EP0921004A3 - Flüssigkeitsausstosskopf , Aufzeichnungsgerät und Flüssigkeitsausstosskopfenherstellungsverfahren - Google Patents
Flüssigkeitsausstosskopf , Aufzeichnungsgerät und Flüssigkeitsausstosskopfenherstellungsverfahren Download PDFInfo
- Publication number
- EP0921004A3 EP0921004A3 EP98123168A EP98123168A EP0921004A3 EP 0921004 A3 EP0921004 A3 EP 0921004A3 EP 98123168 A EP98123168 A EP 98123168A EP 98123168 A EP98123168 A EP 98123168A EP 0921004 A3 EP0921004 A3 EP 0921004A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- liquid
- flow paths
- liquid flow
- members
- liquid discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000007788 liquid Substances 0.000 title abstract 16
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 238000003475 lamination Methods 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/14048—Movable member in the chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/14056—Plural heating elements per ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1604—Production of bubble jet print heads of the edge shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/13—Heads having an integrated circuit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/20—Modules
Applications Claiming Priority (14)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33605597 | 1997-12-05 | ||
JP33610397 | 1997-12-05 | ||
JP33605897 | 1997-12-05 | ||
JP33605797 | 1997-12-05 | ||
JP33605797 | 1997-12-05 | ||
JP33605897 | 1997-12-05 | ||
JP33610397 | 1997-12-05 | ||
JP33605597 | 1997-12-05 | ||
JP62999798 | 1998-04-16 | ||
JP6299798 | 1998-04-16 | ||
JP30451098 | 1998-10-26 | ||
JP30451098 | 1998-10-26 | ||
JP34607698 | 1998-12-04 | ||
JP10346076A JP2000198199A (ja) | 1997-12-05 | 1998-12-04 | 液体吐出ヘッドおよびヘッドカートリッジおよび液体吐出装置および液体吐出ヘッドの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0921004A2 EP0921004A2 (de) | 1999-06-09 |
EP0921004A3 true EP0921004A3 (de) | 2000-04-26 |
Family
ID=27565036
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98123168A Withdrawn EP0921004A3 (de) | 1997-12-05 | 1998-12-04 | Flüssigkeitsausstosskopf , Aufzeichnungsgerät und Flüssigkeitsausstosskopfenherstellungsverfahren |
Country Status (1)
Country | Link |
---|---|
EP (1) | EP0921004A3 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1065059B1 (de) | 1999-07-02 | 2007-01-31 | Canon Kabushiki Kaisha | Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes, damit hergestellter Flüssigkeitsausstosskopf, Kopfkassette, Flüssigkeitsausstossvorrichtung, Verfahren zur Herstellung einer Siliziumplatte und damit hergestellte Siliziumplatte |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4251824A (en) * | 1978-11-14 | 1981-02-17 | Canon Kabushiki Kaisha | Liquid jet recording method with variable thermal viscosity modulation |
EP0178596A2 (de) * | 1984-10-15 | 1986-04-23 | AT & T Teletype Corporation | Siliziumdüsenstruktur und Herstellungsverfahren |
JPS62261453A (ja) * | 1986-05-09 | 1987-11-13 | Canon Inc | 多値化記録方式 |
US4890126A (en) * | 1988-01-29 | 1989-12-26 | Minolta Camera Kabushiki Kaisha | Printing head for ink jet printer |
US4990939A (en) * | 1988-09-01 | 1991-02-05 | Ricoh Company, Ltd. | Bubble jet printer head with improved operational speed |
EP0500110A1 (de) * | 1991-02-21 | 1992-08-26 | Hewlett-Packard Company | Photoabtrageverfahren von wenigstens einer gestuften Öffnung, die ein polymeres Material durchdringt und eine Düsenplatte, die eine gestufte Öffnung aufweist |
US5172139A (en) * | 1989-05-09 | 1992-12-15 | Ricoh Company, Ltd. | Liquid jet head for gradation recording |
US5278585A (en) * | 1992-05-28 | 1994-01-11 | Xerox Corporation | Ink jet printhead with ink flow directing valves |
EP0674995A2 (de) * | 1994-03-29 | 1995-10-04 | Canon Kabushiki Kaisha | Substrat für Tintenstrahlkopf, Tintenstrahlkopf, Tintenstrahlschreiber und Tintenstrahlgerät |
EP0737582A2 (de) * | 1995-04-14 | 1996-10-16 | Canon Kabushiki Kaisha | Verfahren zum Herstellen eines Flüssigkeitsausstosskopfes und nach diesem Verfahren hergestellter Flüssigkeitsausstosskopf |
EP0778133A2 (de) * | 1995-12-05 | 1997-06-11 | Canon Kabushiki Kaisha | Verfahren zum Ausstossen von Flüssigkeit, Flüssigkeitsausstosskopf und Vorrichtung zum Ausstossen von Flüssigkeit |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1127227A (en) | 1977-10-03 | 1982-07-06 | Ichiro Endo | Liquid jet recording process and apparatus therefor |
-
1998
- 1998-12-04 EP EP98123168A patent/EP0921004A3/de not_active Withdrawn
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4251824A (en) * | 1978-11-14 | 1981-02-17 | Canon Kabushiki Kaisha | Liquid jet recording method with variable thermal viscosity modulation |
EP0178596A2 (de) * | 1984-10-15 | 1986-04-23 | AT & T Teletype Corporation | Siliziumdüsenstruktur und Herstellungsverfahren |
JPS62261453A (ja) * | 1986-05-09 | 1987-11-13 | Canon Inc | 多値化記録方式 |
US4890126A (en) * | 1988-01-29 | 1989-12-26 | Minolta Camera Kabushiki Kaisha | Printing head for ink jet printer |
US4990939A (en) * | 1988-09-01 | 1991-02-05 | Ricoh Company, Ltd. | Bubble jet printer head with improved operational speed |
US5172139A (en) * | 1989-05-09 | 1992-12-15 | Ricoh Company, Ltd. | Liquid jet head for gradation recording |
EP0500110A1 (de) * | 1991-02-21 | 1992-08-26 | Hewlett-Packard Company | Photoabtrageverfahren von wenigstens einer gestuften Öffnung, die ein polymeres Material durchdringt und eine Düsenplatte, die eine gestufte Öffnung aufweist |
US5278585A (en) * | 1992-05-28 | 1994-01-11 | Xerox Corporation | Ink jet printhead with ink flow directing valves |
EP0674995A2 (de) * | 1994-03-29 | 1995-10-04 | Canon Kabushiki Kaisha | Substrat für Tintenstrahlkopf, Tintenstrahlkopf, Tintenstrahlschreiber und Tintenstrahlgerät |
EP0737582A2 (de) * | 1995-04-14 | 1996-10-16 | Canon Kabushiki Kaisha | Verfahren zum Herstellen eines Flüssigkeitsausstosskopfes und nach diesem Verfahren hergestellter Flüssigkeitsausstosskopf |
EP0778133A2 (de) * | 1995-12-05 | 1997-06-11 | Canon Kabushiki Kaisha | Verfahren zum Ausstossen von Flüssigkeit, Flüssigkeitsausstosskopf und Vorrichtung zum Ausstossen von Flüssigkeit |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 012, no. 141 (M - 691) 28 April 1988 (1988-04-28) * |
Also Published As
Publication number | Publication date |
---|---|
EP0921004A2 (de) | 1999-06-09 |
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