EP0403287A3 - Procédé de polissage de plaquettes semi-conductrices - Google Patents
Procédé de polissage de plaquettes semi-conductrices Download PDFInfo
- Publication number
- EP0403287A3 EP0403287A3 EP19900306519 EP90306519A EP0403287A3 EP 0403287 A3 EP0403287 A3 EP 0403287A3 EP 19900306519 EP19900306519 EP 19900306519 EP 90306519 A EP90306519 A EP 90306519A EP 0403287 A3 EP0403287 A3 EP 0403287A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- semiconductor wafer
- thickness
- polishing semiconductor
- plate
- regulating member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
- B24B37/013—Devices or means for detecting lapping completion
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1153748A JPH0319336A (ja) | 1989-06-16 | 1989-06-16 | 半導体ウェーハの研磨方法 |
JP153748/89 | 1989-06-16 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0403287A2 EP0403287A2 (fr) | 1990-12-19 |
EP0403287A3 true EP0403287A3 (fr) | 1991-10-23 |
EP0403287B1 EP0403287B1 (fr) | 1994-10-05 |
Family
ID=15569254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP90306519A Expired - Lifetime EP0403287B1 (fr) | 1989-06-16 | 1990-06-14 | Procédé de polissage de plaquettes semi-conductrices |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0403287B1 (fr) |
JP (1) | JPH0319336A (fr) |
DE (1) | DE69013065T2 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5366924A (en) * | 1992-03-16 | 1994-11-22 | At&T Bell Laboratories | Method of manufacturing an integrated circuit including planarizing a wafer |
GB2275130B (en) * | 1992-05-26 | 1997-01-08 | Toshiba Kk | Polishing apparatus and method for planarizing layer on a semiconductor wafer |
US5445996A (en) * | 1992-05-26 | 1995-08-29 | Kabushiki Kaisha Toshiba | Method for planarizing a semiconductor device having a amorphous layer |
JP2778659B2 (ja) | 1993-12-24 | 1998-07-23 | キヤノン株式会社 | 導光体及び照明装置及び画像読取装置 |
JP3983887B2 (ja) * | 1998-04-09 | 2007-09-26 | 沖電気工業株式会社 | 基板研磨用治具及び半導体ウエハの研磨方法 |
CN105199610B (zh) * | 2015-10-16 | 2017-12-19 | 郑州磨料磨具磨削研究所有限公司 | 一种蓝宝石抛光组合物及其制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2979868A (en) * | 1957-11-29 | 1961-04-18 | Siemens Ag | Lapping device for semiconductor wafers |
US3559346A (en) * | 1969-02-04 | 1971-02-02 | Bell Telephone Labor Inc | Wafer polishing apparatus and method |
US4165584A (en) * | 1977-01-27 | 1979-08-28 | International Telephone And Telegraph Corporation | Apparatus for lapping or polishing materials |
FR2521895A1 (fr) * | 1982-02-23 | 1983-08-26 | Ansermoz Raymond | Tasseau multiple pour le rodage, au lapidaire, de pieces en forme de lames minces |
JPS6451268A (en) * | 1987-08-19 | 1989-02-27 | Sanyo Electric Co | Mechanical polishing method |
JPS6471663A (en) * | 1987-09-08 | 1989-03-16 | Hitachi Cable | Lapping method for gaas wafer |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3351687B2 (ja) * | 1996-08-05 | 2002-12-03 | 株式会社東芝 | 雑音消去に用いられるフィルタ演算装置及びフィルタ演算方法 |
-
1989
- 1989-06-16 JP JP1153748A patent/JPH0319336A/ja active Pending
-
1990
- 1990-06-14 DE DE69013065T patent/DE69013065T2/de not_active Expired - Fee Related
- 1990-06-14 EP EP90306519A patent/EP0403287B1/fr not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2979868A (en) * | 1957-11-29 | 1961-04-18 | Siemens Ag | Lapping device for semiconductor wafers |
US3559346A (en) * | 1969-02-04 | 1971-02-02 | Bell Telephone Labor Inc | Wafer polishing apparatus and method |
US4165584A (en) * | 1977-01-27 | 1979-08-28 | International Telephone And Telegraph Corporation | Apparatus for lapping or polishing materials |
FR2521895A1 (fr) * | 1982-02-23 | 1983-08-26 | Ansermoz Raymond | Tasseau multiple pour le rodage, au lapidaire, de pieces en forme de lames minces |
JPS6451268A (en) * | 1987-08-19 | 1989-02-27 | Sanyo Electric Co | Mechanical polishing method |
JPS6471663A (en) * | 1987-09-08 | 1989-03-16 | Hitachi Cable | Lapping method for gaas wafer |
Non-Patent Citations (2)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 13, no. 244 (M-834)(3592) 07 June 1989, & JP-A-01 051 268 (SANYO) 27 February 1989, * |
SOVIET INVENTIONS ILLUSTRATED, Sections P/Q, week 8544, 11 December 1985. Derwent Publications Ltd., London GB. * |
Also Published As
Publication number | Publication date |
---|---|
EP0403287A2 (fr) | 1990-12-19 |
JPH0319336A (ja) | 1991-01-28 |
DE69013065T2 (de) | 1995-01-26 |
EP0403287B1 (fr) | 1994-10-05 |
DE69013065D1 (de) | 1994-11-10 |
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