EP0693379A3 - Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren - Google Patents

Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren Download PDF

Info

Publication number
EP0693379A3
EP0693379A3 EP95110506A EP95110506A EP0693379A3 EP 0693379 A3 EP0693379 A3 EP 0693379A3 EP 95110506 A EP95110506 A EP 95110506A EP 95110506 A EP95110506 A EP 95110506A EP 0693379 A3 EP0693379 A3 EP 0693379A3
Authority
EP
European Patent Office
Prior art keywords
manufacturing
same
ink jet
recording head
jet recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95110506A
Other languages
English (en)
French (fr)
Other versions
EP0693379B1 (de
EP0693379A2 (de
Inventor
Hiroyuki Ogata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of EP0693379A2 publication Critical patent/EP0693379A2/de
Publication of EP0693379A3 publication Critical patent/EP0693379A3/de
Application granted granted Critical
Publication of EP0693379B1 publication Critical patent/EP0693379B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/1429—Structure of print heads with piezoelectric elements of tubular type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1615—Production of print heads with piezoelectric elements of tubular type
EP19950110506 1994-07-08 1995-07-05 Herstellungsverfahren für einen Tintenstrahlaufzeichnungskopf Expired - Lifetime EP0693379B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP15728794A JPH0820109A (ja) 1994-07-08 1994-07-08 インクジェット記録ヘッドおよびその製造方法
JP157287/94 1994-07-08
JP15728794 1994-07-08

Publications (3)

Publication Number Publication Date
EP0693379A2 EP0693379A2 (de) 1996-01-24
EP0693379A3 true EP0693379A3 (de) 1997-03-12
EP0693379B1 EP0693379B1 (de) 2000-06-07

Family

ID=15646365

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19950110506 Expired - Lifetime EP0693379B1 (de) 1994-07-08 1995-07-05 Herstellungsverfahren für einen Tintenstrahlaufzeichnungskopf

Country Status (3)

Country Link
EP (1) EP0693379B1 (de)
JP (1) JPH0820109A (de)
DE (1) DE69517367T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60005288T2 (de) 2000-01-11 2004-07-01 Samsung Electronics Co., Ltd., Suwon Tintenstrahldruckkopf mit mehrfach gestapeltem PZT Antriebselement
US7490405B2 (en) 2004-03-24 2009-02-17 Fujifilm Corporation Method for manufacturing a liquid droplet discharge head.
KR102022392B1 (ko) * 2012-12-11 2019-11-05 삼성디스플레이 주식회사 노즐프린터
CN107584885B (zh) * 2017-09-15 2019-01-25 京东方科技集团股份有限公司 喷头及其驱动方法、喷墨装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0249221A2 (de) * 1986-06-13 1987-12-16 Siemens Aktiengesellschaft Verfahren zum Aufbau einer fertig kontaktierten Piezobaugruppe für Tintenschreibköpfe
US4766671A (en) * 1985-10-29 1988-08-30 Nec Corporation Method of manufacturing ceramic electronic device
DE3733109A1 (de) * 1987-09-30 1989-04-13 Siemens Ag Verfahren zur herstellung eines piezokeramik-elementes fuer einen tintenstrahlschreiber
JPH023311A (ja) * 1988-06-20 1990-01-08 Nec Corp インクジェットヘッドおよびその製造方法
EP0468796A1 (de) * 1990-07-26 1992-01-29 Ngk Insulators, Ltd. Piezoelektrisches/elektrostriktives Antriebselement mit keramischem Substrat

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03147852A (ja) * 1989-11-02 1991-06-24 Murata Mfg Co Ltd 多連型液体吐出装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4766671A (en) * 1985-10-29 1988-08-30 Nec Corporation Method of manufacturing ceramic electronic device
EP0249221A2 (de) * 1986-06-13 1987-12-16 Siemens Aktiengesellschaft Verfahren zum Aufbau einer fertig kontaktierten Piezobaugruppe für Tintenschreibköpfe
DE3733109A1 (de) * 1987-09-30 1989-04-13 Siemens Ag Verfahren zur herstellung eines piezokeramik-elementes fuer einen tintenstrahlschreiber
JPH023311A (ja) * 1988-06-20 1990-01-08 Nec Corp インクジェットヘッドおよびその製造方法
EP0468796A1 (de) * 1990-07-26 1992-01-29 Ngk Insulators, Ltd. Piezoelektrisches/elektrostriktives Antriebselement mit keramischem Substrat

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 014, no. 132 (M - 0948) 13 March 1990 (1990-03-13) *

Also Published As

Publication number Publication date
EP0693379B1 (de) 2000-06-07
DE69517367T2 (de) 2000-10-12
DE69517367D1 (de) 2000-07-13
EP0693379A2 (de) 1996-01-24
JPH0820109A (ja) 1996-01-23

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