ATE69088T1 - Turbomolekularpumpe. - Google Patents

Turbomolekularpumpe.

Info

Publication number
ATE69088T1
ATE69088T1 AT89111755T AT89111755T ATE69088T1 AT E69088 T1 ATE69088 T1 AT E69088T1 AT 89111755 T AT89111755 T AT 89111755T AT 89111755 T AT89111755 T AT 89111755T AT E69088 T1 ATE69088 T1 AT E69088T1
Authority
AT
Austria
Prior art keywords
rotor
piston
bore
stator
chambers
Prior art date
Application number
AT89111755T
Other languages
English (en)
Inventor
Jacques Long
Denis Perrillat-Amede
Original Assignee
Cit Alcatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cit Alcatel filed Critical Cit Alcatel
Application granted granted Critical
Publication of ATE69088T1 publication Critical patent/ATE69088T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Steroid Compounds (AREA)
AT89111755T 1988-06-29 1989-06-28 Turbomolekularpumpe. ATE69088T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8808738A FR2633675B1 (fr) 1988-06-29 1988-06-29 Pompe turbomoleculaire
EP89111755A EP0348931B1 (de) 1988-06-29 1989-06-28 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
ATE69088T1 true ATE69088T1 (de) 1991-11-15

Family

ID=9367850

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89111755T ATE69088T1 (de) 1988-06-29 1989-06-28 Turbomolekularpumpe.

Country Status (6)

Country Link
EP (1) EP0348931B1 (de)
JP (1) JPH0278798A (de)
AT (1) ATE69088T1 (de)
DE (1) DE68900380D1 (de)
FI (1) FI893103A (de)
FR (1) FR2633675B1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0508013D0 (en) * 2005-04-20 2005-05-25 Boc Group Plc Vacuum pump
JP6079052B2 (ja) * 2012-08-24 2017-02-15 株式会社島津製作所 真空ポンプ
DE102012220040A1 (de) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
US10022531B2 (en) 2016-01-21 2018-07-17 Teva Medical Ltd. Luer lock adaptor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2954845A (en) * 1957-06-11 1960-10-04 Salvador A Minera Temperature actuated lubricating device
GB1487268A (en) * 1976-02-25 1977-09-28 Telehoist Ltd Methods of lubricating
DE2853742A1 (de) * 1978-12-13 1980-10-02 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
NL8601666A (nl) * 1986-06-25 1988-01-18 Skf Ind Trading & Dev Smeerinrichting.

Also Published As

Publication number Publication date
JPH0278798A (ja) 1990-03-19
FI893103A (fi) 1989-12-30
FI893103A0 (fi) 1989-06-26
FR2633675B1 (fr) 1991-02-15
FR2633675A1 (fr) 1990-01-05
DE68900380D1 (de) 1991-12-05
EP0348931B1 (de) 1991-10-30
EP0348931A1 (de) 1990-01-03

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