EP1083048A1 - Tintenstrahldruckkopf und verfahren zur dessen herstellung - Google Patents

Tintenstrahldruckkopf und verfahren zur dessen herstellung Download PDF

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Publication number
EP1083048A1
EP1083048A1 EP99923867A EP99923867A EP1083048A1 EP 1083048 A1 EP1083048 A1 EP 1083048A1 EP 99923867 A EP99923867 A EP 99923867A EP 99923867 A EP99923867 A EP 99923867A EP 1083048 A1 EP1083048 A1 EP 1083048A1
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EP
European Patent Office
Prior art keywords
pressure chamber
piezoelectric
piezoelectric element
bonded
external electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99923867A
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English (en)
French (fr)
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EP1083048A4 (de
Inventor
Takashi Nec Corporation OTA
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Fujifilm Business Innovation Corp
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NEC Corp
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Publication date
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Publication of EP1083048A1 publication Critical patent/EP1083048A1/de
Publication of EP1083048A4 publication Critical patent/EP1083048A4/de
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter

Definitions

  • the present invention relates to an ink jet recording head and method of manufacturing the same and, more particularly, to an ink jet recording head used in a printer, facsimile apparatus, or copying apparatus and a method of manufacturing the ink jet recording head.
  • An ink jet recording head of this type is conventionally described in, e.g., Japanese Patent Laid-Open No. 9-174836.
  • Fig. 13 is a sectional view of a conventional ink jet recording head disclosed in Japanese Patent Laid-Open No. 9-174836.
  • upper walls of pressure chambers 2a, 2b, and 2c which are filled with ink 1 are constructed from vibration plates 3a, 3b, and 3c.
  • the vibration plates 3a, 3b, and 3c are bonded to piezoelectric elements 101a, 101b, and 101c, respectively.
  • the piezoelectric elements 101a, 101b, and 101c are bonded and integrated to a base portion 102 on the surfaces opposite to the surfaces bonded to the vibration plates.
  • Fig. 14 is a sectional view taken along the line D - D in Fig. 13.
  • the pressure chamber 2a communicates with a nozzle 4a.
  • the pressure chamber 2a also communicates with an ink pool 6 through an ink supply port 5a.
  • the piezoelectric element 101a is fixed to a constructing member of the pressure chamber 2a in inactive regions 201a and 202a indicating regions in which no distortion occurs inside even if a driving voltage is applied to the electrode.
  • the element 101a is connected to the vibration plate 3a in an active region 203a indicating a region in which distortion occurs.
  • Each of other pressure chambers 2b and 2c has the same arrangement.
  • a voltage is selectively applied to the piezoelectric element 101a in printing so that the generated displacement of the piezoelectric element 101a is transmitted to the pressure chamber 2a through the vibration plate 3a to compress the ink 1 in the pressure chamber 2a. Therefore, the ink droplet can be ejected from the nozzle.
  • the piezoelectric elements 101a, 101b, and 101c are integrated by the base portion 102.
  • the piezoelectric elements 101a, 101b, and 101c are fixed to the pressure chambers 2a, 2b, and 2c through the inactive regions 201a and 202a, a so-called crosstalk occurs in which a displacement of a driven piezoelectric element is transmitted to an adjacent non-driven piezoelectric element through the base portion 102 and vibrates the adjacent non-driven piezoelectric element in the displacement direction, and the vibration of the non-driven piezoelectric element is transmitted to the corresponding pressure chamber.
  • This crosstalk reduces the drop speed and diameter of an ejected ink droplet as the number of nozzles (the number of piezoelectric elements) which are simultaneously driven is large.
  • the crosstalk varies the drop speed and diameter of the ink droplets ejected in accordance with the number of nozzles (the number of piezoelectric elements) which are simultaneously driven, thus causing ink droplet landing position deviation, printing density unevenness, and the like.
  • the crosstalk causes printing quality degradation.
  • a recording head comprises a pressure chamber unit communicating with a nozzle and ink supply port and including a plurality of pressure chambers each having one vibration wall on a surface in the same direction, and a plurality of piezoelectric elements each having two external electrodes and respectively bonded to the plurality of vibration walls.
  • Each piezoelectric element is constructed from an active region in which distortion occurs inside when a voltage is applied to the external electrodes and an inactive region in which no distortion occurs inside when a voltage is applied to the external electrodes, the active region is bonded to the vibration wall of the pressure chamber, and the inactive region is bonded to only the pressure chamber.
  • each piezoelectric element is bonded to only the corresponding pressure chamber through the inactive region, and has no means for fixing a positional relationship between the piezoelectric elements. This can prevent that the displacement of a driven piezoelectric element is transmitted to a non-driven piezoelectric element and the non-driven piezoelectric element is vibrated in the displacement direction. Therefore, crosstalk in which vibrations caused by the displacement of the driven piezoelectric element are transmitted to a non-driven pressure chamber can be prevented.
  • the piezoelectric element further has the following arrangement in addition to the first invention.
  • a plurality of piezoelectric material layers and a plurality of internal electrode layers are alternately stacked, and the internal electrodes are alternately staggered in a direction perpendicular to the stacking direction and alternately connected to two external electrodes formed on two side surfaces of the piezoelectric element in the staggering direction.
  • the piezoelectric element is bonded to the vibration wall through the active region in which all the internal electrodes are stacked at a predetermined width, and to the pressure chamber through the inactive regions which are formed near the two external electrodes and in which the every second internal electrodes are stacked. With this structure, the vibration wall can sufficiently displace even if the width in the direction perpendicular to the stacking direction becomes narrow, thereby arranging the pressure chambers at a high density.
  • the third invention has the following arrangement in addition to the first invention.
  • the piezoelectric element has a piezoelectric material, a non-piezoelectric material bonded on two sides of the piezoelectric material in a direction perpendicular to the array direction of the pressure chambers (i.e., in the horizontal direction of the plurality of pressure chambers), and two external electrodes formed on two surfaces opposing each other in the direction parallel to the array direction of the pressure chambers arranged at at least a part of the piezoelectric element.
  • the piezoelectric element is bonded to the vibration wall through the piezoelectric material, and bonded to the pressure chamber through the non-piezoelectric materials formed on the two sides of the piezoelectric material.
  • the fourth and fifth inventions have the following arrangement in addition to the second and third inventions, respectively.
  • the piezoelectric element has a notched portion in the inactive region between potions bonded to the vibration wall and bonded to the pressure chamber. With this structure, the displacement generated in the active region of the piezoelectric element is hardly constrained, thereby increasing electro-mechanical conversion efficiency (i.e., the pressure transmission efficiency for the ink in the pressure chamber).
  • the seventh invention is a method of manufacturing an ink jet recording head, comprising the first step of forming a piezoelectric element block having a length corresponding to a total length of the plurality of pressure chambers in an array direction of pressure chambers, and two external electrodes, an active region, and inactive regions, that are continuously formed throughout the length in the array direction, the second step of bonding the piezoelectric element block to the pressure chamber unit, and the third step of forming a plurality of piezoelectric elements respectively corresponding to the plurality of pressure chambers by cutting and separating the piezoelectric element block bonded to the pressure chamber unit.
  • the piezoelectric elements are separately formed after the piezoelectric element block and pressure chamber unit are bonded, thus improving the positioning precision of each pressure chamber and a corresponding piezoelectric element.
  • Fig. 1 is a sectional view showing an ink jet recording head according to the first embodiment of the present invention
  • Fig. 2 is a sectional view taken along the line A - A in Fig. 1.
  • pressure chambers 2a, 2b, and 2c filled with ink 1 are formed such that a plate-like deformable vibration plate 3 (this vibration plate having projections 3a, 3b, and 3c) are bonded to a plate-like substrate member in which a plurality of recess portions-each having the same shape are aligned at a predetermined interval.
  • the pressure chamber 2a communicates with a nozzle 4a for ejecting an ink droplet toward a printing medium and an ink pool 6 for supplying the ink 1 through an ink supply port 5a.
  • other pressure chambers 2b and 2c communicate with nozzles 4b and 4c and the ink pool 6 for supplying the ink 1 through ink supply ports 5b and 5c, respectively.
  • Piezoelectric elements 7a, 7b, and 7c which correspond to the pressure chambers 2a, 2b, and 2c, respectively, and are completely separated from each other are bonded to the vibration plate 3.
  • the piezoelectric element 7a is a so-called stacked piezoelectric element. As shown in Fig. 2, the piezoelectric element 7a has a plurality of internal electrodes a and a plurality of internal electrodes b which are alternately connected to two external electrodes 8a and 9a, respectively. When a voltage is applied to the external electrodes 8a and 9a, an electric field is applied to an active region 12a serving as an overlap region of the internal electrodes respectively connected to the external electrodes 8a and 9a while sandwiching piezoelectric ceramic layers c between them to cause distortion.
  • the piezoelectric element 7a is bonded to portions fixed to a substrate member of the vibration plate 3, i.e., portions on the lower surfaces of the corresponding inactive regions 10a and 11a.
  • the piezoelectric element 7a is also connected to a projection 3a of the vibration plate 3 corresponding to the pressure chamber 2a on a lower surface of the active region 12a.
  • each of other piezoelectric elements 7b and 7c has the same arrangement as the piezoelectric element 7a.
  • the piezoelectric element when the voltage is selectively applied to the external electrodes of the piezoelectric element in printing, the piezoelectric element displaces in the stacking direction of the internal electrodes. Since the generated displacement of the piezoelectric element is transmitted to the pressure chamber through the vibration plate 3 to compress the ink in the pressure chamber, the ink droplets can be ejected from the nozzle.
  • each of the piezoelectric elements 7a, 7b, and 7c is bonded to two portions fixed to the substrate member of the corresponding vibration plate 3, i.e., two portions on the lower surfaces of corresponding inactive regions 10a and 10b interposing the corresponding active region 12a.
  • the piezoelectric elements 7a, 7b, and 7c are completely separated. This can prevent the non-driven piezoelectric element from directly receiving the displacement of the driven piezoelectric element, applying the pressure to its pressure chamber, and vibrating in the displacement direction.
  • the force caused by the generated displacement of the driven piezoelectric element is applied to the substrate member in the curving direction so that the substrate member vibrates. However, this vibration in the curving direction generates little pressure in the pressure chamber corresponding to the non-driven piezoelectric element, thereby occurring no crosstalk.
  • Fig. 3 is a sectional view showing an ink jet recording head according to the second embodiment of the present invention
  • Fig. 4 is a sectional view taken along the line B - B in Fig. 3.
  • notched portions are formed in inactive regions formed on two sides of an active region of each of piezoelectric elements 13a, 13b, and 13c.
  • notched portions 17a and 18a are respectively formed in inactive regions 14a and 15a formed on two sides of an active region 16a.
  • Each surface of the notched portions 17a and 18a on the side of the active region 16a positions apart from the active region 16a at a predetermined interval. Therefore, the every second stacked electrodes are exposed on inner surfaces of the notched portions 17a and 18a.
  • a non-stacked portion d in which internal electrodes a and b are not stacked and which occupies 20% or more of the thickness of the piezoelectric element 13a is formed on that side of the piezoelectric element 13a which opposes the side to which a vibration plate 3 is bonded.
  • the notched portions 17a and 18a preferably have a depth to almost ensure the thickness of the non-stacked portion d. That is, the notched portions 17a and 18a preferably have a depth nearly equal to the thickness of the stacked portion in which the internal electrodes a and b are stacked. Assume that stacked portions corresponding to the notched portions 17a and 18a are left.
  • the inactive regions 14a and 15a undesirably limit the displacement of the active region 16a. Since the stacked portions corresponding to the notched portions 17a and 18a are omitted, the cost can be reduced as compared with a piezoelectric element whose total thickness is increased by adding the thickness of the stacked portions.
  • the corners of the notched portions 17a and 18a preferably have curved surfaces with appropriate curvature to avoid stress concentration.
  • Intermediate electrodes 19a and 20a are formed on the most part of the inner surfaces of the notched portions 17a and 18a by plating or sputtering and connect the plurality of internal electrodes in the inactive regions 14a and 15a, respectively.
  • External electrodes 21a and 22a are formed on the two end faces of the piezoelectric element 13a by plating or sputtering in the same manner as the intermediate electrodes 19a and 20a.
  • the internal electrodes in the active region 16a of the piezoelectric element 13a are alternately connected to the intermediate electrodes 19a and 20a, and further connected to external electrodes 21a and 22a through the internal electrodes in the inactive regions 14a and 15a.
  • the piezoelectric element 13a is fixed to the vibration plate 3 on the lower surfaces of the corresponding inactive regions 14a and 15a which are separated from the active region 16a by the notched portions 17a and 18a.
  • the fixed portions are portions fixed by a substrate member constructing a pressure chamber.
  • the active region 16a of the piezoelectric element is connected to a projection 3a of the vibration plate 3 corresponding to a pressure chamber 2a.
  • each of other piezoelectric elements 13b and 13c has the same arrangement as the piezoelectric element 13a.
  • the inactive region hardly constrains the displacement generated in the active region of the piezoelectric element, thereby improving electro-mechanical conversion efficiency (i.e., the pressure transmission efficiency for ink in the pressure chamber). More specifically, the piezoelectric element is different from that in the conventional apparatus in which the active region and the inactive regions formed on the two sides of the active region are integrated each other. Accordingly, unlike the conventional apparatus, the inactive region does not constrain the displacement generated from the active region, thereby improving the pressure transmission efficiency for the ink in the pressure chamber.
  • Fig. 5 is an exploded perspective view showing the method of manufacturing the recording heads shown in Figs. 1 and 2.
  • a first pressure chamber plate 23 having spaces serving as perspective pressure chambers is bonded to a nozzle plate 4 having nozzles 4a, 4b, and 4c.
  • An ink supply port plate 5 in which ink supply ports 5a, 5b, and 5c, and portions serving as the perspective pressure chambers are aligned at predetermined intervals is then bonded to the first pressure chamber plate 23.
  • a second pressure chamber plate 24 having spaces serving as the perspective pressure chambers is then bonded to the ink supply port plate 5.
  • a vibration plate 3 (vibration plate module) having projections 3a, 3b, and 3c is bonded to the second pressure chamber plate 24, and a piezoelectric element block 7 having two external electrodes 8 and 9 is bonded on the vibration plate module 3.
  • All the internal electrodes and piezoelectric ceramic layers are alternately stacked in the central portion between a pair of side surfaces at a predetermined width in the piezoelectric block 7. Near each side surface, the internal electrodes and piezoelectric ceramic layers are stacked such that adjacent every second internal electrodes sandwich two piezoelectric ceramic layers. These internal electrodes and piezoelectric ceramic layers are sintered and integrated, and the two external electrodes 8 and 9 extending from the two side surfaces to the upper surface of the piezoelectric element block are formed.
  • the nozzle plate 4 is manufactured by forming the nozzles 4a, 4b, and 4c in a stainless steel plate or the like by pressing. Alternately, the nozzle plate 4 having the nozzles 4a, 4b, and 4c and made of nickel or the like is formed by electroforming.
  • the first pressure chamber plate 23, ink supply port plate 5, and second pressure chamber plate 24 are formed from stainless steel plates or the like by pressing, or from photosensitive dry films by photolithography.
  • peripherals of the projections 3a, 3b and 3c have shapes thinner than other portions of the vibration plate 3.
  • the vibration plate 3 is made of nickel by electroforming, or of the stainless steel plate or the like by half etching.
  • the stainless steel plates are to be bonded by heating and diffusion or using an adhesive, and the dry films can be bonded to each other by heat fusing.
  • the piezoelectric element block 7 and vibration plate 3 are bonded by using an adhesive.
  • a pressure chamber unit 25 constructed from the nozzle plate 4, first pressure chamber plate 23, ink supply port plate 5, second pressure chamber plate 24, and vibration plate 3, and the piezoelectric element block 7 are bonded in this manner.
  • Fig. 6A is a perspective view of a state wherein a pressure chamber unit and piezoelectric element block are bonded.
  • the piezoelectric element block 7 is worked from the state shown in Fig. 6A such that the vibration plate 3 is cut exceeding the bonding surface of the pressure chamber unit 25 to a predetermined depth. At this time, the cut position is determined using the external shape of the pressure chamber unit 25 as reference such that each piezoelectric element is accurately positioned to and formed on a corresponding pressure chamber.
  • the piezoelectric element block 7 is cut in accordance with the determined cutting position, and piezoelectric elements 7a, 7b, and 7c are separated and formed, as shown in Fig. 6B.
  • the piezoelectric element block 7 can be cut by a dicing saw or wire saw.
  • each piezoelectric element is positioned to a corresponding pressure chamber, and the piezoelectric elements are separated from each other, thereby improving the positioning precision of each pressure chamber and a corresponding piezoelectric element. Therefore, the ink jet recording head having a little variation in characteristics can be obtained.
  • the second manufacturing method of the present invention is basically the same as the first manufacturing method described above except for a piezoelectric element block 13 is bonded to a pressure chamber unit 25 after notches are formed in the piezoelectric element 13.
  • Figs. 7A to 7C are views for explaining a method of manufacturing the piezoelectric element block 13, and show the second manufacturing method.
  • the piezoelectric element block 13 having the same arrangement as the piezoelectric element block shown in the first embodiment is prepared.
  • the piezoelectric element block 13 of the second embodiment shown in Figs. 3 and 4 is formed such that a non-stacked portion d in which no internal electrodes are stacked occupies 20% or more of the thickness in the stacking direction.
  • Notched portions 17 and 18 are respectively formed in the inactive regions by a dicing saw or wire saw (Fig. 7B).
  • the notched portions 17 and 18 are arranged apart from each other at a predetermined distance in the widthwise direction of the active region and formed at a uniform depth throughout the length of the block.
  • the notch is formed to have a depth to ensure the thickness of the aforementioned non-stacked portion d, i.e., to have the depth nearly equal to the thickness of the stacked portion (i.e., the portion in which the internal electrodes are stacked).
  • the piezoelectric element block 13 shown in Fig. 7C is manufactured in this manner and bonded to the pressure chamber unit 25.
  • the piezoelectric element block 13 is then positioned with respect to the pressure chambers in the same manner as the first manufacturing method, and cut and separated.
  • the ink jet recording head excellent in electro-mechanical conversion efficiency i.e., the pressure transmission efficiency for ink in the pressure chamber
  • the pressure chambers and piezoelectric elements can be easily and precisely positioned in manufacturing the ink jet recording head.
  • Fig. 8 is a perspective view showing an ink jet recordings head according to the third embodiment of the present invention
  • Fig. 9 is a sectional view taken along the line C - C in Fig. 8.
  • piezoelectric elements 26a, 26b, and 26c are single-layered piezoelectric elements on which a pair of external electrodes opposing each other are formed in the array direction of pressure chambers (i.e., in the direction of the piezoelectric element 26a ⁇ piezoelectric element 26b ⁇ piezoelectric element 26c in Fig. 8 (i.e., in the horizontal direction in Fig. 8)).
  • the piezoelectric element 26a in this embodiment is a single-layered piezoelectric element, and non-piezoelectric material portions 27 which do not deform when applying an electric field are bonded on two sides of a piezoelectric material portion 28, as shown in Fig. 9.
  • the piezoelectric material portion 28 serves as an active region, and the non-piezoelectric material portions serve as inactive regions.
  • a depth of notched portions 17 and 18 is determined depending on the displacement limitation of the active region by the inactive regions and a decrease in rigidity of the notched portions.
  • the corners of the notched portions 17 and 18 preferably have curved surfaces with appropriate curvature to avoid a stress concentration.
  • External electrodes 29a and 30a which respectively cover a pair of surfaces opposing each other in the array direction of the pressure chambers are formed on the piezoelectric element 26a by plating or sputtering so as to cover at least a part or the whole of the piezoelectric material portion 28.
  • Pad portions 31a and 32a are formed on the upper surface of the piezoelectric element 26a to connect the external electrodes 29a and 30a to a driving circuit (not shown).
  • the non-piezoelectric material portions 27 do not deform.
  • the piezoelectric material portion 28 deforms when the voltage is applied to the external electrodes 29a and 30a to apply the pressure to a pressure chamber 2a.
  • the piezoelectric element 26a is fixed to a vibration plate 3 on the lower surfaces of the corresponding inactive regions which are separated from the active region by the notched portions 17 and 18.
  • the fixed portions are portions fixed by a substrate member constructing a pressure chamber.
  • an active region 16a is connected to a projection 3a corresponding to the pressure chamber 2a.
  • Each of other piezoelectric elements 26b and 26c has the same arrangement as the piezoelectric element 26a.
  • the ink jet recording head can be realized at low cost.
  • the third manufacturing method of the present invention which is a method of manufacturing the recording head shown in Fig. 9 will be described next.
  • Figs. 10A and 10B are perspective views showing the method of manufacturing the piezoelectric element block according to the third embodiment
  • Figs. 11A and 11B are perspective views showing the method of manufacturing the ink jet recording head according to the third embodiment.
  • Notched portions 17 and 18 are respectively formed in inactive regions comprised of the non-piezoelectric material portions 27 on the lower surface of the piezoelectric element block 26 by a dicing saw or wire saw.
  • the notched portions 17 and 18 are arranged apart from the active region at a predetermined distance and formed at a uniform depth throughout the length of the block.
  • Photosensitive resin layers 33 which are used to form patterns as masks when forming external electrodes are formed on the upper and entire side surfaces of the piezoelectric element block 26 and the entire inner surfaces of the notched portions 17 and 18 (Fig. 10B).
  • the piezoelectric element block 26 on which the photosensitive resin layers 33 are formed is then bonded to a pressure chamber unit 25.
  • the photosensitive resin layers 33 are positioned with respect to the pressure chambers and exposed such that portions at which the pad portions of the external electrodes are formed are removed after cutting the block, and unexposed portions are removed (Fig. 11A).
  • the piezoelectric element block is positioned with respect to the pressure chambers and, in the same manner in the first and second manufacturing methods, cut and separated by a dicing saw or the like (Fig. 11B).
  • the external electrodes are formed by plating or sputtering at the portions which are not covered by the photosensitive resin layers 33. After forming the electrode films, the photosensitive resin layers 33 are removed.
  • the single-layered piezoelectric elements each having a pair of electrodes opposing each other in the array direction of the pressure chambers are bonded to the pressure chambers, respectively, thereby arranging the pressure chambers at a high density.
  • electro-mechanical conversion efficiency can be improved, but also the ink jet recording head can be easily manufactured at low cost because no expensive stacked piezoelectric element is used.
  • Fig. 12 is a perspective view showing an ink jet recording head according to the fourth embodiment of the present invention.
  • the fourth embodiment is similar to the third embodiment described above in that piezoelectric elements 34a, 34b, and 34c are single-layered piezoelectric elements on which a pair of external electrodes opposing each other are formed in an array direction of pressure chambers, except that no notched portions are formed.
  • the piezoelectric element 34a in this embodiment is a single-layered piezoelectric element, as described aboye, and non-piezoelectric material portions which do not deform when applying an electric field are bonded on two sides of a piezoelectric material portion, similar to the third embodiment.
  • the piezoelectric material portion therefore serves as an active region, and the non-piezoelectric material portions serve as inactive regions.
  • the fourth manufacturing method of the present invention which is a method for manufacturing the recording head shown in Fig. 12 according to the fourth embodiment will be described next.
  • a piezoelectric element block which is formed to bond each non-piezoelectric material portion to one of a pair of side surfaces of a piezoelectric material portion is prepared.
  • photosensitive resin layers 33 which are used to form patterns as masks when forming external electrodes are formed on the upper and entire side surfaces of the piezoelectric element block in which no notched portion is formed.
  • the piezoelectric element block in which the photosensitive resin layers 33 are formed is then bonded to a pressure chamber unit 25.
  • the photosensitive resin layers 33 are positioned with respect to the pressure chambers and exposed such that portions at which the pad portions of the external electrodes are formed are removed after cutting the block, and unexposed portions are removed.
  • the piezoelectric element block is positioned with respect to the pressure chambers and, in the same manner in the first, second, and third manufacturing methods, cut and separated by a dicing saw or the like.
  • the external electrodes are formed by plating or sputtering at the portions which are not covered by the photosensitive resin layers 33. After forming the electrode films, the photosensitive resin layers 33 are removed.
  • the ink jet recording head can be easily manufactured at low cost.
  • a positional relationship between a pressure chamber in a pressure chamber unit, a nozzle, and an ink supply port is not limited to this, if the pressure chambers are aligned and a vibration plate is formed on a single surface.
  • a piezoelectric element has an active region in which distortion occurs inside when a voltage is applied between external electrodes and an inactive region in which no distortion occurs inside when the voltage is applied between the external electrodes, and is bonded to a corresponding pressure chamber through the active region and a vibration wall and to the corresponding pressure chamber through the inactive region.
  • the inactive region does not constrain the displacement of the active region of the piezoelectric element. Therefore, the pressure transmission efficiency for the ink in the pressure chamber can be improved.
  • each piezoelectric element is positioned to the corresponding pressure chamber, and the piezoelectric elements are separated from each other, thereby improving the positioning precision of each pressure chamber and a corresponding piezoelectric element.
  • the recording head having a little variation in characteristics of each pressure chamber can be obtained.
  • the recording head capable of the high density, minimizing, having a plurality of nozzles, performing at a high-density, compact, multi-nozzle, high-speed, low-power, low-cost recording head can be provided.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP99923867A 1998-06-02 1999-06-02 Tintenstrahldruckkopf und verfahren zur dessen herstellung Withdrawn EP1083048A4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP15338098 1998-06-02
JP15338098A JP3248486B2 (ja) 1998-06-02 1998-06-02 インクジェット記録ヘッド及びその製造方法
PCT/JP1999/002945 WO1999062712A1 (fr) 1998-06-02 1999-06-02 Tete d'ecriture a jet d'encre et procede de fabrication associe

Publications (2)

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EP1083048A1 true EP1083048A1 (de) 2001-03-14
EP1083048A4 EP1083048A4 (de) 2001-09-19

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EP99923867A Withdrawn EP1083048A4 (de) 1998-06-02 1999-06-02 Tintenstrahldruckkopf und verfahren zur dessen herstellung

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EP (1) EP1083048A4 (de)
JP (1) JP3248486B2 (de)
AU (1) AU4058699A (de)
WO (1) WO1999062712A1 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1270227A1 (de) * 2001-06-25 2003-01-02 Xerox Corporation Piezoelektrischer Wandler
EP1275507A1 (de) * 2001-07-09 2003-01-15 Ricoh Company Flüssigkeitstropfenstrahlkopf und Tintenstrahlaufzeichnungsgerät
US6550897B2 (en) 2000-12-19 2003-04-22 Fuji Xerox Co., Ltd. Inkjet recording head and recording apparatus using the same
EP1815991A3 (de) * 2006-02-01 2007-09-12 Samsung Electronics Co., Ltd. Piezoelektrischer Tintenstrahldruckkopf
US7731340B2 (en) 2005-08-31 2010-06-08 Brother Kogyo Kabushiki Kaisha Liquid jetting head and method for producing the same

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JP4622362B2 (ja) * 2004-07-26 2011-02-02 ブラザー工業株式会社 インクジェットヘッド
JP2006096034A (ja) * 2004-08-31 2006-04-13 Brother Ind Ltd 溝付き振動板及び圧電層を有する圧電アクチュエータ、液体移送装置及びその製造方法
JP5151844B2 (ja) 2008-09-16 2013-02-27 株式会社リコー 液滴噴射ヘッド、液滴吐出装置、画像形成装置
KR101063450B1 (ko) * 2009-01-21 2011-09-08 삼성전기주식회사 잉크젯 헤드 제조방법
KR20100104730A (ko) * 2009-03-19 2010-09-29 삼성전기주식회사 잉크젯 헤드 제조방법
KR20220137308A (ko) 2021-04-02 2022-10-12 주식회사 이엠텍 미세입자 발생장치용 히터 및 그 설치구조
KR102498977B1 (ko) 2020-12-01 2023-02-15 주식회사 이엠텍 미세입자 발생장치용 히터 및 그 설치구조

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EP0723866A1 (de) * 1993-10-14 1996-07-31 Citizen Watch Co. Ltd. Tintenstrahldruckkopf, verfahren zur herstellung und verfahren zum steuern desselben
EP0783965A2 (de) * 1995-08-22 1997-07-16 Nec Corporation Apparat zum Ausstossen von Flüssigkeitstropfen und Verfahren zum Ausstossen von Flüssigkeitstropfen
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6550897B2 (en) 2000-12-19 2003-04-22 Fuji Xerox Co., Ltd. Inkjet recording head and recording apparatus using the same
EP1270227A1 (de) * 2001-06-25 2003-01-02 Xerox Corporation Piezoelektrischer Wandler
EP1275507A1 (de) * 2001-07-09 2003-01-15 Ricoh Company Flüssigkeitstropfenstrahlkopf und Tintenstrahlaufzeichnungsgerät
US6729716B2 (en) * 2001-07-09 2004-05-04 Ricoh Company, Ltd. Liquid drop jet head and ink jet recording apparatus
US7731340B2 (en) 2005-08-31 2010-06-08 Brother Kogyo Kabushiki Kaisha Liquid jetting head and method for producing the same
EP1815991A3 (de) * 2006-02-01 2007-09-12 Samsung Electronics Co., Ltd. Piezoelektrischer Tintenstrahldruckkopf
US7699442B2 (en) 2006-02-01 2010-04-20 Samsung Electro-Mechanics Co., Ltd Piezoelectric inkjet printhead
US8042919B2 (en) 2006-02-01 2011-10-25 Samsung Electro-Mechanics Co., Ltd. Piezoelectric inkjet printhead

Also Published As

Publication number Publication date
EP1083048A4 (de) 2001-09-19
WO1999062712A1 (fr) 1999-12-09
AU4058699A (en) 1999-12-20
JP3248486B2 (ja) 2002-01-21
JPH11348276A (ja) 1999-12-21

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