EP0671270B1 - Tintenstrahldruckkopf - Google Patents
Tintenstrahldruckkopf Download PDFInfo
- Publication number
- EP0671270B1 EP0671270B1 EP95250037A EP95250037A EP0671270B1 EP 0671270 B1 EP0671270 B1 EP 0671270B1 EP 95250037 A EP95250037 A EP 95250037A EP 95250037 A EP95250037 A EP 95250037A EP 0671270 B1 EP0671270 B1 EP 0671270B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- ink
- chamber
- nozzle
- chambers
- channels
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
Definitions
- the invention relates to an ink jet print head specified in the preamble of claim 1.
- Inkjet printheads can be used in fast printers are used, such as for franking machines used for franking mail.
- Such printing units also have the task of solving full pressure in just one movement phase execute what a correspondingly large print width of, for example, 1 inch.
- From DE 36 08 205 A1 and DE 36 09 154 A1 is one between two mirror-symmetrical printhead halves centrally arranged nozzle plate known, in which the required nozzle channels on both plate surfaces be etched at the same time so they are the same Have size. But this creates two to each other offset rows of nozzles, the offset of which is again an exact one Mask adjustment required in the lithographic process. In addition, the head manufacturing requires an accurate one Adjustment of all stacked plates. A another disadvantage is the relatively long ink path from the chambers to the nozzles.
- a printhead from an etched base plate and outer membrane plates build up.
- the main body has two rows of nozzles on.
- the offset on both plate surfaces rows of nozzles lying opposite to each other are simultaneously generated.
- the basic body is made by exactly to each other adjusted masks exposed on two sides and afterwards etched on both sides at the same time.
- the use of a Base body avoids complex assembly of several plates on top of each other, however, is the offset of the two rows of nozzles to one another still Adjustment of the masks before the lithographic process dependent.
- the above solution a relatively long ink path from the chamber to the Nozzle required on each side of the base plate.
- a sandwich-type nozzle printer for an ink pen according to DE-OS 26 49 970 consists of mirror-symmetrically opposite arranged print head halves.
- the ink chambers compression chambers.
- the brief increases in pressure in these ink chambers are arranged with a membrane above Piezoceramic transducers (PZT elements) generated.
- PZT elements Piezoceramic transducers
- Between the print head half is a nozzle plate with a Compensation chamber arranged so that it between the Ink chambers. So that the cross-talk effect are effectively suppressed, but is a Variety of panels required, which exactly must be adjusted to each other.
- the task is to create a compact ink-jet print head for high-resolution printing, which does not have the disadvantages of the prior art and is easy to manufacture.
- the variant according to the invention is only a central plate structured, while the two outer panels are unstructured stay and only for diffusion bonding with the Middle plate are connected. This is possible because that the top of the middle plate has a structure receives and the bottom also one of them gets different structure and the two structures through vertical continuous channels with each other which are connected only from one side of the Middle plate are etched out.
- the two structures have chamber groups that are in x-, y- and z-direction are spaced.
- a second level realizes a distance Y and in a third level is another group of ink chambers now arranged so that the ink chambers the third level to those of the first level both a vertical distance Y as well as horizontal Show offset X to the nozzle line.
- the chambers to the row of nozzles on the one hand and to an intake chamber on the other hand are arranged that in the levels of the central part Ink channels of different lengths, especially horizontal ones Nozzle channels and / or inlet channels and / or vertical through channels are provided, the Sum of ink channel lengths per chamber approximately constant remains.
- the nozzle channels for the single row of nozzles are on one of the two surfaces of the central part and preferably realized in an etching process.
- the third and second levels further vertical ink channels integrated. Of the other surface is worked to a depth where the second level begins.
- each surface carries a chamber group in the middle.
- One surface carries the nozzle channels and one Chamber group and the other surface carries two Chamber groups, i.e.
- one middle part includes additional chamber group to the first chamber group, to the first chamber group in the x and z directions is staggered. It is envisaged that in a single row of nozzles to different Nozzle groups belonging to the alternate and that the Coverage of chambers of the chamber group of one Level with those of the other level is avoided or is only effective at the edges of the chamber. With that the Cross-talk effect effectively minimized.
- FSIJIL print head face shooter ink jet in-line print head
- a middle part which has the nozzle channels
- a membrane plate is provided and that in the Row of nozzles belonging to different groups of nozzles Alternate nozzles.
- each has Surface of the middle part only one chamber group.
- the one surface of the Middle part of two chamber groups It is intended that different structures on both surfaces in a first and third level of a middle part Have chamber groups that are in x-, y- and z-direction are spaced and that the different Structure of the first level of the middle part additional chamber groups, which are separated from each other in x and z-direction are spaced.
- the middle part is with vertical and horizontal ink channels provided, so that there is a relatively short but equally long ink path from the chambers to the nozzles.
- the order allows an increased tolerance range during positioning of the masks in the photolithographic Structuring the middle plate and thus a higher one Yield of functional print heads.
- the nozzle openings are processed by etching or laser beam worked into the membrane plate.
- FIGS 1a to 1d show a variant according to which the edge shooter ink jet in-line print head according to the invention (ESIJIL printhead) as an alternative to the ESIJIL printhead, according to the patent DE 42 25 799 can be.
- ESIJIL printhead edge shooter ink jet in-line print head according to the invention
- FIG. 1a is a section of the invention ESIJIL printhead represented by a line A-A '.
- the middle part 3 is one between two membrane plates 2 and 4 arranged center plate structured on both sides. PZT elements 31 are on the membrane plates attached. There are conductor tracks on the membrane plate 2 180 and other mechanical and / or electrical Components or integrated circuits 160 attached.
- a first group of each other in the z direction spaced chambers 101 is in a first plane of the Middle part 3 arranged.
- a second group of chambers 105 spaced from one another in the z direction arranged. In this third level of the middle part 3 there is a single row of nozzles 1 for all the nozzles.
- the openings, channels a suction space 151 and the Chambers on the first level are above a second Level of the middle section with chambers or nozzle channels a third level of the middle section.
- the one-piece middle section becomes vertical through and in a number of levels of ink channels trained so that an approximately the same Ink path length exists.
- the chamber groups are offset to each other in the x, y and z directions, that all ink paths from the suction chamber to the chambers or from the chambers to the nozzles in the row of nozzles of the same length at least within one module is.
- the ink passes through DE 42 25 799 A1 already shown Inlets and openings in a suction space 151, the inlet channels 110 with the ink chambers 101 of the first level.
- the Ink chambers protrude through ink passages 112 the second level and channels 111 with the nozzles in the Nozzle group 1.1 connected in the third level are arranged.
- Each ink chamber is a membrane and assigned a PZT element, which at Application of an electrical impulse Membrane deformed and thus the volume of the chamber changed.
- the chamber volume expands Ink is supplied from the suction space 151.
- Ink drops through one belonging to the nozzle group 1.1
- the nozzle is ejected in the x direction.
- the ink passes through restrictors Inlet channels 113 in the third level to the Ink chambers 105 of a further chamber group and of there via nozzle channels 115 to the nozzles of the nozzle group 1.5.
- the nozzles belonging to nozzle groups 1.1 and 1.5 are arranged in the z direction in a row of nozzles 1.
- For Explanation is a section of a in Figure 1d Edge of the entire ESIJIL printhead after the first Variant with a corresponding nozzle arrangement Row of nozzles 1 superimposed on the sections C-C ', D-D', E-E 'and G-G' shown.
- the PZT elements are the Not shown for the sake of simplicity.
- nozzles in the row of nozzles Nozzle groups with nozzles from the other nozzle groups alternate.
- nozzles of the nozzle group 1.1 and 1.5 belong to an associated chamber 101 and 105 of the first and further chamber groups.
- the too chambers 101, 105 belonging to different groups vertically in the y and also horizontally in the x and z directions staggered.
- the nozzle row 1 includes the different Nozzle groups 1.1, 1.5 belonging nozzles, which in advantageously alternate so that the overlap of chamber groups of one level with those of the other level is only effective at the edges of the chamber.
- the Coverage area F of one chamber of the chamber group 105 with a chamber of the chamber group 101 is hatched drawn. The coverage area F is through the offset in the x and z directions can be minimized.
- the material for all plates of the printhead is in a preferred embodiment photosensitive glass used.
- the structuring including training the nozzle is replaced by a photolithographic Process and etching of the exposed parts reached.
- Metal plates can also be used as the material.
- the membrane plate thicknesses must be selected according to the modulus of elasticity. It is manufactured by: Exposure of photoresist surface, etching, thermal bonding or gluing in a manner known per se.
- E / FSIJIL printhead is based on the example of the material glass are explained in more detail.
- a mask is put on glass. After this Expose with UV light at the exposed areas through a heat treatment a phase change amorphous materials into its crystalline phase. Etching then turns the crystalline material into layers removed, as already by IBM in the US 4,092,166 had been proposed.
- the photolithographic Process the exposures (preferably UV light) controlled in terms of intensity and duration will.
- the depth of the material change stopped when reaching the corresponding level.
- the exposures are made using two masks, which carry the upper and lower structures. If exposure is unavoidable, before the Etching process by applying a mask ensure that only one side at a time is etched.
- the depth of the etching is determined by the concentration and duration of the etching bath.
- an ultrasonic immersion bath is used. The Different etching depths can be achieved through multi-level Etching is created, with the flatter structures protected from further etching by masking will. In this way, the vertical ones are also Channels as a connection between those on the bottom located ink chambers and those on the top structured nozzles can be produced.
- the selectivity s as the ratio of the etching rates between the unexposed part of the sensitive Material and the exposed, e.g. at Photosensitive glass between 2% and 5%.
- the starting material thickness D of the middle plate is therefore to be chosen according to equation (3) so that it is twice the depth a of an ink chamber plus a min.
- the two membrane plates can preferably have identical dimensions. Their thicknesses should be chosen so that on the basis of the modulus of elasticity, the width and length of the ink chambers and the Bending force of the PZT a sufficient change in the Chamber volume occurs, which leads to the ejection of a Ink drop leads. Material thicknesses are preferred from 0.05 mm to 0.2 mm application.
- For the Membrane plate production becomes commercially available plates a 5-inch wafer with a thickness of approx. 1 mm initially isolated and then the individual membrane plates of the Module after UV exposure to a thickness of approx. 0.1 mm etched. After assembling the membrane plates 2, 4 with the etched middle part 3, the module is thermal bonded.
- FIGS 2a to 2c show a variant according to which an inventive face shooter ink jet in-line print head (FSIJIL printhead) can be executed alternative to the FSIJIL printhead, which is in the pending patent application P 43 36 416.0 has been.
- FSIJIL printhead inventive face shooter ink jet in-line print head
- Figure 2a is the section through the line A-A ' and in FIG. 2b the section through the line B-B ' of the FSIJIL print head according to a first variant shown.
- Figures 2a and 2b illustrate the Ink routing in the FSIJIL printhead. Again they are Chambers to the row of nozzles on the one hand and to an intake chamber on the other hand, arranged in such a way that in each level ink channels of different lengths, in particular nozzle channels and inlet channels and through channels are provided are, the sum of all ink channel lengths in x, y and z direction assigned to each chamber remains approximately constant.
- the other part, not shown in these sections of the face shooter ink jet print head according to the invention contains further groups with chambers 102 and 106 and a second suction space 152 on the other side the row of nozzles.
- Figure 2c illustrates in one Top view (component side) the position of the different Groups belong offset to each other Chambers 101, 102, 105 and 106 near the Row of nozzles.
- the membrane plate 4 must now, however, at the same time Nozzle plate are formed. This happens in a more advantageous way Only after a subsequent laser beam processing. Another manufacture before thermal bonding requires precise adjustment.
- the nozzles 1 and through openings 112, 114 can open can be made in different ways. So they can be etched, blown with a laser beam or with Special tools are punched. The selection of the The process depends, among other things, on the material used from.
- a corresponding process control is in the etching of the Membranes required. It is also planned that monitors the thickness of the membrane layer during etching will and that to complete the manufacture of the Chambers required membrane thickness for the chambers achieved by fine grinding each of the chamber parts becomes.
- FIG. 2d shows a view of a PZT plate 31, which is attached to the membrane plate, the Positioning effort compared to individual elements can be reduced.
- the individual PZT elements are worked out finger-like and with electrodes 30 Mistake.
- PZT elements can be applied by first and second pretreated PZT plates metallized and on the first and second membrane plate is applied. If the PZT elements from the plate are not yet sufficiently worked out then a number for that side of the module individual PZT elements separated.
- FIGS. 3a to 3c A second variant for an ESIJIL printhead with an increased resolution is shown in FIGS. 3a to 3c evident.
- Figure 3a is a section through the Line A-A '
- Figure 3b is a section through the Line B-B 'and in Figure 3c is a top view of FIG the middle plate (component side) of the ESIJIL printhead shown according to variant two.
- a face shooter inkjet printhead can be used in the same way build up with a higher nozzle density.
- Figure 4a a section through the line A-A 'of such an FSIJIL printhead shown according to variant two.
- the chamber 101 On the one side to the right of nozzle line 1 is the chamber 101 arranged a first chamber group, which over an ink passage channel 112 and nozzle channel 111 in the third level of the middle part with - shown - the Nozzle group 1.1. associated nozzle is connected.
- the chamber 104 stands above a - dotted - Ink passage channel 112 and nozzle channels in the third level of the middle section with one - not shown - the nozzle group 1.4 associated nozzle in Connection which that of the nozzle group 1.1 associated nozzle is adjacent.
- variant two On average through line B-B 'of the FSIJIL printhead
- variant two is only that of the nozzle group 1.5 associated nozzle shown, which from the chamber 105 is fed.
- This nozzle is adjacent to nozzles which belong to the nozzle groups 1.2 and 1.6.
- the corresponding ink paths from chambers 102 and 106 the chamber groups to the left of the nozzle line to the associated nozzles are shown in dashed lines.
- the for Chamber 103 belonging to additional chamber group here to the right of the nozzle line and stands over channels with the - not shown - to the nozzle group 1.3 associated nozzle in connection.
- This adjustment effort can be significantly reduced if a prefabricated PZT plate 311, as in Figure 5b is shown is used.
- the multiple Comb structure of the PZT plate allows a unique Position on the membrane plate over the corresponding one Chambers with little effort.
- the PZT plate is based on a conventional photolithographic Process structured by etching.
- the electrode coating 30 of the PZT plate 311 is sputtered applied and electrolytically reinforced.
- the embodiment for ESIJIL print heads according to FIG. 3 or for FSIJIL printheads according to FIG. 4 can thereby be modified by the chamber group 101 or Chamber groups 101 and 102 are omitted. It is provided that on a surface of the central part a group of nozzle channels and a chamber group 105, 106 arranged and on the other surface one of of the row of nozzles spaced in the x and y directions further chamber group 103, 104 between the row of nozzles 1 and a row is arranged which the chambers with through channels 112 connecting the nozzle channels form.
- the impact of a larger offset of ink chamber groups against each other on the printed image through constructive (ink channel cross section) and / or electronic measures can be compensated for without the ink path length being exact must be the same length.
- the different structures on the two opposite surfaces of the Middle part 3 allow a relatively close location of the Row of nozzles 1 to one of the two structures. Of the Ink path from the chambers to the nozzles or from the Intake spaces 151, 152 to the chambers is then for the opposite staggered structures different. This is due to a larger offset of the ink chamber groups mutually achievable in the x-z plane, whereby the crosstalk is suppressed more than if mainly the distance of the structures in the y direction, i.e. the thickness of the middle plate 3 increases would.
- the invention is not based on the present Embodiment limited. Rather is a number of variants conceivable, which of the shown Solution even with fundamentally different types Make use of the remarks.
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Ink Jet (AREA)
Description
- Figur 1a,
- Schnitt durch die Linie A-A'eines ESIJIL-Druckkopfes nach Variante eins
- Figur 1b,
- Schnitt durch die Linie B-B'eines ESIJIL-Druckkopfes nach Variante eins
- Figur 1c,
- ESIJIL-Druckkopfes nach Variante eins in Draufsicht auf die Mittelplatte (Bestückungsseite) mit Lage der Kammern
- Figur 1d,
- Ansicht der Düsenseite mit der Düsenlinie des ESIJIL-Druckkopfes nach Variante eins
- Figur 2a,
- Schnitt durch die Linie A-A' eines FSIJIL-Druckkopfes nach Variante eins
- Figur 2b,
- Schnitt durch die Linie B-B' eines FSIJIL-Druckkopfes nach Variante eins
- Figur 2c,
- FSIJIL-Druckkopfes nach Variante eins in Draufsicht auf die Mittelplatte (Bestückungsseite) mit Lage der Kammern
- Figur 2d,
- Ansicht einer PZT-Platte für einen FSIJIL-Druckkopf nach Variante eins
- Figur 3a,
- Schnitt durch die Linie A-A'eines ESIJIL-Druckkopfes nach Variante zwei
- Figur 3b,
- Schnitt durch die Linie B-B'eines ESIJIL-Druckkopfes nach Variante zwei
- Figur 3c,
- ESIJIL-Druckkopfes nach Variante zwei in Draufsicht auf die Mittelplatte (Bestückungsseite) mit Lage der Kammern
- Figur 4a,
- Schnitt durch die Linie A-A'eines FSIJIL-Druckkopfes nach Variante zwei
- Figur 4b,
- Schnitt durch die Linie B-B'eines FSIJIL-Druckkopfes nach Variante zwei
- Figur 4c,
- FSIJIL-Druckkopfes nach Variante zwei in Draufsicht auf die Mittelplatte (Bestückungsseite) mit Lage der Kammern
- Figur 5a,
- Anordnung von PZT-Elementen auf einer Membranplatte
- Figur 5b,
- Ansicht einer PZT-Platte für einen FSIJIL-Druckkopf nach Variante zwei
Belichtung von Photolackoberfläche, Ätzen, thermisches Bonden oder Kleben in an sich bekannter Weise.
- Nur 2 Masken erforderlich, welche mit einer gewissen Toleranzbreite justiert werden könne.
- Nur eine von 3 Platten muß strukturiert werden, d.h. Wegfall von 2/3 des Aufwandes für Lithographie- und Ätzprozeß.
- Die 2 Deckplatten können identisch sein, d.h. beide können vom gleichen Wafer stammen.
- Die Montage der 3 Platten ist völlig unkritisch, da alle fuktionsbestimmenden Strukturen sich auf der Mittelplatte befinden.
- Düsenreinigung mittels Druckluft
- Behandlung (Reinigen und Spülen) der Kammern und Düsen. Durch Spülen mit einer ersten geeigneten handelsüblichen Flüssigkeit entsteht eine hydrophile Innenbeschichtung.
- Durch Behandlung der die Düsen aufweisenden Platte auf der Druckseite mit einer zweiten geeigneten Flüssigkeit wird eine hydrophobische Außenbeschichtung erreicht. Nach dem Aushärten der Oberschicht sind die Düsen fertiggestellt.
- Versehen des Moduls mit den erforderlichen Treiberschaltkreisen auf den zur Druckseite orthogonalen Seiten des Moduls und ggf. mit einem Schutzgehäuse.
- Kombination des Moduls mit weiteren zu seinem Betrieb erforderlichen unterschiedlichen Mitteln (elektrische, mechanische und Tintenversorgungsmittel).
- Der Druckkopf wird anschließend in einem Gehäuse untergebracht, bevor er auf Funktionsfähigkeit getestet wird, um fehlerhafte Exemplare auszusondern.
- Zum Abschluß erfolg noch ein Test des fertiggestellten Druckkopfes.
Claims (10)
- Tintenstrahldruckkopf mit einer beidseitigen Oberflächenstruktur für Tintenkammern und zugehörigen Düsenkanälen auf einer Mittelplatte (3), äußeren Membranplatten (2, 4) und Mitteln zum Zuführen und Austreiben von Tinte aus jeweils einer Tintenkammer, wobei jeder Tintenkammer Kanäle zum Zu- und Abführen von Tinte sowie ein Aktuator (31) zum Austreiben von Tinte aus jeder Kammer und eine Düse zugeordnet sind,unterschiedliche Strukturen (101, 110, 151; 105, 111, 113, 115) sind auf den beiden gegenüberliegenden Oberflächen einer Mittelplatte (3) ausgebildet und liegen in einer ersten und dritten x/z-Ebene, wobei jede Struktur der ersten bzw. dritten x/z-Ebene eine Gruppe von Tintenkammern (101 bzw. 105) mit zueinander parallel in z-Richtung um den Versatz (Z) versetzten und mit ihrer Längserstreckung in x-Richtung angeordneten Tintenkammern aufweist und diese Gruppen von Tintenkammern voneinander in y-Richtung beabstandet sind, wobei ein zu einer zweiten x/z-Ebene vertikal ausgebildeter Abstand (Y) realisiert wird und wobei die Richtungen x, y und z zueinander senkrecht stehen, die Mittelplatte (3) weist die zweite x/z-Ebene durchdringende Düsenkanäle (112) auf, die mit Tintenkammern einer Kammergruppe (101) in Verbindung stehen und Düsenkanäle, die sich (111, 112) sowohl in x- als auch y-Richtung erstrecken, wobei auf einer der beiden Oberflächen der Mittelplatte (3) Düsenkanäle (111, 115) ausgebildet sind, welche in Düsen münden, die in einer einzigen sich in z-Richtung erstreckenden Düsenreihe (1) angeordnet sind.
- Tintenstrahldruckkopf nach Anspruch 1, dadurch gekennzeichnet, daß die Kammern zur Düsenreihe (1) einerseits und zu einem Ansaugraum (151, 152) andererseits derart angeordnet sind, daß in den Ebenen der Mittelplatte (3) unterschiedlich lange Tintenkanäle, insbesondere horizontale Düsenkanäle (111 oder 115) und/oder Einlaßkanäle (110 oder 113) und /oder vertikale Durchgangskanäle (112, 114) vorgesehen sind, wobei die Summe der Tintenkanallängen je Kammer annähernd konstant bleibt.
- Tintenstrahldruckkopf nach den Ansprüchen 1 bis 2, dadurch gekennzeichnet, daß die Mittelplatte (3) mit in y- und x-Richtung verlaufenden Tintenkanälen und mit unterschiedlichen Strukturen auf den beiden gegenüberliegenden Oberflächen so versehen ist, daß sich ein annähernd gleichlanger Tintenweg von den Tintenkammern zu den Düsen in der Düsenreihe (1) ergibt.
- Tintenstrahldruckkopf nach den Ansprüchen 1 bis 3, dadurch gekennzeichnet, daß eine Überdeckungsfläche (F) von einer Kammer der Kammergruppe (105) mit einer Kammer der Kammergruppe (101) existiert, wobei die unterschiedlichen Strukturen auf beiden Oberflächen der Mittelplatte (3) voneinander in x- und z-Richtung derart beabstandet sind, so daß die Überdeckung der Tintenkammern höchstens nur an den Kammerrändern wirksam wird.
- Tintenstrahldruckkopf nach den Ansprüchen 1 bis 4, dadurch gekennzeichnet, daß die Struktur auf einer der beiden Oberflächen einer Mittelplatte (3) eine zur ersten Gruppe von Tintenkammern (101, 102) zusätzliche Gruppe von Tintenkammern (103, 104) umfaßt, die zu der ersten Gruppe von Tintenkammern in x- und z-Richtung versetzt angeordnet ist.
- Tintenstrahldruckkopf nach den Ansprüchen 1 bis 5, dadurch gekennzeichnet, daß auf einer der beiden Oberflächen der Mittelplatte (3) eine Gruppe von Düsenkanälen (115, 126) und zugehörige Tintenkammern einer Kammergruppe (105, 106) sowie auf der anderen Oberfläche eine von der Düsenreihe in x- und y-Richtung beabstandete weitere Kammergruppe (103, 104) zwischen der Düsenreihe (1) und einer Reihe angeordnet ist, in welcher die Durchgangskanäle (112) ausgebildet sind, die die Kammern mit den Düsenkanälen (111, 123, 122, 124) verbinden.
- Tintenstrahldruckkopf nach einem der vorgenannten Ansprüche 1 bis 6, dadurch gekennzeichnet, daß in der einzigen Düsenreihe (1) die zu unterschiedlichen Gruppen von Tintenkammern und die zu unterschiedlichen Düsengruppen gehörenden Düsen alternierend in der Düsenreihe (1) angeordnet sind.
- Tintenstrahldruckkopf nach den Ansprüchen 1 bis 6, dadurch gekennzeichnet, daß die einzige sich in z-Richtung ertreckende Düsenreihe (1) aus Düsen besteht, welche so oientiert sind, daß sie Tintentropfen in x-Richtung ausstoßen.
- Tintenstrahldruckkopf nach den Ansprüchen 1 bis 6, dadurch gekennzeichnet, daß die einzige sich in z-Richtung erstreckende Düsenreihe (1) aus Düsen besteht, welche die Tinte durch entsprechende Öffnungen in einer der beiden äußeren Membranplatten (2, 4) in y-Richtung ausstoßen.
- Tintenstrahldruckkopf nach den Ansprüchen 1 bis 7 und 9, dadurch gekennzeichnet, daß unterschiedliche Strukturen auf beiden Oberflächen in einer ersten und dritten Ebene der Mittelplatte (3) Kammergruppen (101 und 105 bzw. 102 und 106) aufweisen, die voneinander in x-, y- und z-Richtung beabstandet sind und daß die unterschiedliche Struktur der ersten Ebene der Mittelplatte (3) zusätzliche Kammergruppen (103, 104) umfaßt, die voneinander in x- und z-Richtung beabstandet sind.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE9404328U | 1994-03-10 | ||
DE9404328U DE9404328U1 (de) | 1994-03-10 | 1994-03-10 | Tintenstrahldruckkopf |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0671270A2 EP0671270A2 (de) | 1995-09-13 |
EP0671270A3 EP0671270A3 (de) | 1995-12-27 |
EP0671270B1 true EP0671270B1 (de) | 1998-08-12 |
Family
ID=6905964
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP95250037A Expired - Lifetime EP0671270B1 (de) | 1994-03-10 | 1995-02-13 | Tintenstrahldruckkopf |
Country Status (3)
Country | Link |
---|---|
US (1) | US5828390A (de) |
EP (1) | EP0671270B1 (de) |
DE (2) | DE9404328U1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0695641B1 (de) * | 1994-08-03 | 2001-04-04 | Francotyp-Postalia Aktiengesellschaft & Co. | Anordnung für plattenförmige Piezoaktoren und Verfahren zu deren Herstellung |
DE4443254C1 (de) * | 1994-11-25 | 1995-12-21 | Francotyp Postalia Gmbh | Anordnung für einen Tintendruckkopf aus einzelnen Tintendruckmodulen |
US6213594B1 (en) * | 1996-11-18 | 2001-04-10 | Eiko Epson Corporation | Ink-jet printing head for preventing crosstalk |
ATE226146T1 (de) | 1999-01-29 | 2002-11-15 | Seiko Epson Corp | Tintenstrahldruckkopf mit verbesserten tintenzufuhrkanälen |
US6328417B1 (en) | 2000-05-23 | 2001-12-11 | Silverbrook Research Pty Ltd | Ink jet printhead nozzle array |
SG152034A1 (en) * | 2000-05-24 | 2009-05-29 | Silverbrook Res Pty Ltd | An ink jet printhead incorporating an array of nozzle assemblies |
AU2005203479B2 (en) * | 2000-05-24 | 2006-11-23 | Memjet Technology Limited | Inkjet printhead with paired nozzle rows |
WO2001089844A1 (en) * | 2000-05-24 | 2001-11-29 | Silverbrook Research Pty. Ltd. | Ink jet printhead nozzle array |
NL1016735C2 (nl) * | 2000-11-29 | 2002-05-31 | Ocu Technologies B V | Werkwijze voor het vormen van een nozzle in een orgaan voor een inkjet printkop, een nozzle-orgaan, een inkjet printkop voorzien van dit nozzle-orgaan en een inkjet printer voorzien van een dergelijke printkop. |
US20070236537A1 (en) * | 2006-03-29 | 2007-10-11 | Picosys Inc. | Fluid jet print module |
JP6277731B2 (ja) * | 2014-01-17 | 2018-02-14 | セイコーエプソン株式会社 | 液体噴射ヘッドおよび液体噴射装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2349555C2 (de) * | 1973-04-25 | 1983-04-07 | Siemens AG, 1000 Berlin und 8000 München | Druckkopf für Farbflüssigkeits-Spritzdrucker und dergleichen |
DE2649970A1 (de) * | 1976-10-30 | 1978-05-03 | Olympia Werke Ag | Duesendrucker fuer ein tintenschreibwerk |
JPS5586767A (en) * | 1978-12-23 | 1980-06-30 | Seiko Epson Corp | Print head |
DE3311956A1 (de) * | 1982-03-31 | 1983-10-13 | Ricoh Co., Ltd., Tokyo | Farbstrahl-druckerkopf |
JPS58187365A (ja) * | 1982-04-27 | 1983-11-01 | Seiko Epson Corp | オンデマンド型インクジエツト記録ヘツド |
DE3608205A1 (de) * | 1986-03-12 | 1987-09-17 | Olympia Ag | Piezoelektrisch betriebener schreibkopf fuer tintenmosaikschreibeinrichtungen |
DE3609154A1 (de) * | 1986-03-19 | 1987-09-24 | Olympia Ag | Piezoelektrisch betriebener schreibkopf fuer tintenmosaikschreibeinrichtungen |
DE3814720A1 (de) * | 1988-04-30 | 1989-11-09 | Olympia Aeg | Verfahren zur herstellung einer grundplatte mit durch aetzen hergestellte einarbeitungen fuer einen tintendruckkopf |
DE4225799A1 (de) * | 1992-07-31 | 1994-02-03 | Francotyp Postalia Gmbh | Tintenstrahldruckkopf und Verfahren zu seiner Herstellung |
-
1994
- 1994-03-10 DE DE9404328U patent/DE9404328U1/de not_active Expired - Lifetime
-
1995
- 1995-02-13 EP EP95250037A patent/EP0671270B1/de not_active Expired - Lifetime
- 1995-02-13 DE DE59503105T patent/DE59503105D1/de not_active Expired - Fee Related
- 1995-02-21 US US08/393,933 patent/US5828390A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0671270A3 (de) | 1995-12-27 |
US5828390A (en) | 1998-10-27 |
DE59503105D1 (de) | 1998-09-17 |
EP0671270A2 (de) | 1995-09-13 |
DE9404328U1 (de) | 1994-05-19 |
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