EP0949489A1 - Vibrierender Füllstandsdetektor - Google Patents

Vibrierender Füllstandsdetektor Download PDF

Info

Publication number
EP0949489A1
EP0949489A1 EP99102162A EP99102162A EP0949489A1 EP 0949489 A1 EP0949489 A1 EP 0949489A1 EP 99102162 A EP99102162 A EP 99102162A EP 99102162 A EP99102162 A EP 99102162A EP 0949489 A1 EP0949489 A1 EP 0949489A1
Authority
EP
European Patent Office
Prior art keywords
vibration
detection pipe
electromagnet
level detector
type level
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99102162A
Other languages
English (en)
French (fr)
Other versions
EP0949489B1 (de
Inventor
Hiroshi Kawakatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nohken Inc
Original Assignee
Nohken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nohken Inc filed Critical Nohken Inc
Publication of EP0949489A1 publication Critical patent/EP0949489A1/de
Application granted granted Critical
Publication of EP0949489B1 publication Critical patent/EP0949489B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/28—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
    • G01F23/296—Acoustic waves
    • G01F23/2966—Acoustic waves making use of acoustical resonance or standing waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/20—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measurement of weight, e.g. to determine the level of stored liquefied gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/28—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
    • G01F23/296—Acoustic waves
    • G01F23/2966—Acoustic waves making use of acoustical resonance or standing waves
    • G01F23/2967—Acoustic waves making use of acoustical resonance or standing waves for discrete levels

Definitions

  • the present invention relates to vibration type level detectors, and more specifically to a vibration type level detector for detecting a change in the level of a powder and granular material, liquid or the like.
  • a vibration type level detector is described as using a sound piece vibrator.
  • the vibration type level detector includes: a vibration piece of which one end, having its apex portion supported, inserted into a container and having a magnetic substance on a side surface around a leading end of the other end; a vibration generating coil and a reception coil which are arranged to sandwich the magnetic substance on the vibration piece with an appropriate distance therebetween; an amplification portion amplifying a signal from the reception coil and then applying it to the vibration generating coil; and an output portion outputting an output signal in accordance with a reception signal generated in the reception coil.
  • the vibration type level detector having the above mentioned structure, when amplification degree in the amplification circuit is increased, the magnetic substance slightly moves at a certain point, and a voltage is induced in the reception coil. Then, the voltage is amplified in the amplification circuit and applied to the vibration generating coil. Thereafter, a magnetic field is generated for suction (repulsion) of the magnetic substance. Thus, the magnetic substance is greatly vibrated, and the voltage generating in the reception coil increases. As a result, vibration of the vibration piece is continued at a constant value. If particles or the like come into contact with the vibration piece inserted into the container while the vibration is continued, the voltage induced in the reception coil decreases as compared with a vibration generating value, and an output signal is output in accordance with the decrease in the voltage.
  • vibration generated at an electromagnet must efficiently be transferred to the portion of the vibration piece which is in contact with the particles. Therefore, inside portion of a tank is separated from the outside portion, and the vibration piece is supported by a flexible member such as a thin film plate of silicon rubber, for example, so that the vibration of the vibration piece would not be constrained.
  • the vibration type level detector As the vibration generating coil and the reception coil are arranged close to each other, the magnetic field generated by the vibration generating coil becomes a large electromotive force when it reaches the reception coil. Thus, it is difficult to detect a slight change in the electromotive force between the magnetic substance and the reception coil due to a slight decrease in the vibrator which depends on the existence or non-existence of the particle, and the particles which are low in relative density cannot be measured.
  • the vibration generating coil and the reception coil are arranged to sandwich a diaphragm in a direction which allows the direction of the magnetic field to be orthogonal to the longitudinal direction of the diaphragm, with an appropriate space from the magnetic substance on the side surface of the diaphragm.
  • a relatively large space is required, so that the compact vibration type level detector cannot be achieved.
  • a sufficient mechanical strength is not obtained as the vibration piece must be supported by the thin film plate so that vibration thereof would not be constrained.
  • another conventional method is to mount a piezoelectric device which mainly includes titanate lead zirconate (PbTiO 3 -PbZrO 3 ) to a part of the diaphragm as a vibration generating means, apply a high voltage from an amplification circuit to the piezoelectric device, transfer mechanical distortion generated from the piezoelectric device to the diaphragm, and generate vibration necessary for the measurement.
  • a piezoelectric device which mainly includes titanate lead zirconate (PbTiO 3 -PbZrO 3 ) to a part of the diaphragm as a vibration generating means
  • a driving voltage applied to the piezoelectric device and a intensity of the generated vibration are in a direct proportion.
  • the voltage is high as compared with a usual circuit voltage and is generally between several tens of volts to several hundreds of volts.
  • another circuit for internally generating a voltage is required.
  • a ferroelectric substance such as titanate lead zirconate, which is used as a material for the piezoelectric device, has a crystalline structure called a perovskite form, which has a pyramidal quadratic system at a room temperature, and a piezoelectric effect is obtained by spontaneous polarization.
  • a perovskite form which has a pyramidal quadratic system at a room temperature
  • a piezoelectric effect is obtained by spontaneous polarization.
  • the temperature at which the phase of the crystalline structure changes from the pyramidal quadratic system to the cubic system is called a Curie point.
  • the piezoelectric effect gradually decreases as the temperature rises from the room temperature toward the Curie point, at which point no piezoelectric effect is obtained.
  • the piezoelectric device when used as a vibration generating means, it is impossible to use it at the temperature above the Curie point, and even below the Curie point, any change in the temperature results in a change in a vibration generating efficiency and, strictly speaking, results in a variation in detection sensitivity.
  • the present invention is a vibration type level detector including: a detection pipe having a base as a fixed end and a leading end as a free end which is closed with a closing portion; a vibration piece arranged inside the detection pipe; and an electromagnet arranged to face a magnet which is positioned at the leading end of the vibration piece.
  • the vibration piece is excited by the electromagnet and the magnet for repeatedly vibrating the detection pipe, closing portion and vibration piece, and the repeated vibration is detected by the detector.
  • a piezoelectric device needs not be used as a vibration generator or detector.
  • the detector is safe and provided with high explosion proof, and can be fixed to a container or the like using the base of the detection pipe as the fixed end.
  • a vibration mode of the repeated vibration is not affected by a structure, material or mass of a container or the like and a method of attaching the same, so that adjustment for attachment is not necessary.
  • a permanent magnet or an electromagnet is mounted to the vibration piece.
  • an inner surface of the detection pipe on the side of the fixed end is threaded, into which a hollow internal rod having the electromagnet at its one end is screwed therein.
  • a distortion detecting device or an acceleration sensor is provided as a detector on the side of the closing portion of the detection pipe.
  • an electromagnet is arranged to face a magnetic substance which is provided at a leading end of a vibration piece inside a detection pipe, so that the detection pipe, closing portion and the vibration piece are repeatedly vibrated by the electromagnet and the magnetic substance.
  • Figs. 1A to 1C are block diagrams showing cross sections of a vibration type level detector and an electrical system according to one embodiment of the present invention.
  • a detection pipe 1 has a base 11 as a fixed end and a leading end of a free end which is closed with a closing portion 12, thereby forming a folded cantilever.
  • a vibration piece 2 in an elongate rectangular shape is provided inside detection pipe 1.
  • one end of vibration piece 2 is fixed to closing portion 12 of detection pipe 1, whereas the other end is provided with a permanent magnet 3 and made free.
  • an electromagnet 4 is mounted in close contact with the inner wall of detection pipe 1 such that it is arranged in the same direction as an axis of vibration piece 2.
  • electromagnet 4 is driven by an alternating current, the folded cantilever is vibrated by vibration piece 2, closing portion 12 and detection pipe 1 using base 11 as a fixed end, by a suction and repulsion action of a magnetic field of electromagnet 4 and that of permanent magnet 3.
  • a distortion detecting device 5 is provided on the inner wall of detection pipe 1 on the side of base 11.
  • Distortion detecting device 5 detects a state of an amplitude by vibration on the side of base 11 of detection pipe 1, converts it to an electrical signal, and applies it to an amplification circuit 6.
  • Amplification circuit 6 amplifies an input signal and again inputs it to electromagnet 4.
  • Figs. 2A to 2H are diagrams shown in conjunction with an operation mode according to one embodiment of the present invention. Referring to Figs. 2A to 2H, a specific operation of the embodiment of the present invention will be described. Assume that a relation between a polarity of current applied to electromagnet 4 and the magnetic field generated thereby is as shown in Fig. 1B. Then, a pole which faces permanent magnet 3 of electromagnet 4 turns to an N pole, so that a suction force is generated with respect to an S pole of permanent magnet 3 mounted to vibration piece 2, and a repulsion force is generated with respect to the N pole of permanent magnet 3. Thus, the free end of vibration piece 2 moves upwardly in Fig. 1B. A vibration mode of vibration piece 2, closing portion 12 and detection pipe 1 is shown in Figs. 2A and 2B.
  • a vibration generating means including permanent magnet 3 and electromagnet 4 nor the piezoelectric element as detection means 5 are not used, the present invention is suited to explosion proof and can increase detection accuracy. Further, as base 11 of detection pipe 1 can be fixed to a container or the like as a fixed end, the vibration mode of the repeated vibration is not affected by a structure, material or mass of the container, nor by a method of attaching the device, and any adjustment would not be required in attaching the device.
  • the device can be arranged in a small space as vibration piece 2 with permanent magnet 3 and electromagnet 4 are arranged in a row in the longitudinal direction inside detection pipe 1.
  • the vibrator needs not be supported by a material, which is flexible such as silicon and is in a form of thin film, so that the vibrator can be firmly fixed to the side wall of the tank. As a result, a sufficient strength and higher resistance to corrosion are ensured.
  • Fig. 3 is a diagram showing another embodiment of the present invention.
  • electromagnet 4 is closely attached to the inner wall of detection pipe 1.
  • electromagnet 4 is attached to one end of internal rod 13, and the other end of internal rod 13 is fixed to the inner surface on the side of base 11 of detection pipe 1.
  • electromagnet 4 is attached to the leading end of hollow internal rod 13 such that it is opposite to permanent magnet 3 attached to vibration piece 2.
  • a male screw is formed on the outer periphery surface of the other end of internal rod 13, and a female screw is formed in the inner surface of detection pipe 1, so that internal rod 13 is screwed into detection pipe 1. It is noted that a given clearance is obtained between the outer periphery surface of internal rod 13 and the inner surface of detection pipe 1.
  • a distortion detecting element 5 is applied to detection pipe 1 on the side which is close to the base. However, distortion detecting element 5 is applied onto the inner surface of internal rod 13 as it is impossible to apply it inside detection pipe 1. As internal rod 13 is screwed into detection pipe 1, distortion due to vibration generated at the base portion of detection pipe 1 is transferred to internal rod 13 and detected.
  • internal rod 13 serves to support electromagnet 4 and transfer the distortion at the base portion of detection pipe 1, but not affect the vibration mode such as a resonance action with the vibration of the diaphragm.
  • the vibration direction of detection pipe 1 and vibration piece 2 is the same as a polarization direction of permanent magnet 3, and distortion detecting element 5 is also adjusted to the direction to ensure the highest sensitivity by screwing internal rod 13 into detection pipe 1.
  • distortion detecting element 5 is preferably adjusted to ensure the highest sensitivity by screwing internal rod 13 into detection pipe 1.
  • distortion detecting element 5 may be uniquely adjusted to internal rod 13 to ensure high sensitivity of distortion detecting element 5 with a given distance of the gap therebetween.
  • Fig. 5 is a diagram showing a frequency characteristic of the embodiment shown in Fig. 3. As is apparent from Fig. 5, when a frequency of the current applied to electromagnet 4 is 325 Hz, vibration with an extremely high sharpness (Q) is obtained, and it is confirmed that no or very small, if any, vibration would be generated at other frequencies.
  • Fig. 6 is a diagram showing still another embodiment of the present invention.
  • distortion detecting element 5 is attached on the side of base 11 of detection pipe 1.
  • an acceleration sensor 21 for detecting an acceleration of vibration of detection pipe 1 is attached on the inner surface of closing portion 12 of detection pipe 1. Then, the acceleration is detected by acceleration sensor 21, and the detection output is applied to an amplification circuit 6 for amplifying the detected acceleration signal and for applying it to electromagnet 4.
  • Fig. 7A is a diagram showing still another embodiment of the present invention.
  • a bias electromagnet 10 is mounted to the leading end of vibration piece 2 in place of permanent magnet 3 shown in Figs. 1A-1C.
  • a given direct voltage is applied to a bias coil of bias electromagnet 10 from a bias circuit 2, so that N and S poles are respectively generated on the upper and lower sides as shown in Fig. 7B, thereby upwardly moving the free end of vibration piece 2.
  • S and N poles of electromagnet 4 switches, thereby downwardly moving the free end of vibration piece 2 so that vibration is generated thereby.
  • Figs. 8A to 8C are diagrams showing still another embodiment of the present invention.
  • permanent magnet 3 is mounted to the leading end of vibration piece 2 such that it is opposite to electromagnet 4.
  • magnetic substances 8 and 9 such as an iron are used in place of permanent magnet 3.
  • magnetic substance 8 having a cross section generally in an L shape is fixed to the leading end of vibration piece 2 and, similarly, magnetic substance 9 having a cross section generally in the L shape is fixed to electromagnet 4.
  • vibration piece 2 passes the stationary position and moves back to the position shown in Fig. 8C, using its elastic force.
  • mechanical vibration having the same period as that of the voltage application is generated at vibration piece 2, so that detection pipe 1 is vibrated.
  • the vibration is similarly detected by distortion detecting element 5 as in the case of the embodiment shown in Figs. 1A-1C.
  • the present invention is not limited to this and may be applied to a separate excitation system or a follow-up system of a PLL.
  • the electromagnet is arranged inside the detection pipe such that it is opposite to the electromagnet mounted to the leading end of the vibration piece, permanent magnet or magnetic substance, so that the detection pipe, closing portion and vibration piece are repeatedly vibrated and the vibration is detected by the detection means.
  • the piezoelectric element needs not be used as a vibration generating means or detection means.
  • the present invention is provided with explosion proof and can be fixed to the container or the like using the base of the detection pipe as a fixed end.
  • the vibration mode of the repeated vibration is not affected by the structure, material or mass of the container or the like nor by the attachment method, whereby adjustment is not required at the time of attachment.
  • the vibration piece, electromagnet, permanent magnet or magnetic piece are arranged in a row inside the detection pipe. Further, by using the vibration mode of the folded cantilever, the vibrator needs not be supported by a material which is flexible and in the form of thin film. Therefore, the present invention can be fixed on the side wall of the tank or the like, so that a sufficient strength and high resistance to corrosion are ensured.

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Electromagnetism (AREA)
  • Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
EP99102162A 1998-04-06 1999-02-03 Vibrierender Füllstandsdetektor Expired - Lifetime EP0949489B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP9316998 1998-04-06
JP9316998 1998-04-06
JP22687598 1998-08-11
JP22687598A JP4004148B2 (ja) 1998-04-06 1998-08-11 振動式レベル検出装置

Publications (2)

Publication Number Publication Date
EP0949489A1 true EP0949489A1 (de) 1999-10-13
EP0949489B1 EP0949489B1 (de) 2001-01-17

Family

ID=26434592

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99102162A Expired - Lifetime EP0949489B1 (de) 1998-04-06 1999-02-03 Vibrierender Füllstandsdetektor

Country Status (7)

Country Link
US (1) US6105425A (de)
EP (1) EP0949489B1 (de)
JP (1) JP4004148B2 (de)
KR (1) KR100311298B1 (de)
CA (1) CA2262041C (de)
DE (1) DE69900047T2 (de)
TW (1) TW370613B (de)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1106629A1 (de) * 1999-12-10 2001-06-13 Sumitomo Chemical Company, Limited Verfahren und Detektor zur Bestimmung und Messung von Agglomeraten
US6769804B2 (en) * 2002-06-24 2004-08-03 Nohken Inc. Temperature measuring method, object detecting method and object detecting device with vibrating-type level sensor
WO2005059475A2 (de) * 2003-12-18 2005-06-30 Endress+Hauser Gmbh+Co. Kg Messvorrichtung mit mechanisch schwingfähiger einheit sowie verfahren und vorrichtung zu deren herstellung
DE102004003460A1 (de) * 2003-12-16 2005-07-28 Endress + Hauser Gmbh + Co. Kg Verfahren und Vorrichtung zur Herstellung einer Messvorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße und Messvorrichtung
EP1568974A1 (de) * 2004-02-27 2005-08-31 VEGA Grieshaber KG Abgleichschraube
WO2011002392A1 (en) * 2009-07-03 2011-01-06 Itt Manufacturing Enterprises Inc Level sensor and reservoir for housing liquid
WO2012085350A1 (en) * 2010-12-23 2012-06-28 Nexu Oy Thin loudspeaker construction.
US10527585B2 (en) 2015-03-25 2020-01-07 Endress+Hauser SE+Co. KG Electromagnetic driving/receiving unit for a field device of automation technology
US10730741B2 (en) 2015-03-10 2020-08-04 Endress + Hauser Se + Co.Kg MEMS sensor, especially pressure sensor, for metrological registering of a measured variable
EP3482174B1 (de) * 2016-07-05 2021-07-28 Endress+Hauser SE+Co. KG Elektromagnetische antriebs-/empfangseinheit für ein feldgerät der automatisierungstechnik
CN113960609A (zh) * 2021-10-20 2022-01-21 杭州艾科赛德电子科技有限公司 一种非接触式泥层界面仪

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10059421C2 (de) * 2000-11-30 2003-04-10 Bosch Gmbh Robert Vorrichtung zur Bestimmung zumindest eines Parameters eines strömenden Mediums
JP4049678B2 (ja) * 2001-05-08 2008-02-20 株式会社ノーケン コイルインピーダンス検出方法、これを用いた物体検出方法および装置
DE10207278B4 (de) * 2002-02-21 2007-03-01 Robert Bosch Gmbh Verfahren zur Füllstandsbestimmung und Füllstandsmessvorrichtung
KR100496006B1 (ko) * 2002-07-02 2005-06-20 (주)트윈 세이버 진동-전기신호 변환장치
DE10318705A1 (de) * 2003-04-24 2004-11-18 Endress + Hauser Gmbh + Co. Kg Vorrichtung zur Bestimmung und/oder Überwachung mindestens einer physikalischen oder chemischen Prozessgröße eines Mediums
CN100445703C (zh) * 2003-12-23 2008-12-24 茵爱莎公司 用于探测及测量容器内填充物料的非内置方法
TR200900987T1 (tr) * 2006-10-31 2009-07-21 Ar�El�K Anon�M ��Rket� Karıştırıcı akımına göre doluluk seviyesi belirlenen deterjan haznesi.
JP2008189381A (ja) * 2007-01-31 2008-08-21 Kazuo Yamada 残量減少検出器付きサイホン容器及びバブラー容器及び工業用密閉容器
EP2601487B1 (de) 2010-08-02 2021-11-03 Micro Motion, Inc. Verfahren und vorrichtung zur bestimmung einer temperatur eines schwingungssensorelements eines schwingungsmessers
CN101915652A (zh) * 2010-08-13 2010-12-15 中南大学 一种混凝土泵车臂架疲劳试验的电磁式驱动方法及装置
CN101957295B (zh) * 2010-10-11 2012-07-11 中南大学 一种激振力自适应的泵车臂架疲劳试验激振方法及装置
US10113994B2 (en) 2013-02-06 2018-10-30 Ultimo Measurement Llc Non-invasive method for measurement of physical properties of free flowing materials in vessels
US9816848B2 (en) 2014-01-23 2017-11-14 Ultimo Measurement Llc Method and apparatus for non-invasively measuring physical properties of materials in a conduit
DE102022105918A1 (de) 2022-03-14 2023-09-14 Vega Grieshaber Kg Vibronischer Grenzstandsensor mit Beschleunigungssensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0123608A1 (de) * 1983-04-15 1984-10-31 Societe Francaise De Services S.A. Vibrationsstangenviskosimeter
EP0499265A2 (de) * 1991-02-14 1992-08-19 Nohken Inc. Füllstandsensor vom Schwingungstyp
US5670709A (en) * 1992-12-12 1997-09-23 Gallagher; John G. Transducer for the measurement of attributes of flowable media

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3266311A (en) * 1964-05-12 1966-08-16 Delavan Mfg Company Inc Cryogenic liquid level sensing apparatus
DE3619678A1 (de) * 1986-06-11 1987-12-17 Eberhard Hermann Fuellstandskontrollgeraet
US4740726A (en) * 1986-07-21 1988-04-26 Nohken Inc. Vibrator-type level sensor
US4839590A (en) * 1987-09-24 1989-06-13 Magnetek Controls Piezoelectric actuator for magnetostrictive linear displacement measuring device
JP3142151B2 (ja) * 1991-07-05 2001-03-07 株式会社ノーケン 振動式レベル検出装置
JPH06102079A (ja) * 1992-09-21 1994-04-12 Koyo Electron Ind Co Ltd 粉粒体の残量検出装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0123608A1 (de) * 1983-04-15 1984-10-31 Societe Francaise De Services S.A. Vibrationsstangenviskosimeter
EP0499265A2 (de) * 1991-02-14 1992-08-19 Nohken Inc. Füllstandsensor vom Schwingungstyp
US5670709A (en) * 1992-12-12 1997-09-23 Gallagher; John G. Transducer for the measurement of attributes of flowable media

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1106629A1 (de) * 1999-12-10 2001-06-13 Sumitomo Chemical Company, Limited Verfahren und Detektor zur Bestimmung und Messung von Agglomeraten
US6414093B1 (en) 1999-12-10 2002-07-02 Sumitomo Chemical Company, Limited Method and Apparatus for detecting agglomerates
SG93864A1 (en) * 1999-12-10 2003-01-21 Sumitomo Chemical Co Method and apparatus for detecting agglomerates
US6521723B2 (en) * 1999-12-10 2003-02-18 Sumitimo Chemical Company, Limited Method and apparatus for detecting agglomerates
US6769804B2 (en) * 2002-06-24 2004-08-03 Nohken Inc. Temperature measuring method, object detecting method and object detecting device with vibrating-type level sensor
DE102004003460A1 (de) * 2003-12-16 2005-07-28 Endress + Hauser Gmbh + Co. Kg Verfahren und Vorrichtung zur Herstellung einer Messvorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße und Messvorrichtung
US7934414B2 (en) 2003-12-18 2011-05-03 Endress + Hauser Gmbh + Co. Kg Method and apparatus for manufacturing a measuring device for determining and/or monitoring a process variable and measuring device
WO2005059475A3 (de) * 2003-12-18 2005-10-27 Endress & Hauser Gmbh & Co Kg Messvorrichtung mit mechanisch schwingfähiger einheit sowie verfahren und vorrichtung zu deren herstellung
CN100416235C (zh) * 2003-12-18 2008-09-03 恩德莱斯和豪瑟尔两合公司 制造用于确定和/或监控过程量的测量装置的方法和装置以及测量装置
WO2005059475A2 (de) * 2003-12-18 2005-06-30 Endress+Hauser Gmbh+Co. Kg Messvorrichtung mit mechanisch schwingfähiger einheit sowie verfahren und vorrichtung zu deren herstellung
EP1568974A1 (de) * 2004-02-27 2005-08-31 VEGA Grieshaber KG Abgleichschraube
US7131326B2 (en) 2004-02-27 2006-11-07 Vega Grieshaber Kg Level meter, oscillating bodies, and equalizing body for a level meter, as well as a drive and/or receiving device for the same
DE102004009495B4 (de) * 2004-02-27 2009-09-24 Vega Grieshaber Kg Abgleichkörper für eine Füllstandsmessvorrichtung
EP2273239A1 (de) * 2004-02-27 2011-01-12 VEGA Grieshaber KG Schwingungskörper für eine Füllstandsmessvorrichtung mit Abgleichschraube zur Verstellung der Resonanzfrequenz
WO2011002392A1 (en) * 2009-07-03 2011-01-06 Itt Manufacturing Enterprises Inc Level sensor and reservoir for housing liquid
EP2449352A1 (de) * 2009-07-03 2012-05-09 ITT Manufacturing Enterprises Inc. Pegelsensor und behälter zur aufbewahrung einer flüssigkeit
US8875569B2 (en) 2009-07-03 2014-11-04 Xylem Ip Holdings Llc Level sensor and reservoir for housing liquid
EP2449352A4 (de) * 2009-07-03 2015-01-07 Xylem Ip Holdings Llc Pegelsensor und behälter zur aufbewahrung einer flüssigkeit
WO2012085350A1 (en) * 2010-12-23 2012-06-28 Nexu Oy Thin loudspeaker construction.
US10730741B2 (en) 2015-03-10 2020-08-04 Endress + Hauser Se + Co.Kg MEMS sensor, especially pressure sensor, for metrological registering of a measured variable
US10527585B2 (en) 2015-03-25 2020-01-07 Endress+Hauser SE+Co. KG Electromagnetic driving/receiving unit for a field device of automation technology
EP3274668B1 (de) * 2015-03-25 2021-03-31 Endress+Hauser SE+Co. KG Elektromagnetische antriebs-/empfangseinheit für ein feldgerät der automatisierungstechnik
EP3482174B1 (de) * 2016-07-05 2021-07-28 Endress+Hauser SE+Co. KG Elektromagnetische antriebs-/empfangseinheit für ein feldgerät der automatisierungstechnik
US11125602B2 (en) 2016-07-05 2021-09-21 Endress+Hauser SE+Co. KG Electromagnetic driving/receiving unit for a field device of automation technology
CN113960609A (zh) * 2021-10-20 2022-01-21 杭州艾科赛德电子科技有限公司 一种非接触式泥层界面仪
CN113960609B (zh) * 2021-10-20 2022-04-19 杭州艾科赛德电子科技有限公司 一种非接触式泥层界面仪

Also Published As

Publication number Publication date
EP0949489B1 (de) 2001-01-17
JPH11351944A (ja) 1999-12-24
KR19990082784A (ko) 1999-11-25
JP4004148B2 (ja) 2007-11-07
KR100311298B1 (ko) 2001-11-02
TW370613B (en) 1999-09-21
DE69900047T2 (de) 2001-06-21
CA2262041A1 (en) 1999-10-06
DE69900047D1 (de) 2001-02-22
CA2262041C (en) 2002-10-22
US6105425A (en) 2000-08-22

Similar Documents

Publication Publication Date Title
US6105425A (en) Vibration type level detector
US6668627B2 (en) Sensor apparatus with magnetically deflected cantilever
JP3223358B2 (ja) 定電界で駆動されるマイクロビームによる共振ゲージ
US5836203A (en) Magnetically excited flexural plate wave apparatus
US4887032A (en) Resonant vibrating structure with electrically driven wire coil and vibration sensor
WO2003019981A3 (en) Electromagnetic piezoelectric acoustic sensor
JP2006030195A (ja) 電気機械共振器を備える磁力計
US4649336A (en) Automatic, self sustaining probe for measuring the work function
US6573725B2 (en) Sensor for non-contacting electrostatic detector
KR100528776B1 (ko) 진동식 레벨 센서의 온도 측정 방법, 물체 검출 방법 및물체 검출 장치
Seppa et al. Microelectromechanical systems in electrical metrology
US9810749B2 (en) Magnetic field measuring device with vibration compensation
JPWO2004070408A1 (ja) 磁気センサ
CN210741516U (zh) 谐振式传感器
US4739664A (en) Absolute fluid pressure sensor
JP4073335B2 (ja) 振動式レベルセンサ
Miller et al. Signal enhancement in mem resonant sensors using parametric suppression
Beeby et al. Thick-film PZT-silicon micromechanical resonator
JP2001025095A (ja) 自励振型マイクロフォン
Lange et al. Magnetic actuation and MOS-transistor sensing for CMOS-integrated resonators
JPH11142492A (ja) 磁気センサ
Mitsuya et al. Electret-based low power resonator for robust pressure sensor
JP2004151074A (ja) 振動式レベルセンサの多点物体検出装置
US3742387A (en) Multi frequency mass spring oscillators
Zheng et al. Process flow improvement on a bulk micromachined gyroscope

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19990623

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE FR GB SE

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

17Q First examination report despatched

Effective date: 19991026

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

AKX Designation fees paid

Free format text: DE FR GB SE

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE FR GB SE

REF Corresponds to:

Ref document number: 69900047

Country of ref document: DE

Date of ref document: 20010222

ET Fr: translation filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

26N No opposition filed
REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 18

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 19

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 20

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20180221

Year of fee payment: 20

Ref country code: DE

Payment date: 20180227

Year of fee payment: 20

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20180226

Year of fee payment: 20

Ref country code: SE

Payment date: 20180222

Year of fee payment: 20

REG Reference to a national code

Ref country code: DE

Ref legal event code: R071

Ref document number: 69900047

Country of ref document: DE

REG Reference to a national code

Ref country code: GB

Ref legal event code: PE20

Expiry date: 20190202

REG Reference to a national code

Ref country code: SE

Ref legal event code: EUG

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION

Effective date: 20190202