EP0310605A1 - Pompe de fluide a actionnement piezoelectrique - Google Patents

Pompe de fluide a actionnement piezoelectrique

Info

Publication number
EP0310605A1
EP0310605A1 EP87903244A EP87903244A EP0310605A1 EP 0310605 A1 EP0310605 A1 EP 0310605A1 EP 87903244 A EP87903244 A EP 87903244A EP 87903244 A EP87903244 A EP 87903244A EP 0310605 A1 EP0310605 A1 EP 0310605A1
Authority
EP
European Patent Office
Prior art keywords
membrane
layer
piezoelectrically
piezoelectrically excitable
excitable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP87903244A
Other languages
German (de)
English (en)
Inventor
Joachim Heinzl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0310605A1 publication Critical patent/EP0310605A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14338—Multiple pressure elements per ink chamber
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2400/00—Loudspeakers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

La pompe de fluide décrite servant à produire des pressions comprend une membrane excitable électriquement et constituée d'une première couche à excitation piézoélectrique et d'une couche protectrice solidement liée à cette dernière. La membrane possède une région périphérique à excitation piézoélectrique et une région centrale à excitation piézoélectrique, ces régions étant excitées de telle manière que, pour provoquer une orientation de la membrane, celle-ci est raccourcie par contraction transversale dans sa région périphérique et agrandie dans sa région centrale.
EP87903244A 1986-05-30 1987-05-19 Pompe de fluide a actionnement piezoelectrique Withdrawn EP0310605A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19863618106 DE3618106A1 (de) 1986-05-30 1986-05-30 Piezoelektrisch betriebene fluidpumpe
DE3618106 1986-05-30

Publications (1)

Publication Number Publication Date
EP0310605A1 true EP0310605A1 (fr) 1989-04-12

Family

ID=6301881

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87903244A Withdrawn EP0310605A1 (fr) 1986-05-30 1987-05-19 Pompe de fluide a actionnement piezoelectrique

Country Status (4)

Country Link
EP (1) EP0310605A1 (fr)
JP (1) JPH01500892A (fr)
DE (1) DE3618106A1 (fr)
WO (1) WO1987007218A1 (fr)

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DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
CH679555A5 (fr) * 1989-04-11 1992-03-13 Westonbridge Int Ltd
US5205819A (en) * 1989-05-11 1993-04-27 Bespak Plc Pump apparatus for biomedical use
GB9004602D0 (en) * 1990-03-01 1990-04-25 Jones Clifton Products Ltd Improvements in or relating to electrically controlled fluid valves
US5262696A (en) * 1991-07-05 1993-11-16 Rockwell International Corporation Biaxial transducer
JP3035854B2 (ja) * 1995-09-15 2000-04-24 ハーン−シッカート−ゲゼルシャフト フア アンゲワンテ フォルシュンク アインゲトラーゲナー フェライン 逆止弁を有しない流体ポンプ
US6720710B1 (en) * 1996-01-05 2004-04-13 Berkeley Microinstruments, Inc. Micropump
US7034432B1 (en) 1997-02-07 2006-04-25 Sri International Electroactive polymer generators
US6812624B1 (en) 1999-07-20 2004-11-02 Sri International Electroactive polymers
US7320457B2 (en) 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
DE19834536C2 (de) * 1998-07-31 2001-06-28 Daimler Chrysler Ag Vorrichtung, Mikrosystem und Verfahren zum Transportieren und/oder Entmischen von Flüssigkeiten
DE19904106C2 (de) * 1999-02-02 2001-06-28 Oskar Bschorr Schallgenerator mit Pumpantrieb
US7537197B2 (en) 1999-07-20 2009-05-26 Sri International Electroactive polymer devices for controlling fluid flow
US7064472B2 (en) * 1999-07-20 2006-06-20 Sri International Electroactive polymer devices for moving fluid
EP1317626B1 (fr) 2000-09-14 2006-08-02 Jan W. Beenker Procede et machine pour le transport de substances
CA2431677A1 (fr) 2000-09-18 2002-03-21 Par Technologies, Llc Organe de commande piezo-electrique et pompe utilisant ce dernier
US7198250B2 (en) 2000-09-18 2007-04-03 Par Technologies, Llc Piezoelectric actuator and pump using same
ES2302911T3 (es) 2002-01-10 2008-08-01 Interacoustics A/S Bomba piezoelectrica y dispositivo con dicha bomba.
WO2003079409A2 (fr) * 2002-03-15 2003-09-25 United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Dispositif electro-actif mettant en oeuvre un piezo-diaphragme a champ electrique radial destine a la commande de mouvement de fluide
KR100453815B1 (ko) * 2002-05-20 2004-10-20 한국전자통신연구원 압전형 마이크로 펌프
DE10238600A1 (de) * 2002-08-22 2004-03-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Peristaltische Mikropumpe
WO2005001287A1 (fr) * 2003-06-30 2005-01-06 Koninklijke Philips Electronics N.V. Dispositif pour produire un flux de milieu
US7889877B2 (en) 2003-06-30 2011-02-15 Nxp B.V. Device for generating a medium stream
US7290993B2 (en) 2004-04-02 2007-11-06 Adaptivenergy Llc Piezoelectric devices and methods and circuits for driving same
US7287965B2 (en) 2004-04-02 2007-10-30 Adaptiv Energy Llc Piezoelectric devices and methods and circuits for driving same
US7312554B2 (en) 2004-04-02 2007-12-25 Adaptivenergy, Llc Piezoelectric devices and methods and circuits for driving same
US7258533B2 (en) 2004-12-30 2007-08-21 Adaptivenergy, Llc Method and apparatus for scavenging energy during pump operation
US20060232166A1 (en) 2005-04-13 2006-10-19 Par Technologies Llc Stacked piezoelectric diaphragm members
US7345407B2 (en) 2005-11-18 2008-03-18 Adaptivenergy, Llc. Human powered piezoelectric power generating device
DE102005055697B4 (de) * 2005-11-23 2011-12-29 Allmendinger Elektromechanik Gmbh Vorrichtung zur dosierten Abgabe eines Fluids und Gerät mit einer solchen Vorrichtung
EP1862873A1 (fr) 2006-06-02 2007-12-05 Montres Rado S.A. Dispositif d'affichage pour un instrument portable, tel qu'une montre
KR101070944B1 (ko) 2006-07-11 2011-10-06 가부시키가이샤 무라타 세이사쿠쇼 압전 펌프
EP2123913A1 (fr) 2007-03-12 2009-11-25 Murata Manufacturing Co. Ltd. Dispositif de transport de liquide
WO2009006318A1 (fr) 2007-06-29 2009-01-08 Artificial Muscle, Inc. Transducteurs polymères électroactifs pour des applications de rétroaction sensorielle
EP2239793A1 (fr) 2009-04-11 2010-10-13 Bayer MaterialScience AG Montage de film polymère électrique commutable et son utilisation
DE102009024757B4 (de) * 2009-06-12 2012-01-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtungen zur Steuerung einer chemischen Reaktion mittels Druck unter Verwendung von hochdruck-optimierten Biokomponenten
FR2950154B1 (fr) * 2009-09-15 2011-12-23 Commissariat Energie Atomique Dispositif optique a membrane deformable a actionnement piezoelectrique en forme de couronne continue
KR20140008416A (ko) 2011-03-01 2014-01-21 바이엘 인텔렉쳐 프로퍼티 게엠베하 변형가능한 중합체 장치 및 필름을 제조하기 위한 자동화 제조 방법
CN103703404A (zh) 2011-03-22 2014-04-02 拜耳知识产权有限责任公司 电活化聚合物致动器双凸透镜系统
EP2828901B1 (fr) 2012-03-21 2017-01-04 Parker Hannifin Corporation Procédés de fabrication de rouleau à rouleau pour la production de dispositifs à polymère électroactif autoréparant
KR20150031285A (ko) 2012-06-18 2015-03-23 바이엘 인텔렉쳐 프로퍼티 게엠베하 연신 공정을 위한 연신 프레임
WO2014066576A1 (fr) 2012-10-24 2014-05-01 Bayer Intellectual Property Gmbh Diode polymère
DE102013100559A1 (de) 2013-01-21 2014-07-24 Allmendinger Elektromechanik KG Vorrichtung zur dosierten Abgabe eines Fluids, sowie Gerät und Verfahren mit einer solchen Vorrichtung
CN105201796A (zh) * 2015-10-29 2015-12-30 宁波大学 一种压电蠕动微泵

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1065880B (fr) * 1959-09-24
DE1165667B (de) * 1962-06-28 1964-03-19 Siemens Ag Piezoelektrischer Biegeschwinger
DE1287135B (de) * 1967-06-16 1969-01-16 Telefunken Patent Elektroakustischer Wandler mit einer Schicht aus Halbleitermaterial bedeckten Membran
EP0095911B1 (fr) * 1982-05-28 1989-01-18 Xerox Corporation Disposition d'éjection de gouttelettes par onde de pression et ensemble
DE3320443C2 (de) * 1983-06-06 1994-08-18 Siemens Ag Flüssigkeitspumpe
DE3320441A1 (de) * 1983-06-06 1984-12-06 Siemens AG, 1000 Berlin und 8000 München Mit fluessigkeitstroepfchen arbeitendes schreibgeraet mit an beiden enden starr mit einer duesenplatte verbundenen stabfoermigen piezoelektrischen wandlern
DE3342844A1 (de) * 1983-11-26 1985-06-05 Philips Patentverwaltung Gmbh, 2000 Hamburg Mikroplanarer tintenstrahldruckkopf

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO8707218A1 *

Also Published As

Publication number Publication date
DE3618106A1 (de) 1987-12-03
WO1987007218A1 (fr) 1987-12-03
JPH01500892A (ja) 1989-03-30

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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17P Request for examination filed

Effective date: 19881122

AK Designated contracting states

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Designated state(s): CH DE FR GB IT LI NL SE

RAP3 Party data changed (applicant data changed or rights of an application transferred)

Owner name: SIEMENS AKTIENGESELLSCHAFT

17Q First examination report despatched

Effective date: 19891128

STAA Information on the status of an ep patent application or granted ep patent

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18W Application withdrawn

Withdrawal date: 19900412

R18W Application withdrawn (corrected)

Effective date: 19900412

RIN1 Information on inventor provided before grant (corrected)

Inventor name: HEINZL, JOACHIM