JPH01500892A - 圧電動作形流体ポンプ - Google Patents

圧電動作形流体ポンプ

Info

Publication number
JPH01500892A
JPH01500892A JP62503037A JP50303787A JPH01500892A JP H01500892 A JPH01500892 A JP H01500892A JP 62503037 A JP62503037 A JP 62503037A JP 50303787 A JP50303787 A JP 50303787A JP H01500892 A JPH01500892 A JP H01500892A
Authority
JP
Japan
Prior art keywords
layer
membrane
excited
range
piezoelectric effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62503037A
Other languages
English (en)
Japanese (ja)
Inventor
ハインツル，ヨアヒム
Original Assignee
ジーメンス　アクチエンゲゼルシヤフト
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ジーメンス　アクチエンゲゼルシヤフト filed Critical ジーメンス　アクチエンゲゼルシヤフト
Publication of JPH01500892A publication Critical patent/JPH01500892A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14338—Multiple pressure elements per ink chamber
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2400/00—Loudspeakers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Reciprocating Pumps (AREA)
JP62503037A 1986-05-30 1987-05-19 圧電動作形流体ポンプ Pending JPH01500892A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19863618106 DE3618106A1 (de) 1986-05-30 1986-05-30 Piezoelektrisch betriebene fluidpumpe
DE3618106.4 1986-05-30

Publications (1)

Publication Number Publication Date
JPH01500892A true JPH01500892A (ja) 1989-03-30

Family

ID=6301881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62503037A Pending JPH01500892A (ja) 1986-05-30 1987-05-19 圧電動作形流体ポンプ

Country Status (4)

Country Link
EP (1) EP0310605A1 (fr)
JP (1) JPH01500892A (fr)
DE (1) DE3618106A1 (fr)
WO (1) WO1987007218A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8308454B2 (en) 2007-03-12 2012-11-13 Murata Manufacturing Co., Ltd. Fluid conveyance device
CN105201796A (zh) * 2015-10-29 2015-12-30 宁波大学 一种压电蠕动微泵

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
CH679555A5 (fr) * 1989-04-11 1992-03-13 Westonbridge Int Ltd
US5205819A (en) * 1989-05-11 1993-04-27 Bespak Plc Pump apparatus for biomedical use
GB9004602D0 (en) * 1990-03-01 1990-04-25 Jones Clifton Products Ltd Improvements in or relating to electrically controlled fluid valves
US5262696A (en) * 1991-07-05 1993-11-16 Rockwell International Corporation Biaxial transducer
WO1997010435A2 (fr) * 1995-09-15 1997-03-20 Institut Für Mikro- Und Informationstechnik Hahn-Schickard-Gesellschaft Pompe a fluide depourvue de soupape anti-retour
US6720710B1 (en) * 1996-01-05 2004-04-13 Berkeley Microinstruments, Inc. Micropump
US7320457B2 (en) 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
US6812624B1 (en) 1999-07-20 2004-11-02 Sri International Electroactive polymers
DE19834536C2 (de) * 1998-07-31 2001-06-28 Daimler Chrysler Ag Vorrichtung, Mikrosystem und Verfahren zum Transportieren und/oder Entmischen von Flüssigkeiten
DE19904106C2 (de) * 1999-02-02 2001-06-28 Oskar Bschorr Schallgenerator mit Pumpantrieb
AU6230800A (en) 1999-07-20 2001-02-05 Sri International Improved electroactive polymers
US7537197B2 (en) 1999-07-20 2009-05-26 Sri International Electroactive polymer devices for controlling fluid flow
AU2002210359A1 (en) 2000-09-14 2002-03-26 Beenker, Jan W Method and device for conveying media
US7198250B2 (en) 2000-09-18 2007-04-03 Par Technologies, Llc Piezoelectric actuator and pump using same
US7191503B2 (en) 2000-09-18 2007-03-20 Par Technologies, Llc Method of manufacturing a piezoelectric actuator
DE60319801T2 (de) 2002-01-10 2009-04-16 Interacoustics A/S Piezoelektrische pumpe und gerät mit einer solchen pumpe
WO2003079409A2 (fr) * 2002-03-15 2003-09-25 United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Dispositif electro-actif mettant en oeuvre un piezo-diaphragme a champ electrique radial destine a la commande de mouvement de fluide
AU2003225913A1 (en) 2002-03-18 2003-10-08 Roy David Kornbluh Electroactive polymer devices for moving fluid
KR100453815B1 (ko) * 2002-05-20 2004-10-20 한국전자통신연구원 압전형 마이크로 펌프
DE10238600A1 (de) * 2002-08-22 2004-03-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Peristaltische Mikropumpe
US7889877B2 (en) 2003-06-30 2011-02-15 Nxp B.V. Device for generating a medium stream
ATE422614T1 (de) * 2003-06-30 2009-02-15 Nxp Bv Vorrichtung zur erzeugung lauten mit hilfe einer erzeugten medienströmung
US7287965B2 (en) 2004-04-02 2007-10-30 Adaptiv Energy Llc Piezoelectric devices and methods and circuits for driving same
US7290993B2 (en) 2004-04-02 2007-11-06 Adaptivenergy Llc Piezoelectric devices and methods and circuits for driving same
US7312554B2 (en) 2004-04-02 2007-12-25 Adaptivenergy, Llc Piezoelectric devices and methods and circuits for driving same
US7258533B2 (en) 2004-12-30 2007-08-21 Adaptivenergy, Llc Method and apparatus for scavenging energy during pump operation
US20060232166A1 (en) 2005-04-13 2006-10-19 Par Technologies Llc Stacked piezoelectric diaphragm members
WO2007061610A1 (fr) 2005-11-18 2007-05-31 Par Technologies, Llc Dispositif de generation d'energie piezoelectrique alimente par un etre humain
DE102005055697B4 (de) * 2005-11-23 2011-12-29 Allmendinger Elektromechanik Gmbh Vorrichtung zur dosierten Abgabe eines Fluids und Gerät mit einer solchen Vorrichtung
EP1862873A1 (fr) 2006-06-02 2007-12-05 Montres Rado S.A. Dispositif d'affichage pour un instrument portable, tel qu'une montre
WO2008007634A1 (fr) 2006-07-11 2008-01-17 Murata Manufacturing Co., Ltd. Pompe piézoélectrique
JP5602626B2 (ja) 2007-06-29 2014-10-08 アーティフィシャル マッスル，インク． 感覚性フィードバック用途のための電気活性ポリマートランスデューサー
EP2239793A1 (fr) 2009-04-11 2010-10-13 Bayer MaterialScience AG Montage de film polymère électrique commutable et son utilisation
DE102009024757B4 (de) * 2009-06-12 2012-01-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtungen zur Steuerung einer chemischen Reaktion mittels Druck unter Verwendung von hochdruck-optimierten Biokomponenten
FR2950154B1 (fr) * 2009-09-15 2011-12-23 Commissariat Energie Atomique Dispositif optique a membrane deformable a actionnement piezoelectrique en forme de couronne continue
WO2012118916A2 (fr) 2011-03-01 2012-09-07 Bayer Materialscience Ag Procédés de fabrication automatisés pour la production de dispositifs et de films polymères déformables
KR20140019801A (ko) 2011-03-22 2014-02-17 바이엘 인텔렉쳐 프로퍼티 게엠베하 전기활성 중합체 작동기 렌티큘라 시스템
EP2828901B1 (fr) 2012-03-21 2017-01-04 Parker Hannifin Corporation Procédés de fabrication de rouleau à rouleau pour la production de dispositifs à polymère électroactif autoréparant
KR20150031285A (ko) 2012-06-18 2015-03-23 바이엘 인텔렉쳐 프로퍼티 게엠베하 연신 공정을 위한 연신 프레임
WO2014066576A1 (fr) 2012-10-24 2014-05-01 Bayer Intellectual Property Gmbh Diode polymère
DE102013100559A1 (de) 2013-01-21 2014-07-24 Allmendinger Elektromechanik KG Vorrichtung zur dosierten Abgabe eines Fluids, sowie Gerät und Verfahren mit einer solchen Vorrichtung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1065880B (fr) * 1959-09-24
DE1165667B (de) * 1962-06-28 1964-03-19 Siemens Ag Piezoelektrischer Biegeschwinger
DE1287135B (de) * 1967-06-16 1969-01-16 Telefunken Patent Elektroakustischer Wandler mit einer Schicht aus Halbleitermaterial bedeckten Membran
DE3378966D1 (en) * 1982-05-28 1989-02-23 Xerox Corp Pressure pulse droplet ejector and array
DE3320443C2 (de) * 1983-06-06 1994-08-18 Siemens Ag Flüssigkeitspumpe
DE3320441A1 (de) * 1983-06-06 1984-12-06 Siemens AG, 1000 Berlin und 8000 München Mit fluessigkeitstroepfchen arbeitendes schreibgeraet mit an beiden enden starr mit einer duesenplatte verbundenen stabfoermigen piezoelektrischen wandlern
DE3342844A1 (de) * 1983-11-26 1985-06-05 Philips Patentverwaltung Gmbh, 2000 Hamburg Mikroplanarer tintenstrahldruckkopf

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8308454B2 (en) 2007-03-12 2012-11-13 Murata Manufacturing Co., Ltd. Fluid conveyance device
CN105201796A (zh) * 2015-10-29 2015-12-30 宁波大学 一种压电蠕动微泵

Also Published As

Publication number Publication date
WO1987007218A1 (fr) 1987-12-03
DE3618106A1 (de) 1987-12-03
EP0310605A1 (fr) 1989-04-12

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