EP0602347B1 - Procédé pour le balayage et le reconditionnement de systèmes de transfert - Google Patents
Procédé pour le balayage et le reconditionnement de systèmes de transfert Download PDFInfo
- Publication number
- EP0602347B1 EP0602347B1 EP93116941A EP93116941A EP0602347B1 EP 0602347 B1 EP0602347 B1 EP 0602347B1 EP 93116941 A EP93116941 A EP 93116941A EP 93116941 A EP93116941 A EP 93116941A EP 0602347 B1 EP0602347 B1 EP 0602347B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- flushing
- flushing gas
- transfer systems
- media
- process according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims abstract description 24
- 230000008569 process Effects 0.000 title claims abstract description 18
- 238000011010 flushing procedure Methods 0.000 title claims abstract description 17
- 239000007789 gas Substances 0.000 claims abstract description 15
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 15
- 239000001301 oxygen Substances 0.000 claims abstract description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 11
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910000859 α-Fe Inorganic materials 0.000 claims abstract description 3
- 229910001507 metal halide Inorganic materials 0.000 claims description 13
- 150000005309 metal halides Chemical class 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims description 4
- 230000004913 activation Effects 0.000 claims 1
- 230000007717 exclusion Effects 0.000 claims 1
- 238000011109 contamination Methods 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 description 12
- 238000005260 corrosion Methods 0.000 description 12
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 8
- 238000010926 purge Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004679 hydroxides Chemical class 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910001385 heavy metal Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 150000001805 chlorine compounds Chemical class 0.000 description 2
- UOUJSJZBMCDAEU-UHFFFAOYSA-N chromium(3+);oxygen(2-) Chemical class [O-2].[O-2].[O-2].[Cr+3].[Cr+3] UOUJSJZBMCDAEU-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 230000036571 hydration Effects 0.000 description 2
- 238000006703 hydration reaction Methods 0.000 description 2
- 229910000039 hydrogen halide Inorganic materials 0.000 description 2
- 239000012433 hydrogen halide Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910003336 CuNi Inorganic materials 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910001510 metal chloride Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/10—Oxidising
Definitions
- the invention relates to a method for rinsing passivated transfer systems for corrosive gaseous process media according to the preamble of claim 1.
- these are steels with an austenitic structure such as austenitic stainless steels or austenitic structure components, such as austenite ferrites or CrNi alloys, CuNi alloys or the like, whose limited resistance to corrosive media is solely due to the formation of dense, homogeneous passive layers of approx 10 ⁇ m based.
- this layer is at least covered with a monomolecular water layer (Fig. 2/1). If this layer comes into contact with dry gaseous hydrogen chloride, this water layer is first removed. The driving force behind this reaction is the enormous hydration tendency of HCl. The original, pure oxide passive layer is then converted into a mixture of metal chlorides and oxides. The iron and chromium oxides are only kinetically but not thermodynamically stable with respect to the corrosive medium HCl, especially with a large excess of HCl. This process, which takes place in the absence of oxygen, is called acid corrosion (Fig. 2 / II). The resulting metal halide layer prevents further dissolution of the metal.
- the invention is therefore based on the object of providing a method for rinsing and reconditioning transfer systems for corrosive media from passivatable materials, which makes it possible to increase the service life of the transfer systems and to reduce the contamination of the media.
- the metal halide is converted into the corresponding hydroxide by means of the water vapor.
- the halogen hydrogen formed is removed by hydrate formation.
- the hydroxide is then converted into a stable passive oxide layer using dry oxygen or ozone.
- the preferred ranges for the admixtures O 2 according to the invention extend from 0.1% to 100% and / or from O 3 from 0.1 to 100 g / m 3 and / or from water vapor from 10 ppm to 100%.
- the metal halide surfaces can be reconditioned using a one- or two-stage procedure:
- a perfectly passivated and dried surface of an austenitic material consists of a dense, very thin, homogeneous metal oxide layer that approx. 200 ° C is covered with a monomolecular water layer (Fig.1 / I).
- this water layer is first removed.
- the driving force behind this reaction is the tendency towards hydration of halide-containing corrosive media.
- the original, pure oxide passive layer is converted into a mixture of metal halides and oxides (Fig.1 / II).
- the resulting metal halide layer prevents further dissolution of the metal.
- the metal halides are converted into the corresponding hydroxides.
- the hydrogen halide formed is removed by hydrate formation (Fig. 1 / III).
- a shiny metallic surface is formed.
- Repassivation is carried out by flushing with a gas mixture which, in addition to an inert carrier gas, contains a gaseous oxidizing agent such as oxygen or ozone.
- the hydroxides are largely converted into the more stable oxides of the respective metal (Fig. 2 / IV).
- the metal halide surface of a passivatable material is reconditioned at a temperature between room temperature and 400 ° C. of a purge gas containing oxygen and water vapor (for example 20% O 2 ; 100 ppm H 2 O).
- a purge gas containing oxygen and water vapor for example 20% O 2 ; 100 ppm H 2 O.
- the metal halides are converted into the corresponding hydroxides, at the same time the hydrogen halide formed is removed by hydrate formation and the hydroxides are converted into oxides of the respective metal. Due to the simultaneous surface reaction, the two-step process described in embodiment 1 is advantageously replaced by a one-step process.
- the purge gas contains a gaseous oxidizing agent, such as oxygen or ozone, which is also able to oxidize the metal halides directly.
- a gaseous oxidizing agent such as oxygen or ozone
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Claims (6)
- Procédé de balayage de systèmes de transfert passivés pour des milieux de procédé, gazeux, corrosifs, qui activent la surface superficielle passivée des matières comme par exemple en austénite ou en austénite-ferrite,
caractérisé en ce qu'
on transforme de nouveau la surface superficielle activée à l'état passif en excluant les milieux de procédé pendant le balayage du système de transfert avec un gaz de balayage contenant de l'ozone, de l'oxygène et/ou de la vapeur d'eau. - Procédé selon la revendication 1,
caractérisé en ce que
le gaz de balayage est de l'air. - Procédé selon la revendication 1 ou 2,
caractérisé en ce que la température du gaz de balayage est comprise entre la température ambiante et 400°C. - Procédé selon la revendication 1, pour des surfaces superficielles contenant des halogénures métalliques,
caractérisé par
un procédé en deux étapes consistant tout d'abord à transformer l'halogénure métallique en un hydroxyde correspondant à l'aide d'un gaz de balayage contenant de l'humidité, puis on transforme l'hydroxyde à l'aide d'un gaz de balayage sec contenant de l'oxygène ou de l'ozone en une couche d'oxyde passivée, stable. - Procédé selon l'une des revendications 1 à 4,
caractérisé en ce que
le milieu gazeux corrosif est formé d'un élément choisi dans le groupe HCl, Cl2, HF, HBr, NH3. - Procédé selon l'une des revendications 1 à 5,
caractérisé en ce que
le gaz de rinçage contient entre 0,1 et 100 % en volume de O2, entre 0,1 et 100 g/m3 d'ozone O3 et/ou entre 10 ppm et 100 % de vapeur d'eau.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4242967A DE4242967A1 (de) | 1992-12-18 | 1992-12-18 | Verfahren zum Spülen und Rekonditionieren von Transfersystemen |
DE4242967 | 1992-12-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0602347A1 EP0602347A1 (fr) | 1994-06-22 |
EP0602347B1 true EP0602347B1 (fr) | 1997-05-14 |
Family
ID=6475770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP93116941A Expired - Lifetime EP0602347B1 (fr) | 1992-12-18 | 1993-10-20 | Procédé pour le balayage et le reconditionnement de systèmes de transfert |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0602347B1 (fr) |
AT (1) | ATE153081T1 (fr) |
DE (2) | DE4242967A1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6648988B2 (en) | 2001-08-17 | 2003-11-18 | Exxonmobil Research And Engineering Company | Furnace run length extension by fouling control |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3145236C2 (de) * | 1981-11-13 | 1984-11-22 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8000 München | Verfahren zur Herstellung von verformungsbeständigen oxydischen Schutzschichten |
US4519851A (en) * | 1984-06-15 | 1985-05-28 | International Business Machines Corporation | Method for providing pinhole free dielectric layers |
JPH02179867A (ja) * | 1988-12-29 | 1990-07-12 | Tadahiro Omi | プロセスガス供給システム |
IT1251524B (it) * | 1991-03-18 | 1995-05-16 | Vincenzo Lagana | Metodo per la passivazione delle superfici metalliche interessate da condizioni e agenti promotori di corrosione |
US5188714A (en) * | 1991-05-03 | 1993-02-23 | The Boc Group, Inc. | Stainless steel surface passivation treatment |
-
1992
- 1992-12-18 DE DE4242967A patent/DE4242967A1/de not_active Withdrawn
-
1993
- 1993-10-20 EP EP93116941A patent/EP0602347B1/fr not_active Expired - Lifetime
- 1993-10-20 AT AT93116941T patent/ATE153081T1/de not_active IP Right Cessation
- 1993-10-20 DE DE59306445T patent/DE59306445D1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
ATE153081T1 (de) | 1997-05-15 |
EP0602347A1 (fr) | 1994-06-22 |
DE59306445D1 (de) | 1997-06-19 |
DE4242967A1 (de) | 1994-06-23 |
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