EP0348931A1 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

Info

Publication number
EP0348931A1
EP0348931A1 EP89111755A EP89111755A EP0348931A1 EP 0348931 A1 EP0348931 A1 EP 0348931A1 EP 89111755 A EP89111755 A EP 89111755A EP 89111755 A EP89111755 A EP 89111755A EP 0348931 A1 EP0348931 A1 EP 0348931A1
Authority
EP
European Patent Office
Prior art keywords
rotor
bore
piston
bearings
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP89111755A
Other languages
English (en)
French (fr)
Other versions
EP0348931B1 (de
Inventor
Jacques Long
Denis Perrillat-Amede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to AT89111755T priority Critical patent/ATE69088T1/de
Publication of EP0348931A1 publication Critical patent/EP0348931A1/de
Application granted granted Critical
Publication of EP0348931B1 publication Critical patent/EP0348931B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Steroid Compounds (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP89111755A 1988-06-29 1989-06-28 Turbomolekularpumpe Expired - Lifetime EP0348931B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT89111755T ATE69088T1 (de) 1988-06-29 1989-06-28 Turbomolekularpumpe.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8808738 1988-06-29
FR8808738A FR2633675B1 (fr) 1988-06-29 1988-06-29 Pompe turbomoleculaire

Publications (2)

Publication Number Publication Date
EP0348931A1 true EP0348931A1 (de) 1990-01-03
EP0348931B1 EP0348931B1 (de) 1991-10-30

Family

ID=9367850

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89111755A Expired - Lifetime EP0348931B1 (de) 1988-06-29 1989-06-28 Turbomolekularpumpe

Country Status (6)

Country Link
EP (1) EP0348931B1 (de)
JP (1) JPH0278798A (de)
AT (1) ATE69088T1 (de)
DE (1) DE68900380D1 (de)
FI (1) FI893103A (de)
FR (1) FR2633675B1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006111695A1 (en) * 2005-04-20 2006-10-26 Edwards Limited Vacuum pump
EP2728195A3 (de) * 2012-11-02 2015-07-08 Pfeiffer Vacuum Gmbh Vakuumpumpe

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6079052B2 (ja) * 2012-08-24 2017-02-15 株式会社島津製作所 真空ポンプ
US10022531B2 (en) 2016-01-21 2018-07-17 Teva Medical Ltd. Luer lock adaptor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2954845A (en) * 1957-06-11 1960-10-04 Salvador A Minera Temperature actuated lubricating device
GB1487268A (en) * 1976-02-25 1977-09-28 Telehoist Ltd Methods of lubricating
DE2853742A1 (de) * 1978-12-13 1980-10-02 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
EP0251366A1 (de) * 1986-06-25 1988-01-07 SKF Industrial Trading & Development Company, B.V. Schmiereinrichtung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2954845A (en) * 1957-06-11 1960-10-04 Salvador A Minera Temperature actuated lubricating device
GB1487268A (en) * 1976-02-25 1977-09-28 Telehoist Ltd Methods of lubricating
DE2853742A1 (de) * 1978-12-13 1980-10-02 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
EP0251366A1 (de) * 1986-06-25 1988-01-07 SKF Industrial Trading & Development Company, B.V. Schmiereinrichtung

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006111695A1 (en) * 2005-04-20 2006-10-26 Edwards Limited Vacuum pump
EP2728195A3 (de) * 2012-11-02 2015-07-08 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
FI893103A0 (fi) 1989-06-26
FR2633675A1 (fr) 1990-01-05
FI893103A (fi) 1989-12-30
JPH0278798A (ja) 1990-03-19
FR2633675B1 (fr) 1991-02-15
ATE69088T1 (de) 1991-11-15
EP0348931B1 (de) 1991-10-30
DE68900380D1 (de) 1991-12-05

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