EP0310605A1 - Piezoelectrically operated fluid pump - Google Patents
Piezoelectrically operated fluid pumpInfo
- Publication number
- EP0310605A1 EP0310605A1 EP87903244A EP87903244A EP0310605A1 EP 0310605 A1 EP0310605 A1 EP 0310605A1 EP 87903244 A EP87903244 A EP 87903244A EP 87903244 A EP87903244 A EP 87903244A EP 0310605 A1 EP0310605 A1 EP 0310605A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- membrane
- layer
- piezoelectrically
- piezoelectrically excitable
- excitable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000012530 fluid Substances 0.000 title abstract description 7
- 239000012528 membrane Substances 0.000 claims abstract description 51
- 230000002093 peripheral effect Effects 0.000 claims abstract description 11
- 230000008602 contraction Effects 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims description 10
- 230000003068 static effect Effects 0.000 claims description 8
- 230000005684 electric field Effects 0.000 claims description 4
- 230000005284 excitation Effects 0.000 abstract 3
- 239000010410 layer Substances 0.000 abstract 1
- 239000011241 protective layer Substances 0.000 abstract 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 239000000919 ceramic Substances 0.000 description 10
- 208000000260 Warts Diseases 0.000 description 7
- 201000010153 skin papilloma Diseases 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 206010054786 Skin burning sensation Diseases 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14338—Multiple pressure elements per ink chamber
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2400/00—Loudspeakers
Abstract
La pompe de fluide décrite servant à produire des pressions comprend une membrane excitable électriquement et constituée d'une première couche à excitation piézoélectrique et d'une couche protectrice solidement liée à cette dernière. La membrane possède une région périphérique à excitation piézoélectrique et une région centrale à excitation piézoélectrique, ces régions étant excitées de telle manière que, pour provoquer une orientation de la membrane, celle-ci est raccourcie par contraction transversale dans sa région périphérique et agrandie dans sa région centrale.The fluid pump described for producing pressures comprises an electrically excitable membrane and consisting of a first layer with piezoelectric excitation and a protective layer firmly bonded to the latter. The membrane has a peripheral region with piezoelectric excitation and a central region with piezoelectric excitation, these regions being excited in such a way that, to cause an orientation of the membrane, the latter is shortened by transverse contraction in its peripheral region and enlarged in its central region.
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19863618106 DE3618106A1 (en) | 1986-05-30 | 1986-05-30 | PIEZOELECTRICALLY OPERATED FLUID PUMP |
DE3618106 | 1986-05-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
EP0310605A1 true EP0310605A1 (en) | 1989-04-12 |
Family
ID=6301881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP87903244A Withdrawn EP0310605A1 (en) | 1986-05-30 | 1987-05-19 | Piezoelectrically operated fluid pump |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0310605A1 (en) |
JP (1) | JPH01500892A (en) |
DE (1) | DE3618106A1 (en) |
WO (1) | WO1987007218A1 (en) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3814150A1 (en) * | 1988-04-27 | 1989-11-09 | Draegerwerk Ag | VALVE ARRANGEMENT MADE FROM MICROSTRUCTURED COMPONENTS |
CH679555A5 (en) * | 1989-04-11 | 1992-03-13 | Westonbridge Int Ltd | |
US5205819A (en) * | 1989-05-11 | 1993-04-27 | Bespak Plc | Pump apparatus for biomedical use |
GB9004602D0 (en) * | 1990-03-01 | 1990-04-25 | Jones Clifton Products Ltd | Improvements in or relating to electrically controlled fluid valves |
US5262696A (en) * | 1991-07-05 | 1993-11-16 | Rockwell International Corporation | Biaxial transducer |
WO1997010435A2 (en) * | 1995-09-15 | 1997-03-20 | Institut Für Mikro- Und Informationstechnik Hahn-Schickard-Gesellschaft | Fluid pump without non-return valves |
US6720710B1 (en) * | 1996-01-05 | 2004-04-13 | Berkeley Microinstruments, Inc. | Micropump |
US6812624B1 (en) | 1999-07-20 | 2004-11-02 | Sri International | Electroactive polymers |
US7320457B2 (en) | 1997-02-07 | 2008-01-22 | Sri International | Electroactive polymer devices for controlling fluid flow |
DE19834536C2 (en) * | 1998-07-31 | 2001-06-28 | Daimler Chrysler Ag | Device, microsystem and method for transporting and / or segregating liquids |
DE19904106C2 (en) * | 1999-02-02 | 2001-06-28 | Oskar Bschorr | Sound generator with pump drive |
US7537197B2 (en) | 1999-07-20 | 2009-05-26 | Sri International | Electroactive polymer devices for controlling fluid flow |
DE60037433T2 (en) | 1999-07-20 | 2008-12-04 | Sri International, Menlo Park | Electroactive polymer generators |
CA2422579C (en) | 2000-09-14 | 2008-11-18 | Jan W. Beenker | Method and device for conveying media |
DE10196634T5 (en) | 2000-09-18 | 2005-04-07 | Par Technologies Llc | Piezoelectric drive element and such a pump using |
US7198250B2 (en) | 2000-09-18 | 2007-04-03 | Par Technologies, Llc | Piezoelectric actuator and pump using same |
EP1466096B1 (en) | 2002-01-10 | 2008-03-19 | Interacoustics A/S | Piezo electric pump and device with such pump |
AU2003225762A1 (en) * | 2002-03-15 | 2003-09-29 | United States Of America As Represented By The Administrator Of The National Aeronautics And Space | Electro-active device using radial electric field piezo-diaphragm for control of fluid movement |
JP2005522162A (en) * | 2002-03-18 | 2005-07-21 | エスアールアイ インターナショナル | Electroactive polymer devices that move fluids |
KR100453815B1 (en) * | 2002-05-20 | 2004-10-20 | 한국전자통신연구원 | Piezoelectric micro pump |
DE10238600A1 (en) * | 2002-08-22 | 2004-03-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Peristaltic micropump |
WO2005001287A1 (en) * | 2003-06-30 | 2005-01-06 | Koninklijke Philips Electronics N.V. | Device for generating a medium stream |
US7889877B2 (en) | 2003-06-30 | 2011-02-15 | Nxp B.V. | Device for generating a medium stream |
US7287965B2 (en) | 2004-04-02 | 2007-10-30 | Adaptiv Energy Llc | Piezoelectric devices and methods and circuits for driving same |
US7290993B2 (en) | 2004-04-02 | 2007-11-06 | Adaptivenergy Llc | Piezoelectric devices and methods and circuits for driving same |
US7312554B2 (en) | 2004-04-02 | 2007-12-25 | Adaptivenergy, Llc | Piezoelectric devices and methods and circuits for driving same |
US7258533B2 (en) | 2004-12-30 | 2007-08-21 | Adaptivenergy, Llc | Method and apparatus for scavenging energy during pump operation |
US20060232166A1 (en) | 2005-04-13 | 2006-10-19 | Par Technologies Llc | Stacked piezoelectric diaphragm members |
WO2007061610A1 (en) | 2005-11-18 | 2007-05-31 | Par Technologies, Llc | Human powered piezoelectric power generating device |
DE102005055697B4 (en) * | 2005-11-23 | 2011-12-29 | Allmendinger Elektromechanik Gmbh | Device for metered delivery of a fluid and device with such a device |
EP1862873A1 (en) | 2006-06-02 | 2007-12-05 | Montres Rado S.A. | Display unit for a portable instrument, such as a watch |
KR101070944B1 (en) | 2006-07-11 | 2011-10-06 | 가부시키가이샤 무라타 세이사쿠쇼 | Piezoelectric pump |
EP2123913A1 (en) | 2007-03-12 | 2009-11-25 | Murata Manufacturing Co. Ltd. | Fluid transportation device |
EP2174360A4 (en) | 2007-06-29 | 2013-12-11 | Artificial Muscle Inc | Electroactive polymer transducers for sensory feedback applications |
EP2239793A1 (en) | 2009-04-11 | 2010-10-13 | Bayer MaterialScience AG | Electrically switchable polymer film structure and use thereof |
DE102009024757B4 (en) * | 2009-06-12 | 2012-01-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Methods and apparatus for controlling a chemical reaction by pressure using high pressure optimized biocomponents |
FR2950154B1 (en) * | 2009-09-15 | 2011-12-23 | Commissariat Energie Atomique | OPTICAL DEVICE WITH DEFORMABLE MEMBRANE WITH PIEZOELECTRIC ACTUATION IN THE FORM OF A CONTINUOUS CROWN |
KR20140008416A (en) | 2011-03-01 | 2014-01-21 | 바이엘 인텔렉쳐 프로퍼티 게엠베하 | Automated manufacturing processes for producing deformable polymer devices and films |
US9195058B2 (en) | 2011-03-22 | 2015-11-24 | Parker-Hannifin Corporation | Electroactive polymer actuator lenticular system |
WO2013142552A1 (en) | 2012-03-21 | 2013-09-26 | Bayer Materialscience Ag | Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices |
WO2013192143A1 (en) | 2012-06-18 | 2013-12-27 | Bayer Intellectual Property Gmbh | Stretch frame for stretching process |
US9590193B2 (en) | 2012-10-24 | 2017-03-07 | Parker-Hannifin Corporation | Polymer diode |
DE102013100559A1 (en) | 2013-01-21 | 2014-07-24 | Allmendinger Elektromechanik KG | Device for the metered delivery of a fluid, and device and method with such a device |
CN105201796A (en) * | 2015-10-29 | 2015-12-30 | 宁波大学 | Piezoelectric peristaltic micropump |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1065880B (en) * | 1959-09-24 | |||
DE1165667B (en) * | 1962-06-28 | 1964-03-19 | Siemens Ag | Piezoelectric flexural oscillator |
DE1287135B (en) * | 1967-06-16 | 1969-01-16 | Telefunken Patent | Electroacoustic transducer with a membrane covered with a layer of semiconductor material |
EP0095911B1 (en) * | 1982-05-28 | 1989-01-18 | Xerox Corporation | Pressure pulse droplet ejector and array |
DE3320441A1 (en) * | 1983-06-06 | 1984-12-06 | Siemens AG, 1000 Berlin und 8000 München | WRITING DEVICE WORKING WITH LIQUID DROPLETS WITH ROD-SHAPED PIEZOELECTRIC TRANSFORMERS CONNECTED ON BOTH ENDS WITH A NOZZLE PLATE |
DE3320443C2 (en) * | 1983-06-06 | 1994-08-18 | Siemens Ag | Liquid pump |
DE3342844A1 (en) * | 1983-11-26 | 1985-06-05 | Philips Patentverwaltung Gmbh, 2000 Hamburg | MICROPLANAR INK JET PRINT HEAD |
-
1986
- 1986-05-30 DE DE19863618106 patent/DE3618106A1/en not_active Withdrawn
-
1987
- 1987-05-19 WO PCT/DE1987/000230 patent/WO1987007218A1/en not_active Application Discontinuation
- 1987-05-19 JP JP62503037A patent/JPH01500892A/en active Pending
- 1987-05-19 EP EP87903244A patent/EP0310605A1/en not_active Withdrawn
Non-Patent Citations (1)
Title |
---|
See references of WO8707218A1 * |
Also Published As
Publication number | Publication date |
---|---|
JPH01500892A (en) | 1989-03-30 |
WO1987007218A1 (en) | 1987-12-03 |
DE3618106A1 (en) | 1987-12-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19881122 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): CH DE FR GB IT LI NL SE |
|
RAP3 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: SIEMENS AKTIENGESELLSCHAFT |
|
17Q | First examination report despatched |
Effective date: 19891128 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
|
18W | Application withdrawn |
Withdrawal date: 19900412 |
|
R18W | Application withdrawn (corrected) |
Effective date: 19900412 |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: HEINZL, JOACHIM |