EP1089593A3 - Keramisches Heizelement - Google Patents

Keramisches Heizelement Download PDF

Info

Publication number
EP1089593A3
EP1089593A3 EP00308583A EP00308583A EP1089593A3 EP 1089593 A3 EP1089593 A3 EP 1089593A3 EP 00308583 A EP00308583 A EP 00308583A EP 00308583 A EP00308583 A EP 00308583A EP 1089593 A3 EP1089593 A3 EP 1089593A3
Authority
EP
European Patent Office
Prior art keywords
heating elements
ceramic substrate
resistance
plural planar
ceramic heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00308583A
Other languages
English (en)
French (fr)
Other versions
EP1089593A2 (de
Inventor
Atsuo c/o NGK Insulators Ltd. Yamada
Shinji c/o NGK Insulators Ltd. Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of EP1089593A2 publication Critical patent/EP1089593A2/de
Publication of EP1089593A3 publication Critical patent/EP1089593A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
EP00308583A 1999-10-01 2000-09-29 Keramisches Heizelement Withdrawn EP1089593A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP28111599A JP2001102157A (ja) 1999-10-01 1999-10-01 セラミックスヒータ
JP28111599 1999-10-01

Publications (2)

Publication Number Publication Date
EP1089593A2 EP1089593A2 (de) 2001-04-04
EP1089593A3 true EP1089593A3 (de) 2002-08-28

Family

ID=17634573

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00308583A Withdrawn EP1089593A3 (de) 1999-10-01 2000-09-29 Keramisches Heizelement

Country Status (4)

Country Link
EP (1) EP1089593A3 (de)
JP (1) JP2001102157A (de)
KR (1) KR20010067260A (de)
TW (1) TW483285B (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6617553B2 (en) * 1999-05-19 2003-09-09 Applied Materials, Inc. Multi-zone resistive heater
US6423949B1 (en) 1999-05-19 2002-07-23 Applied Materials, Inc. Multi-zone resistive heater
JP3293594B2 (ja) * 1999-06-29 2002-06-17 住友電気工業株式会社 光ファイバ融着接続部の保護部材加熱装置及び加熱方法
JP4744016B2 (ja) * 2001-06-29 2011-08-10 京セラ株式会社 セラミックヒータの製造方法
JP3897563B2 (ja) 2001-10-24 2007-03-28 日本碍子株式会社 加熱装置
JP3925702B2 (ja) 2002-03-18 2007-06-06 日本碍子株式会社 セラミックヒーター
JP4026761B2 (ja) 2002-03-28 2007-12-26 日本碍子株式会社 セラミックヒーター
JP2005197074A (ja) 2004-01-07 2005-07-21 Ngk Insulators Ltd 抵抗発熱体およびヒーター
JP2005285355A (ja) 2004-03-26 2005-10-13 Ngk Insulators Ltd 加熱装置
TWI281833B (en) 2004-10-28 2007-05-21 Kyocera Corp Heater, wafer heating apparatus and method for manufacturing heater
JP4640842B2 (ja) * 2006-10-11 2011-03-02 日本碍子株式会社 加熱装置
KR101177749B1 (ko) * 2007-11-27 2012-08-29 주식회사 코미코 세라믹 히터, 이의 제조 방법 및 이를 갖는 박막 증착 장치
KR101525634B1 (ko) * 2009-03-30 2015-06-03 엔지케이 인슐레이터 엘티디 세라믹 히터 및 그 제조 방법
US8637794B2 (en) 2009-10-21 2014-01-28 Lam Research Corporation Heating plate with planar heating zones for semiconductor processing
US8791392B2 (en) 2010-10-22 2014-07-29 Lam Research Corporation Methods of fault detection for multiplexed heater array
US9633875B2 (en) * 2015-03-13 2017-04-25 Varian Semiconductor Equipment Associates, Inc. Apparatus for improving temperature uniformity of a workpiece
JP6567895B2 (ja) * 2015-06-29 2019-08-28 京セラ株式会社 試料保持具およびこれを備えた試料処理装置
KR102348108B1 (ko) 2015-10-05 2022-01-10 주식회사 미코세라믹스 온도 편차 특성이 개선된 기판 가열 장치
JP6767833B2 (ja) * 2016-09-29 2020-10-14 日本特殊陶業株式会社 加熱装置
US11382180B2 (en) * 2017-11-21 2022-07-05 Watlow Electric Manufacturing Company Multi-zone pedestal heater having a routing layer
EP3866565B1 (de) * 2018-10-11 2024-04-17 NHK Spring Co., Ltd. Bühne, filmbildungsvorrichtung und filmverarbeitungsvorrichtung
JP2020064841A (ja) * 2018-10-11 2020-04-23 日本発條株式会社 ステージ、成膜装置、および膜加工装置
KR102608397B1 (ko) * 2018-10-16 2023-12-01 주식회사 미코세라믹스 미들 영역 독립 제어 세라믹 히터
KR102437076B1 (ko) 2021-08-30 2022-08-29 주식회사 미코세라믹스 온도 편차 특성이 개선된 기판 가열 장치
KR20240025376A (ko) 2022-08-18 2024-02-27 주식회사 미코세라믹스 미세 균열 발생이 억제된 기판 가열 장치
KR102615529B1 (ko) * 2023-09-19 2023-12-19 주식회사 제스코 이층 히터 패턴이 구비된 정전척

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5331134A (en) * 1992-05-21 1994-07-19 Shin-Etsu Chemical Co., Ltd. Double-layered ceramic heater
JPH08236599A (ja) * 1995-02-28 1996-09-13 Kyocera Corp ウェハ保持装置
JPH08274147A (ja) * 1995-03-30 1996-10-18 Kyocera Corp ウェハ保持装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5331134A (en) * 1992-05-21 1994-07-19 Shin-Etsu Chemical Co., Ltd. Double-layered ceramic heater
JPH08236599A (ja) * 1995-02-28 1996-09-13 Kyocera Corp ウェハ保持装置
JPH08274147A (ja) * 1995-03-30 1996-10-18 Kyocera Corp ウェハ保持装置

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 01 31 January 1997 (1997-01-31) *
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 02 28 February 1997 (1997-02-28) *

Also Published As

Publication number Publication date
TW483285B (en) 2002-04-11
EP1089593A2 (de) 2001-04-04
JP2001102157A (ja) 2001-04-13
KR20010067260A (ko) 2001-07-12

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