EP0510485B1 - Kontinuierlich betriebener Gasanalysator - Google Patents

Kontinuierlich betriebener Gasanalysator Download PDF

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Publication number
EP0510485B1
EP0510485B1 EP92106383A EP92106383A EP0510485B1 EP 0510485 B1 EP0510485 B1 EP 0510485B1 EP 92106383 A EP92106383 A EP 92106383A EP 92106383 A EP92106383 A EP 92106383A EP 0510485 B1 EP0510485 B1 EP 0510485B1
Authority
EP
European Patent Office
Prior art keywords
detector
choke
vacuum
pressure
suction device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP92106383A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0510485A2 (de
EP0510485A3 (en
Inventor
Melchior Kahl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vodafone GmbH
Original Assignee
Hartmann and Braun AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hartmann and Braun AG filed Critical Hartmann and Braun AG
Publication of EP0510485A2 publication Critical patent/EP0510485A2/de
Publication of EP0510485A3 publication Critical patent/EP0510485A3/de
Application granted granted Critical
Publication of EP0510485B1 publication Critical patent/EP0510485B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011—Sample conditioning
    • G01N33/0016—Sample conditioning by regulating a physical variable, e.g. pressure or temperature

Definitions

  • the invention is therefore based on the object of improving the control accuracy in the vacuum control in connection with the above-described continuously operated gas analyzer.
  • the vacuum control loops each consist of a piezoelectric pressure sensor, a PI controller and an electropneumatic actuator.
  • the reproducibility, the temperature dependency and the long-term stability of the apparatus can be improved by approximately a power of ten.
  • the vacuum is detected independently of the flow with an accuracy of ⁇ 0.01 mbar as an electrical signal.
  • This signal is amplified by the measuring amplifier 19a or 19b and fed to the PI controller 20a or 20b.
  • the electrical output signals of the PI controllers 20a, 20b act directly on the electropneumatic actuators 21a and 21b.
  • the PI controllers 20a, 20b carry out the setpoint / actual value comparison and accordingly generate a control signal which controls the electropneumatic actuators 21a, 21b. This direct control results in hysteresis-free control behavior and a control accuracy of ⁇ 0.01 mbar.
  • control signal ie the query of the manipulated variables, the sample gas flow and the pump output can be monitored without installing additional sensors or flow meters in the sample gas flow.
  • the new vacuum control described also ensures that the gas analysis measuring device operates independently of the air pressure, since the two measuring sensors use the air pressure and therefore the same reference pressure as the comparison pressure.
  • the piezoelectric sensors and the electropneumatic actuators are commercially available components.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Control Of Fluid Pressure (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
EP92106383A 1991-04-26 1992-04-14 Kontinuierlich betriebener Gasanalysator Expired - Lifetime EP0510485B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4113695 1991-04-26
DE4113695A DE4113695A1 (de) 1991-04-26 1991-04-26 Kontinuierlich betriebener gasanalysator

Publications (3)

Publication Number Publication Date
EP0510485A2 EP0510485A2 (de) 1992-10-28
EP0510485A3 EP0510485A3 (en) 1995-12-27
EP0510485B1 true EP0510485B1 (de) 1997-06-04

Family

ID=6430436

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92106383A Expired - Lifetime EP0510485B1 (de) 1991-04-26 1992-04-14 Kontinuierlich betriebener Gasanalysator

Country Status (6)

Country Link
US (1) US5245857A (ja)
EP (1) EP0510485B1 (ja)
JP (1) JP3138327B2 (ja)
AT (1) ATE154133T1 (ja)
CA (1) CA2066950A1 (ja)
DE (2) DE4113695A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5780717A (en) * 1997-04-23 1998-07-14 Lockheed Martin Energy Research Corporation In-line real time air monitor
FR2789189B1 (fr) * 1999-02-02 2002-12-13 Air Liquide Sante France Procede et installation de regulation d'une centrale de production de vide medical
EP1192426A1 (en) * 1999-07-12 2002-04-03 Unit Instruments, Inc. Pressure insensitive gas control system
DE102009023224A1 (de) * 2009-05-29 2010-12-02 Avl Emission Test Systems Gmbh Anordnung zur geregelten Zuführung und Förderung eines Gasgemisches in eine Analysekammer
CN114345090A (zh) * 2021-07-27 2022-04-15 赵朋飞 一种新型环保型工业废气净化装置
EP4231009A1 (de) * 2022-02-21 2023-08-23 Siemens Aktiengesellschaft Pneumatikmodul für eine gasanalysevorrichtung, und herstellungsverfahren und computerprogrammprodukt dafür

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU466494A1 (ru) * 1972-12-21 1975-04-05 Предприятие П/Я М-5539 Устройство дл регулировани давлени в газодинамической установке
US4257746A (en) * 1978-10-02 1981-03-24 E. I. Du Pont De Nemours And Company Dosimeter having a low air flow rate
US4269059A (en) * 1979-03-19 1981-05-26 E. I. Du Pont De Nemours And Company Dosimeter having constant flow pump
DE2932436C2 (de) * 1979-08-10 1983-11-10 Bayer Ag, 5090 Leverkusen Massenstromabhängiger Gasanalysator mit Durchflußregelung im Unterdruckbetrieb
US4379402A (en) * 1981-01-22 1983-04-12 Beckman Instruments, Inc. Gas analysis instrument having flow rate compensation
DE3114119A1 (de) * 1981-04-08 1982-10-21 Kernforschungsanlage Jülich GmbH, 5170 Jülich Regelkreis zur regelung des druckes in vakuumanlagen
US4579144A (en) * 1983-03-04 1986-04-01 Uti Instrument Company Electron impact ion source for trace analysis
DE3407552A1 (de) * 1984-03-01 1985-09-05 Bodenseewerk Perkin Elmer Co Gasregeleinrichtung zur regelung der brenngas- und oxidanszufuhr zu einem brenner bei einem atomabsorptions-spektrometer
DD236991A1 (de) * 1985-05-03 1986-06-25 Elektro App Werke Veb Schaltungsanordnung fuer piezoresistive drucksensoren mit korrekturverhalten
SU1490132A1 (ru) * 1987-04-24 1989-06-30 Днепропетровский химико-технологический институт им.Ф.Э.Дзержинского Устройство автоматического регулировани подачи коксового газа потребителю
DE3808982A1 (de) * 1988-03-17 1989-10-05 Ratfisch Instr Verfahren und vorrichtung zur kontinuierlichen messung der kohlenwasserstoff-konzentration in einem gasstrom
DE3822360A1 (de) * 1988-07-01 1990-01-04 Kettrup Antonius Gasprobennehmer
DE3840322A1 (de) * 1988-11-30 1990-05-31 Hartmann & Braun Ag Vorrichtung zur ueberwachung des gasstromes in einem gasanalysator und zur korrektur von druck- und durchflussbedingten stoereinfluessen auf dessen messsignal

Also Published As

Publication number Publication date
EP0510485A2 (de) 1992-10-28
US5245857A (en) 1993-09-21
EP0510485A3 (en) 1995-12-27
DE59208560D1 (de) 1997-07-10
JP3138327B2 (ja) 2001-02-26
JPH05180826A (ja) 1993-07-23
CA2066950A1 (en) 1992-10-27
ATE154133T1 (de) 1997-06-15
DE4113695A1 (de) 1992-10-29

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