 which is evacuated and a solid absorbent 28 contains.
- the connection of the container 24 and / or 28 can also be connected to the connector 13 and / or the connecting line 22 take place.
- the containers 23 and 27 form together with the storage container 1 a container 30 ( Figure 2).
- the new container 30 is with closed valves 15, 19, 20, 25 and 26 supplied.
- the Valves 5 and 6 are connected before removing the one previously Container closed.
- the valve 26 is then closed and the valve 25 opened, causing solvent 24 from the Container 23 in the connectors 7, 8, 13, 18 and the Connection line 22 flows.
- After closing the valve 25 valve 26 is opened so that the solvent in the connectors 7, 8, 13, 18 and the connecting line 22 sucked into the container 27 and of the contained therein Absorbent 28 is sucked up. This process can can be repeated several times.
- valves are 15, 19, 20, 25 and 26 automatically, i.e. for example pneumatic or electrically operated, namely via electrical Control lines 31 to 34, which have a plug connection the plug-in parts 37, 38 can be connected to a control unit 39 are.
- the valves 5 and 6 of the connecting pieces 7, 8 are through the control unit 39 can be actuated via control lines 35, 36.
- the valves 20, 25 and 26 closed.
- valves 5 and 15 and 6 and 19 are opened to pressurize the liquid substance to feed the consumer via line 4.
- the dash-dotted in Figure 1 can Section 40 of the device as "Surface Mounted Device” in a plate 41 can be integrated, which is also the storage container 1 closes.
- the container 23 for the solvent and the evacuated container 27 are inside the storage container 1 arranged.
- the connectors 7, 8, 13 and 18 also through holes in the Flange 41 formed or integrated in the valves 5, 6, 15 and 19 can be, as well as the coupling pieces 10, 11, 16th and 21.
- the connecting line 20 between the connections 7 and 8 may be provided.
- the container has 1 shows a tire-shaped extension 42 with a border 43 e.g. attach a protective cover with a tension ring can.
- FIG. 2 is also the container 30 of FIG. 3 as Barrel with a peripheral wall 45, an inwardly curved bottom 46 with an annular base 47 and an intermediate wall 48 formed, with the intermediate wall 48 of the Approach 42 connects with the border 43.
- the storage container 1 with the riser or extraction line 17 is concentric with the peripheral wall 45 inside the barrel 30 arranged and supported on the floor 46.
- the space between the peripheral wall 45, the bottom 46, the intermediate wall 48 and the Storage container 1 is evacuated and forms container 27 for the solvent used; he can also with one solid absorbent, for example zeolite filled his. Because the used solvent is absorbed the risk of fire is reduced if e.g. the peripheral wall 45 is damaged. Likewise, the liquid substance 2 absorbed in the container 1 when the container 1 is damaged and thus the safety of the container 30 is significantly increased.
- the connector 49, the container 27 with the valve 26 (Fig. 1) connects is provided in the intermediate wall 48.
- the solvent container 23 is by a Storage container 1 arranged pipe spiral in the space 27 formed. Instead, a ring or hollow cylinder can also be used form the solvent container around the storage container 1.
- the coupling pieces 16, 21 and the "surface mounted device” 40 are arranged in the neck 42.
- the "Surface Mounted Device” 40 is located on the flange 41, which is connected to the flange 52 is connected to the reservoir 1.
- Line 51, the the solvent container 23 with the valve 25 (Fig. 1) in the "Surface Mounted Device” connects to the bottom connected to the solvent tank 23, which over the the connecting piece 53 passing through the intermediate wall 48 is filled becomes.
- the lid 54 on the border 43 closes the container 30 downwards.
- 3 is a part of the actuators 55-58 for actuating valves 15, 19, 20, 25 and 26 (Fig. 1).
Description
- Fig. 1
- eine schematische Ansicht eines Gebindes mit Vorratsbehälter sowie einen Behälter für das Lösungsmittel und einen Behälter als Vakuumquelle und zur Aufnahme des verbrauchten Lösungsmittels; und
- Fig. 2
- schematisch einen Schnitt durch ein Gebinde aus dem Vorratsbehälter und in den im Vorratsbehälter angeordneten Behältern für das Lösungsmittel bzw. als Vakuumquelle und zur Aufnahme des verbrauchten Lösungsmittels, und
- Fig. 3
- einen Schnitt durch eine an der Ausführungsform eines solchen Gebindes.
Claims (14)
- Vorratsbehälter (1) für flüssige Substanzen, die einem Verbraucher zugeführt werden, mit einer Einrichtung zur Reinigung der Anschlussstücke (13, 18) beim Wechsel des Vorratsbehälters wobei der Vorratsbehälter ein mit einem Absperrorgan (115) und einem Kupplungsstück (16) versehenes Anschlussstück (13) zum Anschluss an ein mit einem Kupplungsstück (10) versehenes Anschlussstück (17) zu einer Druckgasleitung (3) mit einem Absperrorgan (15) und ein mit einem Absperrorgan (19) und einem Kupplungsstück (21) versehenes Anschlussstück (18) zum Anschluss einer Entnahmeleitung (17) in dem Vorratsbehälter (1) an ein mit einem Kupplungsstück (11) versehenes Anschlussstück (8) mit einem Absperrorgan (6) zur Zufuhr der in dem Behälter mit dem Druckgas beaufschlagten Substanz zu dem Verbraucher aufweist, wobei ein Lösungsmittelbehälter (23) zum Spülen der Anschlussstücke, ein Behälter (27) für das verbrauchte Lösungsmittel und eine Vakuumquelle zum Saugen des Lösungsmittels in die Anschlussstücke vorgesehen ist, dadurch gekennzeichnet, dass der Lösungsmittelbehälter (23) und/oder ein die Vakuumquelle bildender evakuierter Behälter (27) mit dem Vorratsbehälter (1) ein Gebinde (30) bildet.
- Vorratsbehälter nach Anspruch 1, dadurch gekennzeichnet, dass der Behälter für das verbrauchte Lösungsmittel ein Gebinde (30) mit dem Vorratsbehälter (1) bildet.
- Vorratsbehälter nach Anspruch 1, dadurch gekennzeichnet, dass der evakuierte Behälter (27) den Behälter für das verbrauchte Lösungsmittel bildet.
- Vorratsbehälter nach Anspruch 1 oder 3, dadurch gekennzeichnet, dass der evakuierte Behälter (27) ein festes Absorptionsmittel (28) enthält.
- Vorratsbehälter nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Lösungsmittelbehälter (23), der evakuierte Behälter (27) und/oder der Behälter für das verbrauchte Lösungsmittel über ein Absperrorgan (25, 26) an das Anschlussstück (13) zur Druckgasleitung (3) und an das Anschlussstück (18) zur Entnahmeleitung (17) anschließbar ist.
- Vorratsbehälter nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Anschlussstück (13) zur Druckgasleitung (3) und das Anschlussstück (18) zur Entnahmeleitung (17) über ein Verbindungsleitung (22) mit einem Absperrorgan (20) verbunden sind.
- Vorratsbehälter nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Absperrorgane (15, 19) in den Anschlussstücken (13, 18) zur Druckgasleitung (3) bzw. zur Entnahmeleitung (17) und/oder die Absperrorgane (25, 26), über die der Lösungsmittelbehälter (23), der evakuierte Behälter (27) und/oder Behälter für das verbrauchte Lösungsmittel an die Anschlussstücke (13) und (18) an die Druckgasleitung (3) bzw. die Entnahmeleitung (17) angeschlossen sind, an einer Platte (41) vorgesehen sind, die Kanäle zum Anschluss der Anschlussstücke (13, 18) an das Innere des Vorratsbehälters (1) bzw. der Entnahmeleitung (17) und/oder der Verbindungsleitung (22) aufweist.
- Vorratsbehälter nach Anspruch 7, dadurch gekennzeichnet, dass der Flansch (41) die Öffnung des Vorratsbehälters (1) verschließt.
- Vorratsbehälter nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Absperrorgane (15, 19) in den Anschlussstücken (13, 18) zu der Druckgasleitung (3) bzw. der Entnahmeleitung (17) und/oder die Absperrorgane (25, 26) über die der Lösungsmittelbehälter (23), der evakuierte Behälter (27) und/oder der Behälter für das verbrauchte Lösungsmittel an die Anschlussstücke (13, 18) angeschlossen sind, und/oder das Absperrorgan (20) in der Verbindungsleitung (22) über Steuerleitungen (31 bis 34) automatisch betätigbar ausgebildet sind.
- Vorratsbehälter nach Anspruch 9, dadurch gekennzeichnet, dass die Steuerleitungen (31 bis 34) von den Absperrorganen (14, 19, 20, 25, 26) mit einem Steckteil (37) verbunden sind, das zur Verbindung mit einer Steuereinheit (39) mit einem Gegensteckteil (38) zusammensteckbar ist.
- Vorratsbehälter nach Anspruch 10, dadurch gekennzeichnet, dass das Steckteil (37) als Schnellkupplung ausgebildet ist.
- Vorratsbehälter nach Anspruch 10 oder 11, dadurch gekennzeichnet, dass in dem Vorratsbehälter (1) eine Füllstandsmeßeinrichtung vorgesehen ist, deren Leitung an das Steckteil (37) angeschlossen ist, um sie mit einer Füllstandsanzeige zu verbinden.
- Vorratsbehälter nach einem der vorstehenden Ansprüche, dadurch gekennzeichnet, dass er im Inneren eines Faßes angeordnet ist und der Raum zwischen dem Vorratsbehälter (1) und der Umfangswand (45) des Faßes den Behälter (27) für das verbrauchte Lösungsmittel bildet.
- Vorratsbehälter nach Anspruch 13, dadurch gekennzeichnet, dass der Lösungsmittelbehälter (23) um den Vorratsbehälter (1) in dem Raum zwischen dem Vorratsbehälter (1) und der Umfangswand (45) angeordnet ist.
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01108033A EP1245527B1 (de) | 2001-03-29 | 2001-03-29 | Vorratsbehälter für flüssige, hochreine Substanzen mit einer Einrichtung zur Reinigung der Anschlussstücke und Rohrleitungen des Vorratsbehälters |
DE50100049T DE50100049D1 (de) | 2001-03-29 | 2001-03-29 | Vorratsbehälter für flüssige, hochreine Substanzen mit einer Einrichtung zur Reinigung der Anschlussstücke und Rohrleitungen des Vorratsbehälters |
AT01108033T ATE227242T1 (de) | 2001-03-29 | 2001-03-29 | Vorratsbehälter für flüssige, hochreine substanzen mit einer einrichtung zur reinigung der anschlussstücke und rohrleitungen des vorratsbehälters |
US09/837,631 US6615851B2 (en) | 2001-03-29 | 2001-04-18 | Storage vessel for liquid high-purity substances |
KR1020010086977A KR100863082B1 (ko) | 2001-03-29 | 2001-12-28 | 고순도 액체 물질용 저장 용기 |
CNB021032556A CN1214956C (zh) | 2001-03-29 | 2002-02-01 | 液态高纯度物质的储存容器 |
JP2002086165A JP4146148B2 (ja) | 2001-03-29 | 2002-03-26 | 高純度液体物質の貯蔵容器 |
SG200201770A SG104305A1 (en) | 2001-03-29 | 2002-03-27 | Storage vessel for liquid high-purity substances |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01108033A EP1245527B1 (de) | 2001-03-29 | 2001-03-29 | Vorratsbehälter für flüssige, hochreine Substanzen mit einer Einrichtung zur Reinigung der Anschlussstücke und Rohrleitungen des Vorratsbehälters |
US09/837,631 US6615851B2 (en) | 2001-03-29 | 2001-04-18 | Storage vessel for liquid high-purity substances |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1245527A1 EP1245527A1 (de) | 2002-10-02 |
EP1245527B1 true EP1245527B1 (de) | 2002-11-06 |
Family
ID=26076521
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01108033A Expired - Lifetime EP1245527B1 (de) | 2001-03-29 | 2001-03-29 | Vorratsbehälter für flüssige, hochreine Substanzen mit einer Einrichtung zur Reinigung der Anschlussstücke und Rohrleitungen des Vorratsbehälters |
Country Status (3)
Country | Link |
---|---|
US (1) | US6615851B2 (de) |
EP (1) | EP1245527B1 (de) |
DE (1) | DE50100049D1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE502004012396D1 (de) * | 2004-02-20 | 2011-05-26 | Cs Clean Systems Ag | Vorrichtung und Verfahren zum Nachfüllen eines Blasenverdampfers |
JP5316302B2 (ja) * | 2008-08-13 | 2013-10-16 | 三菱マテリアル株式会社 | クロロシラン液の収納容器及びこの収納容器用閉止蓋 |
EP2942107B1 (de) * | 2014-05-07 | 2018-10-17 | Basf Se | Entnahmesystem |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS63264199A (ja) * | 1987-04-22 | 1988-11-01 | Hitachi Ltd | 高純度水製造装置 |
US4723967A (en) * | 1987-04-27 | 1988-02-09 | Advanced Technology Materials, Inc. | Valve block and container for semiconductor source reagent dispensing and/or purification |
JPH02270322A (ja) * | 1989-04-11 | 1990-11-05 | Taiyo Sanso Co Ltd | 半導体ウェハの洗浄装置 |
JP2614338B2 (ja) * | 1990-01-11 | 1997-05-28 | 株式会社東芝 | 液体ソース容器 |
US5108015A (en) * | 1990-07-06 | 1992-04-28 | Fluoroware, Inc. | Multiple tube to bung coupling |
US5038840A (en) * | 1990-07-31 | 1991-08-13 | Olin Corporation | Bubbler container automatic refill system |
US5148945B1 (en) * | 1990-09-17 | 1996-07-02 | Applied Chemical Solutions | Apparatus and method for the transfer and delivery of high purity chemicals |
JPH0692558A (ja) * | 1990-09-28 | 1994-04-05 | Otis Elevator Co | 発進時の揺れ及び過剰加速を低減するエレベータの発進制御装置 |
JPH05136114A (ja) * | 1991-11-08 | 1993-06-01 | Tadahiro Omi | 超純水供給装置及び基体洗浄方法並びに超純水製造装置及び超純水製造方法 |
DE4142567C1 (de) * | 1991-12-21 | 1993-06-09 | Burdosa Ing. Herwig Burgert, 6305 Buseck, De | |
JP2833944B2 (ja) * | 1992-11-27 | 1998-12-09 | 直江津電子工業株式会社 | 超純水の製造方法 |
US5607002A (en) * | 1993-04-28 | 1997-03-04 | Advanced Delivery & Chemical Systems, Inc. | Chemical refill system for high purity chemicals |
US5878793A (en) * | 1993-04-28 | 1999-03-09 | Siegele; Stephen H. | Refillable ampule and method re same |
US5964254A (en) * | 1997-07-11 | 1999-10-12 | Advanced Delivery & Chemical Systems, Ltd. | Delivery system and manifold |
US5447640A (en) * | 1993-06-28 | 1995-09-05 | Permelec Electrode Ltd. | Method and apparatus for sterilization of and treatment with ozonized water |
JPH08126886A (ja) * | 1994-10-28 | 1996-05-21 | Japan Organo Co Ltd | 超純水の製造方法及び装置 |
US5671591A (en) * | 1995-05-01 | 1997-09-30 | Ashland, Inc. | Integrated container moulding and filling facility |
JP3673000B2 (ja) * | 1996-01-17 | 2005-07-20 | ペルメレック電極株式会社 | 電解水製造用電解槽 |
JP3357241B2 (ja) * | 1996-04-17 | 2002-12-16 | オルガノ株式会社 | 超純水中の微粒子測定用膜等の洗浄方法 |
JP3568709B2 (ja) * | 1996-09-30 | 2004-09-22 | 株式会社東芝 | 超純水の純化方法及び純化装置 |
US6098848A (en) * | 1997-12-25 | 2000-08-08 | Nisso Engineering Co., Ltd | Method and apparatus for connecting a fluid reservoir with pipelines |
EP1309820B1 (de) * | 2000-08-04 | 2007-09-26 | FujiFilm Electronic Materials USA, Inc. | Automatisches auffüllsystem für hochreine oder kontaminationsempfindliche chemikalien |
-
2001
- 2001-03-29 EP EP01108033A patent/EP1245527B1/de not_active Expired - Lifetime
- 2001-03-29 DE DE50100049T patent/DE50100049D1/de not_active Expired - Lifetime
- 2001-04-18 US US09/837,631 patent/US6615851B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1245527A1 (de) | 2002-10-02 |
US6615851B2 (en) | 2003-09-09 |
DE50100049D1 (de) | 2002-12-12 |
US20020153031A1 (en) | 2002-10-24 |
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