EP1144971A1 - Detecteur - Google Patents

Detecteur

Info

Publication number
EP1144971A1
EP1144971A1 EP99963519A EP99963519A EP1144971A1 EP 1144971 A1 EP1144971 A1 EP 1144971A1 EP 99963519 A EP99963519 A EP 99963519A EP 99963519 A EP99963519 A EP 99963519A EP 1144971 A1 EP1144971 A1 EP 1144971A1
Authority
EP
European Patent Office
Prior art keywords
signal
sensor according
signal detector
signal source
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99963519A
Other languages
German (de)
English (en)
Inventor
Günter Igel
Ulrich Sieben
Jürgen Giehl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Micronas GmbH
Original Assignee
TDK Micronas GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Micronas GmbH filed Critical TDK Micronas GmbH
Publication of EP1144971A1 publication Critical patent/EP1144971A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/003—Details of instruments used for damping

Definitions

  • a capacitive sensor for absolute as well as for relative pressure measurement is known from DE 33 10 643. This shows a first and a second electrode, which are spaced apart from one another and form a measuring capacitance, the first electrode being arranged on a first substrate body and the second electrode being arranged on a second substrate body. These substrate bodies are laterally connected to one another and the second substrate body is formed in the region of the second electrode as a membrane which can be deformed by pressure. The capacitive output signals of the sensor are fed to an external evaluation device and evaluated.
  • the invention has for its object to provide a sensor which shows the broadest possible application in its structure.
  • the sensor according to the invention shows a signal source for the emission of a physical signal and a signal detector spaced apart from and independent of the signal source for receiving the physical signal at the location of the signal detector after the physical signal has overcome the space between the signal source and the signal detector and thereby one Has undergone change.
  • the signal received in the signal detector is fed to an evaluation unit which evaluates the received signal with the aid of stored information about the transmission source and thus about the emitted physical signal.
  • the signal to be expected is preferably compared on the basis of the information about the signal source and thus about the emitted signal with the signal actually received.
  • the relative distance that is, a quantity in which the spatial distance between the signal source and the signal detector and the transmission properties of the area between the signal source and the signal detector are included. This relative distance can thus be distinguished from the purely geometrical distance between the signal source and the signal detector.
  • a statement can be made about a change in the transmission behavior at a constant geometric distance, and certain physical properties, such as density changes, temperature changes or transport speed changes or a change in the flow rate or even their absolute values, can be determined therefrom.
  • certain physical properties such as density changes, temperature changes or transport speed changes or a change in the flow rate or even their absolute values
  • a statement can be made about the change in the geometric distance between the signal source and the signal detector. If the change in distance is caused by an external force, a pressure or an acceleration or the like, either the change in these quantities or their absolute values can be determined therefrom.
  • Radioactive signals, electromagnetic signals, optical signals, pressure fluctuations or thermal signals have emerged as particularly suitable physical signals from the large number of physical signals.
  • the size of the sensor can be reduced very much, which significantly expands the possible application of such a sensor, for example in the pharmaceutical industry or chemical industry, where very high-quality or expensive substances with small volumes are used.
  • a control unit is provided which is connected to the signal source and controls it.
  • control unit is connected to the evaluation unit, which provides an update of the information about the signal source for evaluating the received physical signals.
  • the evaluation unit and additionally the signal detector are connected to the evaluation unit and additionally the signal detector into operation only for the time in which the reception and evaluation of an emitted physical signal by the signal source is to be expected.
  • This embodiment makes it possible to significantly reduce the power consumption of the sensor over a longer period of time, which in turn opens up an enlarged area of application, in particular in remote measuring stations, in particular without connection to a power network.
  • the evaluation unit and / or the control unit is preferably arranged in the substrate body or bodies, in particular in the region of the signal source or the signal detector, as a result of which a higher integration density of the sensor is achieved, which has a very advantageous effect on the size of the sensor.
  • such an arrangement proves to be very advantageous electronically, since very short signal paths can be realized by this arrangement and therefore only slight signal losses can occur, which leads to a particularly advantageous signal-to-noise ratio for the received physical signal.
  • such an arrangement proves to be less sensitive to external electronic interference, for example due to the constant electromagnetic smog, which is particularly important when used in the automotive sector.
  • control unit is preferably implemented separately from the evaluation unit in the substrate body, and the control unit is preferably in the area of the signal source, in particular under this, arranged while the evaluation unit is arranged in the area of the signal detector, in particular under this in the substrate body. If the signal source and the signal detector are formed separately on separate substrate bodies, this separation is also implemented for the control unit and the evaluation unit. This largely prevents mutual interference between the electronic units.
  • the substrate body in the area of the signal receiver and / or the substrate body in the area of the signal detector is designed as a membrane, which is based on an external force or an external pressure or an acceleration of the sensor changes and thereby changes the distance between the signal source and the signal detector and thereby a measure of the force acting externally, the pressure or the acting acceleration or changes thereof can be achieved.
  • a sensor with a membrane with an additional damping device for damping unwanted Preferably, a sensor with a membrane with an additional damping device for damping unwanted.
  • a damping device for damping unwanted.
  • damping devices of this type can be formed by stiffening in the area of the membranes, as a result of which the resonance frequencies of the membrane can be deliberately shifted into less disruptive areas or their suitability for oscillation can be significantly reduced.
  • the signal source and / or the signal detector is structured such that they are suitable for spatially resolving measurement.
  • the signal detector has spatially separate segments which are controlled in a spatially differentiated manner by the physical signal and are evaluated in a spatially differentiated manner by a corresponding electronic arrangement for the spatially resolving processing of the received physical signals.
  • This arrangement for spatially resolving processing is preferably arranged inside the substrate body, in particular below the signal detector in the area of the evaluation unit, which leads to the advantages comparable to the arrangement of the evaluation unit in the substrate body.
  • This spatially resolving measurement and evaluation makes it possible to make specific statements about the type of deflection of the membrane, its mechanical state, in particular its Fatigue state and thus the curability of the membrane and the sensor arrangement.
  • this sensor proves to be a sensor that detects this expected failure before a failure due to material fatigue of the membrane and gives the user the information that an exchange of the sensor according to the invention is necessary.
  • the control unit of the sensor is preferably connected to the signal source and the evaluation unit in such a way that when evaluating and thus comparing the transmitted physical signals or the expected physical signals with the actually received physical signals, the current properties of the signal source Begur ⁇ takes sight. If a change in the properties of the signal source leads to a change in the emitted physical signals, for example due to a declining activity of a radioactive radiation source, this information is transmitted by means of the connecting line of the electronic one Arrangement for evaluation, also called evaluation unit, made available and taken into account in the evaluation. It is thus possible to automatically take changes in the signal source into account in the evaluation and thus to make the measurement result of the sensor considerably more reliable.
  • FIG. 1 shows a first exemplary embodiment of the sensor according to the invention with a radioactive signal source and a spatially resolving signal detector for determining the flow rate
  • Fig. 2 shows a second embodiment of the sensor according to the invention as a pressure sensor
  • FIG. 3 shows an exemplary circuit structure of an exemplary embodiment of a sensor according to the invention.
  • the sensor has a first substrate body 1, to which a second substrate body 2 is assigned at a distance.
  • the signal source 3 is arranged on the first substrate body 1 facing the second substrate body 2.
  • An electronic evaluation unit 5 is arranged in the interior of the second substrate body 2, which is connected to the individual signal detector elements 4a-4d and which amplifies and evaluates the received physical signals.
  • the evaluation also includes a differentiation based on the location of the individual signal detector elements and thus an evaluation based on the spatial development of the physical signal, which results in a representation of the flow rate through the spatial area 6 between the Signal source 3 and the signal detector 4 leads.
  • the signal source 3 shown in this embodiment represents a thermal source. If the space 6 between the signal source 3 and the signal detector 4 is flowed through by a slowly flowing liquid, the thermal energy is deflected only slightly in the direction of flow, while at a higher flow rate one stronger distraction occurs. Depending on the extent of the deflection, various signal detector elements are excited, as a result of which a conclusion can be drawn about the flow rate of the substance flowing through the space 6, and thereby a measure of the flow rate can also be obtained.
  • the signal source 3 works completely independently of the signal detector 4 or of the evaluation unit 5. It is therefore also not necessary to electrically connect the signal detector 3 to the signal detector 4 or to the evaluation unit 5, which has proven to be particularly advantageous. since all the problems of sealing the electrical connections with respect to the substance to be measured for the flow rate and thus the risk of malfunction or the total failure of the sensor are largely excluded.
  • the construction of the sensor with the two substrate bodies 1, 2 and the signal source 3 arranged thereon and the signal detector 4 with the integrated evaluation unit 5 makes it possible to make the sensor extremely small and thus to use it in areas where, for example, only small amounts of substance are present whose flow rate or flow rate is to be determined.
  • a flow rate measuring sensor proves to be particularly suitable for the pharmaceutical industry or for test laboratories, procotype laboratories and analysis laboratories in the chemical industry.
  • 2 shows a pressure sensor according to the invention, which has a first substrate body 1 and a second substrate body 2, a signal detector 4 being arranged on the second substrate body 2 and an electronic evaluation unit 5 being integrated in the second substrate body 2 and for processing the physical measurement signals serves.
  • the first substrate body 1 is shaped such that it shows a membrane which is deformable by pressure.
  • the pressure is usually applied to the membrane in the direction of the arrow.
  • a signal source 3 is arranged on the side assigned to the signal detector 4. If the membrane is deformed by the action of the external pressure and the position of the signal source 3 is changed as a result, this causes a change in the distance from the signal detector 4.
  • the evaluation unit 5 can use the received physical signal to make a statement about the distance traveled, and thus the distance between the signal source 3 and the signal detector 4, and thereby conclude a statement about the pressure on the membrane. A statement about the relative pressure as well as the absolute pressure can be made.
  • the substrate bodies 1, 2 are formed from silicon. This enables a particularly simple integration of the evaluation unit 5.
  • silicon has particularly favorable mechanical properties for the deformable membrane 5.
  • the signal source 3 and the signal detector 4 are formed on the respective sub- Strat emotions 1, 2 formed, whereby they act on the one hand as a transmitting and on the other hand as a receiving antenna for a corresponding electromagnetic signal.
  • the electromagnetic signal can be specified by the choice of the shape and the size of the corresponding conductor tracks, as a result of which the influences of disturbing external electromagnetic fields can be reduced to a minimum.
  • the received electromagnetic signal depends on the transmission properties of the space 6 between the signal source 3 and the signal detector 4, the distance in particular being of central importance.
  • this design of the sensor proves to be particularly suitable, for example to exactly determine the pressure on the membrane. If, in addition to the dependence of transmission properties on the transmission path, there is a dependence on the temperature, this temperature dependence can be taken into account after the measurement by a thermometer known per se in the evaluation by the evaluation unit 5. In such a case, however, this sensor can also be used vice versa as a temperature sensor, provided that the distance between the signal source 3 and the signal detector 4 is kept constant or can be determined in some other way.
  • FIG. 3 shows an exemplary circuit structure of a sensor according to the invention. It shows the transmission source 3, which is formed separately from the signal detector 4 by the spatial area 6. The signal source 3 sends out a physical signal in the direction of the signal detector 4. This signal is indicated as arrow B and crosses space area 6.
  • the sensor shows a control unit 7, which is connected to the transmission source 3 via a control line and to the transmission source 3
  • the tax Unit 7 which is preferably integrated in the region of the signal source 3 in its substrate body 1, connected to the signal detector 4.
  • the evaluation unit 5 is embodied integrated in the second substrate body 2 assigned to the signal detector 4. By means of the connecting lines to the signal detector 4 and to the evaluation unit 5, these are switched on in a targeted manner with knowledge of the control data of the signal source and the expected reception time of the physical signal, so that a reliable detection of the physical signal emitted by the signal source 3 by the signal detector 4 and a corresponding one Evaluation is given in the evaluation unit 5. Outside this time window required for safe operation, the signal detector 4 or the evaluation unit 5 is switched off, as a result of which the energy consumption of the sensor is significantly reduced over time. The same applies to signal source 3.
  • the evaluation unit 5 is also connected to an external display 9.
  • control unit 8 display

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Power Engineering (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

L'invention concerne un détecteur comprenant une source de signaux pour l'émission d'un signal physique, et un détecteur de signaux, à distance de la source de signaux, pour la réception du signal physique à l'emplacement du détecteur de signaux. Le signal physique reçu est évalué au moyen d'une unité d'évaluation et par l'intermédiaire d'une information mémorisée vers la source de signaux, ce qui permet de déterminer la distance relative entre la source de signaux et le détecteur de signaux. La distance relative tient compte, d'une part, de la distance géométrique entre la source de signaux et le détecteur de signaux et, d'autre part, des propriétés de transfert de l'espace compris entre la source de signaux et le détecteur de signaux. En maintenant constant l'un de ces paramètres, on peut en tirer des conclusions sur l'autre paramètre et obtenir ainsi des indications sur des grandeurs physiques déterminées. Un tel détecteur peut être utilisé, par exemple, comme détecteur d'accélération, de pression, de puissance, de densité gazeuse, de vitesse de transport, ou encore, de débit.
EP99963519A 1998-12-19 1999-12-14 Detecteur Withdrawn EP1144971A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19858827 1998-12-19
DE19858827A DE19858827A1 (de) 1998-12-19 1998-12-19 Sensor
PCT/EP1999/009882 WO2000037910A1 (fr) 1998-12-19 1999-12-14 Detecteur

Publications (1)

Publication Number Publication Date
EP1144971A1 true EP1144971A1 (fr) 2001-10-17

Family

ID=7891811

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99963519A Withdrawn EP1144971A1 (fr) 1998-12-19 1999-12-14 Detecteur

Country Status (4)

Country Link
EP (1) EP1144971A1 (fr)
JP (1) JP2002533669A (fr)
DE (1) DE19858827A1 (fr)
WO (1) WO2000037910A1 (fr)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3006584A1 (de) * 1980-02-22 1981-09-03 Degussa Ag, 6000 Frankfurt Thermischer durchflussmesser
US4478076A (en) * 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
DE3616777A1 (de) * 1986-05-17 1987-11-19 Dietmar Kohn Einrichtung zur messung des massenimpulsstroms eines stroemenden mediums
DE3638137A1 (de) * 1986-11-08 1988-05-11 Bosch Gmbh Robert Vorrichtung zur bestimmung der masse eines stroemenden mediums
DE3990616T1 (de) * 1988-06-10 1990-06-07 Iss Electronics As Vorrichtung zur erfassung von verlust oder unerwuenschtem verbrauch in einem rohrsystem
WO1992002912A1 (fr) * 1990-08-06 1992-02-20 Schier J Alan Appareil de detection
DE4427554C2 (de) * 1994-08-04 1996-07-18 Karlsruhe Forschzent Wärmeimpuls-Durchflußmesser
US5689107A (en) * 1995-09-01 1997-11-18 Hughes Aircraft Company Displacement-based opto-electronic accelerometer and pressure sensor
SE511634C2 (sv) * 1996-05-07 1999-11-01 Samba Sensors Ab Anordning för elektrooptisk mätning av tryck

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0037910A1 *

Also Published As

Publication number Publication date
WO2000037910A1 (fr) 2000-06-29
DE19858827A1 (de) 2000-06-29
JP2002533669A (ja) 2002-10-08

Similar Documents

Publication Publication Date Title
DE102008005281A1 (de) Verfahren und Vorrichtung zur Detektion und Identifizierung von Gasen
EP0145861B1 (fr) Dispositif pour mesurer des pressions et des marches de pression en fonction du temps
DE3201198A1 (de) "kapazitiver geber zur anzeige oder registrierung von messgroessen"
EP2371454B1 (fr) Procédé de mesure capacitif et dispositif pour la détection du niveau de remplissage et appareil de laboratoire en étant équipé
DE102008016004A1 (de) Mikroelektromechanischer Inertialsensor mit atmosphärischer Bedämpfung
WO2007135075A1 (fr) Débitmètre à induction magnétique
EP0447810B1 (fr) Dispositif de mesure de niveau ou autre propriété mécanique d'un liquide conducteur
DE1548623A1 (de) Einrichtung zum Untersuchen von gasfoermigen Medien
EP0985139A1 (fr) Transducteur de pression differentielle
DE2824609A1 (de) Vorrichtung zur feuchtigkeitsmessung durch kapazitaetsaenderung
DE102008054749A1 (de) Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
EP1152832A1 (fr) Champ de mesure de detecteur destine au controle du bon fonctionnement d'une micropipette
EP1144971A1 (fr) Detecteur
DE19828093C2 (de) Einrichtung zum Messen physikalischer Größen von ein- oder mehrkomponentigen Flüssigkeiten
DE102016209241A1 (de) Mikromechanisches Bauteil für eine Drucksensorvorrichtung
DE20314618U1 (de) Strom- und Signaldurchführung zwischen Kammern des Gehäuses eines Feldgerätes
EP1145025B1 (fr) Detecteur de champ magnetique capacitif
DE60109953T2 (de) Kapazitiver wandler
DE10217859C1 (de) Neigungsvorrichtung mit einem Pendel
EP0869353B1 (fr) Procédé de fabrication d'un capteur
DE102019134891A1 (de) Verfahren zum in-situ Kalibrieren, Verifizieren und/oder Justieren eines Sensors und Messsystem
DE19701704B4 (de) Vorrichtung zur Angabe des Niveaus einer Fahrzeugachse
DE102005043397B3 (de) Elektronisch aktiver Sensor mit einem Feld aus Nanoporen zur selektiven Detektion von Magnetfeldern
WO2012016953A1 (fr) Commutateur magnétique passif et procédé pour déterminer un champ magnétique
DE102020118473A1 (de) Antrieb für einen Vibrationssensor, Vibrationssensor und Verwendung von Gelen als Antriebselement in Vibrationssensoren

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20010424

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

RBV Designated contracting states (corrected)

Designated state(s): DE FR GB IT NL

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Effective date: 20080802