EP0722538B1 - Pompe a micromembrane - Google Patents

Pompe a micromembrane Download PDF

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Publication number
EP0722538B1
EP0722538B1 EP94927548A EP94927548A EP0722538B1 EP 0722538 B1 EP0722538 B1 EP 0722538B1 EP 94927548 A EP94927548 A EP 94927548A EP 94927548 A EP94927548 A EP 94927548A EP 0722538 B1 EP0722538 B1 EP 0722538B1
Authority
EP
European Patent Office
Prior art keywords
valve
membrane
pump
chamber
valves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP94927548A
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German (de)
English (en)
Other versions
EP0722538A1 (fr
Inventor
Richard Rapp
Helmut Kalb
Walter Stark
Dieter Seidel
Hans Biedermann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BUERKERT GMBH & CO. KG.
Forschungszentrum Karlsruhe GmbH
Original Assignee
Buerkert & Co Kg GmbH
Forschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Buerkert & Co Kg GmbH, Forschungszentrum Karlsruhe GmbH filed Critical Buerkert & Co Kg GmbH
Publication of EP0722538A1 publication Critical patent/EP0722538A1/fr
Application granted granted Critical
Publication of EP0722538B1 publication Critical patent/EP0722538B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps

Definitions

  • the invention relates to a micromembrane pump according to the preamble of claim 1, as can be seen from the conference proceedings. 124 to 133 of the 3rd Symposium Microsystems Technology, FH Regensburg, February 17 to 18, 1993.
  • micropumps have been manufactured almost exclusively using silicon technology, with one or more structured wafers made of silicon and glass being connected to one another by anodic bonding.
  • the pump diaphragm therefore also consists of one of these materials.
  • a pump with a glass membrane is known from J. Uhlemann, T. Wetzig, W. Rotsch, "Assembly technology of structured surface elements using the example of a micropump", 1st symposium microsystem technology, FH Regensburg, (1991).
  • the membranes made of silicon are approx. 20 ⁇ m thick and those made of glass at least 40 ⁇ m thick, so that only small membrane deflections of at most 25 ⁇ m were achieved.
  • the binding to the crystal planes during anisotropic etching of the single-crystal silicon results in pump membranes with restricted geometries, e.g. B. a square membrane. These lead to an inhomogeneous stress distribution in the membrane deflection, which additionally limits the permissible deflections. Large actuator pressures are required for membrane deflection depending on the membrane material and the membrane thickness.
  • valves made of silicon The function of the valves made of silicon is based on the deflection of a bending tongue, which opens or closes an opening.
  • the bending tongue is made of silicon and is elastically deformed by the pressure difference that drops over it.
  • the valves In order to ensure sufficient flow rates, the valves have to be dimensioned appropriately large (2 - 8 mm diameter) due to the high modulus of elasticity of silicon.
  • All pumps made on the basis of silicon are operated with liquids as the pumping medium. The liquids must be largely particle-free so that valve functions such. B. tight closing, not be affected. Since silicon is a hydrophobic material, it is difficult to fill pumps with water for the first time. A functioning micropump has been known for pumping gases.
  • micropumps that do not have any moving parts. They are based on the electrohydrodynamic principle, as is known from A. Richter et al., Electrohydrodynamic Micropumps, VDI Reports 960, 1992, pp 235-249.
  • a disadvantage of the pump of the generic type is that one of the two valves has to be manufactured separately, separated and attached to the side of the diaphragm opposite the first valve when it is manufactured. This requires increased assembly and adjustment effort.
  • the object of the invention is to design a pump of the generic type so that both valves on the same side the membrane can be built up, and the manufacturing process for the pump body can be significantly simplified.
  • FIG. 1 shows the schematic cross section of a pump with two valves of different stiffness
  • FIG. 2 shows the schematic cross section of a pump with two identical valves.
  • FIG. 3 shows the schematic structure of a particularly advantageous valve and FIG. 4 shows an example of dimensions.
  • FIG. 1 shows the lower pump body 1, which is sealed at the top with the membrane 2. This sits tightly connected to it (e.g. by gluing) the upper pump body 3.
  • the lower pump body contains the two valve chambers 4, 5, the pump chamber 6 and the two channels 9, 10, which connect the two valve chambers to the pump chamber.
  • the membrane 2 contains the inlet valve 7 on the left and the outlet valve 8 on the right.
  • the membrane area above the pump chamber 6 serves as a pump drive.
  • the upper pump body 3 contains inlet and outlet channels 11, 12 for the medium to be conveyed and a chamber for the pump drive 13.
  • a feed line for the drive medium is provided which drives the pump due to its pressure changes .
  • the two valves 7, 8 are shown enlarged in the lower part of the figure.
  • the valves are designed so that the stiffness of the part of the valve 8 structured on the membrane 2 is greater and the stiffness of the part of the valve 7 structured on the membrane 2 is smaller than that of the membrane. Overpressure in the pump chamber 6 therefore opens the valve 8 and closes the valve 7, and negative pressure in the pump chamber 6 opens the valve 7 and closes the valve 8.
  • the dimensioning of the valves is explained in more detail below.
  • valves 7, 8 shown enlarged are constructed identically.
  • the pump shown differs from the pump of FIG. 1 only in the area of the outlet valve 8.
  • the deflection channel 14 connects to the channel 10 before the valve 8, which breaks through the membrane 2 and which serves the media flow to the other side of the Steer valve 8.
  • the valve chamber 5 is connected to the outlet channel 12 via the deflection channel 15, which also breaks through the membrane.
  • the outlet duct 12 can also be led out downwards.
  • the arrows on both figures indicate the direction of the medium being pumped.
  • Fig. 3 shows a valve which corresponds to the features of the valve of Fig. 3 b of DE 41 39 668 Al.
  • the membrane 2 corresponds to the valve seat 3 and the valve 7, 8 to the valve body 6.
  • the valve described here is characterized by an advantageous shape of the openings in the membrane 2 and valve 7, 8.
  • the openings in the membrane 2, shown above, are three slots which represent a three-pointed star in the membrane 2.
  • the course of the slits is elliptically curved towards the center of the star, the straight lines through the large semiaxes of the elliptical slit lines forming an equilateral triangle.
  • the cuts at their ends each extend beyond the apex and the adjacent ends of two cuts each run apart in a funnel shape with a bent edge.
  • the cavity 16 between the membrane and the valve which is created by etching away a thin sacrificial layer during valve manufacture.
  • the connecting line runs along the outer edge of the three slots to their ends and from there in an arched outward curve to the adjacent end of the adjacent slot.
  • the cavity 16 has a three-fold axis of rotation perpendicular to the plane of the drawing and three two-fold axes of rotation in the plane of the drawing.
  • a valve 7, 8 is shown below. It has three rows of converging holes that run over the three double axes of rotation of the cavity 16. Care should be taken to ensure that the holes in the valve 7, 8 are far enough away from the slots in the membrane when the diaphragm and valve come into contact when the valve is closed. The edges of the holes are at least 40 ⁇ m away from the slots. This is the only way to ensure a sufficient sealing effect.
  • a star with more than three axes can also be selected.
  • Fig. 4 shows an example of dimensioning, in which the valve, shown in plan view, consists of polyimide and the membrane of titanium. Only the three middle valve holes are shown. The remaining holes are not shown, since they can also be dispensed with in this metal combination.
  • a valve with the material combination of polyimide and titanium can be produced by the method described in DE 41 39 668 A1.
  • the polyimide membrane is replaced by a thicker, galvanized layer.
  • Nickel is used as the electroplating material, since it has by far the largest modulus of elasticity at 200 GPa of the available electroplating materials.
  • nickel has a greater flexural rigidity due to a biaxial module E / (1- ⁇ ) that is 1.5 times larger, with the same thickness and geometry. If you also choose a significantly larger thickness for nickel than the 2.7 ⁇ m of titanium, then when a differential pressure is applied, the titanium membrane is stretched more than the nickel layer.
  • a sacrificial layer is applied to a structured titanium membrane and also structured.
  • 16 ⁇ m photoresist are spun on in two work steps and structured optically.
  • Then, using KOH, the photoresist is developed in the machine developer.
  • the structured photoresist is then galvanically filled.
  • the photoresist can then be removed with acetone and the sacrificial layer can be removed.
  • a frame is then applied, the titanium membrane is cut around it and the valve is detached from the silicon substrate. Finally, the carbon layer can be removed in an oxygen plasma.
  • Option A In the case of a geometrically identical valve design, the inlet and outlet valves differ in one of the membrane materials.
  • Exhaust valve nickel and titanium membrane.
  • Variant B Same membrane materials with different stiffness (different designs) of the valve membranes.
  • Variant C Different membrane materials and different stiffness (valve design) of inlet and outlet valve.
  • the nickel membrane was designed to be as rigid as possible. That is, a greater thickness of the membrane (10 ⁇ m) was selected compared to titanium. In addition, the membrane contains only small holes, so that in addition to the already good material rigidity (given by the biaxial module), a high level of dimensional rigidity is obtained.
  • the titanium membrane which has a high material stiffness per se (which, however, is smaller than that of nickel), must be structured in such a way that the stiffness of the membrane becomes very low. This is achieved by creating a tripole-like structure in the titanium membrane.
  • the arms of the tripole are narrow and therefore flexible.
  • care was taken to ensure that notch stresses are kept low. This must be taken into account, since otherwise high stresses can occur in the thin titanium membrane, which can cause the formation of cracks and their progress along the structured slots that define and define the tripole structure. Outside the structured tripoles, titanium and nickel are firmly connected to one another, so that a "lifting movement" remains limited to the area of the tripoles.
  • Possibility 2 Identical inlet and outlet valves, with the delivery medium being deflected through an additional opening in the membrane at a connection.
  • the latter variant has the advantage that an extremely elastic polyimide membrane is thus available as the pump membrane.
  • the pump body 1, 3 can be plastic parts made of a single material, for. B. by plastic impression.
  • the molds for these plastic parts can be manufactured using precision engineering processes or the LIGA process.
  • One or both of the pump bodies 1, 2 can be made of metal.
  • the membrane instead of building up the walls of the pump body 1 on the membrane 2 and then closing the pump body by mounting an end plate, the membrane (with the valves) can be mounted on the finished pump body, e.g. B. by gluing or welding. This has the advantage over the generic pump that no further structures have to be built on the membrane.
  • the pump body 1, 3 additionally contain the fluidic connections to the inlet and outlet valve 4, 5, the deflection channels 14, 15 and a further chamber with a connection above the pump chamber 6 for a z.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

L'invention concerne une pompe à micromembrane qui comprend deux chambres de soupape, une chambre de pompage entre les chambres de soupape, chaque chambre de soupape étant reliée à la chambre de pompage par un canal, un mécanisme d'entraînement et une membrane qui obture les trois chambres. La membrane porte une soupape d'admission dans la zone d'une chambre de soupape et une soupape de sortie dans la zone de l'autre chambre de soupape. L'invention vise à mettre au point une pompe où les deux soupapes puissent être placées du même côté de la membrane et dont la fabrication du corps de pompe soit sensiblement simplifiée. A cette fin, les soupapes sont intégrées dans la membrane et les parties de soupape structurées sur la membrane se trouvent du même côté de la membrane. Un corps de pompe qui contient la chambre de pompage et les chambres de soupape est monobloc.

Claims (9)

  1. Pompe à micromembrane composée de deux chambres de soupape avec entre elles une chambre de pompe, chaque chambre de soupape étant reliée à la chambre de pompe par un canal,
    • un entraînement de pompe et une membrane fermant les trois chambres,
    • la membrane ayant une soupape d'admission dans la plage d'une chambre de soupape et une soupape d'échappement dans la plage de l'autre chambre de soupape,
    • la soupape d'admission étant structurée sur la membrane,
    caractérisée en ce que
    a) les parties des soupapes (7, 8) structurées sur la membrane (2) sont situées du même côté de la membrane et
    b) toutes les chambres et conduites nécessaires au fonctionnement de la pompe sont réalisées par une structure dans un corps de pompe inférieur (1) et un corps de pompe supérieur (3), ces deux corps étant reliés tous deux de manière étanche à la membrane (2).
  2. Pompe à micromembrane selon la revendication 1,
    caractérisée en ce que
    les deux soupapes (7, 8) sont de même construction et un canal de renvoi (14) est associé à l'une des chambres de soupape qui conduit le fluide sur l'autre côté de la membrane.
  3. Pompe à micromembrane selon la revendication 1,
    caractérisée en ce que
    la rigidité de la partie d'une soupape réalisée par structure sur la membrane (2) est supérieure à celle de la membrane et la rigidité de la partie de l'autre soupape réalisée par structure sur la membrane (2) est plus petite que celle de la membrane.
  4. Pompe à microstructure selon l'une des revendications 1 à 3,
    caractérisée en ce que
    les soupapes (7, 8) ont au moins trois rangées de trous qui se rejoignent et la membrane (2) comporte au moins trois fentes à courbure concave au niveau des soupapes (7, 8).
  5. Pompe à micromembrane selon l'une des revendications 1 à 4,
    caractérisée en ce qu'
    un corps de pompe (1) est en matière plastique et comporte la chambre de pompe (6) et les chambres de soupape (4, 5).
  6. Pompe à micromembrane selon l'une des revendications 1 à 4,
    caractérisée en ce qu'
    un corps de pompe (1) est en métal et comporte la chambre de pompe (6) et les chambres de soupape (4, 5).
  7. Pompe à micromembrane selon l'une des revendications 1 à 6,
    caractérisée en ce que
    la membrane (2) est en polyimide.
  8. Pompe à micromembrane selon l'une des revendications 1 à 6,
    caractérisée en ce que
    la membrane (2) est en métal.
  9. Pompe à micromembrane selon l'une des revendications 1 à 8,
    caractérisée
    par un corps de pompe (1) réalisé en une seule pièce et comportant la chambre de pompe (6) et les chambres de soupape (4, 5).
EP94927548A 1993-09-25 1994-09-02 Pompe a micromembrane Expired - Lifetime EP0722538B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4332720 1993-09-25
DE4332720A DE4332720C2 (de) 1993-09-25 1993-09-25 Mikromembranpumpe
PCT/EP1994/002927 WO1995008711A1 (fr) 1993-09-25 1994-09-02 Pompe a micromembrane

Publications (2)

Publication Number Publication Date
EP0722538A1 EP0722538A1 (fr) 1996-07-24
EP0722538B1 true EP0722538B1 (fr) 1997-10-22

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EP94927548A Expired - Lifetime EP0722538B1 (fr) 1993-09-25 1994-09-02 Pompe a micromembrane

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US (1) US5718567A (fr)
EP (1) EP0722538B1 (fr)
JP (1) JP2977904B2 (fr)
DE (1) DE4332720C2 (fr)
DK (1) DK0722538T3 (fr)
WO (1) WO1995008711A1 (fr)

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DE4139668A1 (de) * 1991-12-02 1993-06-03 Kernforschungsz Karlsruhe Mikroventil und verfahren zu dessen herstellung
US5344292A (en) * 1992-08-20 1994-09-06 Ryder International Corporation Fluid pumping system and apparatus

Also Published As

Publication number Publication date
DE4332720C2 (de) 1997-02-13
US5718567A (en) 1998-02-17
JPH09500945A (ja) 1997-01-28
DE4332720A1 (de) 1995-03-30
DK0722538T3 (da) 1998-05-25
EP0722538A1 (fr) 1996-07-24
JP2977904B2 (ja) 1999-11-15
WO1995008711A1 (fr) 1995-03-30

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