EP0816095A1 - Tête d'impression par jet d'encre à base de composés organosiliciques - Google Patents
Tête d'impression par jet d'encre à base de composés organosiliciques Download PDFInfo
- Publication number
- EP0816095A1 EP0816095A1 EP97110589A EP97110589A EP0816095A1 EP 0816095 A1 EP0816095 A1 EP 0816095A1 EP 97110589 A EP97110589 A EP 97110589A EP 97110589 A EP97110589 A EP 97110589A EP 0816095 A1 EP0816095 A1 EP 0816095A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- compound
- group
- lacquer
- ink jet
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010703 silicon Substances 0.000 title description 3
- 229910052710 silicon Inorganic materials 0.000 title description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 239000007795 chemical reaction product Substances 0.000 title 1
- 239000000463 material Substances 0.000 claims abstract description 34
- 150000001875 compounds Chemical class 0.000 claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 claims abstract description 9
- 125000003342 alkenyl group Chemical group 0.000 claims abstract description 6
- 125000002877 alkyl aryl group Chemical group 0.000 claims abstract description 6
- 125000003710 aryl alkyl group Chemical group 0.000 claims abstract description 6
- 125000003118 aryl group Chemical group 0.000 claims abstract description 6
- 125000000547 substituted alkyl group Chemical group 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 23
- 239000004922 lacquer Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 239000002904 solvent Substances 0.000 claims description 9
- 239000002966 varnish Substances 0.000 claims description 8
- 239000007787 solid Substances 0.000 claims description 7
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 claims description 5
- 238000004132 cross linking Methods 0.000 claims description 5
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 claims description 5
- OLLFKUHHDPMQFR-UHFFFAOYSA-N dihydroxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](O)(O)C1=CC=CC=C1 OLLFKUHHDPMQFR-UHFFFAOYSA-N 0.000 claims description 4
- 238000011417 postcuring Methods 0.000 claims description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 3
- 239000003973 paint Substances 0.000 claims description 3
- 238000002161 passivation Methods 0.000 claims description 2
- 239000007858 starting material Substances 0.000 claims description 2
- 125000002947 alkylene group Chemical group 0.000 claims 1
- 125000005429 oxyalkyl group Chemical group 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- 229920000642 polymer Polymers 0.000 abstract description 3
- 125000000962 organic group Chemical group 0.000 abstract description 2
- 238000007641 inkjet printing Methods 0.000 abstract 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 15
- 238000004049 embossing Methods 0.000 description 10
- 239000010410 layer Substances 0.000 description 10
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000009997 thermal pre-treatment Methods 0.000 description 5
- KTALPKYXQZGAEG-UHFFFAOYSA-N 2-propan-2-ylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C(C)C)=CC=C3SC2=C1 KTALPKYXQZGAEG-UHFFFAOYSA-N 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000009736 wetting Methods 0.000 description 4
- QNODIIQQMGDSEF-UHFFFAOYSA-N (1-hydroxycyclohexyl)-phenylmethanone Chemical compound C=1C=CC=CC=1C(=O)C1(O)CCCCC1 QNODIIQQMGDSEF-UHFFFAOYSA-N 0.000 description 3
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 230000002209 hydrophobic effect Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 230000005520 electrodynamics Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000006068 polycondensation reaction Methods 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 229940090181 propyl acetate Drugs 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 125000001424 substituent group Chemical group 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 206010016352 Feeling of relaxation Diseases 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 229920000592 inorganic polymer Polymers 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000012454 non-polar solvent Substances 0.000 description 1
- -1 nozzle plates Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002688 persistence Effects 0.000 description 1
- 238000006552 photochemical reaction Methods 0.000 description 1
- 239000004848 polyfunctional curative Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 238000007767 slide coating Methods 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
Definitions
- the present invention relates to ink jet printheads which consist at least in part of a polymeric material that is produced using organosilicon compounds with polycondensable and polymerizable groups.
- Inkjet printheads now have to be sold in increasing numbers to be produced. This printing technology is now one time extremely widespread, on the other hand it is desirable to have one To develop "cheap printhead", each together with the Ink cartridge can be replaced.
- Inkjet printheads exist next to the actuator (heating element, Piezo element, electrodynamic transducer, etc.) made of structures for liquid management (channel walls, covers, nozzle walls, -covers, ink supply), ink filters and one not wetting nozzle outlet side (e.g. nozzle plate).
- Modern Ink printheads have the planar structure in common that with the means of semiconductor manufacturing a relatively inexpensive Manufacture with high accuracy in large numbers enables. There are differences in the structure: “Edge shooter arrangement” the droplet is ejected tangentially to the heating element surface, while the so-called “Side shooter arrangement” of the drops normal to the heating element surface is delivered.
- the layered structure of the "edge shooter variant” (substrate, Thin film structure, channel structure, channel cover, glass tub with Ink reservoir) requires nozzles that come from different Materials with different wetting properties be formed (thin film layer, photoresist channel wall, Photoresist adhesive layer, channel cover). This different wetting properties can be negative affect drop formation. Therefore, with “edge shooter arrangements” additionally the coating on the nozzle outlet side with a hydrophobic material.
- the nozzle outlet of the side-shooter arrangement nozzle plate exists but from only one material. Thereby lie in the nozzle area same wetting properties.
- an additional one only Coating (anti-slide coating) required, if the hydrophobic properties of the material are not suffice.
- the channel structures of today's printheads are usually made Acrylic-based photoresists through photolithographic Processes generated.
- photo glass is used that structured after the exposure of the mask can be etched.
- the object of the present invention is a universally applicable To provide material for inkjet printheads, with the channel structures, substrates, nozzle plates, nozzles, ink reservoirs, Ink filters and the like for color and mono ink jet print heads can be completely manufactured, and whose hydrophobic properties are sufficient to respond to the To be able to dispense with an anti-triel coating.
- the Material should be inexpensive, and structuring should with little effort and / or with high precision can.
- Polymer materials of the type used according to the invention belong to the material class of the so-called ORMOCERE (ORganically MOdified CERamics). You can choose between inorganic and organic polymers are classified. The production is based on alkoxides of silicon and, if necessary, in addition other metals wholly or partly through organic polymerizable substituents are modified. By hydrolysis and condensation becomes the inorganic part of the network built up by polymerization, polyaddition or others organic coupling reactions the organic part from reactive organic substituents.
- ORMOCERE ORganically MOdified CERamics
- layers to be structured can be produced as follows: First of all, within a polycondensation reaction (eg in the sol-gel process), a pre-condensate (here usually referred to as "lacquer") is produced from the selected starting materials, which, depending on the chemical compounds used, is usually stable in storage for a few months.
- the solids content of the lacquer can be varied, for example by removing solvent or water or by adding an additional solvent.
- the lacquer is then applied to the desired substrate material as a layer by dipping, spin coating or spraying or the like, the substrate not only consisting of foreign material such as glass, ceramic, metal or foreign polymer, but also of the identical material.
- the lacquer By structuring exposure (mostly UV light), the lacquer can be photopolymerized at the desired positions using any technology, whereupon in a so-called “development step” the part not exposed to the light is removed (negative resist behavior), which is done with the help of solvents such as acetone or an alkaline aqueous medium. Finally, the already structured material is thermally crosslinked. Mechanical embossing with simultaneous or subsequent exposure and subsequent thermal post-crosslinking is also possible.
- the polymeric material be both photopolymerizable groups as well as thermally cross-linkable Contains groups. Furthermore, it is of course preferred a photoinitiator and possibly an accelerator, for example based on amine added.
- FIG. 1 shows an example of the formation of a polymeric "ORMOCER" hybrid material:
- the inorganic oxide network is built up by polycondensation of alkoxysilanes, in a subsequent step the methacrylic groups of 3-methacryloxypropyltrimethoxysilane (MEMO) are photochemically crosslinked and finally the epoxy groups of 3-glycidoxypropyltrimethoxysilane (GLYMO) are thermally polymerized, so that an organic network value also arises .
- MEMO 3-methacryloxypropyltrimethoxysilane
- GLYMO 3-glycidoxypropyltrimethoxysilane
- the use of the GMP2T system is very particularly preferred.
- the paint is preferably made by first the desired silanes, if necessary with further additives (e.g. Network formers or modifying substances), mixed and, if necessary under heat, hydrolyzed by adding water.
- further additives e.g. Network formers or modifying substances
- the Water addition can be done slowly, so the system first substoichiometric amounts are supplied.
- the liquid lacquer produced as described above becomes possibly brought to a desired solids content, what preferably by spinning in or distilling off Solvent or water happens. If necessary, additional or alternatively diluted with a suitable solvent (e.g. with ethanol, acetone, propyl acetate or the like).
- a suitable solvent e.g. with ethanol, acetone, propyl acetate or the like.
- a Solids content in the range from 50% to 85%, especially from about 75% is desirable. However, it should be clear that depending on the type of order and the one you want Structure height also worked with other solids contents can be.
- the varnish can then be applied as a layer on one or different Substrate (s) are applied.
- the substrate or substrates can it be made of another material like glass, Ceramic, metal, silicon or polymer or the like. Act it can also be an order on the used according to the invention Material take place, which should then already be hardened.
- the varnish can be applied by spin-on application (for example at a rotation speed of about 300 to 800 rpm and a period of about 30 to 80 seconds).
- spin-on application for example at a rotation speed of about 300 to 800 rpm and a period of about 30 to 80 seconds.
- Doctor blade dipping, spraying, embossing or similar
- the components 1. to 4. are submitted and at Room temperature stirred for 18 h. Then within The suspension was heated to about 70 ° C. for 90 minutes. after the Suspension has become clear, is 1/4 of the amount of water Maintenance of heating added. At intervals of approx. The remaining amount of water is added for 20 min 1/4). After all the water has been added, the mixture is stirred at 70 ° C. for 1 h continued stirring. Then the heater is removed, and after the paint is ready to use after cooling.
- the system GMPT2 is used for the generation of channel structures, which has very good adhesion to the various substrate materials, even after ink storage.
- the solvent is distilled off until a solids content of 75% is reached.
- 1.5% by mass of photoinitiator (Quantacure ITX, Shell Chemie) and 1.5% by mass of accelerator (N-methyldiethanolamine and diethylenetriamine, ratio 1: 1) are dissolved in the lacquer and this system is carried out on substrates (glass, Si) Spin-on application applied (600 rpm for 60 sec.).
- the photostructuring is carried out using a mask aligner (Karl-Süss MA 45) at a wavelength of 360 nm and an exposure intensity of 14 mW / cm 2 . Exposure times of approximately 10 seconds have proven to be optimal under these conditions.
- the exposed structures are developed by spraying with ethanol (duration: 10 seconds).
- the structures obtained are cured at 120 ° C. for 10 h. These structures are characterized in FIGS. 2 to 4 (SEM and profilometer measurements). With the described method, crack-free structure heights of up to 30 ⁇ m can be achieved in one step. These structures have a high edge steepness, have good substrate adhesion and the required ink storage stability. For this reason and due to their temperature stability up to 270 ° C (thermogravimetric determination in air), they are very well suited for use as channel structures for inkjet printheads.
- the concentration on Photoinitiator is 0.05% by weight (Irgacure 184, company Ciba-Geigy or Quantacure ITX)
- the laser wavelength is included 360 nm
- the laser power before focusing is 1.41 - 2.28 mW (variable; 1 mm beam diameter).
- the laser beam is focused on approx. 10 - 15 ⁇ m. It is written with a Speed of 1 mm / sec.
- Figures 5 and 6 is one such laser-written structuring and the associated Profilometer measurement shown.
- the thickening on the corners is on the persistence of the laser beam when changing direction attributed.
- the structure height is 20 ⁇ m.
- the GMP2T system is also used for embossing channel structures (see example 2).
- Application conditions glass substrates
- curing photochemical and thermal post-curing
- the embossing process requires thermal pretreatment of the applied coating.
- the most favorable pre-hardening conditions are thermal pre-treatments at approx. 80 ° C (5 min). Increasing the temperature leads to strong pre-crosslinking (bad penetration of the embossing mask as a result), while shorter thermal pre-treatment leads to the mask and layer sticking together.
- Structured glass or Si masks with structure heights of up to 40 ⁇ m are used as masks. After the pre-hardening of the layer, these masks are placed on it and pressed with a pressure of approx. 1 kg / cm 2 , exposure being carried out (approx. 10 sec, 14 mW / cm 2 at 360 nm). Then the pressure is released again, the mask is removed and the structure obtained is post-cured at 120 ° C. for 10 hours.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Paints Or Removers (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19626053 | 1996-06-28 | ||
DE19626053 | 1996-06-28 | ||
PCT/DE1997/001340 WO1998000296A1 (fr) | 1996-06-28 | 1997-06-26 | Tete d'impression a jet d'encre avec des elements constitues de composes organosiliciques |
WOPCT/DE97/01340 | 1997-06-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0816095A1 true EP0816095A1 (fr) | 1998-01-07 |
EP0816095B1 EP0816095B1 (fr) | 2001-05-16 |
Family
ID=7798351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP97110589A Expired - Lifetime EP0816095B1 (fr) | 1996-06-28 | 1997-06-27 | Tête d'impression par jet d'encre à base de composés organosiliciques |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0816095B1 (fr) |
CA (1) | CA2230636A1 (fr) |
DE (1) | DE59703535D1 (fr) |
WO (1) | WO1998000296A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1136520A2 (fr) * | 2000-03-17 | 2001-09-26 | nanoFILM, Ltd. | Materiau polymère hybride organique-inorganique et procédé de préparation de celui-ci |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58224761A (ja) * | 1982-06-25 | 1983-12-27 | Canon Inc | インクジエツト記録ヘツド |
DE4400315C1 (de) * | 1994-01-07 | 1995-01-12 | Kernforschungsz Karlsruhe | Verfahren zum stufenweisen Aufbau von Mikrostrukturkörpern und damit hergestellter Mikrostrukturkörper |
EP0658430A1 (fr) * | 1993-11-26 | 1995-06-21 | Canon Kabushiki Kaisha | Tête d'impression à jet d'encre ne représentant pas de détachement entre un substrat et les canaux d'écoulement de l'encre formés sur ce substrat |
JPH08174845A (ja) * | 1994-12-26 | 1996-07-09 | Canon Inc | 液流路形成用樹脂材料、これを用いた液体噴射記録ヘッド、及びその製造方法 |
EP0734866A2 (fr) * | 1995-03-31 | 1996-10-02 | Canon Kabushiki Kaisha | Procédé de fabrication d'une tête à jet d'encre |
DE19613650C1 (de) * | 1996-04-04 | 1997-04-10 | Fraunhofer Ges Forschung | Hydrolisierbare, fluorierte Silane, Verfahren zu deren Herstellung und deren Verwendung zur Herstellung von Kieselsäurepolykondensaten und Kieselsäureheteropolykondensaten |
-
1997
- 1997-06-26 CA CA002230636A patent/CA2230636A1/fr not_active Abandoned
- 1997-06-26 WO PCT/DE1997/001340 patent/WO1998000296A1/fr active Application Filing
- 1997-06-27 DE DE59703535T patent/DE59703535D1/de not_active Expired - Lifetime
- 1997-06-27 EP EP97110589A patent/EP0816095B1/fr not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58224761A (ja) * | 1982-06-25 | 1983-12-27 | Canon Inc | インクジエツト記録ヘツド |
EP0658430A1 (fr) * | 1993-11-26 | 1995-06-21 | Canon Kabushiki Kaisha | Tête d'impression à jet d'encre ne représentant pas de détachement entre un substrat et les canaux d'écoulement de l'encre formés sur ce substrat |
DE4400315C1 (de) * | 1994-01-07 | 1995-01-12 | Kernforschungsz Karlsruhe | Verfahren zum stufenweisen Aufbau von Mikrostrukturkörpern und damit hergestellter Mikrostrukturkörper |
JPH08174845A (ja) * | 1994-12-26 | 1996-07-09 | Canon Inc | 液流路形成用樹脂材料、これを用いた液体噴射記録ヘッド、及びその製造方法 |
EP0734866A2 (fr) * | 1995-03-31 | 1996-10-02 | Canon Kabushiki Kaisha | Procédé de fabrication d'une tête à jet d'encre |
DE19613650C1 (de) * | 1996-04-04 | 1997-04-10 | Fraunhofer Ges Forschung | Hydrolisierbare, fluorierte Silane, Verfahren zu deren Herstellung und deren Verwendung zur Herstellung von Kieselsäurepolykondensaten und Kieselsäureheteropolykondensaten |
Non-Patent Citations (3)
Title |
---|
DATABASE INSPEC INSTITUTE OF ELECTRICAL ENGINEERS, STEVENAGE, GB; ROSCHER C: "perfluoroaryl substituted inorganic-organic hybrid materials", XP002044420 * |
PATENT ABSTRACTS OF JAPAN vol. 008, no. 080 (M - 289) 12 April 1984 (1984-04-12) * |
PATENT ABSTRACTS OF JAPAN vol. 096, no. 011 29 November 1996 (1996-11-29) * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1136520A2 (fr) * | 2000-03-17 | 2001-09-26 | nanoFILM, Ltd. | Materiau polymère hybride organique-inorganique et procédé de préparation de celui-ci |
EP1136520A3 (fr) * | 2000-03-17 | 2001-12-19 | nanoFILM, Ltd. | Materiau polymère hybride organique-inorganique et procédé de préparation de celui-ci |
US6451420B1 (en) | 2000-03-17 | 2002-09-17 | Nanofilm, Ltd. | Organic-inorganic hybrid polymer and method of making same |
US6607590B2 (en) | 2000-03-17 | 2003-08-19 | Nanofilm, Ltd. | Organic-inorganic hybrid polymer and method of making same |
Also Published As
Publication number | Publication date |
---|---|
CA2230636A1 (fr) | 1998-01-08 |
WO1998000296A1 (fr) | 1998-01-08 |
DE59703535D1 (de) | 2001-06-21 |
EP0816095B1 (fr) | 2001-05-16 |
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