EP1234982B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP1234982B1
EP1234982B1 EP20010830121 EP01830121A EP1234982B1 EP 1234982 B1 EP1234982 B1 EP 1234982B1 EP 20010830121 EP20010830121 EP 20010830121 EP 01830121 A EP01830121 A EP 01830121A EP 1234982 B1 EP1234982 B1 EP 1234982B1
Authority
EP
European Patent Office
Prior art keywords
pumping
pump
vacuum pump
pumping section
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP20010830121
Other languages
German (de)
English (en)
Other versions
EP1234982A1 (fr
Inventor
Roberto Cerruti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Priority to EP20010830121 priority Critical patent/EP1234982B1/fr
Priority to DE2001601368 priority patent/DE60101368T2/de
Publication of EP1234982A1 publication Critical patent/EP1234982A1/fr
Application granted granted Critical
Publication of EP1234982B1 publication Critical patent/EP1234982B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/02—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid
    • F04F5/04—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid displacing elastic fluids

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Claims (8)

  1. Une pompe à vide (5) comprenant une pluralité de sections de pompage, agencées entre un conduit d'aspiration (6) et un conduit d'échappement (16) et comprenant au moins une section de pompage (1, 2, 3) turbo-moléculaire, caractérisée en ce que ladite pompe comprend une section de pompage (4) du type d'une pompe à éjecteur ou à effet venturi.
  2. Une pompe à vide (5) selon la revendication 1, comprenant une première section de pompage (1) ayant des étages de pompage avec des disques de rotor ailetés (22a à 22h), une deuxième section de pompage (2) ayant des étages de pompage ayant des disques de rotor lisses (24a à 24f), une troisième section de pompage (3) ayant au moins un étage de pompage à disque de rotor denté, et une quatrième section de pompage formée de ladite section de pompage (4) du type de pompe à éjecteur ou à effet venturi.
  3. Une pompe à vide (5) selon la revendication 1 ou 2, dans laquelle ladite section de pompage à éjecteur (4) comprend une pompe à effet venturi, actionnée par de l'eau.
  4. Une pompe à vide (5) selon la revendication 3, dépendant de la revendication 2, dans laquelle ladite pompe à effet venturi comprend un conduit d'admission (14) pour de l'eau pressurisée, un conduit d'aspiration (8) relié à un orifice de décharge de ladite troisième section de pompage (3), et un conduit de décharge, relié audit conduit d'échappement (16).
  5. Une pompe à vide (5) selon la revendication 3, dans laquelle ladite pompe à effet venturi est alimentée en eau depuis un circuit de refroidissement (12) de ladite au moins une section de pompage turbo-moléculaire.
  6. Une pompe à vide (5) selon la revendication 2, dans laquelle ladite section de pompage à disque de rotor denté comprend un rotor (26) ayant des dents (34) rectilignes.
  7. Une pompe à vide (5) selon la revendication 6, dans laquelle ledit rotor (26) ayant des dents rectilignes est couplé à un anneau statorique (30), et dans lequel un canal libre (36) effilé est défini entre ledit rotor (26) et ledit anneau statorique (30).
  8. Une pompe à vide (5) selon l'une quelconque des revendications précédentes, dans laquelle lesdites sections de pompage (1, 2, 3, 4) forment un corps unique.
EP20010830121 2001-02-22 2001-02-22 Pompe à vide Expired - Lifetime EP1234982B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP20010830121 EP1234982B1 (fr) 2001-02-22 2001-02-22 Pompe à vide
DE2001601368 DE60101368T2 (de) 2001-02-22 2001-02-22 Vakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20010830121 EP1234982B1 (fr) 2001-02-22 2001-02-22 Pompe à vide

Publications (2)

Publication Number Publication Date
EP1234982A1 EP1234982A1 (fr) 2002-08-28
EP1234982B1 true EP1234982B1 (fr) 2003-12-03

Family

ID=8184417

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20010830121 Expired - Lifetime EP1234982B1 (fr) 2001-02-22 2001-02-22 Pompe à vide

Country Status (2)

Country Link
EP (1) EP1234982B1 (fr)
DE (1) DE60101368T2 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE519647C2 (sv) * 2002-05-03 2003-03-25 Piab Ab Vakuumpump och sätt att tillhandahålla undertryck
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0229353D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
JP2004263635A (ja) * 2003-03-03 2004-09-24 Tadahiro Omi 真空装置および真空ポンプ
GB0322889D0 (en) 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE102006043327A1 (de) * 2006-09-15 2008-03-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
DE102012220442A1 (de) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems
EP3267040B1 (fr) 2016-07-04 2023-12-20 Pfeiffer Vacuum Gmbh Pompe turbomoléculaire

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0784871B2 (ja) 1986-06-12 1995-09-13 株式会社日立製作所 真空排気装置
JPH01277698A (ja) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk 複合型真空ポンプ
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
IT1241431B (it) * 1990-03-09 1994-01-17 Varian Spa Pompa turbomolecolare perfezionata.

Also Published As

Publication number Publication date
DE60101368D1 (de) 2004-01-15
DE60101368T2 (de) 2004-10-14
EP1234982A1 (fr) 2002-08-28

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