EP1067609A4 - Dispositif a film mince piezoelectrique, procede de production associe et tete d'enregistrement a jet d'encre - Google Patents

Dispositif a film mince piezoelectrique, procede de production associe et tete d'enregistrement a jet d'encre

Info

Publication number
EP1067609A4
EP1067609A4 EP00900877A EP00900877A EP1067609A4 EP 1067609 A4 EP1067609 A4 EP 1067609A4 EP 00900877 A EP00900877 A EP 00900877A EP 00900877 A EP00900877 A EP 00900877A EP 1067609 A4 EP1067609 A4 EP 1067609A4
Authority
EP
European Patent Office
Prior art keywords
thin film
piezoelectric thin
film device
ink
recording head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00900877A
Other languages
German (de)
English (en)
Other versions
EP1067609B1 (fr
EP1067609A1 (fr
Inventor
Makoto Hanabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP1067609A1 publication Critical patent/EP1067609A1/fr
Publication of EP1067609A4 publication Critical patent/EP1067609A4/fr
Application granted granted Critical
Publication of EP1067609B1 publication Critical patent/EP1067609B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

L'invention concerne un dispositif comprenant un film mince piézoélectrique uniforme présentant une forme spécifique. Ce dispositif à film mince piézoélectrique (1) comprend, dans l'ordre, une base (5), une électrode inférieure (2), un film mince piézoélectrique (3) et une électrode supérieure (4). La section transversale longitudinale et/ou la section transversale latérale verticale du film mince piézoélectrique (3) par rapport à la base (5) est un quadrilatère constitué de côtés supérieurs et inférieurs généralement parallèles opposés entre eux et de côtés droit et gauche. Le rapport entre la longueur Lu du côté supérieur et la longueur Lb du côté inférieur est Lu⊃Lb. Les angles et υ1 et υr formés par le côté inférieur et les côtés gauche et droit sont 90°∫υ1∫150° et 90°∫υr∫150°, respectivement. On forme, par fabrication optique, un film mince piézoélectrique constitué d'un composite photosensible qui peut former un film mince ferroélectrique. L'invention concerne également un procédé de fabrication dudit dispositif à film mince piézoélectrique ainsi qu'une tête d'enregistrement à jet d'encre comprenant ledit film mince piézoélectrique.
EP00900877A 1999-01-22 2000-01-21 Dispositif a film mince piezoelectrique, procede de production associe et tete d'enregistrement a jet d'encre Expired - Lifetime EP1067609B1 (fr)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP1439699 1999-01-22
JP1439699 1999-01-22
JP12943799 1999-05-11
JP12943799 1999-05-11
JP32472199 1999-11-15
JP32472199 1999-11-15
PCT/JP2000/000304 WO2000044054A1 (fr) 1999-01-22 2000-01-21 Dispositif a film mince piezoelectrique, procede de production associe et tete d'enregistrement a jet d'encre

Publications (3)

Publication Number Publication Date
EP1067609A1 EP1067609A1 (fr) 2001-01-10
EP1067609A4 true EP1067609A4 (fr) 2007-06-13
EP1067609B1 EP1067609B1 (fr) 2010-09-29

Family

ID=27280620

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00900877A Expired - Lifetime EP1067609B1 (fr) 1999-01-22 2000-01-21 Dispositif a film mince piezoelectrique, procede de production associe et tete d'enregistrement a jet d'encre

Country Status (4)

Country Link
US (1) US6478412B1 (fr)
EP (1) EP1067609B1 (fr)
DE (1) DE60045022D1 (fr)
WO (1) WO2000044054A1 (fr)

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DE20202297U1 (de) * 2001-09-07 2002-08-29 Drei S Werk Praez Swerkzeuge G Flacher Aktor oder Sensor mit interner Vorspannung
US20030048041A1 (en) * 2001-09-07 2003-03-13 Hiroyuki Kita Piezoelectric thin-film element and a manufacturing method thereof
US7067961B2 (en) * 2002-07-12 2006-06-27 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film device, and manufacturing method of the device
JP3876986B2 (ja) * 2002-09-24 2007-02-07 ブラザー工業株式会社 インクジェットヘッド
KR100519764B1 (ko) 2003-03-20 2005-10-07 삼성전자주식회사 잉크젯 프린트헤드의 압전 액츄에이터 및 그 형성 방법
JPWO2004097854A1 (ja) * 2003-04-30 2006-07-13 旭硝子株式会社 強誘電体薄膜形成用液状組成物および強誘電体薄膜の製造方法
KR100612852B1 (ko) 2003-07-18 2006-08-14 삼성전자주식회사 ＧｏＦ/ＧｏＰ의 질감 표현 방법과, 이를 이용한ＧｏＦ/ＧｏＰ 검색 방법 및 장치
EP1533816A3 (fr) * 2003-11-18 2008-02-13 Konica Minolta Medical & Graphic, Inc. Panneau pour la conversion d'images radiographiques et méthode de préparation
WO2008007551A1 (fr) * 2006-07-10 2008-01-17 Konica Minolta Medical & Graphic, Inc. Procédé de formation de films de résine synthétique piézoélectriques
JP2008028030A (ja) * 2006-07-19 2008-02-07 Seiko Epson Corp 圧電素子および液体噴射ヘッド
EP2154167A1 (fr) * 2008-07-30 2010-02-17 Bayer MaterialScience AG Convertisseur électromécanique doté d'un élément polymère à base de polyisocyanate
JP2011207071A (ja) * 2010-03-30 2011-10-20 Seiko Epson Corp 液体噴射ヘッドの製造方法及び圧電素子の形成方法
JP6182968B2 (ja) * 2012-08-14 2017-08-23 株式会社リコー 電気機械変換素子、液滴吐出ヘッド、画像形成装置及び電気機械変換素子の製造方法
JP2014072511A (ja) * 2012-10-02 2014-04-21 Ngk Insulators Ltd 積層体
JP6256101B2 (ja) 2014-02-28 2018-01-10 セイコーエプソン株式会社 液体噴射ヘッド、及び、液体噴射装置
US20160322560A1 (en) 2015-04-30 2016-11-03 The Regents Of The University Of California 3d piezoelectric polymer materials and devices
JP2019001114A (ja) * 2017-06-19 2019-01-10 コニカミノルタ株式会社 液体吐出ヘッド及び液体吐出装置
JP6868228B2 (ja) * 2019-08-01 2021-05-12 ブラザー工業株式会社 液体吐出装置及び液体吐出装置の製造方法

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Publication number Priority date Publication date Assignee Title
DE2256667A1 (de) * 1972-11-18 1974-06-06 Olympia Werke Ag Vorrichtung zum erzeugen von druckimpulsen in einem grundkoerper mit mehreren fluidkammern
US3824352A (en) * 1973-04-30 1974-07-16 Zenith Radio Corp Stacked piezoelectric transducer acting as quarter-wave resonator for recording video information
US4814659A (en) * 1987-02-23 1989-03-21 Toyota Jidosha Kabushiki Kaisha Variable cross-section piezoelectric actuator
EP0383972A1 (fr) * 1989-02-22 1990-08-29 Siemens Aktiengesellschaft Transducteur ultrasonore à éléments de vibration trapézoidaux, et procédé et dispositif pour leur fabrication
US5075641A (en) * 1990-12-04 1991-12-24 Iowa State University Research Foundation, Inc. High frequency oscillator comprising cointegrated thin film resonator and active device
US5185589A (en) * 1991-05-17 1993-02-09 Westinghouse Electric Corp. Microwave film bulk acoustic resonator and manifolded filter bank
EP0620048A2 (fr) * 1993-04-12 1994-10-19 Acuson Corporation Transducteurs à ultrason ayant des lobes secondaires réduits et procédé de fabrication correspondant
US5459501A (en) * 1993-02-01 1995-10-17 At&T Global Information Solutions Company Solid-state ink-jet print head
EP0727832A1 (fr) * 1995-02-20 1996-08-21 Seiko Epson Corporation Couche mince piézoélectrique, procédé de fabrication et tête d'enregistrement à jet d'encre
WO1998024296A2 (fr) * 1996-11-20 1998-06-11 The Regents Of The University Of California Empilement piezo-electrique multicouche pour haute tension
EP0911891A2 (fr) * 1997-10-20 1999-04-28 Seiko Epson Corporation Procédé de fabrication d'une couche mince piezoélectrique et tête d'enregistremenet à jet d'encre utilisant cette couche mince

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JP3114434B2 (ja) * 1993-06-30 2000-12-04 ブラザー工業株式会社 圧電アクチュエータの駆動方法
JP3250332B2 (ja) 1993-08-23 2002-01-28 セイコーエプソン株式会社 インクジェットヘッド
JP3007795B2 (ja) * 1994-06-16 2000-02-07 シャープ株式会社 複合金属酸化物誘電体薄膜の製造方法
EP0974466B1 (fr) * 1995-04-19 2003-03-26 Seiko Epson Corporation Tête d'enregistrement à jet d'encre et procédé de sa production
DE69612333T2 (de) * 1995-07-26 2001-10-11 Sony Corp Druckvorrichtung und Verfahren zu ihrer Herstellung
JP3460218B2 (ja) * 1995-11-24 2003-10-27 セイコーエプソン株式会社 インクジェットプリンタヘッドおよびその製造方法
JP3209082B2 (ja) * 1996-03-06 2001-09-17 セイコーエプソン株式会社 圧電体薄膜素子及びその製造方法、並びにこれを用いたインクジェット式記録ヘッド
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JPH1020488A (ja) 1996-07-04 1998-01-23 Mitsubishi Materials Corp Ｐｂ非含有金属酸化物薄膜パターンの形成方法
JPH10202874A (ja) * 1997-01-24 1998-08-04 Seiko Epson Corp インクジェットプリンタヘッド及びその製造方法
US6260956B1 (en) * 1998-07-23 2001-07-17 Xerox Corporation Thermal ink jet printhead and process for the preparation thereof

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2256667A1 (de) * 1972-11-18 1974-06-06 Olympia Werke Ag Vorrichtung zum erzeugen von druckimpulsen in einem grundkoerper mit mehreren fluidkammern
US3824352A (en) * 1973-04-30 1974-07-16 Zenith Radio Corp Stacked piezoelectric transducer acting as quarter-wave resonator for recording video information
US4814659A (en) * 1987-02-23 1989-03-21 Toyota Jidosha Kabushiki Kaisha Variable cross-section piezoelectric actuator
EP0383972A1 (fr) * 1989-02-22 1990-08-29 Siemens Aktiengesellschaft Transducteur ultrasonore à éléments de vibration trapézoidaux, et procédé et dispositif pour leur fabrication
US5075641A (en) * 1990-12-04 1991-12-24 Iowa State University Research Foundation, Inc. High frequency oscillator comprising cointegrated thin film resonator and active device
US5185589A (en) * 1991-05-17 1993-02-09 Westinghouse Electric Corp. Microwave film bulk acoustic resonator and manifolded filter bank
US5459501A (en) * 1993-02-01 1995-10-17 At&T Global Information Solutions Company Solid-state ink-jet print head
EP0620048A2 (fr) * 1993-04-12 1994-10-19 Acuson Corporation Transducteurs à ultrason ayant des lobes secondaires réduits et procédé de fabrication correspondant
EP0727832A1 (fr) * 1995-02-20 1996-08-21 Seiko Epson Corporation Couche mince piézoélectrique, procédé de fabrication et tête d'enregistrement à jet d'encre
WO1998024296A2 (fr) * 1996-11-20 1998-06-11 The Regents Of The University Of California Empilement piezo-electrique multicouche pour haute tension
EP0911891A2 (fr) * 1997-10-20 1999-04-28 Seiko Epson Corporation Procédé de fabrication d'une couche mince piezoélectrique et tête d'enregistremenet à jet d'encre utilisant cette couche mince

Non-Patent Citations (1)

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Title
See also references of WO0044054A1 *

Also Published As

Publication number Publication date
US6478412B1 (en) 2002-11-12
EP1067609B1 (fr) 2010-09-29
EP1067609A1 (fr) 2001-01-10
WO2000044054A1 (fr) 2000-07-27
DE60045022D1 (de) 2010-11-11

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