EP0589362B1 - Appareil de pompe à vide - Google Patents
Appareil de pompe à vide Download PDFInfo
- Publication number
- EP0589362B1 EP0589362B1 EP19930114957 EP93114957A EP0589362B1 EP 0589362 B1 EP0589362 B1 EP 0589362B1 EP 19930114957 EP19930114957 EP 19930114957 EP 93114957 A EP93114957 A EP 93114957A EP 0589362 B1 EP0589362 B1 EP 0589362B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- oil
- line
- motor housing
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/06—Lubrication
- F04D29/063—Lubrication specially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
Definitions
- the invention relates to a vacuum pump apparatus comprising a pump mechnism section including a pump casing having suction and discharge ports formed therein, and pump rotor and stator both accommodated in said pump casing; a pump-driving section including a motor housing connected to an end of said pump casing and a driving motor accommodated in said motor housing, said driving motor having a driving shaft extending from said motor housing through said end of said pump casing into said pump casing and drivingly connected to said pump rotor so that said pump rotor is rotated by said driving motor to suck a gas through said suction port into said pump casing and discharge the thus sucked gas from said pump casing through said discharge port; bearing means rotatably supporting said driving shaft on said end of said pump casing; means for introducing purge gas into said pump casing and said motor housing and providing a seal between said pump casing and said motor housing; said motor housing defining a reservoir for lubricatant oil to be fed to said bearing means; said motor housing having formed therein an exhaust
- the vacuum pump of the generic kind is disclosed in JP-A-1-130093 and is structured such that lubricant oil exhausted through an exhaust port of a pump-driving section is collected by an oil mist filter and is returned from the filter directly into an oil reservoir provided in the pump-driving section.
- Fig. 5 is a diagrammatic illustration of the vacuum pump of the JP-A-1-130093 showing the fluid flows in the vacuum pump.
- the vacuum pump of Fig. 5 comprises a pump mechanism section 9 which is isolated from a pump-driving section 10 by menas of a shaft seal section 6.
- the pump mechanism section 9 is operated in a vacuumed condition, while the pump-driving section 10 is under the atmospheric pressure.
- the shaft seal section 6 is supplied with purge gas and divides the flow 15 of the purge gas into two brunches 19 and 20 which respectively enter the pump mechanism section 9 and the pump-driving section 10.
- the pump-driving section 10 incorporates ball bearings (not shown) which are supplied with lubricant oil by an oil pump 12 disposed outside the vacuum pump.
- the purge gas introduced into the pump mechanism section is discharged therefrom through a discharge port 2, while the purge gas introduced into the pump-driving section 10 is discharged therefrom through an exhaust port 18.
- An oil mist filter 21 is provided in an exhaust line 21a connected to and extending from the exhaust port 18.
- the oil mist filter 21 has a drain lilne 17 which is connected to an oil reservoir (not shown) provided in the pump-driving section 10 so that the lubricant oil exhausted from the pump-driving section is collected by the filter and returned to the pump.
- the oil mist filter was required to be of a structure providing an extremely low pressure loss. For this reason, the lubricant oil exhausted from the pump-driving section together with the purge gas also exhausted therefrom could be collected only to limited percentages, with resultant disadvantages that the amount of the lubricant oil exhausted and released from the oil mist filter into the atmosphere was increased and that the oil reservoir had to be supplied with fresh lubricant oil at a short interval or cycle.
- the pump in the case where the vacuum pump is used with a semiconductor producing apparatus or the like which must be operated in a cleaned room, the pump is to be also installed in the cleaned room. In such case, therefore, a difficulty is involved that the gas exhausted from the pump-driving section of the vacuum pump must be processed so as not to contaminate the cleaned room.
- the pump had to be equipped with two different discharge lines, one being a line connected to the discharge port of the pump mechanism section and the other being an exhaust line for the purge gas and mist of lubricant oil exhausted from the pump-driving section.
- US-A-4 231 307 shows a centrifugal refrigerant compressor which comprises a compressing section in a housing, an intermediate gear and bearing section in a housing, and a motor section in a housing.
- the compressor is provided with an oil separation and return system including an oil and refrigerant gas line extending from the gear and bearing housing to a filter housing and a refrigerant gas return line extending from the filter housing to a suction space in the compressing section housing.
- the filter housing has an oil outlet to which is connected an oil return line.
- the compressor is further provided with an oil pump which is provided inside the gear and bearing housing and has a discharge port from which an oil supply line extends to a second oil pump which is in the form of a jet pump to which the oil return line from the oil filter housing is connected.
- the jet pump is operative to suck oil from the oil outlet of the filter housing so that the oil from the oil outlet of the filter housing is combined with or added to the oil from the oil pump and the mixed oil is fed to bearings and gears in the gear and bearing housing.
- an oil pump is disposed outside said pump casing and said motor housing and is operative to suck the lubricant oil from said reservoir and feed the thus sucked lubricant oil to said bearing means, and said drain line has a downstream end communicated with a suction port of said oil pump so that the lubricant oil collected by said oil mist filter means is sucked by said oil pump and flows through said drain line to said oil pump so as to be mixed with or added to the lubricant oil sucked by said oil pump from said reservoir.
- the drain line of the oil mist filter has its downstream end communicated with the suction port of the oil pump. Accordingly, because the oil mist filter is subjected to vacuum created by the oil pump, the oil mist filter does not exert any resistance to the discharge of the purge gas and mist of lubricant oil from the pump-driving section of the vacuum pump. Accordingly, the oil mist filter can be of a high oil-collection efficiency that is capable of collect substantially all parts of the lubricant oil exhausted from the pump-driving section of the vacuum pump.
- an oil mist filter having such a high oil-collection efficiency is operative to reduce the amount of gas flowing, together with the oil thus collected lubricant oil, from the filter through the drain line into and through the oil pump.
- an oil mist filter of such a high oil-collection efficiency can avoid the occurrence of reduction in the performance of the oil pump which otherwise would be caused by the use of such oil mist filter.
- an oil mist filter of a high oil-collection efficiency It would be possible also in the prior art to provide an oil mist filter of a high oil-collection efficiency.
- high oil-collection efficiency involves a high pressure loss
- an oil mist filter of such a high oil-collection efficiency if simply provided in an exhaust line in the prior art vacuum pump apparatus will exert a resistance to the flow of gas-oil mixture exhausted from the pump-driving section of the pump apparatus, so that the pressure in the pump-driving section is increased to pressurize the lubricant oil in the oil reservoir and thus forcibly cause the lubricant oil to blow out of the drain line of the oil mist filter.
- the drain line of the oil mist filter is provided with means for increasing a resistance of the drain line to the fluid flow therethrough.
- the resistance increasing means may preferably comprise at least one restriction orifice provided in the drain line. The restriction orifice will increase the resistance of the drain line to the fluid flow therethrough and thus reduce the amount of gas sucked into the oil pump for thereby avoiding the occurrence of reduction in the oil-pumping performance of the oil pump which would otherwise be caused if a large amount of gas is sucked into the oil pump.
- the provision of the oil mist filter of a high oil-collection efficiency is effective to assure that the amount of the lubricant oil exhausted from the oil mist filter through the gas-outlet thereof can be greatly reduced.
- an exhaust line connected to and extending from the gas-outlet of the oil mist filter can be connected to or merged into a pump discharge line extending from the discharge port of the pump mechanism section of the vacuum pump to greatly simplify the overall structure of the pump.
- the amount of lubricant oil exhausted from the pump-driving section of the vacuum pump into the atmosphere can be extremely reduced to prolong the interval of supply of fresh oil to the oil reservoir;
- the exhausted lubricant oil can be separated from the exhausted gas and collected at a high rat, the thus separated gas can be released into the atmosphere with reduced effect on oil-contamination of the environment and, in addition, necessitates reduced care for the exhaust line;
- the improvement by the invention can be achieved by adding simple component parts to the conventional vacuum pump and provides remarkable advantageous results;
- the collection of exhausted lubricant oil at a high rate permits the exhaust line to be connected to the pump discharge line and, thus, makes it possible to unite the pump discharge line and the gas exhaust line into a single line.
- the drain line extending from the oil mist filter means has its downstream end communicated with the suction port of the oil pump. Accordingly, the oil separation and return system of the applicant's vacuum pump apparatus does not require any pump to be provided in addition to the oil pump.
- a pump machanism section 9 includes a pump casing 3 having formed therein suction and discharge ports 1 and 2 and pump stator and rotor 4 and 5 both accommodated in the pump casing 3 and disposed in opposed relationship.
- a pump-driving section 10 includes a motor housing 10a fixedly connected to an end of the pump casing 3 and a motor 8 disposed in the motor housing 10a and having a driving shaft 8a which is drivingly connected to the pump rotor 5.
- the pump mechanism section 9 When the pump rotor 5 is driven by the motor 8, the pump mechanism section 9 operates to suck a gas into the pump casing 3 through the suction port 1, as indicated by an arrow A in Fig. 1, and discharges the thus sucked gas from the pump casing 3 through the discharge port 2, as indicated by another arrow B also shown in Fig. 1.
- a passage 15 is formed to introduce purge gas, as indicated by a further arrow C, to shaft seals 6 operative to distribute the purge gas to the pump casing 3 and the motor housing 10a so that the pump mechanism section 9 and the pump-driving section 10 are kept at predetermined pressures, respectively.
- the driving shaft 8a is rotatably supported by upper and lower bearings 7.
- the upper bearing 7 is mounted on the end of the pump casing 3 to which the motor housing 10a is connected.
- the other or lower bearing 7 is mounted in the motor housing 10a.
- the motor housing 10a has a lower part which defines therein an oil reservoir 11 for storing an amount of lubricant oil therein.
- An oil pump 12 is disposed outside the pump casing 3 and the motor housing 10a to suck the lubricant oil from the oil reservoir 11 and through an oil suction line 12a and positively circulate or feed the thus sucked oil through an oil feeding line 12b to the bearings 7.
- the motor housing 10a has formed therein an exhaust port 18 connected with an exhaust line 18a in which is disposed an oil mist filter 13 of a high oil-collection efficiency.
- the oil mist filter 13 has a gas-outlet 14 forming a part of the exhaust line 18a and a drain port connected with a drain line 17 having a downstream end connected to the oil suction line 12a so that the oil mist filter 13 is subjected to a vacuum force created in the oil pump 12.
- the drain line includes a box 23 for collecting fine particles of foreign matter.
- the particle collection box 23 has an inlet formed in the top wall thereof and connected to the drain port of the oil mist filter 13 by a short conduit 22.
- the top wall of the box 23 has also formed therein an outlet connected with an end of a pipe line 24 having a small inner diameter.
- the other end of the pipe line 24 is connected to the oil suction line 12a of the oil pump 12.
- a plurality of restriction orifices 25 are provided in the pipe line 24 to increase the resistance of the pipe line 24 to the fluid flow therethrough.
- Fig. 3 graphically illustrates the results of tests on the relationship between the length 1 of the pipe line 24 and the rate G of the fluid flow therethrough.
- the solid line in Fig. 3 shows the result of the test in which the pipe line 24 was not provided with any restriction orifice 25, while the broken line shows the result of the test in which the pipe line 24 was provided with restriction orifices 25.
- the rate Q of the flow of a gas-oil mixture through the pipe line 24 can be adjusted by varying the number of restriction orifices 25 to be installed in the pipe line 24 and by varying the length 1 of the pipe line 24. Accordingly, the flow rate Q can be adjusted to fall within the range which is allowable for the oil pump 12 to avoid the occurrence of gas flow into the pump at such an unduly high level that will deteriorate the oil-pumping performance of the oil pump 12.
- the oil mist filter 13 disposed in the exhaust line 18a can be of a high oil-collection efficiency, so that the interval or cycle with which the oil reservoir in the motor housing 10a is supplied with fresh or additional lubricant oil can be extended to assure a prolonged maintenance-free period of the pump.
- the amount of lubricant oil released into the atmosphere through the gas-outlet 14 of the oil mist filter 13 can be reduced to minimize the problem of contamination of a room in which the vacuum pump is installed.
- the particle collection box 23 provided in the drain line 17 just downstream of the oil mist filter 13 is operative to collect and trap therein any fine particles of a foreign matter which would fall from the filter 13 and, thus, guard the pipe line 24 downstream of the particle collecting box 23.
- Fig. 4 shows another embodiment of the invention which is based on the preceding embodiment described with reference to Figs. 1 - 3.
- the exhaust line connected to the exhaust port 18 of the pump-driving section 10 includes a filter-exhaust line 18b connected at one end to the gas-outlet 14 of the oil mist filter 13.
- the other or downstream end of the filter-exhaust line 18b is connected to a pump discharge line 26 connected to and extending from the discharge port 2 of the pump mechanism section 9 of the vacuum pump.
- This design advantageously reduces the number of pipe lines to be extended from the vacuum pump to a point remote therefrom and, thus, simplifies the arrangement of pipes and assures a simplified maintenance of the vacuum pump apparatus. It will be noted that these advantageous results can be obtained from the fact that substantially all parts of the lubricant oil exhausted from the pump-driving section 10 can be removed from the exhausted gas by the oil mist filter 13.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Claims (7)
- Dispositif de pompe à vide comprenant:une section de mécanisme de pompe (9) comprenant un boîtier de pompe (3) comportant des orifices d'aspiration et de refoulement (1, 2) formés dans celui-ci, et un rotor (5) et un stator (4) de pompe tous deux reçus dans ledit boîtier de pompe;une section d'entraînement de pompe (10) comprenant un carter de moteur (10a) connecté à une extrémité dudit boîtier de pompe (3) et un moteur d'entraînement (8) reçu dans ledit carter de moteur, ledit moteur d'entraînement comportant un arbre d'entraînement (8a) s'étendant à partir dudit carter de moteur à travers ladite extrémité dudit boîtier de pompe (3), à l'intérieur dudit boîtier de pompe (3) et connecté en entraînement audit rotor de pompe, de telle sorte que ledit rotor de pompe tourne sous l'actionnement dudit moteur d'entraînement, de façon à aspirer un gaz à travers ledit orifice d'aspiration à l'intérieur dudit boîtier de pompe et à refouler le gaz ainsi aspiré dudit boîtier de pompe par l'intermédiaire dudit orifice de refoulement (2);des moyens formant palier (7) supportant à rotation ledit arbre d'entraînement sur ladite extrémité dudit boîtier de pompe;des moyens (15, 6) pour introduire du gaz de purge dans ledit boîtier de pompe et ledit carter de moteur et constituer un joint entre ledit boîtier de pompe et ledit carter de moteur;ledit carter de moteur définissant un réservoir (11) pour de l'huile lubrifiante devant être délivrée auxdits moyens formant palier;ledit carter de moteur comportant, formé à l'intérieur de celui-ci, un orifice d'échappement (18) à travers lequel une partie du gaz de purge et un brouillard de l'huile lubrifiante qui a lubrifié lesdits moyens formant palier peut être déchargée dudit carter de moteur;une ligne d'échappement (18a, 18b) ayant une extrémité amont connectée audit orifice d'échappement; etdes moyens formant filtre de brouillard d'huile (13) disposés dans ladite ligne d'échappement de façon à séparer ladite partie du gaz de purge de l'huile lubrifiante déchargée dudit carter de moteur afin de collecter par conséquent l'huile lubrifiante ainsi séparée, lesdits moyens formant filtre de brouillard d'huile comportant un orifice de sortie de gaz (14) pour ladite partie du gaz de purge séparée de l'huile lubrifiante déchargée dudit carter de moteur, lesdits moyens formant filtre de brouillard d'huile comportant de plus une ligne de vidange (17) pour l'huile lubrifiante ainsi collectée,caractérisé en ce queune pompe à huile (12) est disposée à l'extérieur dudit boîtier de pompe et dudit carter de moteur et fonctionne de façon à aspirer de l'huile lubrifiante dudit réservoir (11) et délivre l'huile lubrifiante ainsi aspirée auxdits moyens formant palier, etladite ligne de vidange comporte une extrémité aval communiquant avec un orifice d'aspiration de ladite pompe à huile (12), de telle sorte que l'huile lubrifiante collectée par lesdits moyens formant filtre de brouillard d'huile soit aspirée par ladite pompe à huile et s'écoule par l'intermédiaire de ladite ligne de vidange vers ladite pompe à huile de façon à être mélangée avec l'huile lubrifiante aspirée par ladite pompe à huile depuis ledit réservoir (11) ou à être ajoutée à celle-ci.
- Dispositif de pompe à vide selon la revendication 1, comportant de plus des moyens (25) pour accroître la résistance de ladite ligne de vidange (17) à l'écoulement de fluide à travers ladite ligne de vidange, lesdits moyens d'accroissement de résistance étant disposés dans ladite ligne de vidange entre lesdits moyens formant filtre de brouillard d'huile (13) et ladite pompe à huile (12).
- Dispositif de pompe à vide selon la revendication 2, dans lequel lesdits moyens d'accroissement de résistance comprennent au moins un moyen formant orifice de limitation (25) disposé dans ladite ligne de vidange.
- Dispositif de pompe à vide selon la revendication 2, comprenant de plus des moyens (23) disposés dans ladite ligne de vidange pour collecter des fines particules de matières étrangères s'écoulant à travers ladite ligne de vidange.
- Dispositif de pompe à vide selon la revendication 1, comprenant de plus une ligne de refoulement de pompe (26) s'étendant à partir dudit orifice de refoulement (2) dudit boîtier de pompe (3), ladite ligne d'échappement (18a, 18b) comportant une partie aval (18b) s'étendant dudit orifice de sortie de gaz (14) desdits moyens formant filtre de brouillard d'huile (13) à ladite ligne de refoulement de pompe (26).
- Dispositif de pompe à vide selon la revendication 2, comprenant de plus une ligne de refoulement de pompe (26) s'étendant à partir dudit orifice de refoulement (2) dudit boîtier de pompe (3), ladite ligne d'échappement (18a, 18b) comportant une partie aval (18b) s'étendant entre ledit orifice de sortie de gaz (14) desdits moyens formant filtre de brouillard d'huile (13) et ladite ligne de refoulement de pompe (26).
- Dispositif de pompe à vide selon la revendication 4, comprenant de plus une ligne de refoulement de pompe (26) s'étendant à partir dudit orifice de refoulement (2) dudit boîtier de pompe (3), ladite ligne d'échappement (18a, 18b) comportant une partie aval (18b) s'étendant entre ledit orifice de sortie de gaz (14) desdits moyens formant filtre de brouillard d'huile (13) et ladite ligne de refoulement de pompe (26).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP251179/92 | 1992-09-21 | ||
JP4251179A JP2978339B2 (ja) | 1992-09-21 | 1992-09-21 | 真空ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0589362A1 EP0589362A1 (fr) | 1994-03-30 |
EP0589362B1 true EP0589362B1 (fr) | 1996-07-03 |
Family
ID=17218863
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19930114957 Expired - Lifetime EP0589362B1 (fr) | 1992-09-21 | 1993-09-16 | Appareil de pompe à vide |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0589362B1 (fr) |
JP (1) | JP2978339B2 (fr) |
DE (1) | DE69303447T2 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10648509B2 (en) | 2017-05-30 | 2020-05-12 | Itt Manufacturing Enterprises Llc. | Oil filter/liquid indicator assembly |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3635366B2 (ja) * | 2000-04-07 | 2005-04-06 | 株式会社平安コーポレーション | Ncマシンのマイクロフォグ回収装置 |
EP1941971B1 (fr) * | 2004-03-22 | 2013-05-29 | Paul Müller GmbH & Co. KG Unternehmensbeteiligungen | Broche pour une machine-outil dotée d'un roulement ayant une alimentation capillaire destinée à l'introduction de lubrifiant |
JP2006177281A (ja) * | 2004-12-24 | 2006-07-06 | Shimadzu Corp | 高速回転機器 |
GB0508013D0 (en) * | 2005-04-20 | 2005-05-25 | Boc Group Plc | Vacuum pump |
DE102007054632A1 (de) * | 2007-11-15 | 2009-05-20 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
KR101340375B1 (ko) * | 2011-11-22 | 2013-12-11 | 동일자동화(주) | 진공단열패널 가공장치 |
DE102017011691A1 (de) * | 2017-12-18 | 2019-06-19 | Mann+Hummel Gmbh | Sensordrainageeinheit, Flüssigkeitsabscheider sowie Verfahren zur Drainagemengen-Steuerung eines Flüssigkeitsabscheiders |
JP7289627B2 (ja) * | 2018-10-31 | 2023-06-12 | エドワーズ株式会社 | 真空ポンプ、保護網及び接触部品 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1208696A (fr) * | 1957-11-29 | 1960-02-25 | Sulzer Ag | Installation de turbo-machine |
US4213307A (en) * | 1978-11-13 | 1980-07-22 | Westinghouse Electric Corp. | Oil separation and return system for centrifugal refrigerant compressors |
US4311004A (en) * | 1979-10-26 | 1982-01-19 | Rotoflow Corporation | Gas compression system and method |
JPS6430093A (en) * | 1987-07-24 | 1989-01-31 | Hitachi Ltd | Semiconductor storage device |
-
1992
- 1992-09-21 JP JP4251179A patent/JP2978339B2/ja not_active Expired - Fee Related
-
1993
- 1993-09-16 DE DE1993603447 patent/DE69303447T2/de not_active Expired - Fee Related
- 1993-09-16 EP EP19930114957 patent/EP0589362B1/fr not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10648509B2 (en) | 2017-05-30 | 2020-05-12 | Itt Manufacturing Enterprises Llc. | Oil filter/liquid indicator assembly |
US11111959B2 (en) | 2017-05-30 | 2021-09-07 | Itt Manufacturing Enterprises Llc | Oil filter/liquid indicator assembly |
Also Published As
Publication number | Publication date |
---|---|
DE69303447D1 (de) | 1996-08-08 |
JP2978339B2 (ja) | 1999-11-15 |
EP0589362A1 (fr) | 1994-03-30 |
JPH06101699A (ja) | 1994-04-12 |
DE69303447T2 (de) | 1996-10-31 |
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