EP0657066A1 - Composant a semiconducteur a commande par effet de champ - Google Patents

Composant a semiconducteur a commande par effet de champ

Info

Publication number
EP0657066A1
EP0657066A1 EP93919100A EP93919100A EP0657066A1 EP 0657066 A1 EP0657066 A1 EP 0657066A1 EP 93919100 A EP93919100 A EP 93919100A EP 93919100 A EP93919100 A EP 93919100A EP 0657066 A1 EP0657066 A1 EP 0657066A1
Authority
EP
European Patent Office
Prior art keywords
cathode
emitter
zone
contact
semiconductor component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP93919100A
Other languages
German (de)
English (en)
Inventor
Horst Neubrand
Jacek Korec
Erhard Stein
Dieter Silber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mercedes Benz Group AG
Original Assignee
Daimler Benz AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daimler Benz AG filed Critical Daimler Benz AG
Publication of EP0657066A1 publication Critical patent/EP0657066A1/fr
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/1012—Base regions of thyristors
    • H01L29/102—Cathode base regions of thyristors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
    • H01L29/7404—Thyristor-type devices, e.g. having four-zone regenerative action structurally associated with at least one other device
    • H01L29/7412—Thyristor-type devices, e.g. having four-zone regenerative action structurally associated with at least one other device the device being a diode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
    • H01L29/7428—Thyristor-type devices, e.g. having four-zone regenerative action having an amplifying gate structure, e.g. cascade (Darlington) configuration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
    • H01L29/744—Gate-turn-off devices
    • H01L29/745—Gate-turn-off devices with turn-off by field effect
    • H01L29/7455—Gate-turn-off devices with turn-off by field effect produced by an insulated gate structure

Definitions

  • the invention relates to a field-effect-controlled semiconductor component with at least four zones of alternately opposite conductivity types, in which an anode-side emitter zone, an adjoining first and second base zone, a cathode-side emitter zone and a further adjacent emitter zone are formed, the latter two emitter zones being source and drain a MOS field-effect transistor, with an anode contact, a contact on the cathode-side emitter zone and a control electrode contact of the MOS field-effect transistor.
  • field-effect-controlled semiconductor component consists of an anode-side emitter zone 10, two adjoining base zones 20, 30 and two cathode-side emitter zones 40, 44.
  • an Iosier layer 50 which is a part of the Covered on the cathode-side base zone 30, there is a gate called control electrode contact 60, which forms a field effect transistor with the cathode-side emitters 40, 44 and a channel region 42, 43.
  • the component is equipped with two power connections, a cathode 72 and an anode 74.
  • the first, parasitic thyristor structure consists of one cathode-side emitter zone 40, the two adjoining base zones 30, 20 and the anode-side emitter zone 10 and must not be ignited in any operating state.
  • the second thyristor structure with the other cathode-side emitter structure 44, the two base zones 30, 20 adjoining it and the anode-side emitter zone 10 forms the main current path in the switched-on state.
  • the cathode-side emitter 40 is short-circuited with the cathode-side base zone 30 via the cathode contact 72. In order to make this shunt low-resistance, the base zone 30 is heavily doped in a partial area 32.
  • the main thyristor structure 44, 30, 20, 10 is controlled by a field effect transistor 40, 50, 60, 44 and channel region 42, 43.
  • the doping in a weakly doped partial region 34 of the base zone 30 determines the threshold voltage of the field effect transistor and the injection efficiency of the cathode-side emitter 44. If the semiconductor component is polarized in the forward direction and the gate connection 60 of the latter Driven by field effect transistors with positive potential with respect to the cathode, a conductive channel 42 is formed in the p-base zone 34, which connects the two cathode-side emitters 40, 44 with low resistance.
  • a conductive channel 46 is formed between the emitter 44 and the first base zone 20.
  • the resulting electron current acts as a control current for a pnp transistor on the anode side and provides the starting or holding current for the main thyristor 44, 34, 20, 10.
  • the hole punch flowing over the partial area 34 of the base zone 30 to the cathode contact 72 poles the n + emitter 44 in the forward direction and the injected electrons increase the conductance modulation of the weakly doped n base zone 20.
  • the regenerative activation of the thyristor can be interrupted by da ⁇ Gate potential is equated to the cathode potential, so that the n-channel of the field effect transistor disappears and the electron current is interrupted.
  • the building structure according to 5 must be optimized very carefully, since the n + emitter of the parasitic thyristor structure 40, 30, 20, 10 is partially embedded in the same partial area 34 of the base zone 30 as the emitter 44, but is not poled in the forward direction in any operating state may be. This restriction increases the ignition current and limits the maximum switchable current of the component.
  • FIG. 6 A more suitable, known embodiment is shown in FIG. 6.
  • FIG. 6 divides the cathode-side base region 34 from FIG. 5 into two subregions 34, 36, the subregions 34, 36 being separated by an n-doped region 22 of the first n base region 20.
  • the heavily doped portion 32 provides a median resistance
  • the other sub-region 34 defines the threshold voltage of the channel region 42, and the field effect transistor 40, 42, 22 supplies the ignition current for the main thyristor.
  • the independently produced section 36 can be optimized with regard to the injection efficiency of the n + emitter 44 and the resistance of a shunt. This shunt of the emitter 44 is realized via an ohmic coupling of the partial area 36 to the cathode contact 72.
  • the main thyristor structure 44, 36, 20, 10 is connected to the cathode 72 by a conductive channel 42, 22, 43 of the field effect transistor.
  • FIG. 7 An equivalent circuit diagram of the semiconductor component acc. 6 is illustrated in FIG. 7.
  • the separation of the partial areas 32, 36 facilitates the design of shorting resistors Ri and R2.
  • the resistance Ri should be kept as low as possible, and the value of the resistance R2 must be optimized with regard to the switching properties of the component. In the optimization, however, a compromise between the forward voltage and the maximum switchable Strc must be accepted.
  • the invention is based on the problem of further developing a field-effect-controlled semiconductor component of the type described at the outset in such a way that the conduction behavior of a thyristor increases extended safe working area (SOA) is ensured.
  • SOA extended safe working area
  • the problem is solved in that the portion of the cathode-side base zone which adjoins the emitter zone one, the first and second base zone and the anode-side emitter zone and the main thyristor adjoining the cathode side base zone via a separate p + -doped region integrated component with a non-linear voltage / voltage characteristic is connected to the cathode contact
  • the main thyristor emitter is bound to the potential of the cathode by switching on the field effect transistor.
  • the non-linear coupling of the base zone adjoining the main thyristor meter shows a high level
  • connection according to the invention of the partial regions of the cathode-side base zone near the emitter increases the transmission polarity of the thyristor emitter and improves the transmission behavior of the component.
  • the low dynamic resistance of the base coupling at high current densities makes it easier to switch off the component and expands the safe working range.
  • An expedient embodiment consists in an electrical connection of the emitter region of the cathode-side base zone to the cathode contact via a reverse-polarized, monolithically integrated zener diode or avalanche diode
  • a second embodiment uses the existing layer of polycrystalline silicon to produce a polarized in transmission Diode chain, which is then used as a coupling element with a non-linear current / voltage characteristic.
  • FIG. 1 shows a structure of a field-effect-controlled semiconductor component in cross section
  • 2a shows a structure of another embodiment of a field effect-controlled semiconductor component in cross section
  • 2b shows a structure of a further embodiment of a field-effect-controlled semiconductor component with a cross section
  • 2c shows a structure of an additional embodiment of a field-effect-controlled semiconductor component in cross section
  • 3 shows an equivalent circuit diagram for the semiconductor component shown in FIG. 2
  • 4 shows a structure in cross section of a further embodiment of a field-effect-controlled semiconductor component
  • FIG. 5 shows a structure of a known field-effect-controlled semiconductor component with a cross section
  • 6 shows a structure of a further known field-effect-controlled semiconductor component with a cross section
  • FIG. 7 shows an equivalent circuit diagram for the semiconductor component shown in FIG. 5.
  • FIG. 1 schematically shows the structure of a field-effect-controlled semiconductor component with a strongly p-doped, anode-side emitter layer 10, with a first base zone 20, consisting of an n-doped zone, with a second base zone, which has a partial region 32 with strong p-doping and a partial region 34 with p-doping and a further partial region 36 with p-doping, and with strongly n-doped, cathode-side emitter zones 40, 44.
  • the semiconductor component is provided with an anode connection A of an anode contact 74, a cathode connection K, a cathode contact 72 and a gate connection G of a gate 60.
  • Da ⁇ gate 60 is through an insulating layer 50 is separated from the base zones 20, 32, 34, 36 and the cathode-side emitter zones 40, 44.
  • the subregions 34, 36 of the second base zone are separated from one another by an n-doped region 22 of the first base zone 20.
  • the semiconductor component contains a main thyristor structure with the emitter zone 44 on the bahode side, the first and second base zones 20, 30 and the emitter layer 10 on the anode side.
  • This main thyristor structure is controlled by a field effect transistor which comprises the emitter zones 40, 44 on the cathode side, the insulating layer 50 and the gate 60.
  • the cathode contact 72 forms an ohmic contact both with the emitter zone 40 and also with the partial area 32 of the second base zone.
  • the second base zone is divided into the partial areas 32, 34 and 36.
  • a strongly p-doped region 38 which is adjacent to the base region on the cathode side and adjoins the emitter zone 44 of the main thyristor, is connected to the cathode contact 72 via an integrated component with a nonlinear current / voltage characteristic.
  • a ⁇ starch n-doped region 48 is provided, that is via an ohmic contact and a metallic line, which is designed as a conductor track and, in contrast to the illustration according to FIG. 1 runs in the third dimension, connected to a contact 76 which adjoins the area 38.
  • the pn junction between the n + region 48 and the p + region 32 acts like a zener diode which is polarized in the reverse direction and which is connected via the contacts 76, 78 and the metal conductor track in the third dimension to the sub-region 36, 38 of the base zone .
  • Subarea 38 was provided to improve the ohmic metal / semiconductor junction 76, 38, but can be left out, since a Schottky contact at this point does not affect the operation of the component was detected.
  • the subsection 36 can therefore also be connected directly to the contact 78 by means of a contact and a metallic line.
  • the partial area 34 corresponds to the area 38 according to FIG. 1 is connected via a contact, a metallic conductor and a further contact to a heavily n-doped region in the partial area 32 and is thus connected to the cathode contact 72, which then does not extend over the entire partial area 32.
  • FIG. 2 shows an embodiment in which the partial region 36 adjoining the emitter 44 of the main thyristor is connected to the cathode contact 72 via a diode chain which is polarized in the forward direction.
  • the semiconductor component shown in FIG. 2a has in lateral form the heavily p-doped, anode-side emitter layer 10, the first base zone 20 with n-doping, the second base zone with the heavily p-doped portion 32, the p-doped portion 34 and the partial area 36 separated from these partial areas 32, 34 by an n-layer 22.
  • the emitter zones 40, 44 and the strongly p-doped region 38 are also present.
  • An anode connection A with the anode contact 74 and a cathode connection K with the cathode contact 72 are also present.
  • a gate 60 is located on an insulating layer 50 which covers itself from the area 38, which partially covers it, over the partial area 36, the bitter zone 44, the n-layer 22 of the first basic zone 20 and the partial area 34 to form a strongly n-doped layer Area 40 extends that it is partially covered. The other part of the area 40 and the partial area 32 is covered by the cathode contact 72.
  • the diode chain which is polarized in the n forward direction is produced by an alternating p + - 61, 63 and an n + doping 62, 64 of a semiconductor layer made of polycrystalline silicon on an insulating layer and a corresponding metallization 82, 84, 86.
  • a particularly expedient embodiment of the invention was selected as a lateral component on an SOI substrate (Silicon On Inulator).
  • the active semiconductor layer is from a carrier 5 separated by an insulator layer 55, preferably made of thermally grown silicon oxide.
  • the partial regions 34, 36 of the second base zone are separated by the n-doped partial region 22.
  • One sub-area 36 reads upstream and shields the rest of the component.
  • the ignition current can be supplied through a conductive channel of the field effect transistor in a modified part of the semiconductor component.
  • FIG. 2b shows an embodiment which differs from the embodiment in FIG. 2a only in that the p-base part 36 no longer completely envelops the emitter 44. This results in an even better decoupling between the base sub-areas 36 and 34, which leads to an improvement in the function of the main thyristor.
  • FIG. 2c shows an embodiment which differs from the embodiment in FIG. 2a only in that the p-base 30 is interrupted by the n + emitters 40 and 44 which pass through to the insulating layer 55. This leads to an ideal electrical decoupling of the sub-areas 36 and 34 and to an improvement in the function of the main thyristor.
  • the embodiment acc. 4 coincides with the position of the heavily p-doped region 38 with the embodiment shown in FIG. 2.
  • the area 38 lies in the first base zone 20 or is separated from it by the partial area 36.
  • a metallization 82 which is also connected to the n-doped layer 61 of the diode chain.
  • FIG. 3 shows the replacement circuit diagram of the semiconductor components described above.
  • the component with the non-linear current / voltage characteristic is identified by element D.
  • the execution of D as a diode chain corresponds to FIG. 2; however, according to Fig. 1 a Zener diode are listed. It is obvious that this zener diode according to FIG. 2 could also be implemented using polysilicon technology.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Thyristors (AREA)

Abstract

L'invention a pour objet un composant à semiconducteur à commande par effet de champ, comprenant au moins quatre zones de natures de conductivité alternativement opposées, une zone émettrice côté anode, une première et une deuxième zones de base adjacentes à la zone émettrice précitée, une zone émettrice côté cathode et une autre zone émettrice voisine, un contact anodique, un contact avec la zone émettrice côté cathode et un contact d'électrode de grille d'un transistor MOS à effet de champ. La zone émettrice côté cathode et la zone émettrice voisine forment la source et le drain d'un transistor MOS à effet de champ. La partie (34, 36) de la zone de base côté cathode, qui est contigüe à une zone émettrice (44) d'un thyristor principal, ou une zone séparée, à fort dopage p (38) voisine de la zone de base côté cathode, est reliée, par l'intermédiaire d'un élément intégré (D) à caractéristique courant/tension non linéaire, au contact cathodique (72).
EP93919100A 1992-08-29 1993-08-19 Composant a semiconducteur a commande par effet de champ Ceased EP0657066A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4228832 1992-08-29
DE4228832A DE4228832C2 (de) 1992-08-29 1992-08-29 Feldeffekt-gesteuertes Halbleiterbauelement
PCT/EP1993/002216 WO1994006158A1 (fr) 1992-08-29 1993-08-19 Composant a semiconducteur a commande par effet de champ

Publications (1)

Publication Number Publication Date
EP0657066A1 true EP0657066A1 (fr) 1995-06-14

Family

ID=6466754

Family Applications (1)

Application Number Title Priority Date Filing Date
EP93919100A Ceased EP0657066A1 (fr) 1992-08-29 1993-08-19 Composant a semiconducteur a commande par effet de champ

Country Status (5)

Country Link
US (1) US5587595A (fr)
EP (1) EP0657066A1 (fr)
JP (1) JPH08502858A (fr)
DE (1) DE4228832C2 (fr)
WO (1) WO1994006158A1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4244272A1 (de) * 1992-12-28 1994-06-30 Daimler Benz Ag Feldeffektgesteuertes Halbleiterbauelement
JP3255547B2 (ja) * 1994-03-09 2002-02-12 株式会社東芝 絶縁ゲート付きサイリスタ
JP3781452B2 (ja) * 1995-03-30 2006-05-31 株式会社東芝 誘電体分離半導体装置およびその製造方法
JPH08274306A (ja) * 1995-04-03 1996-10-18 Fuji Electric Co Ltd 絶縁ゲート型サイリスタ
DE19638769C1 (de) * 1996-09-21 1998-03-05 Daimler Benz Ag Emittergesteuerter Thyristor
CN1135093C (zh) 1997-10-07 2004-01-21 奥特控制有限公司 带有将一元件保持在其中的挡圈的电加热容器
JPH11297981A (ja) * 1998-04-15 1999-10-29 Hitachi Ltd 複合半導体装置及びそれを使った電力変換装置
US20030122149A1 (en) * 1998-04-15 2003-07-03 Junichi Sakano Complex semiconductor device and electric power conversion appratus using it
DE19820956A1 (de) * 1998-05-11 1999-11-18 Daimler Chrysler Ag Halbleiter-Bauelement und Verfahren zu seiner Herstellung sowie Verwendung des Halbleiter-Bauelements
DE10001865B4 (de) * 2000-01-18 2004-09-23 Infineon Technologies Ag Halbleiterbauelement und Verarbeitungsverfahren zum Verarbeiten des Halbleiterbauelements
US6501109B1 (en) 2001-08-29 2002-12-31 Taiwan Semiconductor Manufacturing Company Active CMOS pixel with exponential output based on the GIDL mechanism
US7342282B2 (en) * 2004-09-10 2008-03-11 Altera Corporation Compact SCR device and method for integrated circuits

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
DE3024015A1 (de) * 1980-06-26 1982-01-07 Siemens AG, 1000 Berlin und 8000 München Steuerbarer halbleiterschalter
DD154049A1 (de) * 1980-10-30 1982-02-17 Siegfried Wagner Steuerbares halbleiterbauelement
ATE29356T1 (de) * 1984-04-11 1987-09-15 Siemens Ag Elektronischer schalter.
JPS6399569A (ja) * 1986-05-29 1988-04-30 Meidensha Electric Mfg Co Ltd ゲ−トタ−ンオフサイリスタ
US4847671A (en) * 1987-05-19 1989-07-11 General Electric Company Monolithically integrated insulated gate semiconductor device
EP0409010A1 (fr) * 1989-07-19 1991-01-23 Asea Brown Boveri Ag Dispositif semi-conducteur de puissance, à extinction
JPH03253078A (ja) * 1989-12-21 1991-11-12 Asea Brown Boveri Ag 遮断可能なパワー半導体素子
DE3942490C2 (de) * 1989-12-22 1994-03-24 Daimler Benz Ag Feldeffekt-gesteuertes Halbleiterbauelement
JPH04291767A (ja) * 1991-03-20 1992-10-15 Fuji Electric Co Ltd 伝導度変調型ｍｏｓｆｅｔ
JP3111576B2 (ja) * 1992-01-06 2000-11-27 富士電機株式会社 半導体装置

Non-Patent Citations (1)

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Title
See references of WO9406158A1 *

Also Published As

Publication number Publication date
US5587595A (en) 1996-12-24
DE4228832A1 (de) 1994-03-10
WO1994006158A1 (fr) 1994-03-17
DE4228832C2 (de) 1994-11-24
JPH08502858A (ja) 1996-03-26

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