EP0394452A4 - Cryogenic adsorption pump - Google Patents
Cryogenic adsorption pumpInfo
- Publication number
- EP0394452A4 EP0394452A4 EP19890903490 EP89903490A EP0394452A4 EP 0394452 A4 EP0394452 A4 EP 0394452A4 EP 19890903490 EP19890903490 EP 19890903490 EP 89903490 A EP89903490 A EP 89903490A EP 0394452 A4 EP0394452 A4 EP 0394452A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- vessel
- pump
- οbechayκami
- sοsuda
- nasοsa
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Definitions
- a combustible adsorbent pump (sv, ⁇ , 1333833) is known to contain a discharging element, consisting of a liquid nitrogen vessel, which is a dry source of oil
- the indicated areas of the facilities are ringed. Foreign spaces between adjacent sewers and open screens are communicated from the input of the pump.
- the vessel for the agent has a ring guard with two tubes for entering the vessel of the agent and the pumping unit. These tubes are attached to the upper end of the casing.
- P ⁇ i increase diame ⁇ a ⁇ bechae ⁇ - ⁇ e ⁇ l ⁇ v ⁇ d ⁇ v and ⁇ bechae ⁇ - ⁇ is ⁇ e ⁇ an ⁇ v d ⁇ s ⁇ igae ⁇ sya ⁇ a ⁇ zhe increase ⁇ bema ⁇ l ⁇ s ⁇ ey to ⁇ hell s ⁇ ben ⁇ m, ⁇ es ⁇ eg ⁇ ⁇ liches ⁇ v ⁇ in ⁇ ezul ⁇ a ⁇ e cheg ⁇ ⁇ vysh e ⁇ sya s ⁇ btsi ⁇ nnaya em ⁇ s ⁇ nas ⁇ sa.
- the pumping element is shipped with a radiating shielding to reduce thermal radiation from the emergency housing I.
- the shielded vessels are equipped with a 15-port safety vessel.
- an additional screen 31 has been installed, which is designed to reduce the thermal radiation of the radiation from the housing I ⁇ radiation.
- Chevron screens in the vacuum - 6 - shoved volume sends a double-sided display in the form of a thick aluminum layer with a thickness of at least 1 ⁇ m and an aluminum oxide layer with a thickness of 2 to 20 nm.
- the local screens 17 and 26 have a space of 5 at least 150 ⁇ m with a gradual frequency not lower than 0.99 in a range of lengths of 2-200 ⁇ m.
- the proposed pump operates as follows. ⁇ In the input unit 3, it is not immediately available or after a shutter (not shown) it connects the pumped working chamber (not shown).
- 28 Inlet 28 is disconnected through a valve (not shown) with a metallic seal inlet (not indicated) and not supplied with pressure Then after one of the branches 32 through the valve (not shown)
- the vessel 15 of the radiation screen in the case of the 18th tank is filled with a liquid agent, for example, liquid nitrogen.
- a liquid agent for example, liquid nitrogen.
- 25 pipe 13 is filled with a liquid agent that has a temperature lower than that of a vessel in vessel 15; ⁇ In the latter case, a decrease in the temperature of the agent in the vessel 4 is achieved by pumping it out with the vacuum mechanical mechanism.
- the accessories located in the rings of the 10 exhausting element.
- the absorber absorbs gases from the working chamber, ensuring that the pressure is prevented by - 7 - 10 Pa and below.
- the 4 diameter of the pipe 13 may be increased correspondingly.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4391234 | 1988-03-10 | ||
SU884391234A SU1682628A1 (ru) | 1988-03-10 | 1988-03-10 | Криоадсорбционный насос |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0394452A1 EP0394452A1 (de) | 1990-10-31 |
EP0394452A4 true EP0394452A4 (en) | 1991-01-23 |
Family
ID=21360806
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19890903491 Withdrawn EP0363497A4 (en) | 1988-03-10 | 1989-02-10 | Cryogenic adsorption pump |
EP19890903490 Withdrawn EP0394452A4 (en) | 1988-03-10 | 1989-02-10 | Cryogenic adsorption pump |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19890903491 Withdrawn EP0363497A4 (en) | 1988-03-10 | 1989-02-10 | Cryogenic adsorption pump |
Country Status (6)
Country | Link |
---|---|
US (2) | US4979369A (de) |
EP (2) | EP0363497A4 (de) |
JP (2) | JPH02503462A (de) |
AU (2) | AU623387B2 (de) |
SU (1) | SU1682628A1 (de) |
WO (2) | WO1989008780A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU1682628A1 (ru) * | 1988-03-10 | 1991-10-07 | Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср | Криоадсорбционный насос |
US5400604A (en) * | 1990-11-19 | 1995-03-28 | Leybold Ag | Cryopump and process for regenerating said cryopump |
US5261244A (en) * | 1992-05-21 | 1993-11-16 | Helix Technology Corporation | Cryogenic waterpump |
AT398849B (de) * | 1992-09-08 | 1995-02-27 | Sitte Hellmuth | Kammer zur gefriertrocknung durch kryosorption |
US5537833A (en) * | 1995-05-02 | 1996-07-23 | Helix Technology Corporation | Shielded cryogenic trap |
US5799493A (en) * | 1996-09-05 | 1998-09-01 | Helix Technology Corporation | Corrosion resistant cryopump |
US6154478A (en) * | 1998-06-30 | 2000-11-28 | The Boeing Company | Chemical oxygen-iodine laser (coil)/cryosorption vacuum pump system |
US6650681B1 (en) | 2000-04-25 | 2003-11-18 | The Boeing Company | Sealed exhaust chemical oxygen-iodine laser system |
US6621848B1 (en) | 2000-04-25 | 2003-09-16 | The Boeing Company | SECOIL reprocessing system |
US6438992B1 (en) * | 2000-10-18 | 2002-08-27 | Thermal Products Development, Inc. | Evacuated sorbent assembly and cooling device incorporating same |
US7320224B2 (en) * | 2004-01-21 | 2008-01-22 | Brooks Automation, Inc. | Method and apparatus for detecting and measuring state of fullness in cryopumps |
US20070051242A1 (en) * | 2005-09-08 | 2007-03-08 | Petrik Viktor I | Configurations and methods for assisted condensation |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL112391C (de) * | 1960-05-06 | 1900-01-01 | ||
NL251342A (de) * | 1960-05-07 | |||
US3335550A (en) * | 1964-04-24 | 1967-08-15 | Union Carbide Corp | Cryosorption apparatus |
US3310227A (en) * | 1965-04-12 | 1967-03-21 | Milleron Norman | Surge and backstreaming porous diaphragm filter for vacuum system |
US3371499A (en) * | 1966-11-02 | 1968-03-05 | Union Carbide Corp | Cryosorption vacuum pumping system |
US3416326A (en) * | 1967-06-02 | 1968-12-17 | Stuffer Rowen | Efficient nitrogen trap |
FR1549434A (de) * | 1967-10-20 | 1968-12-13 | ||
FR2048253A5 (de) * | 1969-12-01 | 1971-03-19 | Air Liquide | |
DE2208743A1 (de) * | 1971-02-26 | 1972-09-07 | Air Liquide | Verfahren und Vorrichtung zur Gasübertragung |
FR2146100B2 (de) * | 1971-07-16 | 1974-03-29 | Air Liquide | |
SU547549A1 (ru) * | 1974-07-05 | 1977-02-25 | Предприятие П/Я А-3605 | Адсорбционный насос |
SU659792A2 (ru) * | 1977-12-06 | 1979-04-30 | Предприятие П/Я В-8851 | Форвакуумна криогенна ловушка |
SU696176A2 (ru) * | 1978-04-12 | 1979-11-05 | Предприятие П/Я В-8851 | Адсорбционный насос |
SU769080A1 (ru) * | 1978-07-31 | 1980-10-07 | Предприятие П/Я В-8851 | Криогенный вакуумный насос |
SU992814A2 (ru) * | 1981-12-31 | 1983-01-30 | Физико-технический институт низких температур АН УССР | Криогенный конденсационный насос |
US4494381A (en) * | 1983-05-13 | 1985-01-22 | Helix Technology Corporation | Cryopump with improved adsorption capacity |
JPS6065287A (ja) * | 1983-09-20 | 1985-04-15 | Toshiba Corp | クライオソープシヨンポンプ |
SU1333833A1 (ru) * | 1985-08-19 | 1987-08-30 | Организация П/Я М-5273 | Криоадсорбционный насос |
SU1439278A1 (ru) * | 1987-03-09 | 1988-11-23 | Предприятие П/Я Р-6681 | Сорбционный вакуумный насос |
SU1698481A1 (ru) * | 1987-12-17 | 1991-12-15 | Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср | Криогенный адсорбционный насос |
SU1698482A1 (ru) * | 1988-01-08 | 1991-12-15 | Институт Анатилического Приборостроения Научно-Технического Объединения Ан Ссср | Криогенный конденсационный насос |
SU1682628A1 (ru) * | 1988-03-10 | 1991-10-07 | Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср | Криоадсорбционный насос |
-
1988
- 1988-03-10 SU SU884391234A patent/SU1682628A1/ru active
-
1989
- 1989-02-10 US US07/439,368 patent/US4979369A/en not_active Expired - Fee Related
- 1989-02-10 JP JP1503248A patent/JPH02503462A/ja active Pending
- 1989-02-10 US US07/439,366 patent/US5014517A/en not_active Expired - Fee Related
- 1989-02-10 JP JP1503247A patent/JPH02503461A/ja active Pending
- 1989-02-10 WO PCT/SU1989/000035 patent/WO1989008780A1/ru not_active Application Discontinuation
- 1989-02-10 EP EP19890903491 patent/EP0363497A4/de not_active Withdrawn
- 1989-02-10 WO PCT/SU1989/000036 patent/WO1989008781A1/ru not_active Application Discontinuation
- 1989-02-10 AU AU32863/89A patent/AU623387B2/en not_active Ceased
- 1989-02-10 AU AU41885/89A patent/AU615342B2/en not_active Ceased
- 1989-02-10 EP EP19890903490 patent/EP0394452A4/de not_active Withdrawn
Non-Patent Citations (2)
Title |
---|
KEINE WEITERE DOKUMENTEN ERMITTELT. * |
See also references of WO8908781A1 * |
Also Published As
Publication number | Publication date |
---|---|
US4979369A (en) | 1990-12-25 |
US5014517A (en) | 1991-05-14 |
WO1989008780A1 (en) | 1989-09-21 |
WO1989008781A1 (en) | 1989-09-21 |
SU1682628A1 (ru) | 1991-10-07 |
EP0363497A1 (de) | 1990-04-18 |
EP0394452A1 (de) | 1990-10-31 |
AU3286389A (en) | 1989-10-05 |
JPH02503461A (ja) | 1990-10-18 |
AU615342B2 (en) | 1991-09-26 |
AU4188589A (en) | 1989-10-05 |
JPH02503462A (ja) | 1990-10-18 |
EP0363497A4 (en) | 1991-01-23 |
AU623387B2 (en) | 1992-05-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19891109 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): DE FR GB SE |
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A4 | Supplementary search report drawn up and despatched |
Effective date: 19901203 |
|
AK | Designated contracting states |
Kind code of ref document: A4 Designated state(s): DE FR GB SE |
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17Q | First examination report despatched |
Effective date: 19920901 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 19930312 |