EP1197983A1 - Elektronenstrahltransparentes Fenster - Google Patents

Elektronenstrahltransparentes Fenster Download PDF

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Publication number
EP1197983A1
EP1197983A1 EP01124495A EP01124495A EP1197983A1 EP 1197983 A1 EP1197983 A1 EP 1197983A1 EP 01124495 A EP01124495 A EP 01124495A EP 01124495 A EP01124495 A EP 01124495A EP 1197983 A1 EP1197983 A1 EP 1197983A1
Authority
EP
European Patent Office
Prior art keywords
electron beam
beam transparent
diamond
holding element
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01124495A
Other languages
German (de)
English (en)
French (fr)
Inventor
Peter Klaus Dr. Bachmann
Volker Dr. Van Elsbergen
Bernd Dr. David
Rainer Willi Eckart
Geoffrey Harding
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Koninklijke Philips NV
Original Assignee
Philips Corporate Intellectual Property GmbH
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Corporate Intellectual Property GmbH, Koninklijke Philips Electronics NV filed Critical Philips Corporate Intellectual Property GmbH
Publication of EP1197983A1 publication Critical patent/EP1197983A1/de
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H01J33/02—Details
    • H01J33/04—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/18—Windows permeable to X-rays, gamma-rays, or particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H01J2235/082—Fluids, e.g. liquids, gases

Definitions

  • the invention relates to an electron beam transparent window and to a method its manufacture, the window being an electron beam transparent film and a Element for supporting a peripheral area of the electron beam transparency Includes foil in the operating state.
  • the invention also relates to an X-ray source.
  • Such windows are used wherever sensitive objects from outside Conditions should be shielded, but still sufficient transparency for the passage of the electron beam is guaranteed.
  • LIMAX Liquid Metal Anode X-ray tube
  • Such an X-ray source essentially consists of one Electron source and a target from a circulating in the operating state of the emitter Metal.
  • the liquid metal is contained in a pump circuit and is used by pumped into a collecting pot via a stainless steel plate.
  • the electron beam hits the liquid metal flowing over the stainless steel plate and creates in it x-rays.
  • a window used here includes, for example a diamond foil, which is evaporated onto a silicon carrier substrate, followed by the carrier substrate partially for creating a window area or a passage zone for the electron beam is removed.
  • the window constructed in this way is directly in the Tube bulb inserted.
  • carrier substrate serves as a separating surface or auxiliary surface for the production of the window film, the holding element for Positioning aid of the film for the operating state.
  • the invention is therefore based on the object of an electron beam transparent window and to create a corresponding method for its production, which is used as a separation element different conditions or fluctuating conditions between can withstand two rooms safely.
  • a window for overpressure and Vacuum applications are provided, the pressure differences of more than 4 withstands bar in its operating state.
  • an electron beam transparent window which is one of electron beam transparent film separated from a carrier substrate and a holding element to support a peripheral area of the electron beam transparency Includes film in the operating state, wherein the holding element consists of a material which an adapted to the linear coefficient of thermal expansion of the film material, in Has sense of the same or similar, linear thermal expansion coefficient.
  • the electron-beam transparent film is preferably made of diamond with a thickness not larger than 10 ⁇ m.
  • the film can also be made of Molybdenum consist, possibly also of beryllium.
  • the holding element preferably consists of a material with a linear coefficient of thermal expansion less than or equal to 9x10 -6 / K.
  • a material with a linear coefficient of thermal expansion which is in the interval between 0.5 and 1 x10 -6 / K and 9x10 -6 / K lies.
  • the lower limit results from the linear coefficient of thermal expansion of diamond.
  • the linear coefficient of thermal expansion of the ideal diamond as a single or monocrystal is 0.5x10 -6 / K, when it is manufactured using the CVD process and the associated polycrystalline formation, the coefficient increases to a value of approx. 1x10 -6 / K ,
  • the holding element is preferably made of materials such as molybdenum with a linear coefficient of thermal expansion between 5-6x10 -6 / K, tungsten, titanium, tantalum and their low-alloys, glasses, ceramics with correspondingly low linear coefficients of thermal expansion, also made of diamond and possibly from materials that have a lower linear coefficient of thermal expansion than diamond, in particular as diamond with a polycrystalline design.
  • the electron beam transparencies exist Foil and the holding element in one piece from diamond.
  • the one-piece embodiment of the window with holding element which from a one-piece diamond plate with an original thickness of more than 10 ⁇ m is made.
  • the electron beam are transparent Foil and the holding element formed in two pieces, the film having a thickness of less than 10 ⁇ m, preferably less than 5 ⁇ m, via a connection layer on the Holding element is applied.
  • both the film and the holding element each made of diamond or each Molybdenum exist.
  • the proposed Window on a secure connection layer.
  • the material of the holding element is chosen so that its material behavior is matched to that of the diamond foil, so that both materials react to external influences with similar volume changes.
  • a window is obtained that can withstand pressure differences of more than 4 bar and is also suitable as a separating agent for rooms in which different Conditions prevail, for example due to different content (different compound fluids in various physical states).
  • connection layer of the two-piece embodiment is preferably by a Solder layer created from a metallic active solder or a glass solder. This is going on the connecting surfaces of the holding element applied.
  • the one in the metallic active solder contained carbide formers such as titanium or molybdenum react on the Contact surface with the foil - in the case of a diamond foil with the one contained in it Carbon - to metal carbides, which is a firm connection between the film and the holding element create.
  • An adhesive layer for example based, is also recommended an epoxy resin or a temperature-resistant ceramic adhesive, for example distributed by Aremco.
  • the connection layer can also be through a combined adhesive-soldering layer can be created, in particular the combination of glass solders with ceramic adhesives is to be emphasized.
  • At least one surface of the radiation-transmissive Film has at least one thickening - going beyond the surface of the film, the thickness of which is at least 10% of the film thickness.
  • the proposed thickening in the sense of mechanical reinforcement ribs or reinforcement patterns should preferably, but not restrictively, have a thickness which is in particular smaller is the total thickness of the film, but at least 10% of the film thickness.
  • the thickening are regular - for example in parallel reinforcing elements or in Shape of a gate - or also arranged irregularly. Stabilize these thickenings the film mechanically and still leave areas of higher transparency for the electron beam to.
  • EP 0 476 827 A1 which is X-ray transparent and thus reveals non-generic windows because windows are generally transparent to electron beams other framework conditions for transparency have to be fulfilled than x-ray transparencies.
  • an X-ray window is described, which is an X-ray transparent one Foil made of diamond, a carrier substrate, for example silicon, on the the diamond foil is deposited, as well as a carrier ring in the sense of a holding element to support a peripheral area of the X-ray transparent Includes slide.
  • the diamond foil is on their to increase their mechanical strength Reinforcement cross pieces also made of diamond.
  • the carrier ring is made of aluminum.
  • a flat carrier substrate with a carbon-containing gas after a vapor deposition process For example, according to the CVD process (chemical vapor deposition) so that a diamond foil with a thickness between 0.05 to 10 ⁇ m grows up.
  • CVD process chemical vapor deposition
  • a mask is put on, at the places where the reinforcing ribs should have recesses, and otherwise a diamond deposition counteracts. If the thickness of the reinforcement cross pieces is greater than that of the film, the deposition is ended, the mask is removed and the carrier substrate in the middle in the later one Window area etched away and connected to the carrier ring. The substrate can too completely etched away and the carrier ring made of aluminum directly with the diamond foil get connected.
  • a manufacturing process for the one-piece variant proposed according to the invention it is proposed in a first step to use a single-crystal or polycrystalline Manufacture diamond plate with a thickness between 10 to 1,000 ⁇ m and this plate in a central area over at least the cross section of the electron beam thinning the corresponding area to a thickness that is permeable to an electron beam.
  • This thinning process is preferably carried out by a known laser or Ion Beam.
  • This zone points according to the cross section of the electron beam typically rectangular dimensions of less than 5 to 2 mm.
  • edge areas of the central passage zone are less strong thin out so that the thickened areas in the outer area of the thinned out or elaborated zone.
  • the passage of the electron beam through the pass zone thus remains essentially undisturbed.
  • the thinning with different Machining depths are controlled by the input.
  • electrically conductive diamond Use come what, for example, by doping the diamond foil or Diamond plate with boron is reached during the vapor deposition.
  • the proposed window advantageously comes with the X-ray emitter Features of claim 16 for use, but of course its use is not on this Limited use.
  • FIG. 1 shows the cross section of a window 3 constructed in two parts from a diamond foil 1 and a separate, annular holding element 2, the foil 1 and the holding element 2 being connected to one another via an adhesive or solder layer 4.
  • the diamond foil 1 has a thickness of up to 10 ⁇ m and is transparent to an electron beam.
  • the material of the holding element 2 is characterized in that it is a temperature-resistant metal and has a linear coefficient of thermal expansion, the value of which is preferably less than 9x10 -6 / K and thus similar or equal to the coefficient of expansion of the diamond. This includes, for example, molybdenum.
  • the electron-beam transparent film is made of molybdenum and the holding element is made of a material which is adapted to molybdenum with regard to its expansion behavior.
  • the holding element 2 is not in the actual manufacture of the Diamond foil in the sense of a carrier substrate was involved, but only after production the diamond foil is connected to it.
  • the production of thin diamond layers is known and is carried out using gas separation methods.
  • the diamond foil is then removed from the carrier substrate on which it is placed was completely freed - for example by etching away or possibly by Grinding off the substrate - and with its peripheral areas or edge areas connected to the holding element 2, so that a transparent passage area 5 is formed.
  • the thickening can, for example, by the diamond foil corresponding structuring of the CVD carrier substrate to be coated during the Deposition process. But it is also possible, for example by Laser ablation or using an ion beam - starting from a thicker film - To remove areas that form the later electron-beam transparent areas.
  • a one-piece window which consists entirely of diamond.
  • Figure 4 shows a cross section of such a window.
  • the film (300a) and that In this embodiment, holding element (300b) form one unit, the window 300.
  • a diamond plate with a thickness greater than 10 ⁇ m, preferably up to 1,000 ⁇ m, used by laser or ion ablation over at least that Cross section of the electron beam corresponding area up to one for electrons permeable thickness is thinned. This creates the actual window area 307 with the holding element 300b.
  • the window area has the embodiment according to FIG. 5, which also consists of one piece Diamond is made, an unevenly thinned diamond plate and thus one around Thickened areas 310a, b reinforced pass area 308.
  • the electron beam can through the electron beam transparent regions 311a, b, c between the thickenings pass.
  • the windows constructed as proposed to the known windows consisting of a carrier substrate with a diamond film applied during the deposition process, have better pressure resistance.
  • the burst pressure is given as a measure of this.
  • the thickness and the diameter indicate geometry values for the respective window.
  • the diameter here is understood to mean the largest longitudinal dimension of the window opening or the passage zone in cm, which corresponds to the diameter for circular openings, the large axis of the ellipse for elliptical openings and the greatest side length for rectangular openings. It can be seen that the window samples with less strongly adhering foils on silicon carrier substrates (triangles) came off at a pressure of 3-4 bar.
  • the diamond foil was completely detached from the carrier substrate according to the invention and firmly connected to a separate holding element or window holder made of a material with a relatively low linear coefficient of thermal expansion via a separate connecting layer or, alternatively, produced in one piece.
  • the window thickness in ⁇ m must therefore be greater than 0.7 times the product of the diameter (cm) and the pressure difference between the two sides of the window.
  • FIG. 8 gives an overview of an X-ray emitter 20 which uses the LIMAX method works in which a window 3 proposed according to the invention with the described further developments can preferably be used.
  • the X-ray emitter consists of the X-ray bulb 21 and a liquid metal circuit system 22 together.
  • the x-ray piston 21 is closed in a vacuum-tight manner by the window 3.
  • An electron source is located in the vacuum space of the X-ray piston 21 in the form of a cathode 23, which in the operating state emits an electron beam 24 emitted, which hits through the window 3 through a liquid metal, which has a Steel plate is guided.
  • the liquid metal circuit system 22 is provided, which is composed of a piping system 25 in which the liquid metal is driven by a pump 26 in a section 27 on the outside of the Flow past window 3. After passing section 27, it passes into a heat exchanger 28, from which the heat generated is removed by means of a suitable cooling circuit becomes.
  • a suitable cooling circuit By the interaction of the electrons passing through the window with X-rays are generated in the liquid metal (i.e. the liquid metal serves as a target), through the window 3 and an X-ray exit window 29 in the piston 21 exit.
  • a doped diamond in order to charge the window during operation and thus distract from the conductivity, to prevent braking or stopping of the electron beam.
  • boron is suitable to reduce the specific resistance to less than 1,000 ohm cm to reduce.

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  • X-Ray Techniques (AREA)
EP01124495A 2000-10-13 2001-10-12 Elektronenstrahltransparentes Fenster Withdrawn EP1197983A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10050811 2000-10-13
DE10050811A DE10050811A1 (de) 2000-10-13 2000-10-13 Elektronenstrahltransparentes Fenster

Publications (1)

Publication Number Publication Date
EP1197983A1 true EP1197983A1 (de) 2002-04-17

Family

ID=7659686

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01124495A Withdrawn EP1197983A1 (de) 2000-10-13 2001-10-12 Elektronenstrahltransparentes Fenster

Country Status (4)

Country Link
US (1) US6625254B2 (ja)
EP (1) EP1197983A1 (ja)
JP (2) JP2002156499A (ja)
DE (1) DE10050811A1 (ja)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10130070A1 (de) * 2001-06-21 2003-01-02 Philips Corp Intellectual Pty Röntgenstrahler mit Flüssigmetall-Target
WO2005034167A2 (en) * 2003-10-07 2005-04-14 Koninklijke Philips Electronics N.V. Method of manufacturing a window transparent for electrons of an electron beam, in particular of an x-ray source
US20050253496A1 (en) * 2003-12-01 2005-11-17 Adam Armitage Electron gun and an electron beam window
US7145988B2 (en) * 2003-12-03 2006-12-05 General Electric Company Sealed electron beam source
DE102004013620B4 (de) * 2004-03-19 2008-12-04 GE Homeland Protection, Inc., Newark Elektronenfenster für eine Flüssigmetallanode, Flüssigmetallanode, Röntgenstrahler und Verfahren zum Betrieb eines solchen Röntgenstrahlers
DE102004015590B4 (de) * 2004-03-30 2008-10-09 GE Homeland Protection, Inc., Newark Anodenmodul für eine Flüssigmetallanoden-Röntgenquelle sowie Röntgenstrahler mit einem Anodenmodul
EP1670017A1 (en) * 2004-12-03 2006-06-14 Mbda Uk Limited Electron beam window, window assembly, and electron gun
JP4792737B2 (ja) * 2004-12-10 2011-10-12 ウシオ電機株式会社 電子ビーム管
SE530094C2 (sv) * 2006-05-11 2008-02-26 Jettec Ab Metod för alstring av röntgenstrålning genom elektronbestrålning av en flytande substans
JP2010530965A (ja) * 2007-06-22 2010-09-16 アドバンスト アプライド フィジックス ソリューションズ，インコーポレイテッド 放射性同位体を製造する高圧モジュール式ターゲットシステム
FI20105626A0 (fi) * 2010-06-03 2010-06-03 Hs Foils Oy Erittäin ohut berylliumikkuna ja menetelmä sen valmistamiseksi
JP5908492B2 (ja) * 2010-12-02 2016-04-26 テトラ・ラヴァル・ホールディングス・アンド・ファイナンス・ソシエテ・アノニムＴｅｔｒａ Ｌａｖａｌ Ｈｏｌｄｉｎｇｓ ＆ Ｆｉｎａｎｃｅ Ｓ．Ａ． 電子射出窓箔、電子ビーム発生器、電子射出窓箔を提供するための方法及び高性能電子ビームデバイスを提供するための方法
GB201107736D0 (en) * 2011-05-10 2011-06-22 Element Six Holdings N V Composite diamond assemblies
US9330879B2 (en) * 2011-08-04 2016-05-03 John Lewellen Bremstrahlung target for intensity modulated X-ray radiation therapy and stereotactic X-ray therapy
US9715990B2 (en) * 2014-12-19 2017-07-25 Energy Sciences Inc. Electron beam window tile having non-uniform cross-sections
JP6573380B2 (ja) * 2015-07-27 2019-09-11 キヤノン株式会社 Ｘ線発生装置及びｘ線撮影システム

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1243625A (en) * 1967-07-26 1971-08-25 Ti Group Services Ltd Apparatus for irradiating materials with electrons
EP0365366A1 (en) * 1988-10-21 1990-04-25 Crystallume Continuous thin diamond film and method for making same
GB2288272A (en) * 1994-04-09 1995-10-11 Atomic Energy Authority Uk X-ray windows
WO1996018477A1 (en) * 1994-12-12 1996-06-20 Philips Electronics N.V. Method for the vacuumtight sealing of a beryllium window to a metal substrate
EP0761623A2 (en) * 1995-08-31 1997-03-12 General Electric Company Diamond assembly
US5612588A (en) * 1993-05-26 1997-03-18 American International Technologies, Inc. Electron beam device with single crystal window and expansion-matched anode
EP0807839A1 (en) * 1995-07-14 1997-11-19 Sumitomo Electric Industries, Limited Optical window and method of manufacturing the same
EP0957506A1 (de) * 1998-05-15 1999-11-17 Philips Patentverwaltung GmbH Röntgenstrahler mit einem Flüssigmetall-Target
WO2001075500A1 (en) * 2000-04-03 2001-10-11 De Beers Industrial Diamonds (Proprietary) Limited Composite diamond window

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3026284B2 (ja) * 1990-09-18 2000-03-27 住友電気工業株式会社 Ｘ線窓材とその製造方法
JP3127511B2 (ja) * 1991-09-19 2001-01-29 株式会社日立製作所 露光装置および半導体装置の製造方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1243625A (en) * 1967-07-26 1971-08-25 Ti Group Services Ltd Apparatus for irradiating materials with electrons
EP0365366A1 (en) * 1988-10-21 1990-04-25 Crystallume Continuous thin diamond film and method for making same
US5612588A (en) * 1993-05-26 1997-03-18 American International Technologies, Inc. Electron beam device with single crystal window and expansion-matched anode
GB2288272A (en) * 1994-04-09 1995-10-11 Atomic Energy Authority Uk X-ray windows
WO1996018477A1 (en) * 1994-12-12 1996-06-20 Philips Electronics N.V. Method for the vacuumtight sealing of a beryllium window to a metal substrate
EP0807839A1 (en) * 1995-07-14 1997-11-19 Sumitomo Electric Industries, Limited Optical window and method of manufacturing the same
EP0761623A2 (en) * 1995-08-31 1997-03-12 General Electric Company Diamond assembly
EP0957506A1 (de) * 1998-05-15 1999-11-17 Philips Patentverwaltung GmbH Röntgenstrahler mit einem Flüssigmetall-Target
WO2001075500A1 (en) * 2000-04-03 2001-10-11 De Beers Industrial Diamonds (Proprietary) Limited Composite diamond window

Also Published As

Publication number Publication date
JP2009115824A (ja) 2009-05-28
US20020048345A1 (en) 2002-04-25
DE10050811A1 (de) 2002-04-18
US6625254B2 (en) 2003-09-23
JP2002156499A (ja) 2002-05-31

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