EP0817279A1 - Verfahren zur Herstellung von einer Chalcopyrit-Halbleiterdünnschichtstruktur mit einem spezifischen Dotiermaterial - Google Patents

Verfahren zur Herstellung von einer Chalcopyrit-Halbleiterdünnschichtstruktur mit einem spezifischen Dotiermaterial Download PDF

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Publication number
EP0817279A1
EP0817279A1 EP97113690A EP97113690A EP0817279A1 EP 0817279 A1 EP0817279 A1 EP 0817279A1 EP 97113690 A EP97113690 A EP 97113690A EP 97113690 A EP97113690 A EP 97113690A EP 0817279 A1 EP0817279 A1 EP 0817279A1
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EP
European Patent Office
Prior art keywords
film
chalcopyrite
group
heat treatment
dopant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97113690A
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English (en)
French (fr)
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EP0817279B1 (de
Inventor
Takayuki Negami
Mikihiko Nishitani
Shigemi Kohiki
Takahiro Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
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Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of EP0817279A1 publication Critical patent/EP0817279A1/de
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Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264—Inorganic materials
    • H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
    • H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/541—CuInSe2 material PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/153—Solar cells-implantations-laser beam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/93—Ternary or quaternary semiconductor comprised of elements from three different groups, e.g. I-III-V
EP97113690A 1993-02-15 1994-02-10 Verfahren zur Herstellung von einer Chalcopyrit-Halbleiterdünnschichtstruktur mit einem spezifischen Dotiermaterial Expired - Lifetime EP0817279B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2528793 1993-02-15
JP25287/93 1993-02-15
JP2528793A JP3337255B2 (ja) 1993-02-15 1993-02-15 カルコパイライト構造半導体薄膜とその製造方法、薄膜太陽電池の製造方法、および発光装置の製造方法
EP94102089A EP0612112B1 (de) 1993-02-15 1994-02-10 Verfahren zur Herstellung einer chalkopyrit-Halbleiterschicht

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP94102089A Division EP0612112B1 (de) 1993-02-15 1994-02-10 Verfahren zur Herstellung einer chalkopyrit-Halbleiterschicht

Publications (2)

Publication Number Publication Date
EP0817279A1 true EP0817279A1 (de) 1998-01-07
EP0817279B1 EP0817279B1 (de) 2002-10-09

Family

ID=12161808

Family Applications (2)

Application Number Title Priority Date Filing Date
EP94102089A Expired - Lifetime EP0612112B1 (de) 1993-02-15 1994-02-10 Verfahren zur Herstellung einer chalkopyrit-Halbleiterschicht
EP97113690A Expired - Lifetime EP0817279B1 (de) 1993-02-15 1994-02-10 Verfahren zur Herstellung von einer Chalcopyrit-Halbleiterdünnschichtstruktur mit einem spezifischen Dotiermaterial

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP94102089A Expired - Lifetime EP0612112B1 (de) 1993-02-15 1994-02-10 Verfahren zur Herstellung einer chalkopyrit-Halbleiterschicht

Country Status (4)

Country Link
US (2) US5389572A (de)
EP (2) EP0612112B1 (de)
JP (1) JP3337255B2 (de)
DE (2) DE69410137T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4442824C1 (de) * 1994-12-01 1996-01-25 Siemens Ag Solarzelle mit Chalkopyrit-Absorberschicht
EP0743686A3 (de) * 1995-05-15 1998-12-02 Matsushita Electric Industrial Co., Ltd Vorprodukt für Halbleiterdünnschichten und Verfahren zur Herstellung von Halbleiterdünnschichten
JPH10270733A (ja) * 1997-01-24 1998-10-09 Asahi Chem Ind Co Ltd ｐ型半導体、ｐ型半導体の製造方法、光起電力素子、発光素子
DE19723387C2 (de) * 1997-06-04 1999-05-12 Inst Oberflaechenmodifizierung Selektives Wasserstoff-Ionenstrahlätzen von binären Fremdphasen in Chalkopyrithalbleiter-Dünnschichten
US20100108118A1 (en) * 2008-06-02 2010-05-06 Daniel Luch Photovoltaic power farm structure and installation
US9236512B2 (en) 2006-04-13 2016-01-12 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US9865758B2 (en) 2006-04-13 2018-01-09 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8884155B2 (en) 2006-04-13 2014-11-11 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8729385B2 (en) 2006-04-13 2014-05-20 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
EP3327170B1 (de) 2007-09-12 2020-11-04 Flisom AG Vorrichtung zum herstellen eines verbindungsfilms
WO2009046178A1 (en) * 2007-10-02 2009-04-09 University Of Delaware I-iii-vi2 photovoltaic absorber layers
KR101271753B1 (ko) * 2009-11-20 2013-06-05 한국전자통신연구원 박막형 광 흡수층의 제조 방법, 이를 이용한 박막 태양전지 제조 방법 및 박막 태양전지
CN102792463B (zh) 2010-03-10 2015-10-14 陶氏环球技术有限责任公司 挠性太阳能电池互连系统和方法
CN102024870B (zh) * 2010-04-19 2013-07-24 福建欧德生光电科技有限公司 半导体薄膜太阳能电池的制造系统和方法
US8802479B2 (en) 2010-06-03 2014-08-12 NuvoSun, Inc. Solar cell interconnection method using a flat metallic mesh
EP2789020A4 (de) 2011-12-07 2015-08-05 Nuvosun Inc Automatisierte herstellung flexibler solarzellen und verbindung mit rollen aus expandiertem metallnetz
RU2567191C1 (ru) * 2014-07-10 2015-11-10 Федеральное государственное бюджетное учреждение науки Институт проблем химической физики Российской академии наук (ИПХФ РАН) Способ изготовления фоточувствительных халькопиритных пленок
CN111341664B (zh) * 2020-03-11 2022-09-20 鄂尔多斯应用技术学院 过渡金属元素掺杂CuGaS2的中间带薄膜及其制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4004342A (en) * 1976-02-23 1977-01-25 The United States Of America As Represented By The Secretary Of The Air Force Fabrication of ion implanted P-N junction devices
US4311728A (en) * 1980-10-24 1982-01-19 Exxon Research & Engineering Co. Method for depositing photoconductive zinc tin phosphide
JPH02270381A (ja) * 1989-04-11 1990-11-05 Matsushita Electric Ind Co Ltd 半導体発光素子の製造方法
EP0534459A2 (de) * 1991-09-27 1993-03-31 Matsushita Electric Industrial Co., Ltd. Verbindungshalbleiter, Verfahren zur Herstellung einer dünnen Schicht daraus, und eine Halbleitervorrichtung mit dieser dünnen Schicht

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4915745A (en) * 1988-09-22 1990-04-10 Atlantic Richfield Company Thin film solar cell and method of making
US5078804A (en) * 1989-06-27 1992-01-07 The Boeing Company I-III-VI2 based solar cell utilizing the structure CuInGaSe2 CdZnS/ZnO
JPH04324647A (ja) * 1991-04-24 1992-11-13 Dowa Mining Co Ltd ＣｕＩｎＳｅ２薄膜の製法
JPH05262504A (ja) * 1991-09-27 1993-10-12 Matsushita Electric Ind Co Ltd 化合物半導体、その薄膜製造方法及びそれを用いた半導体装置
US5286306A (en) * 1992-02-07 1994-02-15 Shalini Menezes Thin film photovoltaic cells from I-III-VI-VII compounds

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4004342A (en) * 1976-02-23 1977-01-25 The United States Of America As Represented By The Secretary Of The Air Force Fabrication of ion implanted P-N junction devices
US4311728A (en) * 1980-10-24 1982-01-19 Exxon Research & Engineering Co. Method for depositing photoconductive zinc tin phosphide
JPH02270381A (ja) * 1989-04-11 1990-11-05 Matsushita Electric Ind Co Ltd 半導体発光素子の製造方法
EP0534459A2 (de) * 1991-09-27 1993-03-31 Matsushita Electric Industrial Co., Ltd. Verbindungshalbleiter, Verfahren zur Herstellung einer dünnen Schicht daraus, und eine Halbleitervorrichtung mit dieser dünnen Schicht

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 015, no. 026 (E - 1025) 22 January 1991 (1991-01-22) *
SATO K ET AL: "CRYSTAL GROWTH AND PHOTOLUMINESCENCE STUDIES IN FE-DOPED SINGLE CRYSTALS OF CUAL1-XGAXS2", JOURNAL OF CRYSTAL GROWTH, vol. 99, no. 1 / 04 PART 2, 1 January 1990 (1990-01-01), pages 772 - 775, XP000174134 *

Also Published As

Publication number Publication date
EP0612112B1 (de) 1998-05-13
EP0612112A3 (de) 1994-12-21
DE69410137D1 (de) 1998-06-18
DE69431535T2 (de) 2003-06-26
JPH06244442A (ja) 1994-09-02
DE69410137T2 (de) 1998-09-03
JP3337255B2 (ja) 2002-10-21
DE69431535D1 (de) 2002-11-14
EP0612112A2 (de) 1994-08-24
EP0817279B1 (de) 2002-10-09
US5474622A (en) 1995-12-12
US5389572A (en) 1995-02-14

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