EP0360608A1 - Grilles pour l'extraction d'ions - Google Patents

Grilles pour l'extraction d'ions Download PDF

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Publication number
EP0360608A1
EP0360608A1 EP89309628A EP89309628A EP0360608A1 EP 0360608 A1 EP0360608 A1 EP 0360608A1 EP 89309628 A EP89309628 A EP 89309628A EP 89309628 A EP89309628 A EP 89309628A EP 0360608 A1 EP0360608 A1 EP 0360608A1
Authority
EP
European Patent Office
Prior art keywords
holes
lamina
ion extraction
extraction grids
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP89309628A
Other languages
German (de)
English (en)
Inventor
Raymond George Dix
Richard Frederick Froud
Ian Langford
Trevor Charles Sieefers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Publication of EP0360608A1 publication Critical patent/EP0360608A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H01J27/024—Extraction optics, e.g. grids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H01J9/16—Machines for making wire grids

Definitions

  • the present invention relates to the production of extractor grids for use in ion sources, ion engines and the like.
  • Electrodes for the extraction and acceleration of ion beams from plasma ion sources presents a particularly difficult problem because of the high accuracy required in the finished products if they are to achieve the desired ion extraction efficiency, electrode lifetime and "optical" quality of the extracted ion beam. Because of the high temperatures at which they operate, the only suitable materials for the manufacture of the electrodes are refractory metals such as tungsten or molybdenbum.
  • the electrodes take the form of a sheet of refractory metal with an array of holes formed in it.
  • the holes have to be positioned very accurately relative to one another, parallel sided and without burrs or deformations at either end.
  • the usual method of manufacturing such electrodes is by drilling the holes.
  • this method of production is slow and expensive because of the difficulty of drilling holes in the refractory metals which are used to make the electrodes.
  • drills blunted readily by the hardness of the metals but they tend to wander off line.
  • molybdenum in particular tends to suffer from brittle fracture or even, in rolled sheet form, to delaminate, so causing ragged edges to the holes where the drill emerges from the metal sheet.
  • a method of manufacturing a grid electrode comprising a lamina of refractory metal having an array of holes therein, wherein the holes are formed by a punching operation.
  • the method of manufacture may also include the operations of forming the lamina into a non-planar shape and/or heating the lamina to relieve stresses set up in the lamina during earlier operations.
  • the process of the invention has a number of advantages compared with drilling and other hole-producing techniques such as laser drilling, spark erosion or photochemical etching. Not only does it produce accurately located holes of good quality with parallel sides and little or no burrs on the break-out side, but it is possible to produce holes of other than circular cross-section, such as hexagonal or square. Also, the process is much quicker and cheaper than the other processes previously referred to. Moreover, the hardness and brittleness of refractory metals and their tendency to delaminate when in rolled sheet form, which create problems with other hole-producing technqiues, present no such problems to the process of the present invention.
  • a disk 1 of molybdenum in diameter and 0.25 mm thick was mounted on a rigid supporting backing piece 2.
  • the assembly 3 was positioned on the table 4 of a CNC vertical machine, illustrated generally by the outline 5.
  • An hexagonal array of holes 6 consisting of 9097 holes each of 1.75 mm diameter was formed by punching through the molybdenum disk 1 and the backing piece 2.
  • the molybdenum disk 1 and the backing piece 2 were then separated and any minor burrs on the break-out edges of the holes 6 were removed by water blasting.
  • a stiffening rim 21 was then formed as shown in Figure 2. After this had been done the grid was pressed to its approximate final shape. The pressing was carried out progressively at temperatures of up to 300°C with intervals for stress relieving. The partially formed grids were then finished to shape and simultaneously stress relieved by stretch forming against a die 31 at a temperature of 860°C for a period of ten hours.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Spark Plugs (AREA)
  • Electron Sources, Ion Sources (AREA)
EP89309628A 1988-09-23 1989-09-21 Grilles pour l'extraction d'ions Withdrawn EP0360608A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8822475 1988-09-23
GB888822475A GB8822475D0 (en) 1988-09-23 1988-09-23 Ion extraction grids

Publications (1)

Publication Number Publication Date
EP0360608A1 true EP0360608A1 (fr) 1990-03-28

Family

ID=10644178

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89309628A Withdrawn EP0360608A1 (fr) 1988-09-23 1989-09-21 Grilles pour l'extraction d'ions

Country Status (2)

Country Link
EP (1) EP0360608A1 (fr)
GB (2) GB8822475D0 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008009898A1 (fr) * 2006-07-20 2008-01-24 Aviza Technology Limited Sources d'ions
US8400063B2 (en) 2006-07-20 2013-03-19 Aviza Technology Limited Plasma sources
US8425741B2 (en) 2006-07-20 2013-04-23 Aviza Technology Limited Ion deposition apparatus having rotatable carousel for supporting a plurality of targets

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2496978A1 (fr) * 1980-12-24 1982-06-25 Tesla Kp Procede de fabrication de la grille d'un tube emetteur
FR2530378A1 (fr) * 1982-07-19 1984-01-20 Rca Corp Grille pour canon electronique et son procede de fabrication
US4447773A (en) * 1981-06-22 1984-05-08 California Institute Of Technology Ion beam accelerator system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2496978A1 (fr) * 1980-12-24 1982-06-25 Tesla Kp Procede de fabrication de la grille d'un tube emetteur
US4447773A (en) * 1981-06-22 1984-05-08 California Institute Of Technology Ion beam accelerator system
FR2530378A1 (fr) * 1982-07-19 1984-01-20 Rca Corp Grille pour canon electronique et son procede de fabrication

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008009898A1 (fr) * 2006-07-20 2008-01-24 Aviza Technology Limited Sources d'ions
CN101490789B (zh) * 2006-07-20 2011-04-13 阿维扎技术有限公司 离子源
US8354652B2 (en) 2006-07-20 2013-01-15 Aviza Technology Limited Ion source including separate support systems for accelerator grids
US8400063B2 (en) 2006-07-20 2013-03-19 Aviza Technology Limited Plasma sources
US8425741B2 (en) 2006-07-20 2013-04-23 Aviza Technology Limited Ion deposition apparatus having rotatable carousel for supporting a plurality of targets

Also Published As

Publication number Publication date
GB2222978B (en) 1992-07-08
GB8921246D0 (en) 1989-11-08
GB2222978A (en) 1990-03-28
GB8822475D0 (en) 1988-10-26

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