EP0394452A4 - Cryogenic adsorption pump - Google Patents

Cryogenic adsorption pump

Info

Publication number
EP0394452A4
EP0394452A4 EP19890903490 EP89903490A EP0394452A4 EP 0394452 A4 EP0394452 A4 EP 0394452A4 EP 19890903490 EP19890903490 EP 19890903490 EP 89903490 A EP89903490 A EP 89903490A EP 0394452 A4 EP0394452 A4 EP 0394452A4
Authority
EP
European Patent Office
Prior art keywords
vessel
pump
οbechayκami
sοsuda
nasοsa
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19890903490
Other languages
English (en)
Russian (ru)
Other versions
EP0394452A1 (de
Inventor
Marxen Petrovich Larin
Maxim Leonidovich Alexandrov
Valery Ivanovich Nikolaev
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
Original Assignee
NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR filed Critical NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
Publication of EP0394452A1 publication Critical patent/EP0394452A1/de
Publication of EP0394452A4 publication Critical patent/EP0394452A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00Pumps
    • Y10S417/901Cryogenic pumps

Definitions

  • a combustible adsorbent pump (sv, ⁇ , 1333833) is known to contain a discharging element, consisting of a liquid nitrogen vessel, which is a dry source of oil
  • the indicated areas of the facilities are ringed. Foreign spaces between adjacent sewers and open screens are communicated from the input of the pump.
  • the vessel for the agent has a ring guard with two tubes for entering the vessel of the agent and the pumping unit. These tubes are attached to the upper end of the casing.
  • P ⁇ i increase diame ⁇ a ⁇ bechae ⁇ - ⁇ e ⁇ l ⁇ v ⁇ d ⁇ v and ⁇ bechae ⁇ - ⁇ is ⁇ e ⁇ an ⁇ v d ⁇ s ⁇ igae ⁇ sya ⁇ a ⁇ zhe increase ⁇ bema ⁇ l ⁇ s ⁇ ey to ⁇ hell s ⁇ ben ⁇ m, ⁇ es ⁇ eg ⁇ ⁇ liches ⁇ v ⁇ in ⁇ ezul ⁇ a ⁇ e cheg ⁇ ⁇ vysh e ⁇ sya s ⁇ btsi ⁇ nnaya em ⁇ s ⁇ nas ⁇ sa.
  • the pumping element is shipped with a radiating shielding to reduce thermal radiation from the emergency housing I.
  • the shielded vessels are equipped with a 15-port safety vessel.
  • an additional screen 31 has been installed, which is designed to reduce the thermal radiation of the radiation from the housing I ⁇ radiation.
  • Chevron screens in the vacuum - 6 - shoved volume sends a double-sided display in the form of a thick aluminum layer with a thickness of at least 1 ⁇ m and an aluminum oxide layer with a thickness of 2 to 20 nm.
  • the local screens 17 and 26 have a space of 5 at least 150 ⁇ m with a gradual frequency not lower than 0.99 in a range of lengths of 2-200 ⁇ m.
  • the proposed pump operates as follows. ⁇ In the input unit 3, it is not immediately available or after a shutter (not shown) it connects the pumped working chamber (not shown).
  • 28 Inlet 28 is disconnected through a valve (not shown) with a metallic seal inlet (not indicated) and not supplied with pressure Then after one of the branches 32 through the valve (not shown)
  • the vessel 15 of the radiation screen in the case of the 18th tank is filled with a liquid agent, for example, liquid nitrogen.
  • a liquid agent for example, liquid nitrogen.
  • 25 pipe 13 is filled with a liquid agent that has a temperature lower than that of a vessel in vessel 15; ⁇ In the latter case, a decrease in the temperature of the agent in the vessel 4 is achieved by pumping it out with the vacuum mechanical mechanism.
  • the accessories located in the rings of the 10 exhausting element.
  • the absorber absorbs gases from the working chamber, ensuring that the pressure is prevented by - 7 - 10 Pa and below.
  • the 4 diameter of the pipe 13 may be increased correspondingly.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
EP19890903490 1988-03-10 1989-02-10 Cryogenic adsorption pump Withdrawn EP0394452A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SU4391234 1988-03-10
SU884391234A SU1682628A1 (ru) 1988-03-10 1988-03-10 Криоадсорбционный насос

Publications (2)

Publication Number Publication Date
EP0394452A1 EP0394452A1 (de) 1990-10-31
EP0394452A4 true EP0394452A4 (en) 1991-01-23

Family

ID=21360806

Family Applications (2)

Application Number Title Priority Date Filing Date
EP19890903491 Withdrawn EP0363497A4 (en) 1988-03-10 1989-02-10 Cryogenic adsorption pump
EP19890903490 Withdrawn EP0394452A4 (en) 1988-03-10 1989-02-10 Cryogenic adsorption pump

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP19890903491 Withdrawn EP0363497A4 (en) 1988-03-10 1989-02-10 Cryogenic adsorption pump

Country Status (6)

Country Link
US (2) US4979369A (de)
EP (2) EP0363497A4 (de)
JP (2) JPH02503462A (de)
AU (2) AU623387B2 (de)
SU (1) SU1682628A1 (de)
WO (2) WO1989008780A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1682628A1 (ru) * 1988-03-10 1991-10-07 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Криоадсорбционный насос
US5400604A (en) * 1990-11-19 1995-03-28 Leybold Ag Cryopump and process for regenerating said cryopump
US5261244A (en) * 1992-05-21 1993-11-16 Helix Technology Corporation Cryogenic waterpump
AT398849B (de) * 1992-09-08 1995-02-27 Sitte Hellmuth Kammer zur gefriertrocknung durch kryosorption
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
US5799493A (en) * 1996-09-05 1998-09-01 Helix Technology Corporation Corrosion resistant cryopump
US6154478A (en) * 1998-06-30 2000-11-28 The Boeing Company Chemical oxygen-iodine laser (coil)/cryosorption vacuum pump system
US6650681B1 (en) 2000-04-25 2003-11-18 The Boeing Company Sealed exhaust chemical oxygen-iodine laser system
US6621848B1 (en) 2000-04-25 2003-09-16 The Boeing Company SECOIL reprocessing system
US6438992B1 (en) * 2000-10-18 2002-08-27 Thermal Products Development, Inc. Evacuated sorbent assembly and cooling device incorporating same
US7320224B2 (en) * 2004-01-21 2008-01-22 Brooks Automation, Inc. Method and apparatus for detecting and measuring state of fullness in cryopumps
US20070051242A1 (en) * 2005-09-08 2007-03-08 Petrik Viktor I Configurations and methods for assisted condensation

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL112391C (de) * 1960-05-06 1900-01-01
NL251342A (de) * 1960-05-07
US3335550A (en) * 1964-04-24 1967-08-15 Union Carbide Corp Cryosorption apparatus
US3310227A (en) * 1965-04-12 1967-03-21 Milleron Norman Surge and backstreaming porous diaphragm filter for vacuum system
US3371499A (en) * 1966-11-02 1968-03-05 Union Carbide Corp Cryosorption vacuum pumping system
US3416326A (en) * 1967-06-02 1968-12-17 Stuffer Rowen Efficient nitrogen trap
FR1549434A (de) * 1967-10-20 1968-12-13
FR2048253A5 (de) * 1969-12-01 1971-03-19 Air Liquide
DE2208743A1 (de) * 1971-02-26 1972-09-07 Air Liquide Verfahren und Vorrichtung zur Gasübertragung
FR2146100B2 (de) * 1971-07-16 1974-03-29 Air Liquide
SU547549A1 (ru) * 1974-07-05 1977-02-25 Предприятие П/Я А-3605 Адсорбционный насос
SU659792A2 (ru) * 1977-12-06 1979-04-30 Предприятие П/Я В-8851 Форвакуумна криогенна ловушка
SU696176A2 (ru) * 1978-04-12 1979-11-05 Предприятие П/Я В-8851 Адсорбционный насос
SU769080A1 (ru) * 1978-07-31 1980-10-07 Предприятие П/Я В-8851 Криогенный вакуумный насос
SU992814A2 (ru) * 1981-12-31 1983-01-30 Физико-технический институт низких температур АН УССР Криогенный конденсационный насос
US4494381A (en) * 1983-05-13 1985-01-22 Helix Technology Corporation Cryopump with improved adsorption capacity
JPS6065287A (ja) * 1983-09-20 1985-04-15 Toshiba Corp クライオソープシヨンポンプ
SU1333833A1 (ru) * 1985-08-19 1987-08-30 Организация П/Я М-5273 Криоадсорбционный насос
SU1439278A1 (ru) * 1987-03-09 1988-11-23 Предприятие П/Я Р-6681 Сорбционный вакуумный насос
SU1698481A1 (ru) * 1987-12-17 1991-12-15 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Криогенный адсорбционный насос
SU1698482A1 (ru) * 1988-01-08 1991-12-15 Институт Анатилического Приборостроения Научно-Технического Объединения Ан Ссср Криогенный конденсационный насос
SU1682628A1 (ru) * 1988-03-10 1991-10-07 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Криоадсорбционный насос

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
KEINE WEITERE DOKUMENTEN ERMITTELT. *
See also references of WO8908781A1 *

Also Published As

Publication number Publication date
US4979369A (en) 1990-12-25
US5014517A (en) 1991-05-14
WO1989008780A1 (en) 1989-09-21
WO1989008781A1 (en) 1989-09-21
SU1682628A1 (ru) 1991-10-07
EP0363497A1 (de) 1990-04-18
EP0394452A1 (de) 1990-10-31
AU3286389A (en) 1989-10-05
JPH02503461A (ja) 1990-10-18
AU615342B2 (en) 1991-09-26
AU4188589A (en) 1989-10-05
JPH02503462A (ja) 1990-10-18
EP0363497A4 (en) 1991-01-23
AU623387B2 (en) 1992-05-14

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