TWI674041B - Apparatus for generating atmospheric environment plasma - Google Patents

Abstract

An atmospheric plasma generating device includes a casing, an internal electrode, an air intake mechanism, and an arc guide electrode. The casing has an inlet portion and an outlet portion. The internal electrode is disposed in the case and is adjacent to the entrance portion. The air intake mechanism is connected to the internal electrode and the inlet, and the air intake mechanism has at least one air inlet. The arc guide electrode is disposed at the exit portion and is opposite to the inner electrode. The arc guide electrode includes a columnar portion and a tip portion. The tip portion extends from the surface of the columnar portion toward the inner electrode. And the columnar part has a perforation as a plasma outlet on the opposite side of the tip part.

Description

Atmospheric plasma generating device

The embodiment of the invention relates to an atmospheric plasma generating device, in particular to an atmospheric plasma generating device with a guided arc.

Plasma is a material form mainly composed of charged ions and free electrons. In addition to solid, liquid, and gaseous states, plasma is often considered the fourth state of matter. The use of the characteristics of the plasma can cause many special chemical and physical reactions, which have been widely used in various fields, such as dry etching in semiconductor processes, cleaning of circuit boards, and changes in surface properties of materials.

There are many types of plasma sources, including microwave surface wave plasma sources, inductive plasma sources, plasma torches and atmospheric plasma sources. As far as atmospheric plasma is concerned, spray-type atmospheric plasma is often used for component cleaning and surface modification. However, the arc at the time of plasma generation easily spills and damages the component surface, which affects the process yield. Therefore, the development of an atmospheric plasma generating device with a controlled arc is a problem that needs to be solved urgently at present.

One aspect of the present invention is an atmospheric plasma generating device including a casing, an internal electrode, an air intake mechanism, and an arc guiding electrode. The casing has an inlet portion and an outlet portion. The internal electrode is disposed in the casing and is adjacent to the entrance portion. The air intake mechanism is connected to the internal electrode and the inlet, and the air intake mechanism has at least one air inlet. An arc guide electrode is disposed at the exit portion and is opposite to the inner electrode. The arc guide electrode includes a columnar portion and a tip portion. The tip portion extends from a surface of the columnar portion toward the inner electrode, and the columnar portion is connected to the outlet The columnar portion has a perforation as a plasma outlet on the opposite side of the tip portion.

According to some embodiments of the present invention, the tip portion includes a triangular prism, and a ridge line of the triangular prism is substantially parallel to the surface of the columnar portion.

According to some embodiments of the invention, the perforations are substantially perpendicular to the surface of the columnar portion.

According to some embodiments of the present invention, an axis of the perforation forms an included angle with the surface of the columnar portion of about 20 degrees to 90 degrees.

According to some embodiments of the invention, the axis of the perforation is substantially parallel to a side wall of the triangular prism.

According to some embodiments of the invention, a side wall of the triangular prism abuts an edge of the perforation.

According to some embodiments of the present invention, the perforation includes a circular entrance or a rectangular entrance.

According to some embodiments of the present invention, the perforation is a rectangular slit, and a sidewall of the rectangular slit is coplanar with a sidewall of the triangular prism. surface.

According to some embodiments of the invention, the tip portion includes a cone.

According to some embodiments of the invention, the perforations are substantially perpendicular to the surface of the columnar portion.

According to some embodiments of the present invention, an axis of the perforation forms an included angle with the surface of the columnar portion of about 20 degrees to 90 degrees.

According to some embodiments of the invention, the axis of the perforation is substantially parallel to a side wall of the cone.

According to some embodiments of the invention, a side wall of the cone abuts an edge of the perforation.

According to some embodiments of the present invention, the perforation includes a circular entrance or a rectangular entrance.

According to some embodiments of the present invention, the perforation is a rectangular slit, and a sidewall of the rectangular slit is coplanar with a sidewall of the cone.

According to some embodiments of the present invention, the tip portion has a mirror-symmetric structure.

100‧‧‧ Atmospheric plasma generating device

105‧‧‧shell

110‧‧‧Entrance

115‧‧‧Export Department

120‧‧‧Internal electrode

125‧‧‧Air intake element

130‧‧‧air inlet

135‧‧‧Air intake mechanism

140‧‧‧Columnar

145‧‧‧tip

150‧‧‧arc guide electrode

155‧‧‧Edge

160‧‧‧ surface

165‧‧‧perforation

170‧‧‧ sidewall

175‧‧‧conductor

180‧‧‧ Power Supply

185‧‧‧ tip

200‧‧‧gas

300‧‧‧arc

400‧‧‧ Plasma

L‧‧‧ axis

M‧‧‧ axis

θ ‧‧‧ angle

The aspect of the disclosure will be better understood when reading the following detailed description in conjunction with the accompanying drawings. However, it must be noted that in accordance with the standard practice of this industry, various features are not drawn to scale. In fact, the dimensions of various features may be arbitrarily enlarged or reduced for clarity of discussion.

FIG. 1 is a schematic perspective view of an atmospheric plasma generating device according to some embodiments of the present invention.

Fig. 2 is a schematic cross-sectional view along line AA 'of an atmospheric plasma generating device according to Fig. 1.

3 to 8 are perspective views of various arc guiding electrodes according to some embodiments of the present invention.

Fig. 9 is a schematic sectional view along line AA 'of another atmospheric plasma generating device according to Fig. 1.

This disclosure will next provide many different implementations or examples to implement different features in this disclosure. The composition and configuration of each specific embodiment will be described below to simplify the present disclosure. These are examples only and are not intended to limit the present disclosure. For example, a first element formed "above" or "above" a second element may include the first element in the embodiment in direct contact with the second element, or it may include that the first element and the second element are more Other additional elements make the first element in no direct contact with the second element. In addition, in various examples of this disclosure, component symbols and / or letters will be used repeatedly. This repetition is for the purpose of simplicity and clarity, and does not itself determine the relationship between various embodiments and / or structural configurations. In addition, various features may be drawn at different scales for simplicity and clarity.

Further, terms such as "below", "below", "lower", "above", "higher", and other similar relative spatial relationships may be Used herein to describe the relationship between one element or feature and another element or feature in a drawing. The terms of relative spatial relationship are intended to cover various directions of the device in use or operation in addition to the directions described in the drawings. For example, if the device in the figure is turned over, elements that were previously described as "below" or "beneath" other elements or features become "above" the other elements or features. Therefore, the example term "below" can include both directions above and below. The above device may have other guiding methods (rotate 90 degrees or in other directions), and the spatial relative relationship at this time can also be interpreted in the above manner.

FIG. 1 is a schematic perspective view of an atmospheric plasma generating device 100 according to some embodiments of the invention, and FIG. 2 is a schematic cross-sectional view taken along line AA ′ in FIG. 1. As shown in FIGS. 1 and 2, the atmospheric plasma generating device 100 includes a case 105, an internal electrode 120, an air intake mechanism 135, and an arc guide electrode 150.

The casing 105 includes an inlet portion 110 and an outlet portion 115. In one embodiment, the casing 105 is a hollow casing and may be composed of a metal material. In one embodiment, the inlet portion 110 is an electrode setting end, and the outlet portion 115 is a plasma outlet end, which is located at both ends of the casing 105.

The internal electrode 120 is disposed in the case 105 and is adjacent to the entrance portion 110. In one embodiment, the internal electrode 120 is electrically connected to the power supply 180. With the voltage provided by the power supply 180, the gas around the internal electrode dissociates to form plasma gas, and an arc 300 is generated. In an embodiment, the internal electrode 120 is a metal electrode, and may be, for example, copper, tungsten, stainless steel, or a similar high-temperature resistant alloy, or other suitable materials.

The air intake mechanism 135 is connected to the internal electrode 120 and the inlet 110, and the air intake mechanism 135 has at least one air inlet 130. The air intake mechanism 135 is used to introduce a gas 200 required for generating plasma. In one embodiment, the air intake mechanism 135 includes an air intake element 125. The air intake element 125 has a plurality of air inlets 130 located between the internal electrode 120 and the casing 105. The gas 200 supplied by the gas supplier (not shown) can enter the casing 105 through the air inlets 130 and continuously provide the gas required to generate the plasma.

The arc guiding electrode 150 is disposed at the exit portion 115 and is opposite to the internal electrode 120. The arc guiding electrode 150 includes a columnar portion 140 and a tip portion 145. In one embodiment, the casing 105 is made of a metal material, and the conductive wire 175 is connected to the casing 105. The arc guiding electrode 150 can be electrically connected to the power supply 180 through the casing 105. In addition, an isolation element (not shown) may be further disposed between the internal electrode 120 and the casing 105 to prevent the internal electrode 120 from making electrical contact with the casing 105. In another embodiment, the casing 105 is made of a non-metallic material, and the arc guiding electrode 150 may be directly connected to the power supply 180 through a wire 175.

The tip portion 145 extends from the surface 160 of the columnar portion 140 toward the internal electrode 120. The columnar portion 140 is connected to the outlet portion 115. In an embodiment, the outlet portion 115 substantially surrounds and abuts the columnar portion 140, so the perforation 165 is a plasma outlet. In addition, the aforementioned tip-type design (tip portion 145) has the effect of tip discharge, which can attract the arc 300 to this point and eject from the perforation 165 along the side wall 170.

In some embodiments, the tip portion 145 has a mirror-symmetrical structure. The axis m is a normal to the substantially vertical surface 160. For example, if With the axis m as the axis of symmetry, the tip portions 145 on both sides of the axis m appear mirror-symmetrical. In some embodiments, the tip portion 145 is located directly below the tip 185 of the internal electrode 120, and the tip portion 145 to the tip 185 has a distance of about 10 mm to about 60 mm.

Continuing to refer to FIG. 3 to FIG. 5, it is a three-dimensional schematic diagram of the arc guiding electrode 150 in various embodiments. FIG. 3 illustrates an arc guiding electrode 150 having a triangular prism tip design and a circular straight hole. In some embodiments, the tip portion 145 includes a triangular prism, and the ridge line 155 of the triangular prism is substantially parallel to the surface 160 of the cylindrical portion 140. The triangular prism has an edge of the side wall 170 adjacent to the perforation 165. The perforations 165 are circular straight holes that are substantially perpendicular to the surface 160. The electric arc 300 can eject the plasma 400 along the side wall 170 downward from the perforation 165 by the guide of the tip portion 145.

FIG. 4 shows an arc guiding electrode 150 having a triangular prism tip design and a circular oblique hole. The axis L is a dummy axis running through the center of the perforation 165. The included angle θ is the angle at which the axis L intersects the surface 160. In some embodiments, the axis L of the perforation 165 forms an angle θ with the surface 160 of about 20 degrees to 90 degrees. Therefore, the perforation 165 is an oblique hole of the non-vertical surface 160. In an embodiment, the axis L of the perforation 165 is substantially parallel to a side wall 170 of the triangular prism, and the side wall 170 of the triangular prism is adjacent to the edge of the perforation 165. In addition, the airflow will follow the path of least resistance. If the aforementioned perforation 165 is adjacent to and parallel to the side wall 170 of the triangular prism (inclined hole), the arc 300 is guided to the tip portion 145 and can be straightly advanced along the side wall 170 and ejected along the perforation 165. Conversely, if the perforation 165 is perpendicular to the surface 160 (straight hole), the arc 300 flows down the side wall 170 and enters the perforation 165 and will first hit the side wall in the perforation 165. Therefore, the direction of the path needs to be changed to eject from the perforation 165. In other words, the resistance of the arc 300 flowing through the inclined hole is smaller than that of the straight hole, and it has the function of guiding the air flow.

FIG. 5 illustrates an arc guiding electrode 150 having a triangular prism tip design and a rectangular oblique hole. In some embodiments, the perforation 165 is a rectangular slit (rectangular oblique hole), and one side wall of the rectangular slit is coplanar with the side wall 170 of the triangular prism. In some embodiments, the side wall 170 of the triangular prism abuts the edge of the perforation 165 of the aforementioned rectangular slit. Compared with the circular oblique hole described in FIG. 4, because one side wall and the side wall 170 of the rectangular slit are connected to form a continuous and complete plane, the resistance of the arc 300 flowing through the rectangular oblique hole is smaller than that of the circular oblique hole. Has better fluidity.

Continuing to refer to FIG. 6 to FIG. 8, it is a three-dimensional schematic diagram of the arc guiding electrode 150 in various embodiments. FIG. 6 illustrates an arc guiding electrode 150 having a pointed design of a cone and a circular straight hole. In some embodiments, the tip portion 145 includes a cone, and the perforation 165 is substantially perpendicular to the surface 160. The perforations 165 are circular straight holes that are substantially perpendicular to the surface 160. The cone has an edge of the sidewall 170 abutting the perforation 165. In some embodiments, the tip 145 may include, but is not limited to, a triangular pyramid, a quadrangular pyramid, a pentagonal vertebra, or any other shape of vertebra. Different from the aforementioned triangular prism, when the tip portion 145 is designed as a cone, its tip only intersects at one point, so the tip discharge effect is more obvious than the edge line 155. The electric arc 300 can eject the plasma 400 along the side wall 170 downward from the perforation 165 by the guide of the tip portion 145.

FIG. 7 illustrates an arc guiding electrode 150 having a tapered tip design and a circular oblique hole. The axis L is a dummy axis running through the center of the perforation 165. The included angle θ is the angle at which the axis L intersects the surface 160. In some real In the embodiment, the axis L of the perforation 165 and the surface 160 form an included angle θ of about 20 degrees to 90 degrees. Therefore, the perforation 165 is an oblique hole of the non-vertical surface 160. In some embodiments, the axis L of the perforation 165 is substantially parallel to a side wall 170 of the cone, and the side wall 170 of the cone abuts the edge of the perforation 165. As mentioned above, the resistance of the arc 300 flowing through the inclined hole is smaller than that of the straight hole, and it has a better function of guiding the air flow.

FIG. 8 illustrates an arc guiding electrode 150 having a tapered tip design and a rectangular oblique hole. In some embodiments, the perforations 165 include a circular or rectangular inlet. In some embodiments, the perforation 165 is a rectangular slit (rectangular oblique hole), and a sidewall 170 of the rectangular slit is coplanar with a sidewall of the cone. When the cone is non-conical, one of the side walls of the rectangular slit and the side wall 170 form a continuous and complete plane, so that the resistance of the arc 300 flowing through the rectangular oblique hole is smaller than that of the circular oblique hole, which has better flow Sex.

Fig. 9 is a schematic cross-sectional view of another atmospheric plasma generating device 100 along line AA 'in Fig. 1 according to some embodiments of the present invention. The columnar portion 140 of the arc guiding electrode 150 has a perforation 165, and the perforation 165 is an oblique hole as described above. An angle between an axis of the perforation 165 and the surface 160 is an acute angle, and is parallel to and adjacent to the side wall 170 of the tip portion 145. The arc 300 is attracted by the tip 145 of the arc guide electrode 150 and can be ejected straight down from the oblique hole (perforation 165) along the side wall 170. The resistance during the air flow is less than that of the straight hole, and it has better airflow guidance Function to reduce the degree of arc scum. Housing 105, inlet 110, outlet 115, internal electrode 120, air inlet element 125, air inlet 130, air inlet mechanism 135, lead 175, power supply 180, tip 185, gas 200, plasma 400, axis m may be the same as the second The diagrams are the same and will not be repeated here.

The foregoing outlines the features of several embodiments so that those skilled in the art can better understand the aspects of this disclosure. Those skilled in the art should understand that the disclosure can be easily used as a basis for designing or modifying other processes and structures for achieving the same purpose and / or achieving the same advantages of the embodiments introduced herein. Those skilled in the technology should also realize that such equivalent constructions do not violate the spirit and scope of this disclosure, and can make various changes, substitutions and alterations without departing from the spirit and scope of this disclosure. .

Claims (14)

An atmospheric plasma generating device includes: a casing having an inlet portion and an outlet portion; an internal electrode disposed in the casing and adjacent to the inlet portion; an air intake mechanism connecting the internal electrode and the inlet And the air-intake mechanism has at least one air inlet; and an arc-guiding electrode is disposed at the outlet portion and opposite to the inner electrode, the arc-guiding electrode includes a columnar portion and a tip portion, the The tip portion extends from a surface of the columnar portion toward the internal electrode, wherein the columnar portion is connected to the outlet portion, and the columnar portion has a perforation located on one side of the tip portion, wherein the tip portion includes a triangular prism And a ridge line of the triangular prism is substantially parallel to the surface of the columnar portion. The atmospheric plasma generating device according to item 1 of the patent application scope, wherein the perforation is substantially perpendicular to the surface. The atmospheric plasma generating device according to item 1 of the scope of patent application, wherein an axis of the perforation forms an angle with the surface of about 20 to 90 degrees. The atmospheric plasma generating device according to item 3 of the scope of patent application, wherein the axis of the perforation is substantially parallel to a side wall of the triangular prism. The atmospheric plasma generating device according to item 1 of the scope of patent application, wherein a side wall of the triangular prism is adjacent to an edge of the perforation. The atmospheric plasma generating device according to item 1 of the patent application scope, wherein the perforation includes a circular entrance or a rectangular entrance. The atmospheric plasma generating device according to item 1 of the patent application scope, wherein the perforation is a rectangular slit, and a side wall of the rectangular slit is coplanar with a side wall of the triangular prism. An atmospheric plasma generating device includes: a casing having an inlet portion and an outlet portion; an internal electrode disposed in the casing and adjacent to the inlet portion; an air intake mechanism connecting the internal electrode and the inlet And the air-intake mechanism has at least one air inlet; and an arc-guiding electrode is disposed at the outlet portion and opposite to the inner electrode, the arc-guiding electrode includes a columnar portion and a tip portion, The tip portion extends from a surface of the columnar portion toward the internal electrode, wherein the columnar portion is connected to the outlet portion, and the columnar portion has a perforation located on one side of the tip portion, wherein the tip portion includes a cone Wherein a side wall of the cone abuts an edge of the perforation. Atmospheric plasma as described in item 8 of the scope of patent application A device is created wherein the perforation is substantially perpendicular to the surface. The atmospheric plasma generating device according to item 8 of the scope of the patent application, wherein an axis of the perforation forms an angle with the surface of about 20 to 90 degrees. The atmospheric plasma generating device according to item 10 of the patent application scope, wherein the axis of the perforation is substantially parallel to a side wall of the cone. The atmospheric plasma generating device according to item 8 of the patent application scope, wherein the perforation includes a circular entrance or a rectangular entrance. The atmospheric plasma generating device according to item 8 of the scope of the patent application, wherein the perforation is a rectangular slit, and a sidewall of the rectangular slit is coplanar with the sidewall of the cone. The atmospheric plasma generating device according to item 1 or 8 of the patent application scope, wherein the tip portion has a mirror-symmetric structure.