EP0693379B1 - Herstellungsverfahren für einen Tintenstrahlaufzeichnungskopf - Google Patents

Herstellungsverfahren für einen Tintenstrahlaufzeichnungskopf Download PDF

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Publication number
EP0693379B1
EP0693379B1 EP19950110506 EP95110506A EP0693379B1 EP 0693379 B1 EP0693379 B1 EP 0693379B1 EP 19950110506 EP19950110506 EP 19950110506 EP 95110506 A EP95110506 A EP 95110506A EP 0693379 B1 EP0693379 B1 EP 0693379B1
Authority
EP
European Patent Office
Prior art keywords
ink jet
recording head
jet recording
cavity pattern
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP19950110506
Other languages
English (en)
French (fr)
Other versions
EP0693379A2 (de
EP0693379A3 (de
Inventor
Hiroyuki C/O Nec Corporation Ogata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of EP0693379A2 publication Critical patent/EP0693379A2/de
Publication of EP0693379A3 publication Critical patent/EP0693379A3/de
Application granted granted Critical
Publication of EP0693379B1 publication Critical patent/EP0693379B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/1429—Structure of print heads with piezoelectric elements of tubular type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1615—Production of print heads with piezoelectric elements of tubular type

Definitions

  • the present invention relates to an ink jet recording head and, more particularly, to a method for manufacturing an ink jet recording head of a printer including a laminated piezoelectric element.
  • an ink jet recording head of a printer including laminated piezoelectric elements utilizes a piezoelectric effect for jetting ink droplets through a plurality of ink jet nozzles from pressure chambers each forming an ink cavity.
  • Fig. 1 is a flowchart showing a conventional method for manufacturing a conventional ink jet recording head
  • Fig. 2 is a partial cross-sectional view of the conventional ink jet recording head at consecutive steps effected by the process of Fig. 1.
  • a number of cavity pattern members 5 made of a photosensitive resin as shown in Fig. 2A and each having a shape of a rectangular prism are prepared in step S10.
  • step S11 the cavity pattern members 5 are arranged and bonded, in a row extending horizontally as viewed in the drawing, to a surface of an elongate sheet of a piezoelectric material (first piezoelectric sheet) by thermocompression, following which a resin of the piezoelectric material is applied to the surfaces of the cavity pattern members 5 and the piezoelectric sheet to thereby form a body in which a row of the cavity pattern members 5 are enclosed by the piezoelectric material 6a, as shown in Fig. 2B.
  • step S12 a plurality of second piezoelectric sheets 6b each having a row of electrode films 7 printed thereon and having a shape similar to that of the first piezoelectric sheet are layered on both surfaces of the body, as shown in Fig. 2C, and bonded thereto by compression to form a sub-assembly.
  • a heat treatment is conducted to the sub-assembly for removing a binder and the cavity pattern members 5, the binder being contained in the piezoelectric sheets for bonding the piezoelectric sheets to corresponding one of the electrode films.
  • the cavity pattern members 5 are then removed to form ink cavities 8 inside the sub-assembly.
  • the sub-assembly is sintered to obtain the product as shown in Fig. 2D in step S14.
  • a plurality of the resultant products are further layered one on another to form an assembly of an ink jet recording head.
  • US-A-4 766 671 and DE-A-3 733 109 disclose methods for manufacturing ceramic electronic devices for an ink-jet head.
  • an object of the present invention is to provide a method for manufacturing an ink jet recording head which is easy to manufacture, which has a higher dimensional accuracy, and which can reduce costs.
  • each of the ink cavities has a dimensional accuracy and is easy to manufacture so that the costs of the ink jet recording head can be reduced.
  • the cavity pattern members 1 are made of, for example, a photosensitive resin.
  • Each of the cavity pattern member 1 is comprised of a pressure chamber forming portion 1a, which defines a cylindrical pressure chamber at the outer surface thereof, and cylindrical passage forming portions 1b, which are formed at both ends of the pressure chamber forming portion 1a and have a smaller diameter to define a passage for an ink flow at the surface thereof.
  • a number of cavity pattern members 1 are arranged at a predetermined pitch by fixing members 1c with the passage forming portions 1b fixed thereto.
  • Fig. 4 shows a procedure for manufacturing the ink jet recording head according to the embodiment of the present invention.
  • step S1 cavity pattern members 1 as shown in Fig. 3A are formed from a photosensitive resin and fixed to fixing members 1c.
  • the cavity pattern members 1 are dipped into a solution 12 including an electrode material such as platinum (Pt) contained in a first tank 2a as shown in Fig. 3B for a predetermined period of time.
  • the solution further includes a solvent of a binder for bonding the electrode material to the cavity pattern members 1.
  • the resultant members are taken out from the first tank 2a for drying in step S3.
  • the cavity pattern member is coated by an electrode film.
  • step S4 the resultant members are further dipped for a predetermined period of time in a solution 13 of a piezoelectric material including a combination of, for example, PbO 3 , PbTiO 3 and PbZrO 3 contained in a second tank 3a, and then taken out from the second tank 3a for subsequent drying in step S5.
  • a piezoelectric film is formed on the electrode film.
  • the steps S2 through S5 are repeated a plurality of times, for example three times.
  • unitary bodies of the cavity pattern member and a laminate of the electrode films and the piezoelectric films are obtained.
  • a group of unitary bodies are arranged in a matrix to form an assembly for the ink Jet recording head.
  • Each of the resultant matrix of the unitary bodies does not have substantially any gap between the cavity pattern member and the laminate.
  • step S6 a heat treatment is conducted at a temperature of about 500°C for a relatively long period of time to melt the photosensitive resin and to melt the solvent of the binder.
  • the cavity pattern members 1 are removed from the assembly to form an array of ink cavities 4 each including a pressure chamber and passages.
  • step S7 sintering is conducted for the resultant assembly at a temperature of 1200°C to obtain an ink jet recording head according to the present embodiment.
  • Fig. 5 shows a cross-section of a portion of one of they ink cavities in the ink jet recording head obtained by the process as described above.
  • a central, circular ink cavity 4 is surrounded by a concentric laminate of three electrode films 2 and three piezoelectric films 3 formed alternately with the electrode films 2.
  • the radius of the cavities is, for example, between 0.02 and 0.1 mm.
  • the laminate of the electrode films 2 and the piezoelectric films 3 is formed around the cavity pattern members 1, substantially without any gap therebetween.
  • each of the resultant ink cavities 4 has an accurate dimension.
  • the electrode films 2 and the piezoelectric films 3 are layered merely by dipping in solutions and subsequent drying, the process is quite simple, thereby reducing costs of the ink jet recording head.
  • a control signal for the ink jet recording head is supplied through the electrode films to operate the piezoelectric films for a piezoelectric function.
  • the piezoelectric films 3 are concentrically formed around the ink cavity 4, so that a uniform pressure for jetting of ink can be applied from the entire circumferential wall of the ink cavity 4. This enables a smooth jetting of the ink.
  • the cavity pattern member may have any three-dimensional shape such as a cylinder or a rectangular prism.
  • the three-dimensional configuration of the ink cavity allows ink to smoothly flow therein.
  • the cavity pattern members are formed of a photosensitive resin.
  • the material of the cavity pattern members is not limited to a photosensitive resin, but may be any of materials, such as carbon, provided that the material can be removed after formation of the laminate. If carbon is used for the material, the cavity pattern member can be removed by the sintering step (S7 in Fig.2).

Claims (4)

  1. Verfahren zur Herstellung eines Tintenstrahlaufzeichnungskopfes, gekennzeichnet durch die folgenden Schritte: wiederholtes Ausführen der aufeinanderfolgenden Schritte Eintauchen eines Hohlraumstrukturelements (1) in eine erste Lösung (12) eines Elektrodenmaterials, Trocknen des entstandenen Elements, Eintauchen des entstandenen Elements in eine zweite Lösung (13) eines piezoelektrischen Materials und Trocknen des entstandenen Elements, um dadurch einen Einheitskörper aus dem Hohlraumstrukturelement (1) und einem Laminat von Elektrodenschichten (2) und piezoelektrischen Schichten (3) zu formen; Entfernen des Hohlraumstrukturelements (1) aus dem Einheitskörper, um innerhalb des Laminats (2, 3) einen Tintenhohlraum (4) auszubilden.
  2. Verfahren nach Anspruch 1, wobei das Hohlraumstrukturelement (1) aus einem lichtempfindlichen Harz besteht.
  3. Verfahren nach Anspruch 1, wobei das Hohlraumstrukturelement (1) aus Kohlenstoff besteht.
  4. Verfahren nach Anspruch 1, 2 oder 3, wobei das Elektrodenmaterial ein Metall und ein Bindemittel zum Verbinden bzw. Verkleben des Metalls mit dem piezoelektrischen Material einschließt.
EP19950110506 1994-07-08 1995-07-05 Herstellungsverfahren für einen Tintenstrahlaufzeichnungskopf Expired - Lifetime EP0693379B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP15728794 1994-07-08
JP157287/94 1994-07-08
JP15728794A JPH0820109A (ja) 1994-07-08 1994-07-08 インクジェット記録ヘッドおよびその製造方法

Publications (3)

Publication Number Publication Date
EP0693379A2 EP0693379A2 (de) 1996-01-24
EP0693379A3 EP0693379A3 (de) 1997-03-12
EP0693379B1 true EP0693379B1 (de) 2000-06-07

Family

ID=15646365

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19950110506 Expired - Lifetime EP0693379B1 (de) 1994-07-08 1995-07-05 Herstellungsverfahren für einen Tintenstrahlaufzeichnungskopf

Country Status (3)

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EP (1) EP0693379B1 (de)
JP (1) JPH0820109A (de)
DE (1) DE69517367T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1116590B1 (de) 2000-01-11 2003-09-17 Samsung Electronics Co., Ltd. Tintenstrahldruckkopf mit mehrfach gestapeltem PZT Antriebselement
US7490405B2 (en) 2004-03-24 2009-02-17 Fujifilm Corporation Method for manufacturing a liquid droplet discharge head.
KR102022392B1 (ko) * 2012-12-11 2019-11-05 삼성디스플레이 주식회사 노즐프린터
CN107584885B (zh) * 2017-09-15 2019-01-25 京东方科技集团股份有限公司 喷头及其驱动方法、喷墨装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4766671A (en) * 1985-10-29 1988-08-30 Nec Corporation Method of manufacturing ceramic electronic device
EP0249221A3 (de) * 1986-06-13 1989-10-04 Siemens Aktiengesellschaft Verfahren zum Aufbau einer fertig kontaktierten Piezobaugruppe für Tintenschreibköpfe
DE3733109A1 (de) * 1987-09-30 1989-04-13 Siemens Ag Verfahren zur herstellung eines piezokeramik-elementes fuer einen tintenstrahlschreiber
JPH023311A (ja) * 1988-06-20 1990-01-08 Nec Corp インクジェットヘッドおよびその製造方法
JPH03147852A (ja) * 1989-11-02 1991-06-24 Murata Mfg Co Ltd 多連型液体吐出装置
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion

Also Published As

Publication number Publication date
DE69517367T2 (de) 2000-10-12
JPH0820109A (ja) 1996-01-23
EP0693379A2 (de) 1996-01-24
EP0693379A3 (de) 1997-03-12
DE69517367D1 (de) 2000-07-13

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