Classifications

• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
  • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/004—Photosensitive materials
  • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
  • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Definitions

• This invention relates generally to polymeric materials for use in information display devices and sensors where the coatings contain an organic colorant to selectively pass (or reject) a band of frequencies in the ultra-violet (uv) , visible, or infrared (ir) portion of the electromagnetic spectrum, and to optically transparent barrier coatings providing leach/stain resistance.
• the coatings contain an organic colorant to selectively pass (or reject) a band of frequencies in the ultra-violet (uv) , visible, or infrared (ir) portion of the electromagnetic spectrum, and to optically transparent barrier coatings providing leach/stain resistance.
• color filters colored polymeric coatings
• the color filters are arranged in a pattern on a transparent substrate to allow selective passage of light from a light source positioned behind the color filter array.
• Color video detectors use color filter arrays to pass ambient light of predetermined wavelengths to an addressed array of semiconductor photo-cells positioned behind the color filter array.
• Color filter plate and color video detector production relies on the use of photolithographic processes to define the array of colored pixels.
• Two conventional general methods employed in patterning the pixel arrays are wet-etch (solvent etching) and dry-etch (plasma or reactive ion etching) . Both methods require the color filter to be applied uniformly over the substrate to form a film, typically 1 - 2 ⁇ m thick for color filters.
• Application of the color filter is generally effected by a process known as spin-coating whereby the color filter solution is placed in the center of the spinning substrate and spread uniformly over the surface by centrifugal forces.
• Wet-etch processing is a multi-step process typically involving 1) application of the color filter, 2) soft bake to partially insolubilize the coating, 3) application of photoresist, 4) exposure of photoresist, 5) solvent removal of exposed photoresist and underlying color filter, 6) solvent removal of remaining photoresist, 7) final cure of color filter. These steps are repeated for each additional color filter employed where subsequent color filters are applied over the previously processed color filters and patterned by selective removal as previously described.
• Dry-etch processing is a multi-step process typically involving, 1) application of the color filter, 2) hard bake to cure the polymer, 3) application of photoresist, 4) solvent removal of exposed photoresist, 5) removal of remaining photoresist and areas of color filter that are not coated with photoresist using a reactive plasma.
• the manufacture of a multi-colored array necessitates coating each additional color filter on top of the previously processed color filters.
• a phenomenon referred to as leaching can occur in which the dyes in the previously processed color filter diffuse out of the polymer matrix into the solvent of the subsequent layer being applied.
• staining can also take place in which the dyes in the color filter solution being applied can diffuse into the previously processed color filter. Both phenomena result in intermixing of the dyes which can decrease the chromaticity of the color filters.
• Polyimides used in color filters require care to manufacture consistently. As known, of the major factors affecting the manufacture of polyimides include monomer purity, order of monomer addition, rate of monomer addition, reaction temperature, stir speed and time, and ambient humidity. As known, color filter formulations using polyimides require careful formulation/evaluation processes to produce a product that performs within established specifications.
• Polyimides used in color filters also lose some of their optical clarity when heated at temperatures high enough to effect adequate cure. This loss of optical clarity is evidenced by a yellow coloration of the cured film which is believed to be due to the formation of charge transfer complexes.
• Polyimide based color filters also have a limited shelf-life.
• Polyimide precursors polyamic acids
• undergo a continuous association/dissociation of the amide linkage which results in variation of molecular weight with time.
• These variations in molecular weight can result in variations of the film thickness when coated at a given spin-speed and may require process adjustment, as known.
• Another object of the present invention is to provide a color filter base, for both positive and negative photolithographic processes, that has good electrical properties, including resistivity and dielectric strength.
• An object of the present invention is to provide a brightener/color contrast transmitting film having a higher degree of clarity on all colors than the prior art.
• the transmitting film makes a blue which is brighter than the blue of the prior art.
• FIG. 1 is a chart demonstrating the leach resistance of color filter elements incorporating the invention
• FIG. 2 is a chart demonstrating the leach resistance of an alternative color set incorporating the invention
• FIG. 3 is a flow chart showing preparation of test color wheels incorporating the invention
• FIG. 4 is a chart showing staining of conventional coatings of the prior art
• FIG. 5 is a chart showing the protective effect of clear coatings incorporating the invention
• FIG. 6 is a flow chart showing preparation and use of a clear coating according to the invention
• FIG. 7 is a chart showing the protective effect of using a clear photosensitive coating according to one embodiment of the invention.
• FIG. 8 is a chart showing the staining and leach resistance of coatings protected by a clear coating according to the invention.
• FIG. 9 is a chart showing the leach resistance provided by a clear photosensitive coating according to one embodiment of the invention.
• FIG. 10 is a chart similar to FIG. 9 using a thinner protective coating;
• FIG. 11 is a flow chart showing a conventional color system according to the prior art
• FIG. 12 is a flow chart showing preparation of a color system according to the invention.
• transparent polymeric coating materials with leach and stain resistance can be prepared by reacting certain copolymers which contain pendant anhydride groups, such as poly(maleic anhydride-co-styrene) ,e.g. , available under the trade name "SMA® Resins” from Atochem Inc.
• poly(maleic anhydride-co-styrene) e.g. , available under the trade name "SMA® Resins” from Atochem Inc.
• poly(maleic anhydride-co-methylvinyl ether) e.g., available under the tradename "Gantrez® AN Copolymer” from ISP Technologies
• poly(maleic anhydride-co-ethylene) e.g., available from Zeeland Chemicals Inc.
• poly(maleic anhydride-co-styrene) preferably poly(maleic anhydride-co-styrene) . with a polyfunctional component having one functional group capable of reaction with the anhydride and one or more functional groups that are capable of thermal, photo, or chemically induced polymerization.
• the polyfunctional component (referred to hereafter as a reactive graft component) is preferably allylamine, diallyla ine, 3-amino-l-propanol vinyl ether, allyl alcohol, 4-hydroxybutyl vinyl ether, glycerol dimethacrylate, 2-hydroxyethyl methacrylate, or 2-hydroxyethyl acrylate.
• the stoichiometry of the reactive graft component with respect to the pendant anhydrides may range from 0.5 to 1.0, preferably 1.0.
• the above stated infra-red absorption frequencies may be used as an indication of reaction when grafting the reactive graft component onto the anhydride-containing copolymer.
• the carboxylic acid formed as a result of reacting a hydroxyl-containing compound or an amino-containing compound with the anhydride functional group of the copolymer renders the grafted copolymers readily soluble in dilute aqueous base.
• the increased rate of dissolution in dilute aqueous base compared to the dissolution rate of the ungrafted copolymer provides a qualitative indication of successful graft.
• a more quantitative measure of degree of graft is obtained by determination of acid number by titration with a base.
• the grafted copolymer is then blended with a crosslinking component that is capable of reacting with the pendant carboxylic acid groups, or unreacted anhydride groups, of the grafted copolymer.
• the crosslinking component can be a melamine based curative, e.g, such as is available under the tradename Cymel® from Cytec Industries Inc., or polyfunctional isocyanates.
• the crosslinking component is preferably a blocked diisocyanate or more preferably, a blocked polyisocyanate. Blocked polyisocyanates of this type are available, e.g., under the tradename "Desmodur” from Miles Inc. and under the tradename "Luxate” from Olin Chemicals.
• blocked isocyanates permits preparation of a one part formulation with extended shelf-life since the blocked isocyanates are unreactive until heated to a predetermined temperature. Heating the blocked isocyanate to its deblock temperature generates a "free" isocyanate capable of reactions typically associated with isocyanates.
• the blocked isocyanate groups begin to deblock to form free isocyanate groups at temperatures ranging from 60° C to 200° C depending on the type of blocking agent used.
• the free isocyanates generated in this manner then react with the carboxylic acid groups of the grafted copolymer to form an amide as described in "Organic Polymer Chemistry", K.J. Saunders, Chapman and Hall, New York, 1973.
• the reactions of the deblocked isocyanates described above produce extensive crosslinking of the polymer matrix.
• the reactive graft component is an unsaturated alkyl group, it is also believed that at temperatures above 200°C the unsaturated bonds of the pendant reactive graft components react to provide additional crosslinking.
• the reactive graft component can also contain a photo-crosslinkable functionality, such as an acrylate radical.
• the structure of the grafted maleic anhydride copolymer can be described, generally as follows:
• X can be a linear or branched unsaturated alcohol or amine containing from about 2 to 20 carbon atoms. Mixtures of linear or branched unsaturated alcohols and/or amines may also be employed.
• m can be from 0.2 to 1 and n can be from 0.8 to 0.
• the moiety on the right (B) is maleic anhydride copolymer, as peviously described, and the moiety on the left (A) is the grafted component which may contain the amine or alcohol components, as previously described.
• the substituent groups added to the reactive sites on the anhydride may include groups of greater complexity and functionality, for example, as follows:
• R ⁇ is a linear or branched divalent alkylene of from about 1 to 6 carbon atoms or an oxyalkylated derivative thereof.
• R2 is a vinyl, acrylate, or methacrylate radical, m can be from 0.2 to 1 and n can be from 0.8 to 0.
• the applicants' grafted copolymer/blocked polyisocyanate blend can be applied directly to provide an optically transparent, thermally stable, chemical resistant and leach/stain resistant barrier coating with uniform coating thickness.
• the applicants' grafted copolymer/blocked polyisocyanate blend may also be combined with colorants to provide a uniform colored film coating possessing leach/stain resistance for use as a color filter for information displays and detectors.
• the applicants polymeric coating may be several microns to a few hundred Angstroms in thickness.
• Conventional spin-coating usually yields a film from about 0.1 ⁇ m to ten microns in thickness depending on molecular weight of the grafted copolymer and the speed at which the coating is spin-coated.
• Typical speeds for spin-coating the applicants polymeric coating (with or without colorants) may vary from 500 rpm to 6000 rpm depending on the type and size of substrate to be coated and the molecular weight of the copolymer and crosslinking agent used, as well as the composition of the coating.
• Films of greater thickness may be achieved with higher polymer solids levels and/or higher molecular weight polymer, as well as by use of other coating methods.
• Typical cure cycles for the applicants' polymeric coating range from 200°C to 280°C for times of 10 minutes to 60 minutes.
• Applicants' polymeric coating Some specific applications for applicants' polymeric coating include binder for dyes or pigments to form color filter arrays for use in liquid crystal displays, electro-luminescent displays, plasma displays and imaging systems such as charge-coupled devices for color video detectors.
• Applicants' polymeric coating may also be applied over coatings that lack sufficient leach/stain resistance to serve as a barrier coating to prevent staining and leaching of the aforementioned coating.
• Applicants' polymeric coating may also be used as an interlayer dielectric in multi-layer microcircuit fabrication.
• Applicants' polymeric coating may also be used in the construction of optical wave-guides.
• the product had an acid number of 157.
• EXAMPLE 2 Into a reaction vessel equipped with an agitator, a nitrogen inlet tube and a calcium chloride drying tube, there is charged 202.23 parts of styrene-maleic anhydride copolymer having a number average molecular weight of about 350,000 (Aldrich 18,293-1) and an acid number of 473 and 500 parts of N-methyl-2-pyrrolidinone. After purging the reactor with nitrogen for several minutes, the reactor is heated with an electric heating mantel to a temperature 25°C to 75°C while stirring. After all solids are dissolved, the solution is allowed to cool to about 35°C. To the stirring solution there is added dropwise a solution consisting of 48.50 parts allylamine in 152.78 parts N-methyl-2-pyrrolidinone.
• N-methyl-2-pyrrolidinone Into a reaction vessel equipped with an agitator, a nitrogen inlet tube and a calcium chloride drying tube, there is charged 100 parts of N-methyl-2-pyrrolidinone. After purging the reactor with nitrogen for several minutes, there is added 46.71 parts of styrene-maleic anhydride copolymer having a number average molecular weight of about 1600 - 2600 and an acid number of 475 (Monomer-Polymer & Dajac Labs, catalog # 9182) . An additional 20 parts of N-methyl-2-pyrrolidinone are used to rinse the inside walls of the reactor. To the stirring solution there is added dropwise a solution consisting of 13.19 parts allyla ine in 20 parts N-methyl-2-pyrrolidinone. Stirring is continued at room temperature for about 24 hours. The product had an acid number of 144.
• EXAMPLE 4 Into a reaction vessel equipped with an agitator, a nitrogen inlet tube and a calcium chloride drying tube, there is charged 50 parts of N-methy1-2-pyrrolidinone, 50 parts of diethylene glycol dimethyl ether, and 5.87 parts allylamine. After purging the reactor with nitrogen for several minutes, 30 parts of styrene-maleic anhydride copolymer having a number average molecular weight of about 350,000 (Aldrich 18,293-1) and an acid number of 473 are added to the stirring solution. A mixture 21.74 parts of N-methyl-2-pyrrolidinone and 21.74 parts diethylene glycol dimethyl ether is used to rinse the inside walls of the reactor. Stirring is continued for about 48 hours. The product had an acid number of 172.
• polymer blend consisting of 150 parts allylamine grafted styrene-maleic anhydride copolymer solution as described in Example 1, 51 parts blocked polyisocyanate (Des odur BL-3175A, Miles Inc.), 10 parts N-methyl-2-pyrrolidinone and 25 parts eye1ohexanone.
• the coating may be used as a color filter in a multicolor pixel array for use in full-color flat-panel displays to selectively pass predominantly blue light from a light source behind the panel.
• the coating may also be used as a color filter in a multicolor pixel array to selectively pass predominantly blue light to a semiconductor photodetector array.
• the coating may be applied by conventional spin or spray techniques on a substrate and cured at 230°C for 60 minutes or 250°C for 30 minutes.
• the coating may be patterned by conventional plasma etch techniques.
• a clear coating was prepared by stirring the mix for about 1 hour. The mix was then filtered through a 0.2 ⁇ m filter.
• the coating may be used as a transparent barrier layer over color filters to provide protection against leaching of the dyes from the color filter and to protect against staining of the color filter during subsequent processing steps. It will be appreciated that various dyes may be added to produce a coating which is transparent at selected wavelengths and opaque at other wavelengths. For example, the coating may be transparent at the spectra used to determine alignment, but opaque, or colored, at other wavelengths.
• the blue color filter formulation described in Example 6 was spin-coated onto a three inch diameter glass substrate at 1000 rpm for 90 seconds, baked on a hotplate at 100°C for 30 - 60 seconds, pre-baked in a convection oven at 170°C for 30 minutes, and hard-baked (cured) in a convection oven at 250°C for 30 minutes. Film thickness was 1.45 ⁇ m.
• the transmittance spectrum of the cured color filter film is represented by line a in Figure 1.
• the coated glass substrate was then immersed in N-methyl-2-pyrrolidinone for 30 seconds after which it was dried under a stream of dry nitrogen.
• the transmittance spectrum was recorded again and is represented by line b in Figure 1.
• the coated glass substrate was immersed a second time in
• the green color filter formulation described in Example 7 was spin-coated onto a three inch diameter glass substrate at 1000 rpm for 90 seconds, baked on a hotplate at 100°C for 30 - 60 seconds, pre-baked in a convection oven at 170°C for 30 minutes, and hard-baked (cured) in a convection oven at 250°C for 30 minutes. Film thickness was 1.24 ⁇ m.
• the transmittance spectrum of the cured color filter film is represented by line d in Figure 1.
• the coated glass substrate was then immersed in N-methy1-2-pyrrolidinone for 30 seconds after which it was dried under a stream of dry nitrogen.
• the transmittance spectrum was recorded again and is represented by line e in Figure 1.
• the coated glass substrate was immersed a second time in N-methy1-2-pyrrolidinone for 30 seconds after which it was dried under a stream of dry nitrogen.
• the transmittance spectrum was recorded again and is represented by line f in Figure 1.
• the red color filter formulation described in Example 8 was spin-coated onto a three inch diameter glass substrate at 1000 rpm for 90 seconds, baked on a hotplate at 100°C for 30 - 60 seconds, pre-baked in a convection oven at 170°C for 30 minutes, and hard-baked (cured) in a convection oven at 250°C for 30 minutes. Film thickness was 1.36 ⁇ m.
• the transmittance spectrum of the cured color filter film is represented by line g in Figure 1.
• the coated glass substrate was then immersed in N-methyl-2-pyrrolidinone for 30 seconds after which it was dried under a stream of dry nitrogen.
• the transmittance spectrum was recorded again and is represented by line h in Figure 1.
• the coated glass substrate was immersed a second time in N-methyl-2-pyrrolidinone for 30 seconds after which it was dried under a stream of dry •28-
• the cyan color filter formulation described in Example 12 was spin-coated onto a three inch diameter glass substrate at 2000 rpm for 90 seconds, baked on a hotplate at 100°C for 30 - 60 seconds, and hard-baked (cured) in a convection oven at 250°C for 30 minutes. Film thickness was 0.579 ⁇ m.
• the transmittance spectrum of the cured color filter film is represented by line a in Figure 2. The coated glass substrate was then immersed in
• N-methyl-2-pyrrolidinone for 30 seconds after which it was dried under a stream of dry nitrogen.
• the transmittance spectrum was recorded again and is represented by line b in Figure 2.
• the coated glass substrate was immersed a second time in
• the yellow color filter formulation described in Example 14 was spin-coated onto a three inch diameter glass substrate at 2000 rpm for 90 seconds, baked on a hotplate at 100°C for 30 - 60 seconds, and hard-baked (cured) in a convection oven at 250 Q C for 30 minutes. Film thickness was 0.585 ⁇ m.
• the transmittance spectrum of the cured color filter film is represented by line d in Figure 2.
• the coated glass substrate was then immersed in N-methyl-2-pyrrolidinone for 30 seconds after which it was dried under a stream of dry nitrogen.
• the transmittance spectrum was recorded again and is represented by line e in Figure 2.
• the coated glass substrate was immersed a second time in N-methyl-2-pyrrolidinone for 30 seconds after which it was dried under a stream of dry nitrogen.
• the transmittance spectrum was recorded again and is represented by line f in Figure 2.
• the magenta color filter formulation described in Example 13 was spin-coated onto a three inch diameter glass substrate at 2000 rpm for 90 seconds, baked on a hotplate at 100°C for 30 - 60 seconds, and hard-baked (cured) in a convection oven at 250°C for 30 minutes. Film thickness was 0.708 ⁇ m.
• the transmittance spectrum of the cured color filter film is represented by line g in Figure 2.
• the coated glass substrate was then immersed in N-methy1-2-pyrrolidinone for 30 seconds after which it was dried under a stream of dry nitrogen.
• the transmittance spectrum was recorded again and is represented by line h in Figure 2.
• the coated glass substrate was immersed a second time in
• N-methyl-2-pyrrolidinone a clear coating was prepared by stirring the mix for about 1 hour. The mix was then filtered through a 0.2 ⁇ m filter. The coating may be used as a transparent barrier layer over color filters to provide protection against leaching of the dyes from the color filter and to protect against staining of the color filter during subsequent processing steps.
• Example 25 Evaluation of the stain resistance of the formulation of Example 25 was conducted by preparing a three-color color wheel on a three inch diameter glass substrate, as illustrated in Figure 3, that simulates the processing steps used in preparing a color filter plate.
• the steps used in preparing the color wheel are as follows: 1) Spin-coat clear barrier coat of example 25 at 1220 rpm for 90 seconds, bake on hotplate at 100°C for 30 - 60 seconds, bake in convection oven at 250°C for 60 minutes. Film thickness was 1.1 ⁇ m. Spectra of clear coat after this step is shown in Figure 4, line a. 2) Spin-coat red color filter (Brewer Science, Inc. PiC* Red 101) at 1200 rpm for 90 seconds, bake on hotplate at 100°C for 30 - 60 seconds, bake in convection oven at 164°C for 30 minutes.
• Red 101 was then hard-baked (cured) in a convection oven at 280°C for 10 minutes.
• Red 101 film thickness was approximately 1.25 ⁇ m per certificate of analysis. Spectra of the Red 101 and the clear coat after this step are shown in Figure 4, lines b and c, respectively.
• An optical transparent negative working photoresist is prepared by combining 10.00 parts of the formulation prepared in Example 28, 1.90 parts blocked polyisocyanate (Desmodur B1-3175A, Miles Inc), 20.00 parts SafeStrip*, 1.00 parts isopropylthioxanthone (ITX) (First Chemical Corp.), 0.50 parts octyl-para-(dimethylamino) benzoate(ODAB) (First Chemical Corp.), and 0.025 parts 1,4-diazabicyclo[2.2.2]octane (Aldrich D2,780-2). The mix is stirred for 1 hour at room temperature and filtered through a 0.2 ⁇ m.
• IX isopropylthioxanthone
• ODAB octyl-para-(dimethylamino) benzoate
• Aldrich D2,780-2 1,4-diazabicyclo[2.2.2]octane
• Example 29 Spin-coat transparent negative working photoresist prepared in Example 29 at 4000 rpm for 90 seconds, hotplate bake at 100°C for 3 minutes.
• a second color wheel was prepared as described above in steps 1 - 9 with the exception that the Blue 10 was not hard-baked after development in TMAH. Instead, the color wheel was placed on the spinner and spun at
• Figure 8 shows the spectrum of the Red 02 and Green 02 after each hard-bake and removal of Blue 10 where lines a, c, and e represent the transmittance spectra of Red 02 and lines b and d represent the transmittance spectra of Green 02. The spectra show slight decreases in transmittance for the Red 02 and the Green 02 due to thermal decomposition of the dyes. The spectra indicate that the removal of the Blue 10 with
• N-methyl-2-pyrrolidinone did not stain the Green 02 and Red 02 and that there was no leaching of dyes from the Green 02 and Red 02 during the Blue 10 removal step.
• Sample 1 was baked in a convection oven at 250 ⁇ C for 30 minutes
• sample 2 was baked in a convection oven at 230°C for 60 minutes
• sample 3 was baked in a convection oven at 165°C for 30 minutes.
• Sample 2 was spin-coated with a 1:1 dilution of the transparent resist, described in Example 29, and SafeStrip* (Brewer Science, Inc.). The diluted transparent resist was spin-coated at
• Sample 3 was coated with the diluted transparent resist, as previously described, by spin-coating at 5000 rpm for 90 seconds, followed by a hotplate bake at 100°C for 3 minutes.
• the sample was flood-exposed (150 mJ/cm 2 ) on a contact printer and placed in a convection oven at 230°C for 30 minutes. Film thickness was determined to be 0.1 ⁇ m from a spin-curve.
• Evaluation of solvent resistance was performed by immersing each sample in N-methy1-2-pyrrolidinone. The spectrum of each sample was recorded before and after immersion in N-methyl-2-pyrrolidinone. Sample 1 was stripped from the substrate during immersion in N-methyl-2-pyrrolidinone.
• Line a in Figure 9 represents the transmittance spectrum of the blue color filter of sample 2 before application of the transparent resist.
• Line b in Figure 9 represents the transmittance spectrum of sample 2 with the transparent resist baked on.
• Line c in Figure 9 represents the transmittance spectrum of sample 2 with the transparent resist baked on, after immersion in N-methyl-2-pyrrolidinone for 30 seconds.
• Line a in Figure 10 represents the transmittance spectrum of the blue color filter of sample 3 after application and curing of the transparent resist.
• Line b in Figure 10 represents the transmittance spectrum of sample 3 with the transparent resist baked on, after immersion in N-methyl-2-pyrrolidinone for 30 seconds.
• the dye may be a part of the vehicle polymer, e.g. attached to the polymer as an addition compound.
• the polymer may also be one which has the desired filtering properties, transmitting light of a desired wavelength, and excluding other wavelengths.

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