JP2011060688A - Plasma surface treatment device - Google Patents

Plasma surface treatment device Download PDF

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JP2011060688A
JP2011060688A JP2009211468A JP2009211468A JP2011060688A JP 2011060688 A JP2011060688 A JP 2011060688A JP 2009211468 A JP2009211468 A JP 2009211468A JP 2009211468 A JP2009211468 A JP 2009211468A JP 2011060688 A JP2011060688 A JP 2011060688A
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electrode
conductive nozzle
surface treatment
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nozzle
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Kiyokazu Miyahara
清和 宮原
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Kasuga Denki Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a plasma surface treatment device which can effectively apply surface treatment to: an object to be treated in a narrow place; and a small surface to be treated. <P>SOLUTION: The plasma surface treatment device supplies pressure gas to a discharge space 8 between an inner electrode 2 and outer electrode 1, and injects plasma generated by arc discharge generated in the discharge space from an injection port 7a. With reference to a flow direction of the pressure gas, the discharge space 8 is formed on an injection port 7a side from a downstream end part 2a of the inner electrode 2, a conductive nozzle 7 electrically connected to the outer electrode 1 is connected to the discharge space 8, and a tip end of the conductive nozzle 7 serves as the injection port 7a. A length from a tip end of the inner electrode 2 to a base end of the conductive nozzle 7 is made to be a distance at which arc discharge can be made between the inner electrode and conductive nozzle. A length from the base end of the conductive nozzle 7 to the injection port 7a is made to be a distance at which the arc discharge is not emitted from the injection port 7a. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

この発明は、プラズマによって被処理物の濡れ性など、表面特性を改質するためのプラズマ表面処理装置に関する。   The present invention relates to a plasma surface treatment apparatus for modifying surface characteristics such as wettability of an object to be treated by plasma.

従来から、プラズマを照射して被処理物の表面を改質するプラズマ表面処理が行なわれている。このような表面処理を行なうためのプラズマ表面処理装置は、例えば、筒状の外側電極と、その中心付近に設けた内側電極との間でアーク放電を起こし、このアーク放電によってプラズマを生成するものである。そして、上記外側電極内に気体を通過させ、この気流によってプラズマを被処理物に照射させるようにしている。
このようなプラズマ表面処理を必要とする被処理物の被処理面が小さかったり、狭い箇所にあったりした場合に、広範囲にプラズマを照射する表面処理装置を用いたのでは、不必要な箇所にプラズマを照射することになって、無駄なエネルギーを消費するだけでなく、被処理物に対しても悪影響を与えることがある。 Conventionally, plasma surface treatment for modifying the surface of an object to be processed by irradiating with plasma has been performed. A plasma surface treatment apparatus for performing such a surface treatment, for example, causes an arc discharge between a cylindrical outer electrode and an inner electrode provided near the center thereof, and generates plasma by the arc discharge. It is. Then, a gas is passed through the outer electrode, and the object to be processed is irradiated with the airflow.
When the surface to be processed of such an object requiring plasma surface treatment is small or in a narrow place, using a surface treatment apparatus that irradiates plasma over a wide area, By irradiating with plasma, not only wasteful energy is consumed, but also the object to be processed may be adversely affected.

そこで、プラズマ表面処理装置からプラズマが噴出する噴出口を絞ることが考えられる。例えば、特許文献１の図１には、筒状電極の先端にテーパー状にしたセラミックなど絶縁性材料の筒状の口部を設けたものが記載されている。   Therefore, it is conceivable to narrow down the jet outlet from which plasma is jetted from the plasma surface treatment apparatus. For example, FIG. 1 of Patent Literature 1 describes a cylindrical electrode provided with a cylindrical mouth portion of an insulating material such as a tapered ceramic at the tip of a cylindrical electrode.

特表２００３−５１４１１４号公報Special table 2003-514114 gazette

上記のように、プラズマの噴出口を小さく絞ることによって、小さな被処理面に対してプラズマを照射できるようになる。
しかし、筒状電極内で発生したプラズマのイオンは、発生してから放置すれば中和してしまう。上記のように放電によって発生したプラズマを噴射口へ導く過程に絶縁性材料で形成した筒状の口部を設けると、プラズマ流がこの口部を通過する過程でイオンが中和してしまい、プラズマ状態を十分に維持できないことになる。その結果、噴出口から噴射されるプラズマ流のイオン量が少なくなって、被処理物のプラズマ表面処理の効率が悪いという問題があった。 As described above, it is possible to irradiate plasma to a small surface to be processed by narrowing the plasma outlet.
However, plasma ions generated in the cylindrical electrode are neutralized if left after being generated. If a cylindrical mouth part made of an insulating material is provided in the process of guiding the plasma generated by the discharge to the injection port as described above, ions are neutralized in the process of passing the plasma flow through the mouth part. The plasma state cannot be sufficiently maintained. As a result, there is a problem that the amount of ions in the plasma flow ejected from the ejection port is reduced, and the efficiency of the plasma surface treatment of the workpiece is poor.

一方、噴出されるプラズマ流のイオン量を高く保ちたいからといって、上記特許文献１の図５のように、外側電極の先端をそのままプラズマ流の噴出口とし、内側電極の先端を噴出口から僅かに突出させたり、内側電極の先端を外側電極の先端と同レベルにしたりすれば、放電が噴出口の近傍でも起こり、この放電によって生成されたプラズマは高イオン濃度を維持したまま被処理物に照射されるが、噴出口の近傍でアーク放電が起これば、噴出口の外側も高温になる。そのため、被処理物に噴出口を近づけると、被処理物が熱で変形したり、変質してしまったりすることがある。   On the other hand, just because the amount of ions in the plasma flow to be ejected is kept high, as shown in FIG. 5 of the above-mentioned Patent Document 1, the tip of the outer electrode is used as it is and the tip of the inner electrode is used as the jet outlet. If the tip of the inner electrode is slightly protruded from the nozzle, or the tip of the inner electrode is made to be at the same level as the tip of the outer electrode, a discharge occurs in the vicinity of the jet outlet, and the plasma generated by this discharge is processed while maintaining a high ion concentration. Although an object is irradiated, if arc discharge occurs in the vicinity of the jet port, the outside of the jet port also becomes hot. For this reason, when the spout is brought close to the object to be processed, the object to be processed may be deformed or altered by heat.

この発明は、狭い箇所にある被処理物や、小さな被処理面に対しても効率的な表面処理が可能なプラズマ表面処理装置を提供することである。   An object of the present invention is to provide a plasma surface treatment apparatus capable of performing efficient surface treatment even on an object to be processed in a narrow place or a small surface to be processed.

第１の発明は、内側電極と外側電極との間の放電空間に圧力気体を供給し、放電空間内で発生したアーク放電によって生成したプラズマを噴出口から噴出させるプラズマ表面処理装置において、上記圧力気体の流れ方向を基準にして、内側電極の下流側端部より噴出口側に放電空間を形成するとともに、この放電空間には上記外側電極と電気的に接続された導電性ノズルを接続し、この導電性ノズルの先端を上記噴出口とする一方、上記内側電極の先端から導電性ノズルの基端までの長さを、内側電極と導電性ノズル内との間でアーク放電可能な距離にし、かつ上記導電性ノズルの基端から噴出口までの長さを、上記アーク放電が噴出口から出ない距離にした点を特徴とする。   1st invention is a plasma surface treatment apparatus which supplies pressure gas to the discharge space between an inner side electrode and an outer side electrode, and ejects the plasma produced | generated by the arc discharge which generate | occur | produced in the discharge space from a jet nozzle, The said pressure With the gas flow direction as a reference, a discharge space is formed on the jet outlet side from the downstream end of the inner electrode, and a conductive nozzle electrically connected to the outer electrode is connected to the discharge space, While making the tip of this conductive nozzle the jet outlet, the length from the tip of the inner electrode to the base end of the conductive nozzle is a distance capable of arc discharge between the inner electrode and the conductive nozzle, And the length from the base end of the said electroconductive nozzle to a jet nozzle is made the distance which the said arc discharge does not come out of a jet nozzle, It is characterized by the above-mentioned.

第２の発明は、上記外側電極が筒状であり、上記導電性ノズルの基端には、上記外側電極の下流側先端と着脱可能な接続部を設け、この接続部を介して外側電極と導電性ノズルとが電気的に接続される構成にした点に特徴を有する。   According to a second aspect of the invention, the outer electrode is cylindrical, and a connecting portion detachable from the downstream end of the outer electrode is provided at the proximal end of the conductive nozzle, and the outer electrode is connected to the outer electrode via the connecting portion. It is characterized in that it is configured to be electrically connected to the conductive nozzle.

第１、第２の発明によれば、導電性ノズルの基端側が外側電極として機能し、プラズマを生成するためのアーク放電を、ノズル内部でも発生させることができる。そのため、導電性ノズルの先端側である噴出口により近いところでもプラズマを生成でき、生成したプラズマを無駄なく噴射することができる。
しかも、導電性ノズルの先端からは、アーク放電が出ないので、アーク放電の熱によって被処理物を変形・変質させる心配もなく、ノズル先端を被処理物に近づけることができる。 According to the first and second inventions, the base end side of the conductive nozzle functions as an outer electrode, and arc discharge for generating plasma can be generated inside the nozzle. For this reason, plasma can be generated even closer to the jet outlet on the tip side of the conductive nozzle, and the generated plasma can be injected without waste.
In addition, since no arc discharge is generated from the tip of the conductive nozzle, the tip of the nozzle can be brought close to the object to be processed without worrying about deformation or alteration of the object to be processed by the heat of the arc discharge.

従って、高イオン濃度のプラズマ流を導電性ノズルによって細く絞って噴射し、小さい面積の被処理物を効率よく表面処理することができる。
上記のように、プラズマ流を細く絞ることによって、凹凸に沿ってプラズマを照射することができ、平坦面だけでなく、凹凸表面を有する被処理物に対しても効率的、かつ質の高い表面処理が可能である。
また、導電性ノズルの先端からアーク放電が出ないようにしたため、金属製の被処理物との間で放電が起こることがなく、金属製の被処理物に対しても、樹脂製の被処理物と同様の表面処理を施すことができる。
第２の発明によれば、外側電極に対し、様々な形状や大きさの導電性ノズルを付け替えることができ、目的に応じた表面処理の切り替えが容易にできるようになる。 Therefore, a plasma flow having a high ion concentration is finely squeezed and ejected by the conductive nozzle, and the object to be processed having a small area can be efficiently surface-treated.
As described above, by narrowing down the plasma flow, plasma can be irradiated along the unevenness, and not only a flat surface but also an object having an uneven surface is efficient and has a high quality surface. Processing is possible.
In addition, since the arc discharge is prevented from coming out from the tip of the conductive nozzle, there is no discharge between the metal object and the resin object is also treated against the metal object. The same surface treatment as that of the object can be performed.
According to the second invention, the conductive nozzles of various shapes and sizes can be replaced with the outer electrode, and the surface treatment can be easily switched according to the purpose.

この発明の実施形態におけるプラズマ処理装置の部分断面図である。It is a fragmentary sectional view of the plasma processing apparatus in an embodiment of this invention.

図１に示すこの実施形態のプラズマ処理装置は、外側電極である電極筒１内に、内側電極である電極棒２を設け、これら電極筒１と電極棒２との間には交流電源Ａを接続している。なお、この交流電源Ａの交流周波数は１０（ｋＨｚ）〜５０（ｋＨｚ）の高周波である。
上記電極筒１は、大径部１ａと小径部１ｂとを一体的に形成した電極であって、上記交流電源Ａを接続するとともに、その外周にアース線を取り付けて接地している。 The plasma processing apparatus of this embodiment shown in FIG. 1 is provided with an electrode rod 2 that is an inner electrode in an electrode tube 1 that is an outer electrode, and an AC power source A is provided between the electrode tube 1 and the electrode rod 2. Connected. The AC frequency of the AC power source A is a high frequency of 10 (kHz) to 50 (kHz).
The electrode cylinder 1 is an electrode in which a large-diameter portion 1a and a small-diameter portion 1b are integrally formed, and is connected to the AC power source A and is grounded by attaching a ground wire to the outer periphery thereof.

また、電極筒１の大径部１ａ内には樹脂などの絶縁性材料からなるパイプホルダー３を設け、このパイプホルダー３には、セラミック製などの絶縁パイプ４を取り付けている。この絶縁パイプ４は、上記電極筒１の小径部１ｂの内周に一致する外径を備え、その先端が上記電極棒２の先端と一致あるいはほぼ一致する長さを備えている。
さらに、上記パイプホルダー３の内側には導電性の電極棒チャック５を設け、上記電極棒２を取り付けている。この電極棒チャック５は図示しない絶縁性部材を介してパイプホルダー３に固定され、上記電極筒１とは被接触状態を保っている。
なお、図１では、交流電源Ａの接続を模式図で示しているが、実際には、上記電極棒チャック５の基端側に電源端子を取り付けて、この電源端子を高圧ケーブルによって上記交流電源Ａに接続している。 A pipe holder 3 made of an insulating material such as resin is provided in the large diameter portion 1 a of the electrode cylinder 1, and an insulating pipe 4 made of ceramic is attached to the pipe holder 3. The insulating pipe 4 has an outer diameter that matches the inner circumference of the small diameter portion 1 b of the electrode cylinder 1, and has a length that matches or substantially matches the tip of the electrode rod 2.
Further, a conductive electrode bar chuck 5 is provided inside the pipe holder 3 and the electrode bar 2 is attached thereto. The electrode bar chuck 5 is fixed to the pipe holder 3 via an insulating member (not shown), and is kept in contact with the electrode cylinder 1.
In FIG. 1, the connection of the AC power source A is schematically shown. However, in practice, a power source terminal is attached to the base end side of the electrode bar chuck 5, and this power source terminal is connected to the AC power source by a high voltage cable. Connected to A.

一方、電極筒１の小径部１ｂの先端には、この発明の接続部となる接続部材６を介して導電性ノズル７を取り付けている。上記接続部材６は導電性材料で形成された部材であって、導電性ノズル７に一体的に固定され、電極筒１の小径部１ｂの先端側内周にねじ結合するものである。すなわち、接続部材６の外周に雄ねじを形成するとともに、小径部１ｂの先端側内周には雌ねじを形成している。
このように、接続部材６を介して導電性ノズル７を取り付けることによって、導電性ノズル７と電極筒１とは電気的に接続される。 On the other hand, a conductive nozzle 7 is attached to the tip of the small-diameter portion 1b of the electrode cylinder 1 via a connection member 6 serving as a connection portion of the present invention. The connecting member 6 is a member formed of a conductive material, and is integrally fixed to the conductive nozzle 7 and is screwed to the inner periphery of the distal end side of the small diameter portion 1 b of the electrode cylinder 1. That is, a male screw is formed on the outer periphery of the connecting member 6, and a female screw is formed on the inner periphery on the distal end side of the small diameter portion 1b.
Thus, by attaching the conductive nozzle 7 via the connecting member 6, the conductive nozzle 7 and the electrode cylinder 1 are electrically connected.

さらに、電極筒１の後端側には、上記パイプホルダー３内に気体を供給するための、図示しない基体供給機構を接続し、図に実線の矢印で示すように、パイプホルダー３、絶縁性パイプ４を介してノズル７の噴出口７ａから外部へ向かう気流を形成する。   Further, a base body supply mechanism (not shown) for supplying gas into the pipe holder 3 is connected to the rear end side of the electrode cylinder 1, and the pipe holder 3 and the insulating property are shown as indicated by solid arrows in the figure. An air flow is formed through the pipe 4 from the outlet 7a of the nozzle 7 to the outside.

このようなプラズマ表面処理装置の作用を、以下に説明する。
上記交流電源Ａによって電極筒１と電極棒２との間に高周波電圧を印加して、両電極間にアーク放電を発生させる。ただし、上記電極筒１の内側にはパイプホルダー３と絶縁パイプ４が設けられて、これら絶縁性部材によって電極棒２の外周が囲まれている。従って、電極筒１のうち、電極棒２に対して放電電極として機能する部分は、上記絶縁パイプ４の先端より導電性ノズル７側である。 The operation of such a plasma surface treatment apparatus will be described below.
A high frequency voltage is applied between the electrode cylinder 1 and the electrode rod 2 by the AC power source A to generate an arc discharge between the electrodes. However, a pipe holder 3 and an insulating pipe 4 are provided inside the electrode cylinder 1, and the outer periphery of the electrode rod 2 is surrounded by these insulating members. Therefore, a portion of the electrode cylinder 1 that functions as a discharge electrode with respect to the electrode rod 2 is closer to the conductive nozzle 7 than the tip of the insulating pipe 4.

つまり、この発明の、圧力気体の流れ方向を基準にして、内側電極２の下流側端部である上記電極棒２の先端２ａより噴出口７ａ側に、アーク放電が発生する放電空間８が形成される。
この放電空間８は、上記電極筒１の小径部１ｂの先端側一部と、接続部材６及びノズル７の基端で囲まれ、これら接続部材６及び導電性ノズル７は電極筒１と電気的に接続している。そして、上記電極棒２の先端２ａから上記接続部材６及び導電性ノズル７の基端までの長さを、内側電極と導電性ノズル内との間でアーク放電可能な距離にしている。
すなわち、上記接続部材６及び導電性ノズル７の基端は、上記電極棒２の先端と対向して放電電極として機能することになる。
そこで、上記放電空間８内に発生するアーク放電は、破線矢印で図示したように、導電性ノズル７の基端側内部でも発生する。 That is, a discharge space 8 in which arc discharge is generated is formed on the ejection port 7a side from the tip 2a of the electrode rod 2, which is the downstream end of the inner electrode 2, with reference to the flow direction of the pressure gas of the present invention. Is done.
The discharge space 8 is surrounded by a part of the distal end side of the small-diameter portion 1b of the electrode cylinder 1 and the base ends of the connection member 6 and the nozzle 7. The connection member 6 and the conductive nozzle 7 are electrically connected to the electrode cylinder 1. Connected to. And the length from the front-end | tip 2a of the said electrode rod 2 to the base end of the said connection member 6 and the electroconductive nozzle 7 is made into the distance which can perform arc discharge between an inner side electrode and the inside of an electroconductive nozzle.
That is, the base ends of the connection member 6 and the conductive nozzle 7 face the tip of the electrode rod 2 and function as a discharge electrode.
Therefore, the arc discharge generated in the discharge space 8 also occurs inside the base end side of the conductive nozzle 7 as shown by the broken line arrows.

このように、導電性ノズル７内でもアーク放電が発生すれば、この放電によって生成されるプラズマは、より噴出口７ａに近いところで生成されることになる。そのため、上記気流に乗って噴出するプラズマは高イオン濃度を保持している。
また、上記導電性ノズル７は、アーク放電が噴出口７ａから外部に出ない程度の長さにしている。そのため、ノズル先端７ａを被処理物に近づけても、アーク放電の熱によって被処理物が変形したり、変質したりすることがない。
このように、アーク放電が導電性ノズル７の噴出口７ａから出ないので、熱の影響を気にしないで上記噴出口７ａを被処理物に近づけることができる。そのため、導電性ノズル７で、処理の目的にあわせて絞ったプラズマ流を効率よく被処理物に照射でき、効率のよい表面処理が実現できる。 Thus, if an arc discharge occurs in the conductive nozzle 7, the plasma generated by this discharge is generated closer to the jet port 7a. For this reason, the plasma ejected in the airflow maintains a high ion concentration.
The conductive nozzle 7 has a length that prevents arc discharge from coming out of the ejection port 7a. Therefore, even if the nozzle tip 7a is brought close to the workpiece, the workpiece is not deformed or altered by the heat of arc discharge.
As described above, since the arc discharge does not come out from the ejection port 7a of the conductive nozzle 7, the ejection port 7a can be brought close to the object to be processed without worrying about the influence of heat. Therefore, the conductive nozzle 7 can efficiently irradiate the object to be processed with a plasma flow that is narrowed in accordance with the purpose of the process, and an efficient surface treatment can be realized.

さらに、アーク放電が導電性ノズル７の噴出口７ａから出ないので、金属製の被処理物に対して放電が発生して電流を流すこともない。もしも、導電性ノズルの先端からアーク放電が出る構造の装置で、金属製の被処理物を処理すると、被処理物との間で放電が起こり、放電集中によって被処理物を破損してしまうこともあるが、この実施形態のプラズマ表面処理装置ではそのようなことが無く、金属製の被処理物に対しても、樹脂製の被処理物と同様の表面処理を施すことができる。
なお、上記導電性ノズル７の、アーク放電が出ない長さは、交流電源Ａによる印加電圧や、供給する圧力基体の流量などに応じて設定するものである。 Furthermore, since arc discharge does not come out from the jet nozzle 7a of the electroconductive nozzle 7, discharge does not generate | occur | produce and flow an electric current with respect to a metal to-be-processed object. If an arc discharge is generated from the tip of a conductive nozzle and a metal workpiece is processed, a discharge occurs between the workpiece and the workpiece is damaged due to the concentration of discharge. However, this is not the case with the plasma surface treatment apparatus of this embodiment, and it is possible to perform the same surface treatment on a metal workpiece as with a resin workpiece.
The length of the conductive nozzle 7 at which arc discharge does not occur is set according to the voltage applied by the AC power source A, the flow rate of the pressure base to be supplied, and the like.

また、上記導電性ノズル７は、上記接続部材６とともにねじ結合によって電極筒１の先端に結合され、着脱可能にしている。このように、導電性ノズル７を着脱可能にすれば、長さや、噴出口の内径が異なる様々な導電性ノズルに交換することができる。
例えば、微小電流によっても破壊されてしまうような電子部品の近傍の被処理物を処理するときには、プラズマ流を絞るための極小径の導電性ノズルに取り替えることができるし、他の部品の奥に有る被処理物をプラズマ表面処理する場合には、長い導電性ノズルに交換すればよい。あるいは、噴出口を被処理物に近づけるために、湾曲した導電性ノズルを用いることもできる。
このように、導電性ノズル７を容易に交換可能にすれば、被処理物の位置や、被処理面の大きさに応じた導電性ノズルを選択し、より効率的な表面処理ができることになる。 The conductive nozzle 7 is coupled to the tip of the electrode cylinder 1 by screw coupling together with the connecting member 6 so as to be detachable. Thus, if the conductive nozzle 7 is made detachable, it can be replaced with various conductive nozzles having different lengths and different inner diameters of the jet nozzles.
For example, when processing an object in the vicinity of an electronic component that is destroyed even by a minute current, it can be replaced with a very small diameter conductive nozzle for constricting the plasma flow, and behind other components. In the case of performing plasma surface treatment on an object to be processed, a long conductive nozzle may be replaced. Alternatively, a curved conductive nozzle can be used to bring the jet port closer to the object to be processed.
Thus, if the conductive nozzle 7 can be easily replaced, a more efficient surface treatment can be performed by selecting a conductive nozzle according to the position of the object to be processed and the size of the surface to be processed. .

１ （外側電極である）電極筒
２ （内側電極である）電極棒
２ａ 先端
４ 絶縁パイプ
６ 接続部材
７ 導電性ノズル
７ａ 噴出口
８ 放電空間
Ａ 交流電源 DESCRIPTION OF SYMBOLS 1 Electrode cylinder 2 (it is an outer electrode) Electrode rod 2a (It is an inner electrode) Tip 4 Insulation pipe 6 Connection member 7 Conductive nozzle 7a Jet 8 Discharge space A AC power supply

Claims (2)

内側電極と外側電極との間の放電空間に圧力気体を供給し、放電空間内で発生したアーク放電によって生成したプラズマを噴出口から噴出させるプラズマ表面処理装置において、上記圧力気体の流れ方向を基準にして、内側電極の下流側端部より噴出口側に放電空間を形成するとともに、この放電空間には上記外側電極と電気的に接続された導電性ノズルを接続し、この導電性ノズルの先端を上記噴出口とする一方、上記内側電極の先端から導電性ノズルの基端までの長さを、内側電極と導電性ノズル内との間でアーク放電可能な距離にし、かつ上記導電性ノズルの基端から噴出口までの長さを、上記アーク放電が噴出口から出ない距離にしたことを特徴とするプラズマ表面処理装置。   In a plasma surface treatment apparatus that supplies a pressure gas to a discharge space between an inner electrode and an outer electrode and ejects plasma generated by arc discharge generated in the discharge space from a jet outlet, the flow direction of the pressure gas is used as a reference. In addition, a discharge space is formed on the jet outlet side from the downstream end of the inner electrode, and a conductive nozzle electrically connected to the outer electrode is connected to the discharge space, and the tip of the conductive nozzle , The length from the tip of the inner electrode to the base end of the conductive nozzle is set to a distance capable of arc discharge between the inner electrode and the conductive nozzle, and the conductive nozzle A plasma surface treatment apparatus characterized in that a length from a base end to a jet outlet is set to a distance at which the arc discharge does not exit from the jet outlet. 上記外側電極は筒状であり、上記導電性ノズルの基端には、上記外側電極の下流側先端と着脱可能な接続部を設け、この接続部を介して外側電極と導電性ノズルとが電気的に接続される構成にした請求項１に記載のプラズマ表面処理装置。   The outer electrode has a cylindrical shape, and a connecting portion that can be attached to and detached from the downstream end of the outer electrode is provided at the base end of the conductive nozzle, and the outer electrode and the conductive nozzle are electrically connected via the connecting portion. The plasma surface treatment apparatus according to claim 1, wherein the plasma surface treatment apparatus is configured to be connected electrically.
JP2009211468A 2009-09-14 2009-09-14 Plasma surface treatment device Pending JP2011060688A (en)

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