EP0464265B1 - Verfahren zum Aufbringen von Nitridschichten auf Titan - Google Patents

Verfahren zum Aufbringen von Nitridschichten auf Titan Download PDF

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Publication number
EP0464265B1
EP0464265B1 EP90125660A EP90125660A EP0464265B1 EP 0464265 B1 EP0464265 B1 EP 0464265B1 EP 90125660 A EP90125660 A EP 90125660A EP 90125660 A EP90125660 A EP 90125660A EP 0464265 B1 EP0464265 B1 EP 0464265B1
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EP
European Patent Office
Prior art keywords
titanium
ammonia
mpa
temperatures
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP90125660A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0464265A1 (de
Inventor
Friedrich Dr. Preisser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALD Vacuum Technologies GmbH
Original Assignee
Degussa GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Degussa GmbH filed Critical Degussa GmbH
Publication of EP0464265A1 publication Critical patent/EP0464265A1/de
Application granted granted Critical
Publication of EP0464265B1 publication Critical patent/EP0464265B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/24—Nitriding

Definitions

  • the invention relates to a method for applying nitride layers to parts made of titanium and titanium alloys by thermochemical treatment of the parts with ammonia or ammonia-containing gas mixtures under pressure and at temperatures above 500 ° C.
  • titanium As a construction material, titanium has several advantages over steel, which result from its low specific weight, its corrosion resistance and its high strength. This is offset by the relatively low hardness, which makes surface treatment necessary if the wear resistance is to be increased.
  • This surface treatment usually consists of the production of layers of titanium carbide or titanium nitride. In previously known methods for nitriding parts made of titanium and titanium alloys, high-energy gases or electromagnetic fields are used. These processes are very complex and can only be used for simple geometry of the parts to be treated.
  • JP-A-2-025 559 Patent Abstracts of Japan, vol. 14, Ni. 176, 4119 describes the nitriding of titanium and titanium alloys in an ammonia atmosphere at normal pressure.
  • EP-A 0 105 835 describes a method for producing nitride layers on components made of titanium and titanium alloys by exposing the components in an autoclave to pressures of at least 10 MPa and temperatures of at least 200 ° C. in an ammonia atmosphere.
  • the ammonia must be of great purity.
  • the nitration is preferably carried out at 90 to 130 MPa and temperatures from 930 ° to 1000 ° C. This process has the disadvantage that it is very expensive due to the use of autoclaves and very pure ammonia and 20 ⁇ m thick layers only in periods of three and more hours can be reached.
  • This object is achieved in that the treatment is carried out at temperatures from 700 to 950 ° C. and pressures from 0.5 to 7 MPa, the ammonia partial pressure being kept at least at 0.2 MPa.
  • components made of titanium and titanium alloys of any geometry and size can be provided with sufficiently thick nitride layers of 20 ⁇ m and more in appropriate chamber furnaces.
  • no high-purity gases are required for this, but the normal commercial quality of ammonia is sufficient.
  • nitrogen is also possible to add nitrogen to the ammonia, with only an ammonia partial pressure of at least 0.2 MPa being required for the nitriding process.
  • the layer thickness of the titanium nitride that forms depends on the temperature and the treatment time in large pressure ranges.
  • the surface is shiny gold and causes a significant increase in hardness.
  • the layer thickness is almost independent of the pressure.
  • the figure shows the formation of a titanium nitride layer on parts made of pure titanium depending on the pressure and the temperature of the ammonia-containing atmosphere.
  • a TiN layer of, for example, 30 ⁇ m builds up if the samples are kept at 880 ° C for one hour.
  • titanium alloys such as TiAl6V4 are nitrided.
  • An autoclave is not required for these coatings, but the treatment can be carried out in a commercially available chamber furnace.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Chemically Coating (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Road Paving Structures (AREA)
  • Revetment (AREA)
EP90125660A 1990-07-04 1990-12-28 Verfahren zum Aufbringen von Nitridschichten auf Titan Expired - Lifetime EP0464265B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4021286 1990-07-04
DE4021286A DE4021286C1 (xx) 1990-07-04 1990-07-04

Publications (2)

Publication Number Publication Date
EP0464265A1 EP0464265A1 (de) 1992-01-08
EP0464265B1 true EP0464265B1 (de) 1996-03-06

Family

ID=6409636

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90125660A Expired - Lifetime EP0464265B1 (de) 1990-07-04 1990-12-28 Verfahren zum Aufbringen von Nitridschichten auf Titan

Country Status (14)

Country Link
EP (1) EP0464265B1 (xx)
JP (1) JPH0649924B2 (xx)
CN (1) CN1020476C (xx)
AT (1) ATE135058T1 (xx)
AU (1) AU627960B2 (xx)
BR (1) BR9101899A (xx)
CZ (1) CZ279472B6 (xx)
DE (2) DE4021286C1 (xx)
ES (1) ES2085320T3 (xx)
NO (1) NO905209L (xx)
PL (1) PL166281B1 (xx)
PT (1) PT98195A (xx)
RU (1) RU1836484C (xx)
TW (1) TW208721B (xx)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1169487A1 (de) * 1999-04-15 2002-01-09 Vacuumschmelze GmbH Korrosionsfreie eisen-nickel-legierung für fehlerstromschutzschalter und uhrenlaufwerke
JP4684383B2 (ja) * 2000-04-03 2011-05-18 株式会社アライドマテリアル 耐酸化層を有する高融点金属材料及びその製造方法
JP2001295023A (ja) * 2000-04-06 2001-10-26 Allied Material Corp 表面硬化層を有する高融点金属材料およびその製造方法
WO2008079977A2 (en) * 2006-12-22 2008-07-03 Iap Research, Inc. System and method for surface hardening of refractory metals
CN102699516B (zh) 2007-02-28 2015-03-18 沃特世科技公司 具有扩散结合的钛构件的液相色谱装置
CN100537805C (zh) * 2007-10-30 2009-09-09 沈阳宝鼎化工设备制造有限公司 耐磨、耐腐蚀备件及其表面处理工艺
JP5977669B2 (ja) * 2012-12-28 2016-08-24 株式会社セブン・セブン 真空断熱二重容器の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0105835A1 (de) * 1982-09-07 1984-04-18 Vereinigte Drahtwerke AG Verfahren zur Bildung einer Härteschicht im Bauteil aus Titan oder Titanlegierungen

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2804410A (en) * 1953-10-27 1957-08-27 Nat Lead Co Method for nitriding titanium surfaces

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0105835A1 (de) * 1982-09-07 1984-04-18 Vereinigte Drahtwerke AG Verfahren zur Bildung einer Härteschicht im Bauteil aus Titan oder Titanlegierungen

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
TRANSACTIONS OF THE ASM vol.46 (1954) p 540 ff *

Also Published As

Publication number Publication date
ATE135058T1 (de) 1996-03-15
PL290931A1 (en) 1992-10-05
RU1836484C (ru) 1993-08-23
CN1057866A (zh) 1992-01-15
AU627960B2 (en) 1992-09-03
DE59010178D1 (de) 1996-04-11
DE4021286C1 (xx) 1991-02-21
TW208721B (xx) 1993-07-01
CS198891A3 (en) 1992-02-19
PL166281B1 (pl) 1995-04-28
ES2085320T3 (es) 1996-06-01
AU6760290A (en) 1992-01-09
NO905209L (no) 1992-01-06
EP0464265A1 (de) 1992-01-08
BR9101899A (pt) 1992-01-14
NO905209D0 (no) 1990-11-30
PT98195A (pt) 1992-04-30
JPH04232247A (ja) 1992-08-20
CN1020476C (zh) 1993-05-05
CZ279472B6 (cs) 1995-05-17
JPH0649924B2 (ja) 1994-06-29

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