EP0348931B1 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire Download PDF

Info

Publication number
EP0348931B1
EP0348931B1 EP89111755A EP89111755A EP0348931B1 EP 0348931 B1 EP0348931 B1 EP 0348931B1 EP 89111755 A EP89111755 A EP 89111755A EP 89111755 A EP89111755 A EP 89111755A EP 0348931 B1 EP0348931 B1 EP 0348931B1
Authority
EP
European Patent Office
Prior art keywords
piston
bore
rotor
bearings
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP89111755A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0348931A1 (fr
Inventor
Jacques Long
Denis Perrillat-Amede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to AT89111755T priority Critical patent/ATE69088T1/de
Publication of EP0348931A1 publication Critical patent/EP0348931A1/fr
Application granted granted Critical
Publication of EP0348931B1 publication Critical patent/EP0348931B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the present invention relates to a turbomolecular pump.
  • Grease-lubricated turbomolecular, vane, or Ga ⁇ de channel pumps should be closely monitored. Indeed, the maximum time interval between two consecutive lubrication depends on the operating temperature of the pump and the actual time of use. This manual maintenance operation requires vigilance on the part of the user, which is not always possible to obtain.
  • This lubrication operation is carried out with the pump stopped and returned to atmospheric pressure. Lubrication is carried out after removing the inlet plugs, introducing the strictly necessary quantity of new grease using a syringe allowing this quantity to be dosed.
  • the German document DE-A-2,853,742 describes a lubrication system for a turbomolecular vacuum pump.
  • the system comprises in the central shaft of the pump a bore in which are provided grease reserve chambers from which radially leave channels leading to the ball bearings, directly on the ball cage and radially, the bearings not comprising inner ring.
  • the internal raceway of the balls is directly produced on the shaft on which the bearings are mounted.
  • a central piston makes it possible to push the grease from time to time. The end of this piston is threaded and the piston is pushed by rotating the piston using a screwdriver.
  • the central shaft is rotary, in another, the central shaft is fixed carrying the stator of a drive motor, the rotor of which, integral with the pump rotor, is located around the stator of the engine.
  • the present invention aims to overcome all these drawbacks and to allow automatic and metered lubrication of the pump during its operation.
  • the invention thus relates to a turbomolecular pump comprising a rotor and a stator, the rotor being supported in the stator by bearings, the stator, in its part carrying said bearings, being pierced with a bore equipped with a delimiting piston with said bore of the chambers constituting grease reserves, at least one radial channel extending from each of these chambers, said piston comprising, on the side of its external end, means for allowing its insertion into said bore, characterized in that each channel ends in front of a threaded cylindrical seat, integral with the rotor and immediately adjacent to a rotor support bearing, supplying the grease axially to said bearing according to a circular crown, said piston being fitted with a seal located between the chambers and its outer end, said means allowing the piston to be pushed into the bore comprising a motor means started periodically.
  • said rotor is integral with a rotor support shaft on which said bearings are mounted, said bore being drilled parallel to the axis of said shaft, said cylindrical threaded surfaces being located on said rotor support shaft.
  • said stator is integral with a fixed central shaft on which are mounted said bearings and around which rotates said rotor, said bore being drilled in the axis of said fixed central shaft.
  • said bore is tapped at its beginning and cooperates with the end, external side, of the piston carrying a threaded seat, a rotary drive motor being coupled with said piston.
  • the periodic start-up of said motor means is carried out by a command as a function of the effective time of operation of the pump.
  • the control can also take into account the temperature of the pump and also possibly the internal pressure of the machine at the bearings.
  • FIG. 1 represents a part 1 of a stator of a turbomolecular pump of the Ga ⁇ de channel type whose rotor 40, partially shown, is in the shape of a bell which covers the represented part of the stator.
  • the rotor is integral with a rotor support shaft 30 which penetrates into the central bore 2 of part 1 of the stator, and rests in this part 1 of stator on two bearings, for example ball bearings 3 and 4.
  • the stator comprises a second part, not shown, which covers the rotor 40 and comes to rest and fix itself against the bottom 5 of part 1 of the stator.
  • This second part has an intake opening located on the side opposite the bottom 5.
  • part 1 of the stator is pierced with a bore 6 parallel to the axis of the shaft 30.
  • This bore 6 comprises a thread 7 at its start and its bottom 8 is blind.
  • the radial channels 9 and 10 open into the bore 6 respectively in these chambers 16 and 17.
  • These chambers 16 and 17 constitute grease reserves and are made so that their volume be equal.
  • the piston 13 is equipped with an O-ring seal 25 located between the chamber 17 and the external end 26 of the piston. Likewise, a seal 50 is disposed at the end of the piston 13.
  • the rotation is periodic, so as to periodically provide the necessary supply of grease to the bearings, and this during the rotation of the machine.
  • the control takes place automatically according to a certain function of the pump temperature, measured by a thermocouple and / or of the pump operating time. It is also possible to take into account the pressure at the bearings.
  • FIG. 2 represents a variant of the invention.
  • the elements equivalent to figure 1 bear the same references.
  • the rotor 40 partially shown, rotates around a fixed central shaft 41 secured to a stator 42 partially shown, enveloping the rotor and having an opening intake located on the left side of the figure and an exhaust outlet located on the right side of the figure.
  • the ball bearings 3 and 4 are mounted on the fixed central shaft 41.
  • the stator 43 of the electric motor driving the rotor 40 fixed on the fixed central shaft 41 as well as the rotor 44 of the electric drive motor which therefore surrounds its stator 43 and is fixed to the rotor 40 of the pump in a cavity 45.
  • the central shaft 41 being fixed and integral with the pump stator 42, the bore 6 is drilled in the axis of this fixed central shaft 41.
  • the lubrication device of the invention applies to any turbomolecular pump, whether it be a vane or of the Ga ⁇ de or Siegbahn channel type and whether the rotor is bell-shaped or not.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Steroid Compounds (AREA)
EP89111755A 1988-06-29 1989-06-28 Pompe turbomoléculaire Expired - Lifetime EP0348931B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT89111755T ATE69088T1 (de) 1988-06-29 1989-06-28 Turbomolekularpumpe.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8808738 1988-06-29
FR8808738A FR2633675B1 (fr) 1988-06-29 1988-06-29 Pompe turbomoleculaire

Publications (2)

Publication Number Publication Date
EP0348931A1 EP0348931A1 (fr) 1990-01-03
EP0348931B1 true EP0348931B1 (fr) 1991-10-30

Family

ID=9367850

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89111755A Expired - Lifetime EP0348931B1 (fr) 1988-06-29 1989-06-28 Pompe turbomoléculaire

Country Status (6)

Country Link
EP (1) EP0348931B1 (fi)
JP (1) JPH0278798A (fi)
AT (1) ATE69088T1 (fi)
DE (1) DE68900380D1 (fi)
FI (1) FI893103A (fi)
FR (1) FR2633675B1 (fi)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0508013D0 (en) * 2005-04-20 2005-05-25 Boc Group Plc Vacuum pump
JP6079052B2 (ja) * 2012-08-24 2017-02-15 株式会社島津製作所 真空ポンプ
DE102012220040A1 (de) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
US10022531B2 (en) 2016-01-21 2018-07-17 Teva Medical Ltd. Luer lock adaptor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2954845A (en) * 1957-06-11 1960-10-04 Salvador A Minera Temperature actuated lubricating device
GB1487268A (en) * 1976-02-25 1977-09-28 Telehoist Ltd Methods of lubricating
DE2853742A1 (de) * 1978-12-13 1980-10-02 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
NL8601666A (nl) * 1986-06-25 1988-01-18 Skf Ind Trading & Dev Smeerinrichting.

Also Published As

Publication number Publication date
ATE69088T1 (de) 1991-11-15
FR2633675B1 (fr) 1991-02-15
JPH0278798A (ja) 1990-03-19
FI893103A (fi) 1989-12-30
FI893103A0 (fi) 1989-06-26
FR2633675A1 (fr) 1990-01-05
EP0348931A1 (fr) 1990-01-03
DE68900380D1 (de) 1991-12-05

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