EP0809854A1 - Cathode a emission de champ et procedes pour la realiser - Google Patents

Cathode a emission de champ et procedes pour la realiser

Info

Publication number
EP0809854A1
EP0809854A1 EP96903328A EP96903328A EP0809854A1 EP 0809854 A1 EP0809854 A1 EP 0809854A1 EP 96903328 A EP96903328 A EP 96903328A EP 96903328 A EP96903328 A EP 96903328A EP 0809854 A1 EP0809854 A1 EP 0809854A1
Authority
EP
European Patent Office
Prior art keywords
field emission
emitting surface
substance
irregularities
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96903328A
Other languages
German (de)
English (en)
Other versions
EP0809854B1 (fr
Inventor
V. S. Kaftanov
A. L. Suvorov
E. P. Sheshin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Italia SRL
Lightlab AB
Original Assignee
Dow Italia SRL
Lightlab AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SE9500554A external-priority patent/SE504603C2/sv
Priority claimed from US08/467,825 external-priority patent/US5588893A/en
Application filed by Dow Italia SRL, Lightlab AB filed Critical Dow Italia SRL
Publication of EP0809854A1 publication Critical patent/EP0809854A1/fr
Application granted granted Critical
Publication of EP0809854B1 publication Critical patent/EP0809854B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/304Field-emissive cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels

Definitions

  • the present invention relates to a field emission cathode to be used in light sources and similar devices, such as display panels, cathode-ray tubes, etc., and to methods in the production of such a field emission cathode.
  • US patent 4 728 851 discloses a field emission cathode in an emitting device with a memory function, consisting of one carbon fibre with a diameter in the order of two micrometers with an emitting end sharpened by corona discharge to a diameter of approximately 0.2 micrometers.
  • US patent 4 272 699 discloses a field emission cathode in an electron impact ion source device consisting of a bundle of carbon fibres with diameters in the order of two to ten micrometers with emitting ends, which are cut off and not sharpened by any refinishing operation.
  • An object of the invention is to provide a method in the production of a field emission cathode, wherein the cathode is provided with a surface geometry that facilitates the achievement of local high electric field strengths for electron field emission. Another object is to provide a method in the production of a field emission cathode, wherein the cathode has a high mechanical and electrical durability. Another object is to provide a method in the production of a field emission cathode, wherein the cathode has a low work function. Another object is to provide a method in the production of a field emission cathode, wherein negative environmental effects of an illuminating device including the cathode are minimized.
  • Another object of the invention is to provide a field emission cathode for electron field emission with a surface geometry adapted for high intensity local electric fields. Further objects of a field emission cathode of the invention are to attain a field emission cathode with an emitting surface having irregular topography facilitating electron field emission, a high mechanical durability, a high electrical durability of cathode, preferably a low electron work function, as well as a long life in use, a high emission of energy per unit area of cathode, a very short switching time in the electron emission, and minimized negative environmental effects of an illuminating device including the cathode.
  • a further object of the invention is to improve an illuminating device, or other electron field emission devices, the operating principles of which are known per se, by employing at least one field emission cathode with features set fourth above.
  • a field emission cathode constituted by at least one body, preferably purified to contain essentially a first substance, and preferably normalized in its internal and surface structure, is treated in the following steps: preparing the body or bodies by mechanical, thermal, erosion, and/or irradiation treatment so as to provide it with at least one emitting surface having irregularities facilitating electron field emission; and modifying the emitting surface by applying to the body a variable electric field, in order to induce electron field emission from the emitting surface, and increasing the field intensity according to a predetermined scheme, in order to preserve the irregularities of the emitting surface, to such an extent that full operating voltage may then be applied momentarily (in a step) without any substantial deterioration of the field emitting properties of the cathode.
  • the method may comprise the step of adding to the emitting surface a second substance with a lower work function than that of the first substance, in order to lower the electrical field strength required to induce electron field emission from the emitting surface.
  • One way of arriving at a suitable initial material for the cathode would be to anneal the body or the initial material, in order to remove from it other substances than the first substance and/or to normalize its structure.
  • the term normalization may be understood as reduction of the occurrence of amorphous structures of the body of the initial material.
  • the body of the cathode may have any geometric configuration, including but not limited to a fibre, a layer, a cone shaped body, and a block.
  • the term irregularities should not be understood as excluding non-smooth geometries formed in a regular pattern on the emitting surface.
  • the preparation step may more specifically be performed through mechanical grinding, electrical spark discharge, or ion bombardment. It is preferred to perform the step of preparation by bombardment simultaneously with the step of modifying, see below. Also, in the case of preparing by ion bombardment, that step could be performed with ions of the second substance, which would combine the step of adding with the step of preparing (and modifying) .
  • the bodies being a bundle of fibres
  • the first substance of the cathodes is carbon or a substance with similar properties.
  • the use of carbon is advantageous, e.g., due to its ability to develop irregularities when hit by ions in production and in normal use.
  • the second substance (the implant), if used, may be cesium or other suitable material with a low work function. It would be possible to manufacture or develop a suited electro-conductive body from either a solid, liquid or gaseous phase of the selected substance(s) or through an external action on a body.
  • the irregularities remaining after the step of preparing the emitting ends by bombarding (irradiating) with, and possibly adding (doping) , ions are crucial to field emission properties of the cathode.
  • the irregularities may consist of peaks or tips (microtips) of carbon, which is possibly cesium-doped.
  • the radius of curvature of the tips are preferably within the orders of magnitude of 0.1-100 nanometers.
  • the step of modifying the emitting surface is a "burning-in" process, in which the irregularities are rounded off at the peaks by melting due to heat generation from electron field emission. According to the invention, this process is performed carefully, so that only the sharpest or highest points are rounded off, leaving irregularities that withstand momentary application of full operating voltage without melting.
  • the variable voltage in the step of modifying is applied either in predetermined steps, according to a pre- determined (continuous) curve, or with regulation in respect to a maximum voltage derivative with respect to time, so as to limit probability of local current density in tips (irregularities) of the ends exceeding a predetermined value (restricting or limiting points of melting) .
  • a predetermined value restrictive or limiting points of melting
  • Excessive melting will result in a disadvantageous smoothing of the surface. This smoothing will be more severe should the heat not be allowed to escape from the tips through raising the field emission current (field intensity) slowly or in a number of steps the first time.
  • One possible way of expressing a criterion for the modifying step could be limiting the probability of local current density in irregularities of the tips exceeding a predetermined value. Another would be increasing the variable electric field, in such a manner that a deterioration of said irregularities of said emitting surface is limited.
  • the first substance of the cathode could contain a crystal or a grain structure or both. Moreover, it is possible for the irregularities to occur in the form of micro-pores or cavities with high concentration, where the first substance has a (micro-) grain structure.
  • the cathode could be a flat plate structure, e.g., achieved through pyrography.
  • steps of preparing, adding (for example by bombarding) and modifying, respectively may be used independently or in a different order to arrive at a field emission cathode with an improved function. It is to be understood that these steps may also be performed in various combinations, sequentially, simultaneously, or repeatedly.
  • More than one of the cathodes may be combined on a substrate into a compound cathode suited for the geometry of a specific illuminating device.
  • the invention is directed not only toward use in lamps, fluorescent tubes, cathode-ray tubes, but to any other devices it where electron field emission is desired. It would even be possible to apply the invention using only one single tip (irregularity) .
  • Fig. 1 shows for clarity, after a step of cutting fibres into segments and annealing the fibres, part of a bundle made of a plurality of the fibres to constitute one field emission cathode of the invention
  • Fig. 2 shows the fibres of fig. 1 after the step of ion bombardment, in which a diverging of emitting ends of the fibre segments has occurred;
  • Fig. 3 shows schematically a possible "rough" profile of, generally, a surface to be prepared for emission in subsequent steps, and, specifically, an end surface of one fibre segment of fig. 1;
  • Fig. 4 shows schematically a possible "multi-pointed" profile of, generally, an emitting surface to be modified further for emission in a subsequent step, and, specifically, an end surface of one fibre segment of fig. 2;
  • Fig. 5 shows schematically a possible "rounded off" profile of, generally, an emitting surface prepared and modified for emission, and, specifically, an end surface of one fibre segment of fig. 2 after a step of modifying the ends of the fibre segments with a variable voltage
  • Fig. 6 shows field emission cathodes of the invention distributed in a matrix on a substrate in an illuminating device provided with a modulator grid electrode, an anode, and a fluorescent layer, operating inside an evacuated glass container.
  • the field emission cathode is made from a fibre material containing a first substance, the method comprising firstly the steps of combining a plurality of fibres of the fibre material; cutting, mechanically or by melting, bundles from the fibre material, each bundle consisting of a plurality of fibre segments of a predetermined length; and annealing the fibre segments in order to remove from it other substances than the first substance, and/or to normalize the structure of the first substance in the fibre segments.
  • the method secondly comprises the steps of irradiating the emitting ends of the fibre segments with ions, to increase and improve irregularities of the emitting ends, in order to facilitate electron field emission (Stronger local electrical fields are formed generally at irregularities or tips) ; and modifying the emitting ends by applying a variable voltage to the fibre segments and increasing according to a predetermined scheme the variable voltage, during electron field emission from the emitting ends, in order to preserve the irregularitie of the emitting ends, to such an extent that full operating voltage may then be applied momentarily (in a step) without an substantial deterioration of the field emitting properties of the cathode.
  • the steps of irradiating and modifying are performed simultaneously in an evacuated environment containin residual gas ions.
  • the ion bombardment may involve adding ions of a second substance with a lower work function than that of the first substance.
  • a field emission cathode of the invention consists of a bundle 1 of carbon fibres 3 with emitting ends 2.
  • a bundle 1 there may be in the order of a hundred fibres 3 or more.
  • the diameter of the fibres 3 are in the range of a few micrometers. For clarity, a small number only of the carbon fibre segments is shown in figs. 1 and 2.
  • the cut fibre bundles are annealed, preferably in open air at a temperature which is increased continuously for about 1.5 hours to approximately 500°C and then maintained for about 8-10 minutes.
  • This treatment improves the ability of the emitting surface to develop effectively emitting irregularities.
  • Fig. 1 shows a part only of the bundle 1 of fibres 3 with the emitting ends 2 after the annealing.
  • Fig. 3 shows a profile 5 of one fibre 4 after the annealing, the emitting end profile 5 having small irregularities.
  • the next step of preparing the emitting ends is performed together with the step of modifying ("burning-in") in a vacuum chamber.
  • the pressure in the chamber is approximately 10 " ⁇ Torr, which means that the chamber contains some residual gas.
  • an electric field strong enough is applied to the cathode, electron emission will occur from the emitting ends.
  • the application of the electric field also causes ions of the residual gas to accelerate toward the emitting surface and collide with it creating new irregularities.
  • the emission will reach levels in the sharpest irregularities (peaks) , causing them to melt locally. If the electric field strength is increased slowly, the melting will be restricted and a substantial portion of the irregularities be preserved, and so will the field emission properties of the emitting ends.
  • the electrical field is increased in five, possibly, equal steps from zero to full operating voltage, each step being a few minutes, e.g., ten minutes.
  • Fig. 2 shows a part only of the bundle 1 of fibres 3 with the emitting ends 2 after the irradiation, wherein still another advantageous effect is achieved.
  • the emitting ends 2 (the tips of the fibre segments) are slightly separated, which facilitates a wider distribution of emitted electrons.
  • Fig. 4 shows a profile 7 of one fibre 6 after the irradiation, the emitting end profile 7 having high and sharp irregularities 8.
  • Fig. 5 shows a profile 10 of one fibre 9 after the modifying, the emitting end profile 10 having high, but slightly rounded irregularities 11.
  • the step of irradiation (bombardment) of the emitting ends may be performed with ions of cesium or a similar low work function material.
  • the ions are then saturated into the surface of the emitting ends, thereby lowering the electron work function of the emitting ends.
  • these irradiation impacts also cause sharp irregularities in the emitting ends.
  • the step of modifying may be applied at different stages of the manufacturing of a field emission cathode according to the invention. For example, modifying may be performed when the fibres (or bodies) are being treated in the vacuum chamber and/or when they are mounted in an illuminating device or in any electron emitting device.
  • Fig. 6 shows a light source with field emission cathodes applied in the form of bundles 1, preferably in a matrix, arranged on a conductive substrate 17.
  • a modulator electrode 12 with an aperture centred around each bundle.
  • the substrate 17 and the modulator 12 rest on dielectric supports 18 inside an evacuated glass container with an upper boundary glass plate 15 and a lower boundary glass plate 16.
  • an anode 13 and a luminescent layer 14 Opposite the bundles 1 and the modulator, there is provided on the inside of the upper boundary 15 an anode 13 and a luminescent layer 14.
  • the anode 13, the modulator 12, and the substrate 17, have electrical terminals A, B, C, respectively, for application of voltages leading electrons from the bundles 1, via the modulator apertures, to the luminescent layer 14 in connection with the anode 13.
  • the luminescent layer 14 When electrons hit the luminescent layer 14, light is emitted escaping the transparent anode 13 and the glass container.

Landscapes

  • Cold Cathode And The Manufacture (AREA)
  • Discharge Lamp (AREA)
  • Battery Electrode And Active Subsutance (AREA)
EP96903328A 1995-02-15 1996-02-15 Cathode a emission de champ et procedes pour la realiser Expired - Lifetime EP0809854B1 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
SE9500554 1995-02-15
SE9500554A SE504603C2 (sv) 1995-02-15 1995-02-15 Metod vid tillverkning av en fältemissionskatod samt fältemissionskatod
US08/467,825 US5588893A (en) 1995-06-06 1995-06-06 Field emission cathode and methods in the production thereof
US467825 1995-06-06
PCT/SE1996/000209 WO1996025753A1 (fr) 1995-02-15 1996-02-15 Cathode a emission de champ et procedes pour la realiser

Publications (2)

Publication Number Publication Date
EP0809854A1 true EP0809854A1 (fr) 1997-12-03
EP0809854B1 EP0809854B1 (fr) 2000-11-08

Family

ID=26662227

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96903328A Expired - Lifetime EP0809854B1 (fr) 1995-02-15 1996-02-15 Cathode a emission de champ et procedes pour la realiser

Country Status (10)

Country Link
EP (1) EP0809854B1 (fr)
JP (1) JP3299544B2 (fr)
CN (1) CN1097836C (fr)
AT (1) ATE197515T1 (fr)
AU (1) AU689702B2 (fr)
CA (1) CA2212681C (fr)
DE (1) DE69610902T2 (fr)
ES (1) ES2152513T3 (fr)
MX (1) MX9706141A (fr)
WO (1) WO1996025753A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2803087A1 (fr) * 1999-12-27 2001-06-29 Sony Corp Cathode a emission par champ electrique, dispositif d'emission electronique et son procede de fabrication
US7432883B2 (en) 2003-01-28 2008-10-07 Canon Kabushiki Kaisha Driving method for electron-emitting device, driving method for electron source, manufacturing method for electron source, and image display apparatus

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE510413C2 (sv) * 1997-06-13 1999-05-25 Lightlab Ab En fältemissionskatod och en ljuskälla innefattande en fältemissionskatod
SE510412C2 (sv) * 1997-06-13 1999-05-25 Lightlab Ab En ljuskälla innefattande en fältemissionskatod och en fältemissionskatod för användning i en ljuskälla
US6054801A (en) * 1998-02-27 2000-04-25 Regents, University Of California Field emission cathode fabricated from porous carbon foam material
JP4131306B2 (ja) * 1998-12-10 2008-08-13 昭和電工株式会社 電子放出素材
WO2000055880A1 (fr) * 1999-03-17 2000-09-21 Matsushita Electric Industrial Co., Ltd. Dispositif d'emission d'electrons et dispositif d'affichage d'images utilisant un dispositif d'emission d'electrons
AU5720900A (en) * 1999-06-10 2001-01-02 Lightlab Ab Method of producing a field emission cathode, a field emission cathode and a light source
FR2803944B1 (fr) * 2000-01-14 2002-06-14 Thomson Tubes Electroniques Cathode generatrice d'electrons et son procede de fabrication
JP3636154B2 (ja) * 2002-03-27 2005-04-06 ソニー株式会社 冷陰極電界電子放出素子及びその製造方法、並びに、冷陰極電界電子放出表示装置及びその製造方法
JP2007265639A (ja) * 2006-03-27 2007-10-11 Osaka Univ 電子波干渉電子源とその製造方法およびそれを用いた素子
RU2598857C2 (ru) * 2014-08-07 2016-09-27 Публичное акционерное общество "Автоэмиссионные технологии" Малогабаритная автоэмиссионная электронная пушка

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2810736A1 (de) * 1978-03-13 1979-09-27 Max Planck Gesellschaft Feldemissionskathode sowie herstellungsverfahren und verwendung hierfuer
US4728851A (en) * 1982-01-08 1988-03-01 Ford Motor Company Field emitter device with gated memory

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9625753A1 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2803087A1 (fr) * 1999-12-27 2001-06-29 Sony Corp Cathode a emission par champ electrique, dispositif d'emission electronique et son procede de fabrication
US7432883B2 (en) 2003-01-28 2008-10-07 Canon Kabushiki Kaisha Driving method for electron-emitting device, driving method for electron source, manufacturing method for electron source, and image display apparatus

Also Published As

Publication number Publication date
AU689702B2 (en) 1998-04-02
CA2212681A1 (fr) 1996-08-22
CA2212681C (fr) 2001-12-11
AU4737296A (en) 1996-09-04
JP3299544B2 (ja) 2002-07-08
CN1097836C (zh) 2003-01-01
ES2152513T3 (es) 2001-02-01
WO1996025753A1 (fr) 1996-08-22
MX9706141A (es) 1998-08-30
DE69610902T2 (de) 2001-04-19
DE69610902D1 (de) 2000-12-14
EP0809854B1 (fr) 2000-11-08
CN1174629A (zh) 1998-02-25
JPH11500259A (ja) 1999-01-06
ATE197515T1 (de) 2000-11-11

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