DE69303447D1 - Vakuumpumpgerät - Google Patents

Vakuumpumpgerät

Info

Publication number
DE69303447D1
DE69303447D1 DE69303447T DE69303447T DE69303447D1 DE 69303447 D1 DE69303447 D1 DE 69303447D1 DE 69303447 T DE69303447 T DE 69303447T DE 69303447 T DE69303447 T DE 69303447T DE 69303447 D1 DE69303447 D1 DE 69303447D1
Authority
DE
Germany
Prior art keywords
pumping device
vacuum pumping
vacuum
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69303447T
Other languages
English (en)
Other versions
DE69303447T2 (de
Inventor
Kazuaki Nakamori
Minoru Taniyama
Katsuhiko Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE69303447D1 publication Critical patent/DE69303447D1/de
Application granted granted Critical
Publication of DE69303447T2 publication Critical patent/DE69303447T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE1993603447 1992-09-21 1993-09-16 Vakuumpumpgerät Expired - Fee Related DE69303447T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4251179A JP2978339B2 (ja) 1992-09-21 1992-09-21 真空ポンプ

Publications (2)

Publication Number Publication Date
DE69303447D1 true DE69303447D1 (de) 1996-08-08
DE69303447T2 DE69303447T2 (de) 1996-10-31

Family

ID=17218863

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1993603447 Expired - Fee Related DE69303447T2 (de) 1992-09-21 1993-09-16 Vakuumpumpgerät

Country Status (3)

Country Link
EP (1) EP0589362B1 (de)
JP (1) JP2978339B2 (de)
DE (1) DE69303447T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3635366B2 (ja) * 2000-04-07 2005-04-06 株式会社平安コーポレーション Ｎｃマシンのマイクロフォグ回収装置
EP1941971B1 (de) * 2004-03-22 2013-05-29 Paul Müller GmbH & Co. KG Unternehmensbeteiligungen Spindel für eine Werkzeugmaschine mit einem Lagerelement mit einer kapillaren Zuleitung zur Zuführung von Schmierstoff
JP2006177281A (ja) * 2004-12-24 2006-07-06 Shimadzu Corp 高速回転機器
GB0508013D0 (en) * 2005-04-20 2005-05-25 Boc Group Plc Vacuum pump
DE102007054632A1 (de) * 2007-11-15 2009-05-20 Pfeiffer Vacuum Gmbh Vakuumpumpe
KR101340375B1 (ko) * 2011-11-22 2013-12-11 동일자동화(주) 진공단열패널 가공장치
US10648509B2 (en) 2017-05-30 2020-05-12 Itt Manufacturing Enterprises Llc. Oil filter/liquid indicator assembly
DE102017011691A1 (de) * 2017-12-18 2019-06-19 Mann+Hummel Gmbh Sensordrainageeinheit, Flüssigkeitsabscheider sowie Verfahren zur Drainagemengen-Steuerung eines Flüssigkeitsabscheiders
JP7289627B2 (ja) * 2018-10-31 2023-06-12 エドワーズ株式会社 真空ポンプ、保護網及び接触部品

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1208696A (fr) * 1957-11-29 1960-02-25 Sulzer Ag Installation de turbo-machine
US4213307A (en) * 1978-11-13 1980-07-22 Westinghouse Electric Corp. Oil separation and return system for centrifugal refrigerant compressors
US4311004A (en) * 1979-10-26 1982-01-19 Rotoflow Corporation Gas compression system and method
JPS6430093A (en) * 1987-07-24 1989-01-31 Hitachi Ltd Semiconductor storage device

Also Published As

Publication number Publication date
EP0589362A1 (de) 1994-03-30
EP0589362B1 (de) 1996-07-03
JP2978339B2 (ja) 1999-11-15
DE69303447T2 (de) 1996-10-31
JPH06101699A (ja) 1994-04-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee