EP0521867B1 - Dispositif de regeneration electrolytique d'un reactif d'attaque contenant des ions chlorure et metal - Google Patents

Dispositif de regeneration electrolytique d'un reactif d'attaque contenant des ions chlorure et metal Download PDF

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Publication number
EP0521867B1
EP0521867B1 EP91904225A EP91904225A EP0521867B1 EP 0521867 B1 EP0521867 B1 EP 0521867B1 EP 91904225 A EP91904225 A EP 91904225A EP 91904225 A EP91904225 A EP 91904225A EP 0521867 B1 EP0521867 B1 EP 0521867B1
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EP
European Patent Office
Prior art keywords
anode
cathode
rods
etching agent
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP91904225A
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German (de)
English (en)
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EP0521867A1 (fr
Inventor
Heribert Reith
Hans Lander
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hans Hollmueller Maschinenbau & Co GmbH
Robert Bosch GmbH
Original Assignee
Hans Hollmueller Maschinenbau & Co GmbH
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hans Hollmueller Maschinenbau & Co GmbH, Robert Bosch GmbH filed Critical Hans Hollmueller Maschinenbau & Co GmbH
Publication of EP0521867A1 publication Critical patent/EP0521867A1/fr
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Publication of EP0521867B1 publication Critical patent/EP0521867B1/fr
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Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions

Definitions

  • the invention relates to a device for the electrolytic regeneration of an etchant containing chloride and metal ions, with an electrolysis chamber in which a first anode and a first cathode are arranged, with a first DC voltage source to which the first anode and the first cathode are connected, whereby separates metal from the etchant at the first cathode during the electrolysis process taking place between it and the first anode, and furthermore anodically decomposes water to adjust the pH in the etchant, thereby generating hydrogen ions and oxygen.
  • EP-PS 01 41 905 Such a device is known from EP-PS 01 41 905.
  • This prior publication describes in detail the chemical and electrophysical processes that take place in the etching reaction and the electrolytic regeneration of an etchant, as is used in particular in the production of electronic circuit boards. Reference is made to these statements.
  • EP-PS 01 41 905 it is recognized in EP-PS 01 41 905 that part of the copper ions reduced in the etching reaction is oxidized again by atmospheric oxygen, in particular when spraying in the etching machine. This side reaction is undesirable because it manifests itself in an increase in pH, which in turn influences the etching reaction and the electrolytic regeneration.
  • the procedure is therefore such that water is decomposed consciously at the anode during the electrolysis process with the development of oxygen.
  • the object of the present invention is to design a device of the type mentioned in such a way that the composition of the etchant and thus also the etching conditions are kept highly constant and as a result both the electrolytic deposition of the metal enriched in the etchant and the adjustment of the pH -Value can be done under optimal conditions.
  • a completely independent pair of electrodes with an independent power supply is provided for the electrolytic oxygen formation which serves to adjust the pH.
  • Two separate electrolysis processes then take place within the device, both of which have only one function and therefore both for their respective function can be optimally adjusted.
  • current density and duration of the electrolysis process had to be primarily adapted to the requirements which were determined by the deposition of the metal on the cathode. This left only a limited scope for the selection of the parameters that are responsible for the formation of oxygen, so that maintaining a constant pH was only possible to a limited extent. Due to the separation of the two electrolysis processes provided according to the invention, however, the formation of oxygen and thus the adjustment of the pH value can take place without taking into account those processes which lead to the deposition of the metal enriched in the etchant.
  • the second anode is preferably in the form of a plurality of anode rods connected in parallel and the second cathode is in the form of a plurality of cathode rods connected in parallel.
  • the anode rods and the cathode rods are preferably combined in auxiliary electrode arrangements in which a row of cathode rods is arranged on both sides of a middle row of anode bars.
  • auxiliary electrode arrangements can be used side by side in modules (depending on the size and capacity of the machine). They can be electrically connected in series, but preferably in parallel.
  • the second anode consists at least on its surface of an oxide or mixed oxide of the metals of the platinum group (platinum, titanium, tantalum, iridium, rubidium).
  • the anode has a gas-permeable coating.
  • This can be, for example, a polypropylene fabric, a fabric made of fluoroplastic, e.g. PTFE, or made of carbon fibers or a needle felt.
  • a particular advantage of the present invention is that the adjustment of the pH can be automated particularly easily.
  • a pH measuring probe can be provided which monitors the pH in the etchant and acts on a control circuit which in turn controls the second DC voltage source in such a way that the pH in the etchant is kept at an essentially constant value.
  • the control variables in this control circuit do not depend in any way on those control variables in which the electrolysis leading to the deposition of the enriched metal is generally integrated.
  • the device shown in Figure 1 is used for the electrolytic regeneration of a chloride-containing etchant, which is used in the production of electrical circuit boards and has thereby been enriched with etched metal ions, in particular copper ions.
  • a chloride-containing etchant which is used in the production of electrical circuit boards and has thereby been enriched with etched metal ions, in particular copper ions.
  • the chemical and electrophysical processes that take place in this connection and the problems that arise in this connection are described in detail in EP-PS 01 41 905 described above. This is referred to.
  • the device contains an electrolysis chamber 2 in a machine housing 1.
  • the electrolysis chamber 2 is filled with the etchant 4 to be regenerated up to a certain level 3.
  • the type of supply and discharge of the etchant and the associated control processes are not the subject of the present invention and are not shown in the drawing.
  • DE-OS 26 50 912 can be used for this.
  • a deposition drum 5 is immersed up to about half in the etchant 4. It has a jacket made of copper, which is coated with a titanium layer 7. As will be explained in more detail below, this serves as the cathode of the electrolysis regenerating the etchant.
  • the separating drum 5 is rotatably mounted on the machine housing 1 by means of an axis 8, the rotation being provided by an electric motor (not shown).
  • the axis 8 also serves to supply current to the titanium layer 7 serving as the cathode via the end walls of the separation drum 5.
  • An anode 14 in the form of an anode basket made of parallel rods or a mesh surrounds the separating drum 5 as a concentric circular arc. It is connected via a cable 9 to the positive pole of a DC voltage source 10. Similarly, the axis 8 of the separating drum 5 is connected to the negative pole of the DC voltage source 10 via a cable 11.
  • the redox electrode 12 is shown in FIG. 1 directly in the electrolysis chamber 2; However, the arrangement in a flow path lying outside the electrolysis chamber 2, for example in the pipeline (not shown in the drawing), which connects the sump 21 below the electrolysis chamber 2 to the electrolysis chamber, is more favorable in terms of measurement technology.
  • control circuit 13 which in turn controls the DC voltage source 10 so that the ratio of the concentrations of monovalent and divalent copper ions, for which the measured redox potential is a measure and which in turn serves as an indication of the progress of the regeneration of the etchant, within certain limits remains constant.
  • the type of regulation is not critical in the present context; it is only important that this regulation can only be operated from the point of view of an optimal depletion of the etchant from the etched metal contained therein and that no other factors need to be taken into account here.
  • the conditions are significantly different than in the subject of EP-PS 01 41 905, where by a uniform Electrolysis not only the actual deposition process of the metal but at the same time a certain oxygen generation at the anode to restore a certain pH value.
  • a scraper knife 18 is under a certain pressure and possibly parallel to the lateral surface of the separating drum 5 in an oscillating manner against the titanium layer 7 and from there strips the deposited copper.
  • the copper powder obtained in this way falls into a bagging device 19 and is packaged in easy-to-handle containers 20, which are then sent to a re-user.
  • sump 21 in the machine housing 1, in which sump 4 is also located up to a mirror 22.
  • the etchant 4 contained in the sump 21 is switched on in a certain manner, which is not of interest here, in the control process for the supply or discharge of enriched or depleted etchant to the electrolysis chamber 2.
  • An example of this, but to which the present invention is not restricted, can be found in the earlier patent application WO 90/05797
  • the auxiliary electrode arrangement 23 is immersed in the etchant 4, which is located in the sump 21. This is shown enlarged in Figures 2 and 3, so that the details can be seen better.
  • the auxiliary electrode arrangement 23 comprises a row of anode rods 24 and two rows of cathode rods 25 on both sides of the anode rods 24. The arrangement in rows can be seen particularly well in FIG. 2.
  • the anode rods 24 are electrically connected to one another at their upper end via a busbar 26.
  • the row of cathode rods 25 on the left in FIG Busbar 27 and the row of cathode rods 25 on the right in FIG. 3 are electrically connected to one another at their upper end by a busbar 28.
  • the arrangement rods 24 and cathode rods 25 are held in the arrangement described in a holding plate 29 made of electrically insulating material, which in turn can be fastened to the machine housing 1 with screws.
  • the lower ends of the cathode rods 25 are screwed to a counter plate 30; the lower ends of the anode rods 24, however, are freely passed through holes in the counter plate 30;
  • the counter plate 30 also consists of electrically non-conductive material.
  • a plurality of auxiliary electrode arrangements 23 of this type are arranged across the width of the sump 21, ie across the dimension that is perpendicular to the drawing plane of FIG. 1, which can be electrically connected in series, but are preferably connected in parallel. All anodes of the auxiliary electrode arrangements 23 are connected via a cable 31 to the positive pole of a second direct current source 32. In a corresponding manner, all cathodes of the auxiliary electrode arrangements 23 are connected to the negative pole of the direct current source 32 via a cable 33.
  • a pH measuring probe 34 is arranged in the etchant 4, which is located in the sump 21, a pH measuring probe 34 is arranged. Of course, this can also be in a pipeline through which the etchant 4 is conveyed, or in another suitable location.
  • the pH probe 34 supplies it for the pH value signal in the etchant 4 to a second control circuit 35, which in turn drives the second direct current source 32.
  • the control processes are basically similar to those described in EP-PS 01 41 905: If the pH rises as a result of the air oxidation of the etchant, particularly in the etching machine, for example above the setpoint of 2.0, this sets the pH -Measuring probe 34 fixed.
  • the second direct current source 32 via the control circuit 35, so that an electrolysis process takes place between the anode rods 24 and the cathode rods 25 in the auxiliary electrode arrangements 23.
  • the duration of this electrolysis and the process parameters of the electrolysis, in particular voltage, current and surface properties of the electrodes used can be specifically and exclusively to the Adjust the purpose of re-adjusting the pH.
  • the control processes which take place on the one hand in the control circuit 35 for setting the pH value and on the other hand in the control circuit 13 for setting the redox potential in the regenerated etchant 4, are completely independent of one another.
  • a sheath 36 of the anode rods 24 is used in the device described here (see FIG. 3), which preferably consists of a polypropylene fabric.
  • the type of fabric and the type of winding can be used to determine within a wide range to what extent oxygen forms on the anode rods 24 of the auxiliary electrode arrangements 23. The unwanted Release of chlorine gas at this point is practically completely avoided.
  • the material from which the anode rods 24 are made serves in the same sense: here oxides or mixed oxides of the platinum group (platinum, titanium, tantalum, iridium, rubidium) are used (at least on the surface).

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
  • ing And Chemical Polishing (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)

Abstract

Un dispositif de régénération électrolytique d'un réactif d'attaque contenant des ions chlorure et métal comprend une chambre d'électrolyse (2), dans laquelle se fait le traitement électrolytique proprement dit qui entraîne la séparation du métal avec lequel l'agent caustique est enrichi. Une première anode (14) et une première cathode (7), qui sont alimentées par une source de courant continu individuelle (10), servent exclusivement à la réalisation dudit traitement. Indépendamment, une seconde anode (24) et une seconde cathode (25), de préférence sous la forme de tiges parallèles, servent à la décomposition anodique de l'eau et ainsi à la production d'ions oxygène et hydrogène pour compenser l'augmentation du pH due à l'oxydation du réactif d'attaque dans la machine d'attaque. La seconde anode (24) et la seconde cathode (25) sont reliées électriquement à une source de courant continu individuelle (27) et ne sont destinées, de par leur constitution et leur réglage, qu'à l'ajustement du pH.

Claims (10)

  1. Appareil pour la régénération électrolytique d'un agent de gravure contenant des ions chlorures et des ions métalliques, lequel comprend une cuve d'électrolyse à l'intérieur de laquelle une première anode et une première cathode sont disposées, une première source de courant continu à laquelle sont reliées la première anode et la première cathode, où du métal se dissocie par rapport à l'agent de gravure au niveau de la première cathode pendant le processus de l'électrolyse qui se produit entre la première anode et la première cathode et où, de plus, l'eau contenue dans l'agent de gravure est décomposée par électrolyse afin d'ajuster la valeur de pH, ce qui entraîne la création d'ions hydrogène et d'oxygène,
    caractérisé par
    a) une deuxième anode indépendante (24) et une deuxième cathode indépendante (25);
    b) une deuxième source de courant continu indépendante (32) à laquelle sont reliées la deuxième anode (24) et la deuxième cathode (25),
    ce qui permet que se forme de l'oxygène au niveau de la deuxième anode (24) pendant le processus de l'électrolyse qui se produit entre la deuxième anode (24) et la deuxième cathode (25).
  2. Appareil d'après la revendication 1, caractérisé en ce que l'anode se présente sous la forme d'un grand nombre d'anodes en barreau (24) mis en parallèle les uns avec les autres et que la cathode se présente sous la forme d'un grand nombre de cathodes en barreau (25) mis en parallèle les uns avec les autres.
  3. Appareil d'après la revendication 2, caractérisé en ce que les anodes en barreau (24) et les cathodes en barreau (25) sont regroupées en paquets d'électrodes auxiliaires (23), dans lesquels une rangée latérale de cathodes en barreau (25) est placée de chaque côté d'une rangée centrale d'anodes en barreau (24).
  4. Appareil d'après l'une des revendications 1 à 3, caractérisé en ce que la seconde anode (24) est constituée au moins à sa surface par un oxyde ou un mélange d'oxydes de métaux appartenant au groupe du platine (platine, titane, tantale, irridium, rubidium).
  5. Appareil d'après l'une des revendications 1 à 4, caractérisé en ce que l'anode (24) comporte une enveloppe perméable aux gaz (36).
  6. Appareil d'après la revendication 5, caractérisé en ce que l'enveloppe perméable aux gaz (36) est formée par un tissu de polypropylène.
  7. Appareil d'après la revendication 5, caractérisé en ce que l'enveloppe perméable aux gaz (36) est formée par un tissu de plastique fluoré, par exemple, du PTFE.
  8. Appareil d'après la revendication 5, caractérisé en ce que l'enveloppe perméable aux gaz (36) est formée par un tissu en fibres de carbone.
  9. Appareil d'après la revendication 5, caractérisé en ce que l'enveloppe perméable aux gaz (36) est formée par un feutre aiguilleté.
  10. Appareil d'après l'une des revendications 1 à 9, caractérisé en ce qu'une sonde de pH-mètre (34) est prévue, laquelle surveille les valeurs de pH à l'intérieur de l'agent de gravure (4) et commande une boucle d'asservissement (35), qui commande de son côté la deuxième source de courant continu (32) de telle sorte que la valeur de pH à l'intérieur de l'agent de gravure soit maintenue à une valeur pratiquement constante.
EP91904225A 1990-03-29 1991-02-23 Dispositif de regeneration electrolytique d'un reactif d'attaque contenant des ions chlorure et metal Expired - Lifetime EP0521867B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4010035A DE4010035A1 (de) 1990-03-29 1990-03-29 Vorrichtung zur elektrolytischen regeneration eines chlorid- und metallionen enthaltenden aetzmittels
DE4010035 1990-03-29
PCT/EP1991/000340 WO1991014800A1 (fr) 1990-03-29 1991-02-23 Dispositif de regeneration electrolytique d'un reactif d'attaque contenant des ions chlorure et metal

Publications (2)

Publication Number Publication Date
EP0521867A1 EP0521867A1 (fr) 1993-01-13
EP0521867B1 true EP0521867B1 (fr) 1994-12-28

Family

ID=6403287

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Application Number Title Priority Date Filing Date
EP91904225A Expired - Lifetime EP0521867B1 (fr) 1990-03-29 1991-02-23 Dispositif de regeneration electrolytique d'un reactif d'attaque contenant des ions chlorure et metal

Country Status (4)

Country Link
EP (1) EP0521867B1 (fr)
JP (1) JPH05505645A (fr)
DE (2) DE4010035A1 (fr)
WO (1) WO1991014800A1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2008766B2 (de) * 1970-02-23 1971-07-29 Licentia Patent Verwaltungs GmbH, 6000 Frankfurt Verfahren zum regenerieren einer kupferhaltigen aetzloesung insbesondere fuer die herstellung von gedruckten schaltungen
US3764503A (en) * 1972-01-19 1973-10-09 Dart Ind Inc Electrodialysis regeneration of metal containing acid solutions
DE2241462A1 (de) * 1972-08-23 1974-03-07 Bach & Co Verfahren zum rueckgewinnen einer kupfer(ii)-chlorid enthaltenden aetzloesung
DE2650912A1 (de) * 1976-11-06 1978-05-18 Hoellmueller Maschbau H Elektrolytische regeneration eines aetzmittels
DE3330349A1 (de) * 1983-08-23 1985-03-14 Robert Bosch Gmbh, 7000 Stuttgart Verfahren zur elektrochemischen kompensation der luftoxidation bei der elektrochemischen regenerierung von chloridhaltigen kupferaetzloesungen
DE3738996A1 (de) * 1986-12-02 1988-06-30 Robotron Veb K Verfahren und einrichtung zur kupferabscheidung aus ammoniakalischen kupferchloridloesungen

Also Published As

Publication number Publication date
EP0521867A1 (fr) 1993-01-13
DE4010035A1 (de) 1991-10-02
DE59104080D1 (de) 1995-02-09
JPH05505645A (ja) 1993-08-19
WO1991014800A1 (fr) 1991-10-03

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