EP1067829A3 - Plasmadüse - Google Patents

Plasmadüse Download PDF

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Publication number
EP1067829A3
EP1067829A3 EP00113748A EP00113748A EP1067829A3 EP 1067829 A3 EP1067829 A3 EP 1067829A3 EP 00113748 A EP00113748 A EP 00113748A EP 00113748 A EP00113748 A EP 00113748A EP 1067829 A3 EP1067829 A3 EP 1067829A3
Authority
EP
European Patent Office
Prior art keywords
housing
plasma nozzle
nozzle
axis
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00113748A
Other languages
English (en)
French (fr)
Other versions
EP1067829A2 (de
EP1067829B1 (de
Inventor
Peter FÖRNSEL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plasma Treat GmbH
Original Assignee
Plasma Treat GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasma Treat GmbH filed Critical Plasma Treat GmbH
Publication of EP1067829A2 publication Critical patent/EP1067829A2/de
Publication of EP1067829A3 publication Critical patent/EP1067829A3/de
Application granted granted Critical
Publication of EP1067829B1 publication Critical patent/EP1067829B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3463—Oblique nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3478—Geometrical details

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Geometry (AREA)
  • Plasma Technology (AREA)
  • Arc Welding In General (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Abstract

Plasmadüse, insbesondere zum Vorbehandeln von Oberflächen, mit einem rohrförmigen Gehäuse (10), das einen von einem Arbeitsgas durchströmten Düsenkanal (16) bildet, einer koaxial in dem Düsenkanal angeordneten Elektrode (24) und einer den Düsenkanal umgebenden Gegenelektrode, dadurch gekennzeichnet, daß die Mündung (18) des Düsenkanals gegenüber dieser Achse abgewinkelt ist.
EP00113748A 1999-07-09 2000-06-29 Plasmadüse Expired - Lifetime EP1067829B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29911974U 1999-07-09
DE29911974U DE29911974U1 (de) 1999-07-09 1999-07-09 Plasmadüse

Publications (3)

Publication Number Publication Date
EP1067829A2 EP1067829A2 (de) 2001-01-10
EP1067829A3 true EP1067829A3 (de) 2003-06-25
EP1067829B1 EP1067829B1 (de) 2006-05-17

Family

ID=8075901

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00113748A Expired - Lifetime EP1067829B1 (de) 1999-07-09 2000-06-29 Plasmadüse

Country Status (8)

Country Link
US (1) US6262386B1 (de)
EP (1) EP1067829B1 (de)
JP (1) JP4111659B2 (de)
AT (1) ATE326827T1 (de)
DE (2) DE29911974U1 (de)
DK (1) DK1067829T3 (de)
ES (1) ES2265312T3 (de)
PT (1) PT1067829E (de)

Families Citing this family (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29919142U1 (de) 1999-10-30 2001-03-08 Agrodyn Hochspannungstechnik GmbH, 33803 Steinhagen Plasmadüse
US20040011378A1 (en) * 2001-08-23 2004-01-22 Jackson David P Surface cleaning and modification processes, methods and apparatus using physicochemically modified dense fluid sprays
US6774336B2 (en) 2001-02-27 2004-08-10 Thermal Dynamics Corporation Tip gas distributor
JP4678973B2 (ja) * 2001-03-29 2011-04-27 西日本プラント工業株式会社 溶射トーチのプラズマアークの発生装置及び発生方法
AT412719B (de) * 2003-06-16 2005-06-27 Eckelt Glas Gmbh Verfahren und vorrichtung zum bereichsweisen entschichten von glasscheiben
US7164095B2 (en) 2004-07-07 2007-01-16 Noritsu Koki Co., Ltd. Microwave plasma nozzle with enhanced plume stability and heating efficiency
US8134097B2 (en) * 2004-08-23 2012-03-13 Illinois Tool Works Inc. Multi-position head plasma torch
US20060052883A1 (en) * 2004-09-08 2006-03-09 Lee Sang H System and method for optimizing data acquisition of plasma using a feedback control module
DE102005020511A1 (de) 2005-04-29 2006-11-09 Basf Ag Verbundelement, insbeondere Fensterscheibe
JP2009519799A (ja) * 2005-12-20 2009-05-21 プラズマトリート ゲゼルシャフト ミット ベシュレンクテル ハフツング 物品の消毒方法および装置
CN101361409B (zh) * 2006-01-30 2011-09-14 赛安株式会社 工件处理系统和等离子体产生装置
TW200742506A (en) * 2006-02-17 2007-11-01 Noritsu Koki Co Ltd Plasma generation apparatus and work process apparatus
JP4647566B2 (ja) * 2006-08-30 2011-03-09 株式会社サイアン プラズマ発生装置およびそれを用いるワーク処理装置
JP4619966B2 (ja) * 2006-02-27 2011-01-26 株式会社サイアン ワーク処理装置
JP4680095B2 (ja) * 2006-02-28 2011-05-11 株式会社サイアン ワーク処理装置及びプラズマ発生装置
US20070284342A1 (en) * 2006-06-09 2007-12-13 Morten Jorgensen Plasma treatment method and apparatus
US7547861B2 (en) * 2006-06-09 2009-06-16 Morten Jorgensen Vortex generator for plasma treatment
JP5055893B2 (ja) * 2006-08-17 2012-10-24 パナソニック株式会社 大気圧プラズマ発生装置
JP4724625B2 (ja) * 2006-08-30 2011-07-13 株式会社サイアン プラズマ発生装置およびそれを用いるワーク処理装置
JP4620015B2 (ja) * 2006-08-30 2011-01-26 株式会社サイアン プラズマ発生装置およびそれを用いるワーク処理装置
WO2008061602A1 (de) 2006-11-23 2008-05-29 Plasmatreat Gmbh Verfahren und vorrichtung zum erzeugen eines plasmas und anwendungen des plasmas
DE102006060942A1 (de) 2006-12-20 2008-06-26 Plasma Treat Gmbh Vorrichtung und Verfahren zur Erzeugung eines Plasmastrahls
DE102007024090A1 (de) 2007-05-22 2008-11-27 Diener, Christof, Dipl.-Ing. Plasmabehandlungsvorrichtung
JP4719184B2 (ja) * 2007-06-01 2011-07-06 株式会社サイアン 大気圧プラズマ発生装置およびそれを用いるワーク処理装置
US20100074810A1 (en) * 2008-09-23 2010-03-25 Sang Hun Lee Plasma generating system having tunable plasma nozzle
DE202008013560U1 (de) 2008-10-15 2010-03-04 Raantec Verpachtungen Gmbh & Co. Kg Vorrichtung zur Erzeugung eines Plasmastrahls
DE102008052102B4 (de) * 2008-10-20 2012-03-22 INPRO Innovationsgesellschaft für fortgeschrittene Produktionssysteme in der Fahrzeugindustrie mbH Vorrichtung zum Vor- und/oder Nachbehandeln einer Bauteiloberfläche mittels eines Plasmastrahls
TWI387400B (zh) * 2008-10-20 2013-02-21 Ind Tech Res Inst 電漿系統
US7921804B2 (en) 2008-12-08 2011-04-12 Amarante Technologies, Inc. Plasma generating nozzle having impedance control mechanism
TWI380743B (en) * 2008-12-12 2012-12-21 Ind Tech Res Inst Casing and jet type plasma system
TWI407842B (zh) * 2008-12-31 2013-09-01 Ind Tech Res Inst 大氣電漿大幅寬處理裝置
US20100201272A1 (en) * 2009-02-09 2010-08-12 Sang Hun Lee Plasma generating system having nozzle with electrical biasing
DE102009008907B4 (de) 2009-02-13 2014-07-24 Airbus Operations Gmbh Verfahren zur Plasmabehandlung und Lackierung einer Fläche
US20100254853A1 (en) * 2009-04-06 2010-10-07 Sang Hun Lee Method of sterilization using plasma generated sterilant gas
JP2011060688A (ja) * 2009-09-14 2011-03-24 Kasuga Electric Works Ltd プラズマ表面処理装置
DE102009048397A1 (de) 2009-10-06 2011-04-07 Plasmatreat Gmbh Atmosphärendruckplasmaverfahren zur Herstellung oberflächenmodifizierter Partikel und von Beschichtungen
CN101778525B (zh) * 2010-01-22 2012-06-06 芜湖荣事达塑胶有限责任公司 气动旋转空气等离子射流源
DE102010011643B4 (de) 2010-03-16 2024-05-29 Christian Buske Vorrichtung und Verfahren zur Plasmabehandlung von lebendem Gewebe
JP4889834B2 (ja) 2010-05-13 2012-03-07 パナソニック株式会社 プラズマ処理装置及び方法
CN102387653B (zh) 2010-09-02 2015-08-05 松下电器产业株式会社 等离子体处理装置及等离子体处理方法
JP5617817B2 (ja) 2011-10-27 2014-11-05 パナソニック株式会社 誘導結合型プラズマ処理装置及び誘導結合型プラズマ処理方法
CN103094038B (zh) * 2011-10-27 2017-01-11 松下知识产权经营株式会社 等离子体处理装置以及等离子体处理方法
WO2013070179A1 (en) * 2011-11-09 2013-05-16 Freeze Brent Method and apparatus for compressing plasma to a high energy state
JP5510437B2 (ja) * 2011-12-07 2014-06-04 パナソニック株式会社 プラズマ処理装置及びプラズマ処理方法
FR2984678B1 (fr) * 2011-12-15 2014-11-07 Renault Sa Dispositif robotise de preparation de surface par plasma d'une piece thermoplastique
US9211603B2 (en) 2012-01-31 2015-12-15 The Esab Group, Inc. Plasma gouging torch and angled nozzle therefor
DE102012003563B4 (de) * 2012-02-23 2017-07-06 Drägerwerk AG & Co. KGaA Einrichtung zur desinfizierenden Wundbehandlung
US10115565B2 (en) 2012-03-02 2018-10-30 Panasonic Intellectual Property Management Co., Ltd. Plasma processing apparatus and plasma processing method
DE102012206081A1 (de) * 2012-04-13 2013-10-17 Krones Ag Beschichtung von Behältern mit Plasmadüsen
US10721812B2 (en) 2012-08-06 2020-07-21 Hypertherm, Inc. Asymmetric consumables for a plasma arc torch
US9107282B2 (en) 2012-08-06 2015-08-11 Hypertherm, Inc. Asymmetric consumables for a plasma arc torch
US10314155B2 (en) 2012-08-06 2019-06-04 Hypertherm, Inc. Asymmetric consumables for a plasma arc torch
US9497845B2 (en) 2012-08-06 2016-11-15 Hypertherm, Inc. Consumables for a plasma arc torch for bevel cutting
US9781818B2 (en) 2012-08-06 2017-10-03 Hypertherm, Inc. Asymmetric consumables for a plasma arc torch
CZ2012935A3 (cs) * 2012-12-19 2014-07-02 Masarykova Univerzita Způsob vytváření plazmatu za atmosférického tlaku ve štěrbinové trysce a zařízení k jeho provádění
KR101479767B1 (ko) * 2012-12-26 2015-01-12 주식회사 다원시스 아크제트 플라스마 발생기
DE102013103259A1 (de) 2013-04-02 2014-10-02 Plasmatreat Gmbh Desinfektionsmodul für eine Serienprozessanlage
WO2015088069A1 (ko) * 2013-12-11 2015-06-18 주식회사 에이피아이 플라즈마 발생장치
TWI531280B (zh) 2014-04-16 2016-04-21 馗鼎奈米科技股份有限公司 電漿裝置
CN104640339A (zh) * 2015-01-12 2015-05-20 广东韦达尔科技有限公司 一种等离子表面处理装置
TW201709775A (zh) * 2015-08-25 2017-03-01 馗鼎奈米科技股份有限公司 電弧式大氣電漿裝置
DE102015121253A1 (de) 2015-12-07 2017-06-08 Plasmatreat Gmbh Vorrichtung zum Erzeugen eines atmosphärischen Plasmastrahls zur Behandlung der Oberfläche eines Werkstücks
DE102015121252A1 (de) 2015-12-07 2017-06-08 Plasmatreat Gmbh Vorrichtung zur Erzeugung eines atmosphärischen Plasmastrahls und Verfahren zur Behandlung der Oberfläche eines Werkstücks
DE102016209097A1 (de) * 2016-03-16 2017-09-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Plasmadüse
KR101716698B1 (ko) * 2016-04-15 2017-03-15 안선희 휴대용 플라즈마 미용장치
WO2018020434A1 (en) 2016-07-26 2018-02-01 BORISSOVA, Anastasiia Olegovna Tissue tolerable plasma generator and method for the creation of protective film from the wound substrate
EP3496515B1 (de) 2016-08-02 2022-09-28 Feagle Co., Ltd Medizinisches gerät mit plasma-zufuhrvorrichtung und plasma-verbesserungselement
KR20180134182A (ko) * 2017-06-08 2018-12-18 삼성전자주식회사 플라즈마 처리 장치
TWI674041B (zh) * 2017-12-21 2019-10-01 雷立強光電科技股份有限公司 一種大氣電漿產生裝置
TWI691237B (zh) * 2018-02-13 2020-04-11 國立交通大學 常壓電漿束產生裝置
KR102032294B1 (ko) * 2018-04-13 2019-10-15 주식회사 에이피피 대기압 플라즈마 발생장치
DE102018132960A1 (de) 2018-12-19 2020-06-25 Plasmatreat Gmbh Vorrichtung und Verfahren zur Behandlung einer Werkstückoberfläche mit einem atmosphärischen Plasmastrahl
CN114586473A (zh) 2019-10-22 2022-06-03 株式会社富士 等离子体产生装置及等离子体处理方法
US20230125601A1 (en) * 2020-03-19 2023-04-27 Caps Medical Ltd. Plasma system with adjustable features
WO2021235912A1 (ko) * 2020-05-22 2021-11-25 이창훈 대기압 플라즈마 발생 장치를 이용한 원통형 및 환형 피처리물의 표면처리 시스템 및 방법
JP7420003B2 (ja) * 2020-07-31 2024-01-23 株式会社デンソー プラズマ処理装置用のプラズマ放出ノズル及びプラズマ処理装置
US11692267B2 (en) * 2020-12-31 2023-07-04 Applied Materials, Inc. Plasma induced modification of silicon carbide surface
DE102021115020A1 (de) 2021-06-10 2022-12-15 Plasmatreat Gmbh Vorrichtung zum erzeugen eines atmosphärischen plasmastrahls zur behandlung einer oberfläche eines werkstücks
WO2024042577A1 (ja) 2022-08-22 2024-02-29 株式会社Fuji プラズマ発生装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4692582A (en) * 1985-02-22 1987-09-08 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Plasma welding or cutting system provided with a delay
DE3612722A1 (de) * 1986-04-16 1987-10-29 Lothar Wittig Vorrichtung zum plasmaschmelzschneiden
FR2672459A1 (fr) * 1991-02-01 1992-08-07 Girard Frederic Dispositif de rechargement par plasma a orifice oblique.
US5278387A (en) * 1991-03-22 1994-01-11 La Soudure Autogene Francaise Gun for cutting out sheet metal
EP0766502A1 (de) * 1995-09-28 1997-04-02 Sulzer Metco (Irvine) Inc. Einkathode-Plasmabrenner mit Pulverzuführung entlang der Zentralachse der Ausgangsdüse
US5837958A (en) * 1995-09-01 1998-11-17 Agrodyn Hochspannungstechnik Gmbh Methods and apparatus for treating the surface of a workpiece by plasma discharge

Family Cites Families (3)

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Publication number Priority date Publication date Assignee Title
US3707615A (en) * 1971-11-12 1972-12-26 Metco Inc Nozzle for a plasma generator
DE3642375A1 (de) * 1986-12-11 1988-06-23 Castolin Sa Verfahren zur aufbringung einer innenbeschichtung in rohre od. dgl. hohlraeume engen querschnittes sowie plasmaspritzbrenner dafuer
DE29805999U1 (de) 1998-04-03 1998-06-25 Agrodyn Hochspannungstechnik GmbH, 33803 Steinhagen Vorrichtung zur Plasmabehandlung von Oberflächen

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4692582A (en) * 1985-02-22 1987-09-08 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Plasma welding or cutting system provided with a delay
DE3612722A1 (de) * 1986-04-16 1987-10-29 Lothar Wittig Vorrichtung zum plasmaschmelzschneiden
FR2672459A1 (fr) * 1991-02-01 1992-08-07 Girard Frederic Dispositif de rechargement par plasma a orifice oblique.
US5278387A (en) * 1991-03-22 1994-01-11 La Soudure Autogene Francaise Gun for cutting out sheet metal
US5837958A (en) * 1995-09-01 1998-11-17 Agrodyn Hochspannungstechnik Gmbh Methods and apparatus for treating the surface of a workpiece by plasma discharge
EP0766502A1 (de) * 1995-09-28 1997-04-02 Sulzer Metco (Irvine) Inc. Einkathode-Plasmabrenner mit Pulverzuführung entlang der Zentralachse der Ausgangsdüse

Also Published As

Publication number Publication date
DK1067829T3 (da) 2006-09-18
EP1067829A2 (de) 2001-01-10
DE29911974U1 (de) 2000-11-23
ATE326827T1 (de) 2006-06-15
DE50012751D1 (de) 2006-06-22
US6262386B1 (en) 2001-07-17
JP2001068298A (ja) 2001-03-16
EP1067829B1 (de) 2006-05-17
ES2265312T3 (es) 2007-02-16
JP4111659B2 (ja) 2008-07-02
PT1067829E (pt) 2006-10-31

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