WO2015088069A1 - 플라즈마 발생장치 - Google Patents
플라즈마 발생장치 Download PDFInfo
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- WO2015088069A1 WO2015088069A1 PCT/KR2013/011461 KR2013011461W WO2015088069A1 WO 2015088069 A1 WO2015088069 A1 WO 2015088069A1 KR 2013011461 W KR2013011461 W KR 2013011461W WO 2015088069 A1 WO2015088069 A1 WO 2015088069A1
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- plasma
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- high voltage
- discharge head
- nozzle
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3463—Oblique nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/024—Moving components not otherwise provided for
Definitions
- the present invention relates to a plasma generating device, and more particularly, because it has a compact and improved structure unlike the conventional one, no complicated structure such as a carbon brush is required, and dust and foreign substances generated in the carbon brush are not generated at the source. Therefore, the problem of damage to the grounding bearings does not occur, and thus, frequent maintenance problems can be solved, and the durability of the device can be greatly improved. Therefore, the plasma generator can be applied to various industrial processes requiring plasma. It is about.
- Plasma refers to a gaseous state that is separated into electrons with positive charges and positively charged ions at very high temperatures. At this time, the charge separation degree is very high, but the negative and positive charges are the same as the whole.
- the state of the material is divided into three, such as solid, liquid, gas, but because it does not belong to the plasma is often referred to as the fourth material state.
- Plasma generation often requires electrical methods such as direct current, microwave, and electron beams to generate plasma and then maintain this state using magnetic fields.
- plasma is the most common state. It is estimated that 99% of the universe is plasma.
- Lightning, aurora borealis and ionic layers in the atmosphere are in a plasma state. If you go out of the atmosphere, plasma is also present in the anti-Allen band, where ions are trapped in the Earth's magnetic field, and the solar wind emanating from the sun.
- the interior of the star or its surrounding gas is also in a plasma state.
- the hydrogen gas filling the space between the stars is also in a plasma state.
- Plasma is used in a variety of applications ranging from plasma used for ultra-high temperature fusion having a temperature of several hundred million degrees to low temperature glow plasma and arc plasma used in recent semiconductor processes and new material synthesis.
- the plasma is ashed to a photoresist used for patterning a metal material or semiconductor deposition. It may be used in a cleaning process for removing, etching a thin film made of other organic materials or semiconductor materials, or removing organic materials on the surface.
- plasma is widely used throughout the industry for various purposes, and accordingly, various types of plasma generators for artificially generating plasma are commercially available.
- the object of the present invention unlike the conventional one, because it has a compact but improved structure does not require a complex structure such as a carbon brush, and since dust and foreign substances generated from the carbon brush is not generated at the source, the problem of damage to the grounding combined bearings does not occur. As a result, it is possible to solve frequent maintenance problems and to significantly improve the durability of the device, thereby providing a plasma generator that can be applied to various industrial processes requiring plasma.
- the object is a plasma generating module for generating a plasma (Plasma); And at least one plasma nozzle through which the plasma generated by the plasma generating module is blown to the outside, and is disposed separately from the plasma generating module and rotatably disposed outside the plasma generating module. It is achieved by a plasma generating device comprising a whole.
- the plasma generation module includes: a high voltage electrode disposed at a central region; A ground electrode disposed around the high voltage electrode and configured to generate a high voltage arc by charging a power applied to the high voltage electrode; And a gas inlet provided between the high voltage electrode and the ground electrode, and compressed air or gas is injected into the discharge head.
- the plasma generating module includes: at least one high voltage insulator provided between the high voltage electrode and the ground electrode; And a gas distributor including a plurality of gas distribution holes through which compressed air or gas is injected through the gas injection unit.
- the high voltage insulator may include a first high voltage insulator disposed adjacent to the gas injector; And a second high voltage insulator disposed along a circumferential direction of the first high voltage insulator at a radially outer side of the first high voltage insulator.
- the ground electrode may include a first ground electrode having a cylindrical shape; And a second ground electrode having a funnel shape and detachably coupled to the first ground electrode.
- the rotor includes a rotor rotatably disposed outside the plasma generation module; And a discharge head including the plasma nozzle, the discharge head being detachably coupled to the end of the rotor and gradually widening toward the end.
- the rotor may include a first rotor rotatably disposed radially outward of the first ground electrode with a bearing therebetween; And one side may include a second rotor detachably coupled to the first rotor and the other side detachably coupled to the discharge head.
- a lip seal having excellent slip property may be further provided around the bearing to prevent damage of the bearing.
- the second rotor may include a cylindrical diameter expanding engagement section that is coupled to the first rotor in a threaded manner; A first inclined section formed to be inclined at an end of the cylindrical enlarged diameter coupling section; A stepped section that is connected to the first inclined section and forms a step with the cylindrical wide diameter joining section at a radially inner side of the cylindrical wide diameter joining section, but having a smaller diameter than the cylindrical wide diameter joining section; A second inclined section formed to be inclined at an end of the stepped section; And a cylindrical shaft diameter coupling section connected to the second inclined section and detachably coupled to the discharge head at an end thereof.
- the inclination of the first inclined section may be formed more sharply than the inclination of the second inclined section, and a plurality of grooves may be formed on the outer wall of the cylindrical shaft diameter coupling section.
- An end portion of the first rotor may be formed with a bearing release preventing flange which is bent inward to prevent the bearing from being separated.
- the plasma nozzle may include: a first inclined guide configured to guide the plasma in an inclined direction in the discharge head; And a second inclination guide part having a different inclination from the first inclination guide part and forming the plasma nozzle together with the first inclination guide part.
- the plasma nozzle may be inclined in the end region of any one of the first inclined guide portion and the second inclined guide portion so that the plasma may be guided to the inclined end surface of the discharge head or the bottom surface of the discharge head. It may further include an end dummy dummy inclined guide portion formed to be inclined at a different angle from the portion.
- a plurality of plasma nozzles may be disposed on both the inclined end surface of the discharge head or the bottom surface of the discharge head.
- the plasma nozzle may be centrally disposed at a portion along the circumferential direction on both the inclined end surface of the discharge head or the bottom surface of the discharge head.
- the gas distribution hole may include a diameter reducing nozzle section formed to gradually decrease its diameter toward the plasma nozzle; A cylindrical nozzle section communicating with the diameter reducing nozzle section in a minimum diameter region of the diameter reducing nozzle section; And a diameter increasing nozzle section communicating with the cylindrical nozzle section, the diameter increasing gradually from the cylindrical nozzle section toward the plasma nozzle.
- the present invention since it has a compact and improved structure unlike the conventional one, no complicated structure such as a carbon brush is not required, and dust and foreign substances generated from the carbon brush are not generated at the source. As a result, frequent maintenance problems can be solved, as well as the durability of the device can be significantly improved, which can be applied to various industrial processes requiring plasma.
- FIG. 1 is a block diagram of a plasma generating apparatus according to an embodiment of the present invention.
- FIG. 2 is a cross-sectional structural view of FIG. 1.
- FIG. 3 is a partial exploded view of FIG. 2.
- FIG. 4 is a partial exploded view of the plasma generating module.
- FIG. 5 is an enlarged view of the discharge head shown in FIG. 2.
- FIG. 6 is a cross-sectional structural view of another angle with respect to FIG.
- FIG. 7 is an enlarged view of the discharge head shown in FIG. 6.
- FIG. 9 is a cross-sectional structural view of a plasma generating apparatus according to another embodiment of the present invention.
- FIG. 10 is an enlarged view of the gas distribution hole region shown in FIG. 9.
- FIG. 1 is a configuration diagram of a plasma generating apparatus according to an embodiment of the present invention
- Figure 2 is a cross-sectional structure of Figure 1
- Figure 3 is a partial exploded view of Figure 2
- Figure 4 is a partial exploded view of the plasma generation module
- Figure 5 An enlarged view of the discharge head shown in FIG. 2
- FIG. 6 is a cross-sectional structural view of another angle with respect to FIG. 1
- FIG. 7 is an enlarged view of the discharge head shown in FIG. 6, and
- FIG. 8 is a plan view of the discharge head.
- the plasma generating apparatus 100 since the plasma generating apparatus 100 according to the present embodiment has a compact and improved structure unlike before, it does not require a complicated structure such as a carbon brush (not shown), and dust generated from the carbon brush. Since no foreign matter is generated at the source, it does not cause the problem of damage to the grounding bearings, and thus it is possible to solve the frequent maintenance problem and to greatly improve the durability of the device. As it may be applied, it may include a plasma generating module 110 and the rotating body (170).
- Plasma generating module 110 is an assembly of module units for generating a plasma (Plasma).
- the plasma generating module 110 itself generates plasma.
- the plasma generating module 110 includes a high voltage electrode 120, a ground electrode 131, 132, a counter electrode, a gas inlet 140, a high voltage insulator 151, 152, a high voltage insulator, and a gas distributor. (160, Gas Distributor).
- the high voltage electrode 120 is a rod-shaped electrode disposed in a central region.
- the high voltage is applied to the central high voltage electrode 120 through a cable (C).
- the ground electrodes 131 and 132 are counter structures disposed around the high voltage electrode 120. As the ground electrodes 131 and 132 are charged with the power, an arc of high voltage is generated.
- the ground electrodes 131 and 132 may be provided as one body. However, in the present embodiment, the ground electrodes 131 and 132 are applied to the divided body for maintenance. That is, in the present embodiment, the ground electrodes 131 and 132 may include a first ground electrode 131 having a cylindrical shape and a second ground electrode 132 having a funnel shape and detachably coupled to the first ground electrode 131. Include.
- the gas inlet 140 is provided between the high voltage electrode 120 and the ground electrodes 131 and 132, and is a portion in which compressed air or gas is injected into the discharge head 190.
- the compressed air may be general compressed air
- the gas may be plasma gas
- the high voltage insulator (151, 152, High Voltage Insulator) is a structure provided between the high voltage electrode 120 and the ground electrode (131, 132), and provides a thermal insulation function to the outside.
- the high voltage insulators 151 and 152 may also be provided as one body. However, in the present embodiment, the high voltage insulators 151 and 152 are applied as a divided body for maintenance.
- the high voltage insulators 151 and 152 may include the first high voltage insulator 151 disposed adjacent to the gas injection unit 140 and the first high voltage insulator 151 in the radially outer side of the first high voltage insulator 151. And a second high voltage insulator 152 disposed along the circumferential direction of the second high voltage insulator.
- the gas distributor 160 forms a place where compressed air or gas injected through the gas injection unit 140 is distributed.
- a plurality of gas distribution holes 161 are formed in the gas distributor 160.
- the plurality of gas distribution holes 161 may be arranged at an equiangular interval along the circumferential direction of the gas distributor 160.
- the rotating body 170 is provided with a plasma nozzle (191, Plasma Nozzle) for blowing out the plasma generated by the plasma generating module 110, the plasma generating module 110 is provided separately from the plasma generating module It is a structure that is rotatably disposed outside the (110).
- a plasma nozzle (191, Plasma Nozzle) for blowing out the plasma generated by the plasma generating module 110
- the plasma generating module 110 is provided separately from the plasma generating module It is a structure that is rotatably disposed outside the (110).
- the plasma may be generated in a wide area as shown in FIG. 1.
- the plasma may be sprayed in a vertical direction, the scope of the present invention is not limited to the drawings.
- the rotor 170 includes rotors 181, 182 and a rotor rotatably disposed outside the plasma generating module 110, and a plasma nozzle 191, and is detachably attached to an end of the second rotor 182. And a discharge head 190 coupled and formed to gradually widen toward the end.
- the rotors 181 and 182 may also be provided as one body. However, in this embodiment, the rotor (181, 182) is applied to the divided body for maintenance.
- the rotors 181 and 182 are rotatably disposed on the radially outer side of the first ground electrode 131 with the bearing B therebetween, and one side of the rotors 181 and 182. ) And a second rotor 182 detachably coupled to the other side and detachably coupled to the discharge head 190.
- the first rotor 181 has a substantially cylindrical shape.
- a plurality of grooves 181a are formed on an outer wall of the first rotor 181, and a flange for preventing release of bearings 181b is formed at an end thereof to be bent inward to prevent separation of the bearings B.
- a lip seal 182g having excellent slip property is further provided around the inner bearing B of the first rotor 181 to prevent damage of the bearing.
- Lip seal 182g may be made of fluorinated ethylene polymer (PTFE), but the scope of the present invention is not limited to the material thereof.
- the plasma generating apparatus 100 because it has a compact yet improved structure unlike the conventional structure such as a conventional carbon brush (not shown) used for grounding In addition, since dust and foreign substances generated from the carbon brush are not generated at the source, it is possible to prevent contamination of the product during plasma surface treatment.
- the second rotor 182 has the following structural features.
- the second rotor 182 is a cylindrical wide diameter coupling section 182a coupled to the first rotor 181 in a screw manner, and a first inclined section inclined at the end of the cylindrical wide diameter coupling section 182a. 182b and the first inclined section 182b, and form a step with the cylindrical wide diameter coupling section 182a in the radially inner side of the cylindrical wide diameter coupling section 182a, but having a diameter greater than that of the cylindrical wide diameter coupling section 182a.
- the second inclined section 182d that is formed to be inclined at the end of the stepped section 182c, and the second inclined section 182d, and is detached from the discharge head 190 at the end. It may include a cylindrical shaft diameter coupling section 182e that is possibly coupled.
- the second rotor 182 may have the above structural features.
- the wide diameter coupling section 182a, the first inclined section 182b, the stepped section 182c, the second inclined section 182d, and the cylindrical shaft diameter coupling section 182e constituting the second rotor 182 may be formed of a single material. It can be molded integrally by.
- the inclination of the first inclined section 182b may be formed more urgently than the inclination of the second inclined section 182d.
- a plurality of grooves 182f may be formed on the outer wall of the cylindrical shaft diameter coupling section 182e.
- the discharge head 190 is provided with the above-described plasma nozzle 191, detachably coupled to the end of the second rotor 182 and the discharge head 190 is formed to gradually increase in width toward the end Include.
- the plasma nozzle 191 has a different inclination from the first inclined guide 191a for guiding the plasma in an inclined direction in the discharge head 190 and the first inclined guide 191a, and the first inclined guide. And a second inclined guide portion 191b forming the plasma nozzle 191 together with the portion 191a.
- the plasma nozzle 191 in the present embodiment the first inclined guide portion 191a so that the plasma can be guided to the inclined end surface 190a of the discharge head 190 or the bottom surface 190b of the discharge head 190.
- the first and second end dummy inclined guides 191c and 191d formed to be inclined at different angles from the corresponding inclined guides 191a and 191b in one of the end regions of the second and second inclined guides 191b. It further includes.
- the plasma may be guided to the inclined end surface 190a of the discharge head 190.
- the plasma may be guided to the bottom surface 190b of the discharge head 190.
- a plurality of plasma nozzles 191 may be disposed on both the inclined end surface 190a of the discharge head 190 or the bottom surface 190b of the discharge head 190. As shown in FIG. 8, The plasma nozzle 191 is concentrated in some sections along the circumferential direction on both the inclined end surface 190a of the discharge head 190 or the bottom surface 190b of the discharge head 190. By having such a structural feature it is possible to increase the plasma generation efficiency.
- the polymer surface becomes hydrophilic in nature when exposed to an electric arc.
- the high voltage electrode 120 designed in a round shape may be implemented as it is connected to the secondary coil of the high voltage transformer.
- the electric arc is generated only between the high voltage electrode 120 and the ground electrodes (131, 132), the air (or special gas) is a plasma state (mixing ions and electrons) by the generated arc.
- the plasma generated through the plasma nozzle 191 of the discharge head 190 may be blown out by injecting compressed air or gas, and the surface of the target may be modified by the plasma.
- the continuous arc produces ions with high energy in the plasma field.
- reactive active groups are generated on the surface. Therefore, it is a necessary condition for crosslinking of the polymer surface with ink, coating agent, adhesive, and the like.
- the arc has a conical shape, such as a flame coming from a torch, as in FIG.
- the present embodiment since it has a compact and improved structure unlike the conventional one, there is no need for a complicated structure such as a carbon brush, and since dust and foreign substances generated in the carbon brush are not generated at the source, bearing B damage problems. As a result, frequent maintenance problems can be solved, and the durability of the device can be greatly improved, and thus it can be applied to various industrial processes requiring plasma.
- the plasma generating apparatus 100 of the present embodiment it is possible to provide a strong high voltage power to ensure long-term reliability, structurally simple operation, and can be protected by its own circuit.
- FIG. 9 is a cross-sectional structural view of a plasma generating apparatus according to another embodiment of the present invention
- FIG. 10 is an enlarged view of a gas distribution hole region shown in FIG. 9.
- the plasma generating apparatus 200 of the present embodiment may also include a plasma generating module 110 and a rotating body 170.
- the plasma generation module 210 also includes a high voltage electrode 120, a ground electrode 131, 132, a counter electrode, a gas inlet 140, a high voltage insulator 151, 152, a high voltage insulator, and a gas.
- the distributor 260 may include a gas distributor.
- the structure of the gas distribution holes 261 formed in the gas distributor 260 is provided in a different form from the above-described gas distribution holes 161.
- the gas distribution hole 261 has a minimum diameter of the nozzle section 261a for reducing the diameter and the nozzle section 261a for reducing the diameter, which is formed to gradually decrease in diameter toward the plasma nozzle 191.
- the cylindrical nozzle section 261b in communication with the nozzle section 261a for reducing the diameter in the diameter region and the cylindrical nozzle section 261b communicate with each other, and toward the plasma nozzle 191 from the cylindrical nozzle section 261b.
- a diameter increasing nozzle section 261c formed so that its diameter is gradually increased.
- the diameter reducing nozzle section 261a prevents the vortex of the gas directed toward the diameter reducing nozzle section 261a so that the gas can flow uniformly and stably.
- the cylindrical nozzle section 261b lowers the pressure of the gas introduced from the diameter reducing nozzle section 261a to speed up the flow rate.
- the introduced gas may be injected from the nozzle section 261c for increasing the diameter at a desired flow rate.
- the diameter increasing nozzle section 261c allows the gas to be better sprayed into the entire area of the discharge head 190.
- the velocity of the gas passes through the diameter reducing nozzle section 261a, the cylindrical nozzle section 261b, and the diameter increasing nozzle section 261c.
Abstract
Description
Claims (16)
- 플라즈마(Plasma)를 발생시키는 플라즈마 발생모듈; 및상기 플라즈마 발생모듈에 의해 발생된 플라즈마가 외부로 불어내지는 적어도 하나의 플라즈마 노즐(Plasma Nozzle)을 구비하며, 상기 플라즈마 발생모듈과는 별개로 마련되어 상기 플라즈마 발생모듈의 외측에 회전 가능하게 배치되는 회전체를 포함하는 것을 특징으로 하는 플라즈마 발생장치.
- 제1항에 있어서,상기 플라즈마 발생모듈은,중앙 영역에 배치되는 고전압 전극(High Voltage Electrode);상기 고전압 전극의 주변에 배치되고 상기 고전압 전극으로 인가되는 전원이 대전되어 고압의 아크를 발생시키는 접지 전극(Counter Electrode); 및상기 고전압 전극과 상기 접지 전극 사이에 마련되며, 상기 방전 헤드 측으로 압축공기 또는 가스가 주입되는 가스 주입부(Gas Inlet)를 포함하는 것을 특징으로 하는 플라즈마 발생장치.
- 제2항에 있어서,상기 플라즈마 발생모듈은,상기 고전압 전극과 상기 접지 전극 사이에 마련되는 적어도 하나의 고전압 인슐레이터(High Voltage Insulator); 및상기 가스 주입부를 통해 주입되는 압축공기 또는 가스가 분배되는 다수의 가스 분배공을 구비하는 가스 분배기(Gas Distributor)를 더 포함하는 것을 특징으로 하는 플라즈마 발생장치.
- 제3항에 있어서,상기 고전압 인슐레이터는,상기 가스 주입부에 인접하게 배치되는 제1 고전압 인슐레이터; 및상기 제1 고전압 인슐레이터의 반경 방향 외측에서 상기 제1 고전압 인슐레이터의 둘레 방향을 따라 배치되는 제2 고전압 인슐레이터를 포함하는 것을 특징으로 하는 플라즈마 발생장치.
- 제2항에 있어서,상기 접지 전극은,원통형 형상을 갖는 제1 접지 전극; 및깔때기 형상을 가지며, 상기 제1 접지 전극과 착탈 가능하게 결합되는 제2 접지 전극을 포함하는 것을 특징으로 하는 플라즈마 발생장치.
- 제5항에 있어서,상기 회전체는,상기 플라즈마 발생모듈의 외측에 회전 가능하게 배치되는 로터(Rotor); 및상기 플라즈마 노즐을 구비하며, 상기 로터의 단부에 착탈 가능하게 결합되고 단부로 갈수록 점진적으로 폭이 넓어지게 형성되는 방전 헤드를 포함하는 것을 특징으로 하는 플라즈마 발생장치.
- 제6항에 있어서,상기 로터는,베어링을 사이에 두고 상기 제1 접지 전극의 반경 방향 외측에 회전 가능하게 배치되는 제1 로터; 및일측은 상기 제1 로터와 착탈 가능하게 결합되고 타측은 상기 방전 헤드와 착탈 가능하게 결합되는 제2 로터를 포함하는 것을 특징으로 하는 플라즈마 발생장치.
- 제7항에 있어서,상기 베어링의 주변에는 상기 베어링의 손상이 저지되도록 슬립성이 우수한 립 실(Lip Seal)이 더 마련되는 것을 특징으로 하는 플라즈마 발생장치.
- 제7항에 있어서,상기 제2 로터는,상기 제1 로터와 나사 방식으로 결합되는 원통형 확경 결합구간;상기 원통형 확경 결합구간의 단부에서 경사지게 형성되는 제1 경사구간;상기 제1 경사구간과 연결되며, 상기 원통형 확경 결합구간의 반경 방향 내측에서 상기 원통형 확경 결합구간과 단차를 형성하되 상기 원통형 확경 결합구간보다 직경이 좁게 형성되는 단차구간;상기 단차구간의 단부에서 경사지게 형성되는 제2 경사구간; 및상기 제2 경사구간과 연결되며, 단부에서 상기 방전 헤드와 착탈 가능하게 결합되는 원통형 축경 결합구간을 포함하는 것을 특징으로 하는 플라즈마 발생장치.
- 제9항에 있어서,상기 제1 경사구간의 경사도가 상기 제2 경사구간의 경사도보다 급하게 형성되며,상기 원통형 축경 결합구간의 외벽에는 다수의 그루브가 형성되는 것을 특징으로 하는 플라즈마 발생장치.
- 제7항에 있어서,상기 제1 로터의 단부에는 내측으로 절곡되어 상기 베어링의 이탈을 저지시키는 베어링 이탈 저지용 플랜지가 형성되는 것을 특징으로 하는 플라즈마 발생장치.
- 제6항에 있어서,상기 플라즈마 노즐은,상기 방전 헤드 내부에서 상기 플라즈마를 경사진 방향으로 안내하는 제1 경사안내부; 및상기 제1 경사안내부와는 상이한 경사도를 가지며, 상기 제1 경사안내부와 함께 상기 플라즈마 노즐을 형성하는 제2 경사안내부를 포함하는 것을 특징으로 하는 플라즈마 발생장치.
- 제12항에 있어서,상기 플라즈마 노즐은,상기 플라즈마가 상기 방전 헤드의 경사단부면 또는 상기 방전 헤드의 밑면으로 안내될 수 있도록, 상기 제1 경사안내부와 상기 제2 경사안내부 중 어느 하나의 단부 영역에서 해당 경사안내부와 상이한 각도를 가지고 경사지게 형성되는 단부형 더미 경사안내부를 더 포함하는 것을 특징으로 하는 플라즈마 발생장치.
- 제13항에 있어서,상기 플라즈마 노즐은 상기 방전 헤드의 경사단부면 또는 상기 방전 헤드의 밑면 모두에 다수 개 배치되는 것을 특징으로 하는 플라즈마 발생장치.
- 제14항에 있어서,상기 플라즈마 노즐은 상기 방전 헤드의 경사단부면 또는 상기 방전 헤드의 밑면 모두에서 원주 방향을 따라 일부 구간에 집중 배치되는 것을 특징으로 하는 플라즈마 발생장치.
- 제3항에 있어서,상기 가스 분배공은,상기 플라즈마 노즐 쪽으로 갈수록 그 직경이 점진적으로 감소되게 형성되는 직경 감소용 노즐구간부;상기 직경 감소용 노즐구간부의 최소 직경 영역에서 상기 직경 감소용 노즐구간부와 연통되는 원통형 노즐구간부; 및상기 원통형 노즐구간부와 연통되며, 상기 원통형 노즐구간부에서 상기 플라즈마 노즐 쪽으로 갈수록 그 직경이 점진적으로 증가되게 형성되는 직경 증가용 노즐구간부를 포함하는 것을 특징으로 하는 플라즈마 발생장치.
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RU2016127703A RU2649314C1 (ru) | 2013-12-11 | 2013-12-11 | Плазменный генератор |
US15/103,412 US9779915B2 (en) | 2013-12-11 | 2013-12-11 | Plasma generating device comprising a rotating body |
EP13898927.2A EP3082384B1 (en) | 2013-12-11 | 2013-12-11 | Plasma generating device |
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US20160314938A1 (en) | 2016-10-27 |
RU2649314C1 (ru) | 2018-04-02 |
EP3082384B1 (en) | 2019-05-01 |
CN105830540A (zh) | 2016-08-03 |
CN105830540B (zh) | 2018-10-26 |
JP6323842B2 (ja) | 2018-05-16 |
EP3082384A1 (en) | 2016-10-19 |
JP2017507449A (ja) | 2017-03-16 |
EP3082384A4 (en) | 2017-07-19 |
KR101498392B1 (ko) | 2015-03-03 |
US9779915B2 (en) | 2017-10-03 |
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