EP1067829A3 - Plasma nozzle - Google Patents

Plasma nozzle Download PDF

Info

Publication number
EP1067829A3
EP1067829A3 EP00113748A EP00113748A EP1067829A3 EP 1067829 A3 EP1067829 A3 EP 1067829A3 EP 00113748 A EP00113748 A EP 00113748A EP 00113748 A EP00113748 A EP 00113748A EP 1067829 A3 EP1067829 A3 EP 1067829A3
Authority
EP
European Patent Office
Prior art keywords
housing
plasma nozzle
nozzle
axis
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00113748A
Other languages
German (de)
French (fr)
Other versions
EP1067829A2 (en
EP1067829B1 (en
Inventor
Peter FÖRNSEL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plasma Treat GmbH
Original Assignee
Plasma Treat GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasma Treat GmbH filed Critical Plasma Treat GmbH
Publication of EP1067829A2 publication Critical patent/EP1067829A2/en
Publication of EP1067829A3 publication Critical patent/EP1067829A3/en
Application granted granted Critical
Publication of EP1067829B1 publication Critical patent/EP1067829B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3463—Oblique nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3478—Geometrical details

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Geometry (AREA)
  • Plasma Technology (AREA)
  • Arc Welding In General (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Abstract

The plasma nozzle is designed so that the mouth (18) of the nozzle duct is curved in relation to the vertical axis (A). The housing (10) is rotatable about its axis (A). The housing (10) is located rotationally on a carrying tube (14). The counter electrode is formed by the housing (10).
EP00113748A 1999-07-09 2000-06-29 Plasma nozzle Expired - Lifetime EP1067829B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29911974U DE29911974U1 (en) 1999-07-09 1999-07-09 Plasma nozzle
DE29911974U 1999-07-09

Publications (3)

Publication Number Publication Date
EP1067829A2 EP1067829A2 (en) 2001-01-10
EP1067829A3 true EP1067829A3 (en) 2003-06-25
EP1067829B1 EP1067829B1 (en) 2006-05-17

Family

ID=8075901

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00113748A Expired - Lifetime EP1067829B1 (en) 1999-07-09 2000-06-29 Plasma nozzle

Country Status (8)

Country Link
US (1) US6262386B1 (en)
EP (1) EP1067829B1 (en)
JP (1) JP4111659B2 (en)
AT (1) ATE326827T1 (en)
DE (2) DE29911974U1 (en)
DK (1) DK1067829T3 (en)
ES (1) ES2265312T3 (en)
PT (1) PT1067829E (en)

Families Citing this family (78)

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AT412719B (en) * 2003-06-16 2005-06-27 Eckelt Glas Gmbh METHOD AND DEVICE FOR PROCESSING DEFLECTING GLASS PANELS
US7164095B2 (en) 2004-07-07 2007-01-16 Noritsu Koki Co., Ltd. Microwave plasma nozzle with enhanced plume stability and heating efficiency
US8134097B2 (en) * 2004-08-23 2012-03-13 Illinois Tool Works Inc. Multi-position head plasma torch
US20060052883A1 (en) * 2004-09-08 2006-03-09 Lee Sang H System and method for optimizing data acquisition of plasma using a feedback control module
DE102005020511A1 (en) 2005-04-29 2006-11-09 Basf Ag Composite element, in particular window pane
JP2009519799A (en) * 2005-12-20 2009-05-21 プラズマトリート ゲゼルシャフト ミット ベシュレンクテル ハフツング Article disinfection method and apparatus
CN101361409B (en) * 2006-01-30 2011-09-14 赛安株式会社 Work piece processing system and plasma body generating apparatus
JP4647566B2 (en) * 2006-08-30 2011-03-09 株式会社サイアン Plasma generating apparatus and work processing apparatus using the same
TW200742506A (en) * 2006-02-17 2007-11-01 Noritsu Koki Co Ltd Plasma generation apparatus and work process apparatus
JP4619966B2 (en) * 2006-02-27 2011-01-26 株式会社サイアン Work processing device
JP4680095B2 (en) * 2006-02-28 2011-05-11 株式会社サイアン Work processing apparatus and plasma generating apparatus
US7547861B2 (en) * 2006-06-09 2009-06-16 Morten Jorgensen Vortex generator for plasma treatment
US20070284342A1 (en) * 2006-06-09 2007-12-13 Morten Jorgensen Plasma treatment method and apparatus
JP5055893B2 (en) * 2006-08-17 2012-10-24 パナソニック株式会社 Atmospheric pressure plasma generator
JP4724625B2 (en) * 2006-08-30 2011-07-13 株式会社サイアン Plasma generating apparatus and work processing apparatus using the same
JP4620015B2 (en) * 2006-08-30 2011-01-26 株式会社サイアン Plasma generating apparatus and work processing apparatus using the same
WO2008061602A1 (en) 2006-11-23 2008-05-29 Plasmatreat Gmbh Method and device for producing a plasma, and applications of the plasma
DE102006060942A1 (en) 2006-12-20 2008-06-26 Plasma Treat Gmbh Apparatus and method for generating a plasma jet
DE102007024090A1 (en) 2007-05-22 2008-11-27 Diener, Christof, Dipl.-Ing. Device for plasma treatment of surfaces, has electrical generator and multiple plasma producers, where plasma producers are connected or disconnected together at individual output voltage of generators
JP4719184B2 (en) * 2007-06-01 2011-07-06 株式会社サイアン Atmospheric pressure plasma generator and work processing apparatus using the same
US20100074810A1 (en) * 2008-09-23 2010-03-25 Sang Hun Lee Plasma generating system having tunable plasma nozzle
DE202008013560U1 (en) 2008-10-15 2010-03-04 Raantec Verpachtungen Gmbh & Co. Kg Apparatus for generating a plasma jet
DE102008052102B4 (en) * 2008-10-20 2012-03-22 INPRO Innovationsgesellschaft für fortgeschrittene Produktionssysteme in der Fahrzeugindustrie mbH Device for pre- and / or after-treatment of a component surface by means of a plasma jet
TWI387400B (en) * 2008-10-20 2013-02-21 Ind Tech Res Inst Plasma system
US7921804B2 (en) 2008-12-08 2011-04-12 Amarante Technologies, Inc. Plasma generating nozzle having impedance control mechanism
TWI380743B (en) * 2008-12-12 2012-12-21 Ind Tech Res Inst Casing and jet type plasma system
TWI407842B (en) * 2008-12-31 2013-09-01 Ind Tech Res Inst Wide area atmospheric pressure plasma jet apparatus
US20100201272A1 (en) * 2009-02-09 2010-08-12 Sang Hun Lee Plasma generating system having nozzle with electrical biasing
DE102009008907B4 (en) 2009-02-13 2014-07-24 Airbus Operations Gmbh Process for plasma treatment and painting of a surface
US20100254853A1 (en) * 2009-04-06 2010-10-07 Sang Hun Lee Method of sterilization using plasma generated sterilant gas
JP2011060688A (en) * 2009-09-14 2011-03-24 Kasuga Electric Works Ltd Plasma surface treatment device
DE102009048397A1 (en) 2009-10-06 2011-04-07 Plasmatreat Gmbh Atmospheric pressure plasma process for producing surface modified particles and coatings
CN101778525B (en) * 2010-01-22 2012-06-06 芜湖荣事达塑胶有限责任公司 Pneumatic rotary air plasma jet source
DE102010011643B4 (en) 2010-03-16 2024-05-29 Christian Buske Device and method for plasma treatment of living tissue
JP4889834B2 (en) 2010-05-13 2012-03-07 パナソニック株式会社 Plasma processing apparatus and method
CN102387653B (en) 2010-09-02 2015-08-05 松下电器产业株式会社 Plasma processing apparatus and method of plasma processing
JP5617817B2 (en) 2011-10-27 2014-11-05 パナソニック株式会社 Inductively coupled plasma processing apparatus and inductively coupled plasma processing method
CN103094038B (en) * 2011-10-27 2017-01-11 松下知识产权经营株式会社 Plasma processing apparatus and plasma processing method
WO2013070179A1 (en) * 2011-11-09 2013-05-16 Freeze Brent Method and apparatus for compressing plasma to a high energy state
JP5510437B2 (en) * 2011-12-07 2014-06-04 パナソニック株式会社 Plasma processing apparatus and plasma processing method
FR2984678B1 (en) * 2011-12-15 2014-11-07 Renault Sa ROBOTIC DEVICE FOR PLASMA SURFACE PREPARATION OF A THERMOPLASTIC PIECE
US9211603B2 (en) 2012-01-31 2015-12-15 The Esab Group, Inc. Plasma gouging torch and angled nozzle therefor
DE102012003563B4 (en) * 2012-02-23 2017-07-06 Drägerwerk AG & Co. KGaA Device for disinfecting wound treatment
US10115565B2 (en) 2012-03-02 2018-10-30 Panasonic Intellectual Property Management Co., Ltd. Plasma processing apparatus and plasma processing method
DE102012206081A1 (en) * 2012-04-13 2013-10-17 Krones Ag Coating of containers with plasma nozzles
US9781818B2 (en) 2012-08-06 2017-10-03 Hypertherm, Inc. Asymmetric consumables for a plasma arc torch
US9497845B2 (en) 2012-08-06 2016-11-15 Hypertherm, Inc. Consumables for a plasma arc torch for bevel cutting
US10314155B2 (en) 2012-08-06 2019-06-04 Hypertherm, Inc. Asymmetric consumables for a plasma arc torch
US10721812B2 (en) 2012-08-06 2020-07-21 Hypertherm, Inc. Asymmetric consumables for a plasma arc torch
US9107282B2 (en) 2012-08-06 2015-08-11 Hypertherm, Inc. Asymmetric consumables for a plasma arc torch
CZ2012935A3 (en) * 2012-12-19 2014-07-02 Masarykova Univerzita Method of generating plasma under atmospheric pressure in slot nozzle and apparatus for making the same
KR101479767B1 (en) * 2012-12-26 2015-01-12 주식회사 다원시스 Arc-jet plasma generator
DE102013103259A1 (en) 2013-04-02 2014-10-02 Plasmatreat Gmbh Disinfection module for a serial process plant
KR101498392B1 (en) * 2013-12-11 2015-03-03 주식회사 에이피아이 Plasma generating apparatus
TWI531280B (en) 2014-04-16 2016-04-21 馗鼎奈米科技股份有限公司 Plasma device
CN104640339A (en) * 2015-01-12 2015-05-20 广东韦达尔科技有限公司 Plasma surface treatment device
TW201709775A (en) * 2015-08-25 2017-03-01 馗鼎奈米科技股份有限公司 Arc atmospheric pressure plasma device
DE102015121253A1 (en) 2015-12-07 2017-06-08 Plasmatreat Gmbh Apparatus for generating an atmospheric plasma jet for treating the surface of a workpiece
DE102015121252A1 (en) 2015-12-07 2017-06-08 Plasmatreat Gmbh Apparatus for generating an atmospheric plasma jet and method for treating the surface of a workpiece
DE102016209097A1 (en) * 2016-03-16 2017-09-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. plasma nozzle
KR101716698B1 (en) * 2016-04-15 2017-03-15 안선희 Portable Plasma skin care Apparatus
WO2018020434A1 (en) 2016-07-26 2018-02-01 BORISSOVA, Anastasiia Olegovna Tissue tolerable plasma generator and method for the creation of protective film from the wound substrate
WO2018026026A1 (en) * 2016-08-02 2018-02-08 주식회사 피글 Plasma enhancement member, and plasma supply device and medical device including same
KR20180134182A (en) * 2017-06-08 2018-12-18 삼성전자주식회사 plasma processing apparatus
TWI674041B (en) * 2017-12-21 2019-10-01 雷立強光電科技股份有限公司 Apparatus for generating atmospheric environment plasma
TWI691237B (en) * 2018-02-13 2020-04-11 國立交通大學 Atmospheric-pressure plasma jet generating device
KR102032294B1 (en) * 2018-04-13 2019-10-15 주식회사 에이피피 Apparatus for generating atmospheric pressure plasma
DE102018132960A1 (en) 2018-12-19 2020-06-25 Plasmatreat Gmbh Device and method for treating a workpiece surface with an atmospheric plasma jet
EP4050973A4 (en) 2019-10-22 2022-11-09 Fuji Corporation Plasma generation device and plasma processing method
WO2021186448A2 (en) * 2020-03-19 2021-09-23 Caps Medical Ltd. Plasma system with directional features
JP2022538202A (en) * 2020-05-22 2022-09-01 フン リ，チャン Surface treatment system and method for cylindrical and annular objects to be treated using atmospheric pressure plasma generator
JP7420003B2 (en) * 2020-07-31 2024-01-23 株式会社デンソー Plasma discharge nozzle for plasma processing equipment and plasma processing equipment
US11692267B2 (en) 2020-12-31 2023-07-04 Applied Materials, Inc. Plasma induced modification of silicon carbide surface
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4692582A (en) * 1985-02-22 1987-09-08 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Plasma welding or cutting system provided with a delay
DE3612722A1 (en) * 1986-04-16 1987-10-29 Lothar Wittig Apparatus for plasma arc cutting
FR2672459A1 (en) * 1991-02-01 1992-08-07 Girard Frederic Device for recharging by plasma, with oblique orifice
US5278387A (en) * 1991-03-22 1994-01-11 La Soudure Autogene Francaise Gun for cutting out sheet metal
EP0766502A1 (en) * 1995-09-28 1997-04-02 Sulzer Metco (Irvine) Inc. Single cathode plasma gun with powder feed along central axis of exit barrel
US5837958A (en) * 1995-09-01 1998-11-17 Agrodyn Hochspannungstechnik Gmbh Methods and apparatus for treating the surface of a workpiece by plasma discharge

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US3707615A (en) * 1971-11-12 1972-12-26 Metco Inc Nozzle for a plasma generator
DE3642375A1 (en) * 1986-12-11 1988-06-23 Castolin Sa METHOD FOR APPLYING AN INTERNAL COATING INTO TUBES OD. DGL. CAVITY NARROW CROSS SECTION AND PLASMA SPLASH BURNER DAFUER
DE29805999U1 (en) 1998-04-03 1998-06-25 Agrodyn Hochspannungstechnik GmbH, 33803 Steinhagen Device for the plasma treatment of surfaces

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4692582A (en) * 1985-02-22 1987-09-08 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Plasma welding or cutting system provided with a delay
DE3612722A1 (en) * 1986-04-16 1987-10-29 Lothar Wittig Apparatus for plasma arc cutting
FR2672459A1 (en) * 1991-02-01 1992-08-07 Girard Frederic Device for recharging by plasma, with oblique orifice
US5278387A (en) * 1991-03-22 1994-01-11 La Soudure Autogene Francaise Gun for cutting out sheet metal
US5837958A (en) * 1995-09-01 1998-11-17 Agrodyn Hochspannungstechnik Gmbh Methods and apparatus for treating the surface of a workpiece by plasma discharge
EP0766502A1 (en) * 1995-09-28 1997-04-02 Sulzer Metco (Irvine) Inc. Single cathode plasma gun with powder feed along central axis of exit barrel

Also Published As

Publication number Publication date
EP1067829A2 (en) 2001-01-10
JP2001068298A (en) 2001-03-16
PT1067829E (en) 2006-10-31
EP1067829B1 (en) 2006-05-17
JP4111659B2 (en) 2008-07-02
DE50012751D1 (en) 2006-06-22
DE29911974U1 (en) 2000-11-23
US6262386B1 (en) 2001-07-17
ES2265312T3 (en) 2007-02-16
DK1067829T3 (en) 2006-09-18
ATE326827T1 (en) 2006-06-15

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